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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2201/00
Specific applications of micro-electromechanical systems
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B81B2201/0235
Accelerometers
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Patents Grants
last 30 patents
Information
Patent Grant
Mechanical shock resistant MEMS accelerometer arrangement, associat...
Patent number
11,971,428
Issue date
Apr 30, 2024
Merlin Technology, Inc.
Albert W. Chau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric body and MEMS device using same
Patent number
11,968,902
Issue date
Apr 23, 2024
National Institute of Advanced Industrial Science and Technology
Masato Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Combined corrugated piezoelectric microphone and corrugated piezoel...
Patent number
11,962,973
Issue date
Apr 16, 2024
Infineon Technologies AG
Christian Bretthauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
Patent number
11,945,712
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for providing getters in microelectromechanical...
Patent number
11,945,713
Issue date
Apr 2, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Differential mems device and methods
Patent number
11,892,465
Issue date
Feb 6, 2024
Movella Inc.
Sanjay Bhandari
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wearable device with combined sensing capabilities
Patent number
11,885,689
Issue date
Jan 30, 2024
Pixart Imaging Incorporation
Chih-Ming Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, electronic apparatus, and vehicle
Patent number
11,867,716
Issue date
Jan 9, 2024
Seiko Epson Corporation
Fumiya Ito
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical structure and micromechanical sensor
Patent number
11,858,805
Issue date
Jan 2, 2024
Robert Bosch GmbH
Stefan Kiesel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Inertia measurement device, vehicle, and electronic device
Patent number
11,860,185
Issue date
Jan 2, 2024
Seiko Epson Corporation
Yusuke Kinoshita
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical structure and micromechanical sensor
Patent number
11,860,184
Issue date
Jan 2, 2024
Robert Bosch GmbH
Cristian Nagel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anchor structure for reducing temperature-based error
Patent number
11,852,649
Issue date
Dec 26, 2023
Murata Manufacturing Co., Ltd.
Akira Konno
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual-operating accelerometer
Patent number
11,852,650
Issue date
Dec 26, 2023
STMicroelectronics S.r.l.
Francesco Rizzini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and electronic device
Patent number
11,834,326
Issue date
Dec 5, 2023
Kabushiki Kaisha Toshiba
Kei Masunishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS accelerometric sensor having high accuracy and low sensitivity...
Patent number
11,835,541
Issue date
Dec 5, 2023
STMicroelectronics S.r.l.
Alessandro Tocchio
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor control method
Patent number
11,834,329
Issue date
Dec 5, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Marc Sansa Perna
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vibration damping in MEMS acceleration sensors
Patent number
11,820,648
Issue date
Nov 21, 2023
Murata Manufacturing Co., Ltd.
Matti Liukku
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical system device and method of forming the same
Patent number
11,825,750
Issue date
Nov 21, 2023
Vanguard International Semiconductor Corporation
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic intensity sensor using a MEMS triaxial accelerometer and M...
Patent number
11,796,562
Issue date
Oct 24, 2023
AIVS Inc.
James W. Waite
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low-stress packaging structure for MEMS acceleration sensor chip
Patent number
11,780,727
Issue date
Oct 10, 2023
Zhejiang University
Lufeng Che
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming dielectric and metal sealing layers on capping st...
Patent number
11,772,960
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor
Patent number
11,768,221
Issue date
Sep 26, 2023
Robert Bosch GmbH
Andrea Visconti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor MEMS structure
Patent number
11,767,216
Issue date
Sep 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS stress reduction structure embedded into package
Patent number
11,760,627
Issue date
Sep 19, 2023
Invensense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for adjusting calibration parameters and senso...
Patent number
11,761,980
Issue date
Sep 19, 2023
Robert Bosch GmbH
Hanna Beuchert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vibrating beam accelerometer with pressure damping
Patent number
11,754,591
Issue date
Sep 12, 2023
Honeywell International Inc.
John Reinke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for measuring the rate of angular displacement...
Patent number
11,754,394
Issue date
Sep 12, 2023
SEEHOW PTE. LTD.
Apoorva Murarka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low-parasitic capacitance MEMS inertial sensors and related methods
Patent number
11,746,004
Issue date
Sep 5, 2023
Analog Devices, Inc.
Charles Blackmer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with polysilicon and etch stop layer
Patent number
11,731,871
Issue date
Aug 22, 2023
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROMECHANICAL SENSOR WITH INTEGRATED STRESS SENSOR AND METHOD FOR...
Publication number
20240142490
Publication date
May 2, 2024
ROBERT BOSCH GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240132340
Publication date
Apr 25, 2024
STMicroelectronics (Malta) Ltd.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE INCLUDI...
Publication number
20240124299
Publication date
Apr 18, 2024
STMicroelectronics S.r.l.
Paolo FERRARI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WEARABLE DEVICE WITH COMBINED SENSING CAPABILITIES
Publication number
20240118141
Publication date
Apr 11, 2024
PIXART IMAGING INCORPORATION
Chih-Ming Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device, Electronic Apparatus, And Vehicle
Publication number
20240094239
Publication date
Mar 21, 2024
SEIKO EPSON CORPORATION
Fumiya ITO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND MANUFACTURING METHOD THEREOF
Publication number
20240092631
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Yoshiyuki INUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240083741
Publication date
Mar 14, 2024
Rohm Co., Ltd.
Daisuke NISHINOHARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR UNIT, ELECTRONIC APPARATUS, AND MOVING OBJECT
Publication number
20240085452
Publication date
Mar 14, 2024
SEIKO EPSON CORPORATION
Mikimoto Jin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEMS PACKAGE AND METHOD FOR MANUFACTURING...
Publication number
20240083743
Publication date
Mar 14, 2024
Vanguard International Semiconductor Corporation
RAKESH CHAND
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR SUPPRESSING VIBRATION COUPLED SIGNALS IN A MICROPHONE FO...
Publication number
20240073599
Publication date
Feb 29, 2024
L3 Technologies, Inc.
Michael E. Weed
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MOTION LIMITER WITH REDUCED STICTION
Publication number
20240051816
Publication date
Feb 15, 2024
Murata Manufacturing Co., Ltd.
Pekka LEHTINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Inertia Measurement Device, Vehicle, And Electronic Device
Publication number
20240044936
Publication date
Feb 8, 2024
SEIKO EPSON CORPORATION
Yusuke KINOSHITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING MICRO-ELECTROMECHANICAL SYSTEM DEVICE
Publication number
20240040932
Publication date
Feb 1, 2024
Vanguard International Semiconductor Corporation
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
Publication number
20240034617
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing company Ltd.
JHENG-HONG JIANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240025734
Publication date
Jan 25, 2024
Zhunmao (Hangzhou) Technology Co.
Haitao Ding
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
Publication number
20240017989
Publication date
Jan 18, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...
Publication number
20240010490
Publication date
Jan 11, 2024
STMicroelectronics S.r.l.
Gabriele GATTERE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Device
Publication number
20230416078
Publication date
Dec 28, 2023
INFINEON TECHNOLOGIES AG
Andreas Bogner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
Publication number
20230382716
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
Publication number
20230382717
Publication date
Nov 30, 2023
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
Publication number
20230382719
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing company Ltd.
CHING-KAI SHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR DESIGN WITH REJECTION OF EXTERNAL SHEAR FORCE
Publication number
20230365397
Publication date
Nov 16, 2023
InvenSense, Inc.
Mrigank Sharma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLUG FOR MEMS CAVITY
Publication number
20230365399
Publication date
Nov 16, 2023
Murata Manufacturing Co., Ltd.
Petteri KILPINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR MEMS STRUCTURE
Publication number
20230365395
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING METHOD AND ASSOCIATED PACKAGING STRUCTURE
Publication number
20230357002
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
Publication number
20230348259
Publication date
Nov 2, 2023
Vanguard International Semiconductor Corporation
WAI MUN CHONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACCELEROMETER-BASED ACOUSTIC BEAMFORMER VECTOR SENSOR WITH COLLOCAT...
Publication number
20230348261
Publication date
Nov 2, 2023
AIVS Inc.
James W. Waite
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL SENSOR STRUCTURE WITH DAMPING STRUCTURE
Publication number
20230331544
Publication date
Oct 19, 2023
ROBERT BOSCH GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR
Publication number
20230314462
Publication date
Oct 5, 2023
SEIKO EPSON CORPORATION
Fumiya Ito
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANICAL SHOCK RESISTANT MEMS ACCELEROMETER ARRANGEMENT, ASSOCIAT...
Publication number
20230314468
Publication date
Oct 5, 2023
Merlin Technology, Inc.
Albert W. Chau
B81 - MICRO-STRUCTURAL TECHNOLOGY