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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Forming micro-structural systems
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Bonding two components
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Patents Grants
last 30 patents
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Patent Grant
Method for producing fine structures in the volume of a substrate c...
Patent number
12,172,157
Issue date
Dec 24, 2024
Schott AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Enclosed cavity structures
Patent number
12,162,747
Issue date
Dec 10, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anti-stiction process for MEMS device
Patent number
12,157,667
Issue date
Dec 3, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jui-Chun Weng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor with high stability
Patent number
12,139,398
Issue date
Nov 12, 2024
Invensense, Inc.
Weng Shen Su
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Conductive bond structure to increase membrane sensitivity in MEMS...
Patent number
12,139,399
Issue date
Nov 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectronics package with vertically stacked MEMS device and co...
Patent number
12,129,168
Issue date
Oct 29, 2024
Qorvo US, Inc.
Julio C. Costa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of bonding substrates and separating a portion of the bonded...
Patent number
12,116,303
Issue date
Oct 15, 2024
Corning Incorporated
Thomas Mikio Wynne
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonded structures
Patent number
12,100,684
Issue date
Sep 24, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Liang Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microchannel chip and method for manufacturing same
Patent number
12,091,308
Issue date
Sep 17, 2024
Zeon Corporation
Hiroya Nishioka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
Patent number
12,092,460
Issue date
Sep 17, 2024
The Charles Stark Draper Laboratory, Inc.
Eugene H. Cook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Laser-assisted material phase-change and expulsion micro-machining...
Patent number
12,077,432
Issue date
Sep 3, 2024
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Micro-acoustic wafer-level package and method of manufacture
Patent number
12,071,339
Issue date
Aug 27, 2024
RF360 SINGAPORE PTE. LTD.
Manuel Hofer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
Patent number
12,070,773
Issue date
Aug 27, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a wafer connection
Patent number
12,030,773
Issue date
Jul 9, 2024
Robert Bosch GmbH
Friedjof Heuck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor integrated device with electrical contacts between st...
Patent number
12,024,422
Issue date
Jul 2, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multilayer fluidic devices and methods for their fabrication
Patent number
12,017,214
Issue date
Jun 25, 2024
Illumina, Inc.
Jeffrey S. Fisher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
Patent number
11,993,512
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yang-Che Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,981,559
Issue date
May 14, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package and method for manufacturing the same
Patent number
11,973,048
Issue date
Apr 30, 2024
Advanced Semiconductor Engineering, Inc.
An-Nong Wen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic device
Patent number
11,944,965
Issue date
Apr 2, 2024
Imec VZW
Giuseppe Fiorentino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabrication of omni-view peripheral scanning system
Patent number
11,926,523
Issue date
Mar 12, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods including panel bonding acts and electronic devices includi...
Patent number
11,921,032
Issue date
Mar 5, 2024
Infineon Technologies AG
Horst Theuss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor with dimple features and improved out-of-plane stiction
Patent number
11,919,769
Issue date
Mar 5, 2024
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
11,915,924
Issue date
Feb 27, 2024
Denso Corporation
Megumi Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,897,760
Issue date
Feb 13, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive microphone sensor design and fabrication method for achi...
Patent number
11,902,741
Issue date
Feb 13, 2024
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensing module and manufacturing method thereof
Patent number
11,894,473
Issue date
Feb 6, 2024
Ruei Chi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing microelectromechanical devices, in partic...
Patent number
11,891,298
Issue date
Feb 6, 2024
STMicroelectronics S.r.l.
Fabio Quaglia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,884,537
Issue date
Jan 30, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods including panel bonding acts and electronic devices includi...
Patent number
11,885,736
Issue date
Jan 30, 2024
Infineon Technologies AG
Horst Theuss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
Publication number
20240425364
Publication date
Dec 26, 2024
NXP USA, Inc.
Chayathorn Saklang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
Publication number
20240416385
Publication date
Dec 19, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20240418510
Publication date
Dec 19, 2024
AAC TECHNOLOGIES PTE. LTD
Houming Chong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...
Publication number
20240409398
Publication date
Dec 12, 2024
Murata Manufacturing Co., Ltd.
Konsta HANNULA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
Publication number
20240383005
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kang-Yi Lien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTILAYER FLUIDIC DEVICES AND METHODS FOR THEIR FABRICATION
Publication number
20240375099
Publication date
Nov 14, 2024
Illumina, Inc.
Jeffrey S. FISHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...
Publication number
20240367965
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
Publication number
20240343558
Publication date
Oct 17, 2024
Murata Manufacturing Co., Ltd.
Petteri KILPINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR
Publication number
20240317579
Publication date
Sep 26, 2024
Rohm Co., Ltd.
Daisuke KAMINISHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTERPOSER FOR DAMPING MEMS MICROPHONES
Publication number
20240279049
Publication date
Aug 22, 2024
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Achim Bittner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC DEVICE AND MODULE INCLUDING THE SAME
Publication number
20240270567
Publication date
Aug 15, 2024
Murata Manufacturing Co., Ltd.
Hiroshi MATSUBARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240262681
Publication date
Aug 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yang-Che CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240228264
Publication date
Jul 11, 2024
STMicroelectronics International N.V.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
Publication number
20240199412
Publication date
Jun 20, 2024
InvenSense, Inc.
Camillo Pilla
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
Publication number
20240182298
Publication date
Jun 6, 2024
ROBERT BOSCH GmbH
Johannes CLASSEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
Publication number
20240137711
Publication date
Apr 25, 2024
Innogrity Pte Ltd
KATHIRGAMASUNDARAM SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240132340
Publication date
Apr 25, 2024
STMicroelectronics (Malta) Ltd.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM DEVICE
Publication number
20240116749
Publication date
Apr 11, 2024
Vanguard International Semiconductor Corporation
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Support Device for One or More MEMS Components
Publication number
20240101412
Publication date
Mar 28, 2024
ROBERT BOSCH GmbH
Joachim Friedl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND MANUFACTURING METHOD THEREOF
Publication number
20240092631
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Yoshiyuki INUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240083742
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED DICING DIE BONDING SHEET AND METHOD FOR PRODUCING SEMICO...
Publication number
20240087941
Publication date
Mar 14, 2024
Dow Toray Co., Ltd.
Nohno TODA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH AN IMPROVED CAP AND RELATED MANUFACTURING PROCESS
Publication number
20240043265
Publication date
Feb 8, 2024
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE MANUFACTURING
Publication number
20240043264
Publication date
Feb 8, 2024
Obsidian Sensors, Inc.
Tallis CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...
Publication number
20240044846
Publication date
Feb 8, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
Publication number
20240034618
Publication date
Feb 1, 2024
STMicroelectronics S.r.l.
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR THE OPTICAL CONTACT BONDING OF COMPONENTS
Publication number
20240036345
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Stefan SCHUETTER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
Publication number
20240002218
Publication date
Jan 4, 2024
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEAL FOR MICROELECTRONIC ASSEMBLY
Publication number
20230420313
Publication date
Dec 28, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY