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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/014
by depositing an etch stop layer
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Patents Grants
last 30 patents
Information
Patent Grant
Sealed force sensor with etch stop layer
Patent number
11,965,787
Issue date
Apr 23, 2024
NEXTINPUT, INC.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for ablating or roughening wafer surfaces
Patent number
11,958,739
Issue date
Apr 16, 2024
University of Rhode Island Board of Trustees
Jason Rodger Dwyer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a microelectromechanical sensor and microelect...
Patent number
11,958,740
Issue date
Apr 16, 2024
Robert Bosch GmbH
Achim Kronenberger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
Patent number
11,946,822
Issue date
Apr 2, 2024
Sciosense B.V.
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Programmable structural building blocks
Patent number
11,939,213
Issue date
Mar 26, 2024
Raytheon Company
Anthony Serino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
Patent number
11,939,216
Issue date
Mar 26, 2024
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabrication of omni-view peripheral scanning system
Patent number
11,926,523
Issue date
Mar 12, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of forming nanostructures utilizing self-assembled nucleic...
Patent number
11,923,197
Issue date
Mar 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capless semiconductor package with a micro-electromechanical system...
Patent number
11,897,763
Issue date
Feb 13, 2024
STMicroelectronics, Inc.
Jefferson Sismundo Talledo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,890,643
Issue date
Feb 6, 2024
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deep etching substrates using a bi-layer etch mask
Patent number
11,886,122
Issue date
Jan 30, 2024
Fraunhofer USA, Inc.
Jung-Hun Seo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
Patent number
11,878,906
Issue date
Jan 23, 2024
Sciosense B.V.
Kailash Vijayakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of fabricating micro electro-mechanical systems structures
Patent number
11,845,654
Issue date
Dec 19, 2023
The University of British Columbia
Edmond Cretu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of 3D microelectrodes and use thereof in multi-function...
Patent number
11,840,446
Issue date
Dec 12, 2023
University of Central Florida Research Foundation, Inc.
Swaminathan Rajaraman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Shaping nanomaterials by short electrical pulses
Patent number
11,830,743
Issue date
Nov 28, 2023
Board of Regents, The University of Texas System
Ali E. Aliev
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Migration of nano metals in semisolid and solid matrix under the in...
Patent number
11,813,676
Issue date
Nov 14, 2023
Instituto Tecnologico y de Estudios Superiores de Monterrey
Sergio Omar Martínez Chapa
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Package structure of micro speaker and method for forming the same
Patent number
11,818,563
Issue date
Nov 14, 2023
FORTEMEDIA, INC.
Li-Jen Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonding process for forming semiconductor device structure
Patent number
11,772,963
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hang Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bi-layer metal electrode for micromachined ultrasonic transducer de...
Patent number
11,766,696
Issue date
Sep 26, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with polysilicon and etch stop layer
Patent number
11,731,871
Issue date
Aug 22, 2023
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method of semiconductor structure
Patent number
11,708,262
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yi-Hsien Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Online trimming device and method for micro-shell resonator gyroscope
Patent number
11,703,356
Issue date
Jul 18, 2023
NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY
Kun Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three dimensional microstructures with selectively removed regions...
Patent number
11,703,331
Issue date
Jul 18, 2023
The Regents of the University of Michigan
Khalil Najafi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure forming method and device
Patent number
11,679,976
Issue date
Jun 20, 2023
Seiko Epson Corporation
Shogo Inaba
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microstructure and method for manufacturing same
Patent number
11,673,797
Issue date
Jun 13, 2023
SHANGHAI INDUSTRIAL UTECHNOLOGY RESEARCH INSTITUTE
Shinan Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronics device
Patent number
11,667,523
Issue date
Jun 6, 2023
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vertical nanopore coupled with a pair of transverse electrodes havi...
Patent number
11,644,435
Issue date
May 9, 2023
Seagate Technology LLC
ShuaiGang Xiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabricating calcite nanofluidic channels
Patent number
11,628,406
Issue date
Apr 18, 2023
Saudi Arabian Oil Company
Dong Kyu Cha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating a micro machined channel
Patent number
11,629,048
Issue date
Apr 18, 2023
Berkin B.V.
Yiyuan Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240158225
Publication date
May 16, 2024
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
Publication number
20240124300
Publication date
Apr 18, 2024
STMICROELECTRONICS, INC.
Jefferson Sismundo TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MIRROR DEVICE
Publication number
20240059555
Publication date
Feb 22, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three Dimensional Microstructures With Selectively Removed Regions...
Publication number
20240019249
Publication date
Jan 18, 2024
The Regents of the University of Michigan
Khalil NAJAFI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...
Publication number
20240010490
Publication date
Jan 11, 2024
STMicroelectronics S.r.l.
Gabriele GATTERE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR AND/OR MICROPHONE DEVICE
Publication number
20230416079
Publication date
Dec 28, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
Publication number
20230406698
Publication date
Dec 21, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
Publication number
20230399754
Publication date
Dec 14, 2023
Entegris, Inc.
Daniela White
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
Publication number
20230382715
Publication date
Nov 30, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Samer DAGHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230382714
Publication date
Nov 30, 2023
DB HITEK CO., LTD.
Min Hyun JUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
Publication number
20230365402
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hang Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...
Publication number
20230357001
Publication date
Nov 9, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
Publication number
20230357000
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
Publication number
20230348258
Publication date
Nov 2, 2023
STMicroelectronics S.r.l.
Mikel AZPEITIA URQUIA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
Publication number
20230294980
Publication date
Sep 21, 2023
Vanguard International Semiconductor Corporation
RAKESH CHAND
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
Publication number
20230271825
Publication date
Aug 31, 2023
RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
Quanshui ZHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME
Publication number
20230239628
Publication date
Jul 27, 2023
Fortemedia, Inc.
Li-Jen CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
Publication number
20230202835
Publication date
Jun 29, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
Publication number
20230118429
Publication date
Apr 20, 2023
TDK Electronics AG
Pirmin Rombach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS OF FORMING NANOSTRUCTURES INCLUDING METAL OXIDES USING BLOC...
Publication number
20230116129
Publication date
Apr 13, 2023
Micron Technology, Inc.
Nicholas Hendricks
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
Publication number
20230072948
Publication date
Mar 9, 2023
Beijing Voyager Technology Co., Ltd.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...
Publication number
20230061430
Publication date
Mar 2, 2023
STMicroelectronics S.r.l.
Paolo FERRARI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS
Publication number
20230067030
Publication date
Mar 2, 2023
Atlantic Inertial Systems Limited
Christopher Paul Fell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20230037849
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
Publication number
20230045563
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR PACKAGE WITH EMBEDDED INTEGRATED CIRCUIT
Publication number
20230030627
Publication date
Feb 2, 2023
STMicroelectronics Pte Ltd
Jing-En LUAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
Publication number
20230036935
Publication date
Feb 2, 2023
Sciosense B.V.
Kailash Vijayakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEALED FORCE SENSOR WITH ETCH STOP LAYER
Publication number
20230016531
Publication date
Jan 19, 2023
NextInput, Inc.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CANTILEVERED PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEMS MICROPHONE
Publication number
20230012046
Publication date
Jan 12, 2023
Skyworks Solutions, Inc.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...
Publication number
20220401953
Publication date
Dec 22, 2022
SCHOTT AG
Andreas Ortner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR