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comprising a micromechanical device connected to control or processing electronics
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2207/00
Micro-structural systems or auxiliary parts thereof
Current Industry
B81B2207/01
comprising a micromechanical device connected to control or processing electronics
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Patents Grants
last 30 patents
Information
Patent Grant
Sensor module having conductive bonding members with varying meltin...
Patent number
12,000,857
Issue date
Jun 4, 2024
Seiko Epson Corporation
Masayasu Sakuma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS-MEMS humidity sensor
Patent number
12,000,792
Issue date
Jun 4, 2024
HANGZHOU WEIMING XINKE TECHNOLOGY CO., LTD
Han Xiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package and method for manufacturing the same
Patent number
11,973,048
Issue date
Apr 30, 2024
Advanced Semiconductor Engineering, Inc.
An-Nong Wen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated digital force sensors and related methods of manufacture
Patent number
11,946,817
Issue date
Apr 2, 2024
DecaWave, Ltd.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
Patent number
11,946,822
Issue date
Apr 2, 2024
Sciosense B.V.
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Blood pressure detection device
Patent number
11,944,412
Issue date
Apr 2, 2024
Microjet Technology Co., Ltd.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for providing getters in microelectromechanical...
Patent number
11,945,713
Issue date
Apr 2, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device and corresponding method
Patent number
11,945,714
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Alex Gritti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Signal processing circuit for triple-membrane MEMS device
Patent number
11,932,533
Issue date
Mar 19, 2024
Infineon Technologies AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Heat dissipation system with microelectromechanical system (MEMS) f...
Patent number
11,910,568
Issue date
Feb 20, 2024
Cisco Technology, Inc.
Joel Richard Goergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ovenized MEMS
Patent number
11,909,354
Issue date
Feb 20, 2024
SiTime Corporation
Carl Arft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor device having an ASIC chip integrated into a...
Patent number
11,906,383
Issue date
Feb 20, 2024
Robert Bosch GmbH
Stefan Pinter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capless semiconductor package with a micro-electromechanical system...
Patent number
11,897,763
Issue date
Feb 13, 2024
STMicroelectronics, Inc.
Jefferson Sismundo Talledo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method for forming the same
Patent number
11,897,759
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Po Chen Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Robust method for gyroscope drive amplitude measurement
Patent number
11,867,509
Issue date
Jan 9, 2024
Invensense, Inc.
Damiano Milani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system and manufacturing method thereof
Patent number
11,851,321
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Li Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system (MEMS) sensor packages and methods fo...
Patent number
11,851,322
Issue date
Dec 26, 2023
Infineon Technologies AG
Rainer Markus Schaller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Heterogenous integration of complementary metal-oxide-semiconductor...
Patent number
11,845,653
Issue date
Dec 19, 2023
MERIDIAN INNOVATION PTE LTD
Wan Chia Ang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
Patent number
11,847,851
Issue date
Dec 19, 2023
Invensense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
11,833,542
Issue date
Dec 5, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package with built-in vibration isolation, thermal st...
Patent number
11,834,328
Issue date
Dec 5, 2023
Invensense, Inc.
Hamid Eslampour
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
Patent number
11,834,325
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Fan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
Patent number
11,827,513
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company Limited
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure for MEMS device with particle filter
Patent number
11,807,521
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor
Patent number
11,810,863
Issue date
Nov 7, 2023
TDK TAIWAN CORP.
An-Ping Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
Patent number
11,806,747
Issue date
Nov 7, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Reduced light reflection package
Patent number
11,800,297
Issue date
Oct 24, 2023
Invensense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS assembly substrates including a bond layer
Patent number
11,787,690
Issue date
Oct 17, 2023
Knowles Electronics, LLC
Sung Bok Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS stress reduction structure embedded into package
Patent number
11,760,627
Issue date
Sep 19, 2023
Invensense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE
Publication number
20240174514
Publication date
May 30, 2024
INFINEON TECHNOLOGIES AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240158225
Publication date
May 16, 2024
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20240140782
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A DEVICE COMPRISING TWO SEMICONDUCTOR DICE...
Publication number
20240140783
Publication date
May 2, 2024
STMicroelectronics S.r.l.
Mark Andrew SHAW
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240132340
Publication date
Apr 25, 2024
STMicroelectronics (Malta) Ltd.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL DEVICE COMPRISING A HYDROGEN DRAINAGE LAYER
Publication number
20240124296
Publication date
Apr 18, 2024
ROBERT BOSCH GmbH
Johannes Boy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
Publication number
20240124300
Publication date
Apr 18, 2024
STMICROELECTRONICS, INC.
Jefferson Sismundo TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240109768
Publication date
Apr 4, 2024
Advanced Semiconductor Engineering, Inc.
Chieh-An YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20240100565
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Support Device for One or More MEMS Components
Publication number
20240101412
Publication date
Mar 28, 2024
ROBERT BOSCH GmbH
Joachim Friedl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED MEMS ELECTROSTATIC MICRO-SPEAKER DEVICE AND METHOD
Publication number
20240092629
Publication date
Mar 21, 2024
Vibrant Microsystems Inc.
Steven NASIRI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS, METHOD OF MANUFACTURING AN MEMS AND METHOD OF CONFIGURING AN...
Publication number
20240092633
Publication date
Mar 21, 2024
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Anton MELNIKOV
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240083742
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Haptic Device with Multiple Fluidically-Controlled Voids
Publication number
20240019934
Publication date
Jan 18, 2024
Meta Platforms Technologies, LLC
Sean Jason Keller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
Publication number
20240012237
Publication date
Jan 11, 2024
Magic Leap, Inc.
Julien Gamet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REDUCED LIGHT REFLECTION PACKAGE
Publication number
20240015447
Publication date
Jan 11, 2024
InvenSense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...
Publication number
20240010490
Publication date
Jan 11, 2024
STMicroelectronics S.r.l.
Gabriele GATTERE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSI...
Publication number
20240004184
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Luc Roger Simonne HASPESLAGH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR
Publication number
20230417614
Publication date
Dec 28, 2023
MEI Micro, Inc.
Robert Mark Boysel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20230399225
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Capacitive Linearization Method Applied to MEMS Microphones Systems
Publication number
20230399223
Publication date
Dec 14, 2023
Wilfried Florian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER
Publication number
20230399226
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Fan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED ULTRASONIC TRANSDUCERS
Publication number
20230389897
Publication date
Dec 7, 2023
Exo Imaging, Inc.
Janusz Bryzek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE PACKAGE
Publication number
20230391610
Publication date
Dec 7, 2023
Fortemedia, Inc.
Yen-Son Paul HUANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMACHINED SUPERCONDUCTING INTERCONNECT IN SILICON
Publication number
20230391609
Publication date
Dec 7, 2023
International Business Machines Corporation
Muir Kumph
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
Publication number
20230382716
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
Publication number
20230373780
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Fan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
Publication number
20230365396
Publication date
Nov 16, 2023
TDK Corporation
Toyotaka KOBAYASHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
Publication number
20230365398
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company Limited
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY