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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
Sub Industries
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
B81C2203/00
Forming micro-structural systems
B81C2900/00
Apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems
B81C3/00
Assembling of devices or systems from individually processed components
B81C99/00
Subject matter not provided for in other groups of this subclass
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor package and method for manufacturing the same
Patent number
11,973,048
Issue date
Apr 30, 2024
Advanced Semiconductor Engineering, Inc.
An-Nong Wen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure and method for manufacturing the same
Patent number
11,970,388
Issue date
Apr 30, 2024
Winbond Electronics Corp.
Jin-Neng Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing microchannel device
Patent number
11,970,390
Issue date
Apr 30, 2024
Canon Kabushiki Kaisha
Takeshi Yamamoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Self-packing three-arm thermal scanning probe for micro-nano manufa...
Patent number
11,970,392
Issue date
Apr 30, 2024
Zhejiang University
Huan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plate
Patent number
11,970,681
Issue date
Apr 30, 2024
Ushio Denki Kabushiki Kaisha
Daisuke Nomoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system device containing a bump stopper an...
Patent number
11,970,387
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chun-wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Flexible electrode and preparation method thereof
Patent number
11,970,391
Issue date
Apr 30, 2024
SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
Tianzhun Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sealed force sensor with etch stop layer
Patent number
11,965,787
Issue date
Apr 23, 2024
NEXTINPUT, INC.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having uniform contacts
Patent number
11,964,866
Issue date
Apr 23, 2024
Qorvo US, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
Patent number
11,965,797
Issue date
Apr 23, 2024
Wuxi Sencoch Semiconductor Co., Ltd.
Tongqing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for controlling stress variation in a material...
Patent number
11,961,722
Issue date
Apr 16, 2024
SPTS Technologies Limited
Anthony Wilby
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for ablating or roughening wafer surfaces
Patent number
11,958,739
Issue date
Apr 16, 2024
University of Rhode Island Board of Trustees
Jason Rodger Dwyer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a microelectromechanical sensor and microelect...
Patent number
11,958,740
Issue date
Apr 16, 2024
Robert Bosch GmbH
Achim Kronenberger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
Patent number
11,953,674
Issue date
Apr 9, 2024
Texas Instruments Incorporated
Jose A. Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,952,267
Issue date
Apr 9, 2024
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
Patent number
11,952,268
Issue date
Apr 9, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device production method
Patent number
11,953,675
Issue date
Apr 9, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device
Patent number
11,952,264
Issue date
Apr 9, 2024
Merry Electronics (Shenzhen) Co., Ltd.
Jia Yin Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Hollow package and method for manufacturing same
Patent number
11,955,394
Issue date
Apr 9, 2024
Nippon Kayaku Kabushiki Kaisha
Tadashi Naito
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging structure and method of MEMS pressure sensor
Patent number
11,953,392
Issue date
Apr 9, 2024
Wuxi Sencoch Semiconductor Co., Ltd.
Tongqing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-device structures with etch holes
Patent number
11,952,266
Issue date
Apr 9, 2024
X-CELEPRINT LIMITED
Pierluigi Rubino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic device
Patent number
11,944,965
Issue date
Apr 2, 2024
Imec VZW
Giuseppe Fiorentino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated digital force sensors and related methods of manufacture
Patent number
11,946,817
Issue date
Apr 2, 2024
DecaWave, Ltd.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
Patent number
11,946,822
Issue date
Apr 2, 2024
Sciosense B.V.
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
Patent number
11,944,998
Issue date
Apr 2, 2024
Korea Institute of Science and Technology
Byung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
Patent number
11,945,712
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonded structures
Patent number
11,948,847
Issue date
Apr 2, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for providing getters in microelectromechanical...
Patent number
11,945,713
Issue date
Apr 2, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device and corresponding method
Patent number
11,945,714
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Alex Gritti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Implantable microneedle and manufacturing method therefor
Patent number
11,938,308
Issue date
Mar 26, 2024
SNVIA CO., LTD.
Seung Yun Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF ATTACHING FILM
Publication number
20240140785
Publication date
May 2, 2024
Advanced Semiconductor Engineering, Inc.
Chin-Song LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL SENSOR WITH INTEGRATED STRESS SENSOR AND METHOD FOR...
Publication number
20240142490
Publication date
May 2, 2024
ROBERT BOSCH GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20240140782
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A DEVICE COMPRISING TWO SEMICONDUCTOR DICE...
Publication number
20240140783
Publication date
May 2, 2024
STMicroelectronics S.r.l.
Mark Andrew SHAW
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Inattentive HF Concentration Vapors Phase Release of Micro-electro-...
Publication number
20240140786
Publication date
May 2, 2024
UNM Rainforest Innovations
Tito Busani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR ENCLOSING REFERENCE GASES IN MEMS CELLS
Publication number
20240133802
Publication date
Apr 25, 2024
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Achim BITTNER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LASER SEALING METHODS FOR CLOSING VENTHOLES OF MICROMECAHNICAL DEVICES
Publication number
20240132342
Publication date
Apr 25, 2024
ROBERT BOSCH GmbH
Bo CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
Publication number
20240137711
Publication date
Apr 25, 2024
Innogrity Pte Ltd
KATHIRGAMASUNDARAM SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240132340
Publication date
Apr 25, 2024
STMicroelectronics (Malta) Ltd.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Devices and Methods of Manufacture
Publication number
20240124298
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yun-Chung Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE INCLUDI...
Publication number
20240124299
Publication date
Apr 18, 2024
STMicroelectronics S.r.l.
Paolo FERRARI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
Publication number
20240124300
Publication date
Apr 18, 2024
STMICROELECTRONICS, INC.
Jefferson Sismundo TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
Publication number
20240125599
Publication date
Apr 18, 2024
The Regents of the University of California
Andrei M. SHKEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CARTRIDGE INTERFERENCE
Publication number
20240124297
Publication date
Apr 18, 2024
VueReal Inc.
Gholamreza CHAJI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING GLASS BY ALKALINE ETCHING
Publication number
20240116805
Publication date
Apr 11, 2024
SCHOTT AG
Andreas Ortner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED STRUCTURES
Publication number
20240120245
Publication date
Apr 11, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
Publication number
20240120172
Publication date
Apr 11, 2024
Northwestern University
Vinayak P. Dravid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED CAVITY STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240116752
Publication date
Apr 11, 2024
Zhuhai ACCESS Semiconductor Co., Ltd
Xianming CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR SEALING A MEMS DEVICE AND A SEALED MEMS DEVICE
Publication number
20240116753
Publication date
Apr 11, 2024
Murata Manufacturing Co., Ltd.
Antti IIHOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM DEVICE
Publication number
20240116749
Publication date
Apr 11, 2024
Vanguard International Semiconductor Corporation
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240116751
Publication date
Apr 11, 2024
XINTEC INC.
Chia-Ming CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240109768
Publication date
Apr 4, 2024
Advanced Semiconductor Engineering, Inc.
Chieh-An YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240109769
Publication date
Apr 4, 2024
XINTEC INC.
Wei-Luen SUEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
Publication number
20240109770
Publication date
Apr 4, 2024
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS FOR SEALING CAVITIES IN MICRO-FABRICATED DEVICES AND MICRO-...
Publication number
20240109771
Publication date
Apr 4, 2024
The University of British Columbia
Kenichi TAKAHATA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPLANTABLE MICRONEEDLE AND MANUFACTURING METHOD THEREFOR
Publication number
20240108817
Publication date
Apr 4, 2024
SNVIA CO., LTD.
Seung Yun YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
Publication number
20240111148
Publication date
Apr 4, 2024
Preciseley Microtechnology Corp.
Tiansheng ZHOU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NEURAL LATTICE DEVICE FOR CHARACTERIZATION OF NEURON BEHAVIOR
Publication number
20240101943
Publication date
Mar 28, 2024
International Business Machines Corporation
Sagarika Mukesh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
Publication number
20240101413
Publication date
Mar 28, 2024
Intel Corporation
Jeremy D. Ecton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microfluidic Products with Controlled Fluid Flow
Publication number
20240100519
Publication date
Mar 28, 2024
Brian David BABCOCK
B81 - MICRO-STRUCTURAL TECHNOLOGY