Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Current Industry

B81B7/0029Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Actively controlled surfaces
- Patent number 12,091,160
- Issue date Sep 17, 2024
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Protective cover member and member supplying sheet
- Patent number 12,060,263
- Issue date Aug 13, 2024
- Nitto Denko Corporation
- Hiroki Kigami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Charge controlled clamp for MEMS readout circuits
- Patent number 12,024,419
- Issue date Jul 2, 2024
- Infineon Technologies AG
- Hong Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 11,807,521
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Charge controlled clamp for mems readout circuits
- Patent number 11,618,671
- Issue date Apr 4, 2023
- Infineon Technologies AG
- Hong Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sealed vacuum MEMS die
- Patent number 11,528,546
- Issue date Dec 13, 2022
- Knowles Electronics, LLC
- Hung Chien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actively-controlled superhydrophobic surfaces
- Patent number 11,447,237
- Issue date Sep 20, 2022
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS package, MEMS microphone and method of manufacturing the MEMS...
- Patent number 11,350,220
- Issue date May 31, 2022
- SAE Magnetics (H. K.) Ltd.
- Masashi Shiraishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
- Patent number 11,317,219
- Issue date Apr 26, 2022
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Water proofing and water detection schemes for MEMS-based environme...
- Patent number 11,305,984
- Issue date Apr 19, 2022
- Apple Inc.
- Krishna Prasad Vummidi Murali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 10,968,097
- Issue date Apr 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-mechanical sensor and method for manufacturing a micro-electr...
- Patent number 10,961,116
- Issue date Mar 30, 2021
- Infineon Technologies Dresden GmbH & Co. KG
- Dirk Meinhold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Backside reinforcement structure design for mirror flatness
- Patent number 10,858,243
- Issue date Dec 8, 2020
- Microsoft Technology Licensing, LLC
- Utku Baran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deposition of protective material at wafer level in front end for e...
- Patent number 10,858,245
- Issue date Dec 8, 2020
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric optical MEMS device with embedded moisture layers
- Patent number 10,829,365
- Issue date Nov 10, 2020
- Texas Instruments Incorporated
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing an electronic device
- Patent number 10,773,949
- Issue date Sep 15, 2020
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Heinz Moitzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone chip and MEMS microphone
- Patent number 10,750,292
- Issue date Aug 18, 2020
- Goertek, Inc.
- Junkai Zhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Water proofing and water detection schemes for MEMS-based environme...
- Patent number 10,640,367
- Issue date May 5, 2020
- Apple Inc.
- Krishna Prasad Vummidi Murali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
- Patent number 10,555,091
- Issue date Feb 4, 2020
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-layer, stress-isolation platform for a MEMS die
- Patent number 10,457,547
- Issue date Oct 29, 2019
- DunAn Microstaq, Inc.
- Wayne C. Long
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deposition of protective material at wafer level in front end for e...
- Patent number 10,370,244
- Issue date Aug 6, 2019
- Infineon Technologies AG
- Florian Brandl
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Capacitance type transducer and acoustic sensor
- Patent number 10,375,482
- Issue date Aug 6, 2019
- Omron Corporation
- Tadashi Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acoustic sensor integrated MEMS microphone structure and fabricatio...
- Patent number 10,349,187
- Issue date Jul 9, 2019
- GOERTEK INC.
- Junkai Zhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device
- Patent number 10,281,442
- Issue date May 7, 2019
- Sensirion AG
- Werner Hunziker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor having particle barrier
- Patent number 10,267,822
- Issue date Apr 23, 2019
- Hewlett-Packard Development Company, L.P.
- Jennifer Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS grid for manipulating structural parameters of MEMS devices
- Patent number 10,199,262
- Issue date Feb 5, 2019
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated multi-sensing systems
- Patent number 10,144,635
- Issue date Dec 4, 2018
- Kris Vossough
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for shielding and biasing in MEMS devices enca...
- Patent number 10,081,535
- Issue date Sep 25, 2018
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric optical MEMS device with embedded moisture layers
- Patent number 9,834,433
- Issue date Dec 5, 2017
- Texas Instruments Incorporated
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device structure and methods of forming same
- Patent number 9,802,816
- Issue date Oct 31, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chang-Chia Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
- Publication number 20240253976
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR STRUCTURE AND PRESSURE SENSOR DEVICE
- Publication number 20240246811
- Publication date Jul 25, 2024
- Murata Manufacturing Co., Ltd.
- Ryosuke NIWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE
- Publication number 20240182297
- Publication date Jun 6, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Charge Controlled Clamp for MEMS Readout Circuits
- Publication number 20230219807
- Publication date Jul 13, 2023
- INFINEON TECHNOLOGIES AG
- Hong Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROTECTIVE COVER MEMBER AND MEMBER SUPPLYING SHEET
- Publication number 20230159321
- Publication date May 25, 2023
- Nitto Denko Corporation
- Hiroki KIGAMI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CROSSOVERS FOR VACUUM PACKAGING
- Publication number 20220411261
- Publication date Dec 29, 2022
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVELY CONTROLLED SURFACES
- Publication number 20220388632
- Publication date Dec 8, 2022
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD OF SEMICONDU...
- Publication number 20220315415
- Publication date Oct 6, 2022
- Mitsubishi Electric Corporation
- Kimitoshi SATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEALED VACUUM MEMS DIE
- Publication number 20220321986
- Publication date Oct 6, 2022
- KNOWLES ELECTRONICS, LLC
- Hung Chien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHARGE CONTROLLED CLAMP FOR MEMS READOUT CIRCUITS
- Publication number 20220041431
- Publication date Feb 10, 2022
- INFINEON TECHNOLOGIES AG
- Hong Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER
- Publication number 20210238030
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Package, MEMS Microphone and Method of Manufacturing the MEMS...
- Publication number 20210227334
- Publication date Jul 22, 2021
- SAE Magnetics (H.K.) Ltd.
- Masashi Shiraishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WATER PROOFING AND WATER DETECTION SCHEMES FOR MEMS-BASED ENVIRONME...
- Publication number 20200223686
- Publication date Jul 16, 2020
- Apple Inc.
- Krishna Prasad VUMMIDI MURALI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
- Publication number 20200092659
- Publication date Mar 19, 2020
- STMicroelectronics S.r.l.
- Matteo PERLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BACKSIDE REINFORCEMENT STRUCTURE DESIGN FOR MIRROR FLATNESS
- Publication number 20200048073
- Publication date Feb 13, 2020
- Microsoft Technology Licensing, LLC
- Utku BARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE CHIP AND MEMS MICROPHONE
- Publication number 20190394574
- Publication date Dec 26, 2019
- Goertek, Inc.
- JUNKAI ZHAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-MECHANICAL SENSOR AND METHOD FOR MANUFACTURING A MICRO-ELECTR...
- Publication number 20190345027
- Publication date Nov 14, 2019
- Infineon Technologies Dresden GmbH & Co. KG
- Dirk MEINHOLD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES
- Publication number 20190329872
- Publication date Oct 31, 2019
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
- Publication number 20190300362
- Publication date Oct 3, 2019
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
- Publication number 20190161345
- Publication date May 30, 2019
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
- Publication number 20190090067
- Publication date Mar 21, 2019
- STMicroelectronics S.r.l.
- Matteo PERLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Component Carrier With Integrated Wall Structure For Subsequent Ass...
- Publication number 20190062150
- Publication date Feb 28, 2019
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Heinz Moitzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC SENSOR INTEGRATED MEMS MICROPHONE STRUCTURE AND FABRICATIO...
- Publication number 20180359571
- Publication date Dec 13, 2018
- GOERTEK INC.
- Junkai ZHAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LAYER, STRESS-ISOLATION PLATFORM FOR A MEMS DIE
- Publication number 20180319654
- Publication date Nov 8, 2018
- DunAn Microstaq, Inc.
- Wayne C. Long
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM FOR CONTROLLING THE APPLICATION OF ENERGY TO A CONSTRUCTION...
- Publication number 20180186626
- Publication date Jul 5, 2018
- NEWTONOID TECHNOLOGIES, L.L.C.
- FIELDING B. STATON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC OPTICAL MEMS DEVICE WITH EMBEDDED MOISTURE LAYERS
- Publication number 20180141804
- Publication date May 24, 2018
- TEXAS INSTRUMENTS INCORPORATED
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Multi-Sensing Systems
- Publication number 20180086628
- Publication date Mar 29, 2018
- Kris Vossough
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vent Attachment System For Micro-Electromechanical Systems
- Publication number 20180009655
- Publication date Jan 11, 2018
- W.L. GORE & ASSOCIATES, INC.
- Andrew J. Holliday
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
- Publication number 20170320724
- Publication date Nov 9, 2017
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
- Publication number 20170088415
- Publication date Mar 30, 2017
- MEMS DRIVE, INC.
- ROMAN GUTIERREZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Actively controlled surfaces

Protective cover member and member supplying sheet

Charge controlled clamp for MEMS readout circuits

Support structure for MEMS device with particle filter

Charge controlled clamp for mems readout circuits

Sealed vacuum MEMS die

Actively-controlled superhydrophobic surfaces

MEMS package, MEMS microphone and method of manufacturing the MEMS...

Method for manufacturing a thin filtering membrane and an acoustic...

Water proofing and water detection schemes for MEMS-based environme...

Support structure for MEMS device with particle filter

Micro-mechanical sensor and method for manufacturing a micro-electr...

Backside reinforcement structure design for mirror flatness

Deposition of protective material at wafer level in front end for e...

Piezoelectric optical MEMS device with embedded moisture layers

Method of manufacturing an electronic device

MEMS microphone chip and MEMS microphone

Water proofing and water detection schemes for MEMS-based environme...

Method for manufacturing a thin filtering membrane and an acoustic...

Multi-layer, stress-isolation platform for a MEMS die

Deposition of protective material at wafer level in front end for e...

Capacitance type transducer and acoustic sensor

Acoustic sensor integrated MEMS microphone structure and fabricatio...

Sensor device

Sensor having particle barrier

MEMS grid for manipulating structural parameters of MEMS devices

Integrated multi-sensing systems

Apparatus and method for shielding and biasing in MEMS devices enca...

Piezoelectric optical MEMS device with embedded moisture layers

MEMS device structure and methods of forming same

Patents Applicationslast 30 patents

MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES

PRESSURE SENSOR STRUCTURE AND PRESSURE SENSOR DEVICE

MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE

Charge Controlled Clamp for MEMS Readout Circuits

PROTECTIVE COVER MEMBER AND MEMBER SUPPLYING SHEET

CROSSOVERS FOR VACUUM PACKAGING

ACTIVELY CONTROLLED SURFACES

SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD OF SEMICONDU...

SEALED VACUUM MEMS DIE

CHARGE CONTROLLED CLAMP FOR MEMS READOUT CIRCUITS

SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER

MEMS Package, MEMS Microphone and Method of Manufacturing the MEMS...

WATER PROOFING AND WATER DETECTION SCHEMES FOR MEMS-BASED ENVIRONME...

METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...

BACKSIDE REINFORCEMENT STRUCTURE DESIGN FOR MIRROR FLATNESS

MEMS MICROPHONE CHIP AND MEMS MICROPHONE

MICRO-MECHANICAL SENSOR AND METHOD FOR MANUFACTURING A MICRO-ELECTR...

ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES

DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...

DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...

METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...

Component Carrier With Integrated Wall Structure For Subsequent Ass...

ACOUSTIC SENSOR INTEGRATED MEMS MICROPHONE STRUCTURE AND FABRICATIO...

MULTI-LAYER, STRESS-ISOLATION PLATFORM FOR A MEMS DIE

SYSTEM FOR CONTROLLING THE APPLICATION OF ENERGY TO A CONSTRUCTION...

PIEZOELECTRIC OPTICAL MEMS DEVICE WITH EMBEDDED MOISTURE LAYERS

Integrated Multi-Sensing Systems

Vent Attachment System For Micro-Electromechanical Systems

MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES

MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES