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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
Current Industry
B81B7/0029
Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025
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Patents Grants
last 30 patents
Information
Patent Grant
Actively controlled surfaces
Patent number
12,091,160
Issue date
Sep 17, 2024
The Boeing Company
Joshua Benjamin Guerry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Protective cover member and member supplying sheet
Patent number
12,060,263
Issue date
Aug 13, 2024
Nitto Denko Corporation
Hiroki Kigami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Charge controlled clamp for MEMS readout circuits
Patent number
12,024,419
Issue date
Jul 2, 2024
Infineon Technologies AG
Hong Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure for MEMS device with particle filter
Patent number
11,807,521
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Charge controlled clamp for mems readout circuits
Patent number
11,618,671
Issue date
Apr 4, 2023
Infineon Technologies AG
Hong Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sealed vacuum MEMS die
Patent number
11,528,546
Issue date
Dec 13, 2022
Knowles Electronics, LLC
Hung Chien Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actively-controlled superhydrophobic surfaces
Patent number
11,447,237
Issue date
Sep 20, 2022
The Boeing Company
Joshua Benjamin Guerry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package, MEMS microphone and method of manufacturing the MEMS...
Patent number
11,350,220
Issue date
May 31, 2022
SAE Magnetics (H. K.) Ltd.
Masashi Shiraishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
Patent number
11,317,219
Issue date
Apr 26, 2022
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Water proofing and water detection schemes for MEMS-based environme...
Patent number
11,305,984
Issue date
Apr 19, 2022
Apple Inc.
Krishna Prasad Vummidi Murali
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure for MEMS device with particle filter
Patent number
10,968,097
Issue date
Apr 6, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-mechanical sensor and method for manufacturing a micro-electr...
Patent number
10,961,116
Issue date
Mar 30, 2021
Infineon Technologies Dresden GmbH & Co. KG
Dirk Meinhold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Backside reinforcement structure design for mirror flatness
Patent number
10,858,243
Issue date
Dec 8, 2020
Microsoft Technology Licensing, LLC
Utku Baran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deposition of protective material at wafer level in front end for e...
Patent number
10,858,245
Issue date
Dec 8, 2020
Infineon Technologies AG
Florian Brandl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric optical MEMS device with embedded moisture layers
Patent number
10,829,365
Issue date
Nov 10, 2020
Texas Instruments Incorporated
YungShan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing an electronic device
Patent number
10,773,949
Issue date
Sep 15, 2020
AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
Heinz Moitzi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone chip and MEMS microphone
Patent number
10,750,292
Issue date
Aug 18, 2020
Goertek, Inc.
Junkai Zhan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Water proofing and water detection schemes for MEMS-based environme...
Patent number
10,640,367
Issue date
May 5, 2020
Apple Inc.
Krishna Prasad Vummidi Murali
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
Patent number
10,555,091
Issue date
Feb 4, 2020
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-layer, stress-isolation platform for a MEMS die
Patent number
10,457,547
Issue date
Oct 29, 2019
DunAn Microstaq, Inc.
Wayne C. Long
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deposition of protective material at wafer level in front end for e...
Patent number
10,370,244
Issue date
Aug 6, 2019
Infineon Technologies AG
Florian Brandl
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Capacitance type transducer and acoustic sensor
Patent number
10,375,482
Issue date
Aug 6, 2019
Omron Corporation
Tadashi Inoue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic sensor integrated MEMS microphone structure and fabricatio...
Patent number
10,349,187
Issue date
Jul 9, 2019
GOERTEK INC.
Junkai Zhan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor device
Patent number
10,281,442
Issue date
May 7, 2019
Sensirion AG
Werner Hunziker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor having particle barrier
Patent number
10,267,822
Issue date
Apr 23, 2019
Hewlett-Packard Development Company, L.P.
Jennifer Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS grid for manipulating structural parameters of MEMS devices
Patent number
10,199,262
Issue date
Feb 5, 2019
MEMS DRIVE, INC.
Roman Gutierrez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated multi-sensing systems
Patent number
10,144,635
Issue date
Dec 4, 2018
Kris Vossough
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for shielding and biasing in MEMS devices enca...
Patent number
10,081,535
Issue date
Sep 25, 2018
Analog Devices, Inc.
Li Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric optical MEMS device with embedded moisture layers
Patent number
9,834,433
Issue date
Dec 5, 2017
Texas Instruments Incorporated
YungShan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device structure and methods of forming same
Patent number
9,802,816
Issue date
Oct 31, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chang-Chia Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
Publication number
20240253976
Publication date
Aug 1, 2024
INFINEON TECHNOLOGIES AG
Hutomo Suryo Wasisto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSOR STRUCTURE AND PRESSURE SENSOR DEVICE
Publication number
20240246811
Publication date
Jul 25, 2024
Murata Manufacturing Co., Ltd.
Ryosuke NIWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE
Publication number
20240182297
Publication date
Jun 6, 2024
INFINEON TECHNOLOGIES AG
Hutomo Suryo Wasisto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Charge Controlled Clamp for MEMS Readout Circuits
Publication number
20230219807
Publication date
Jul 13, 2023
INFINEON TECHNOLOGIES AG
Hong Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROTECTIVE COVER MEMBER AND MEMBER SUPPLYING SHEET
Publication number
20230159321
Publication date
May 25, 2023
Nitto Denko Corporation
Hiroki KIGAMI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CROSSOVERS FOR VACUUM PACKAGING
Publication number
20220411261
Publication date
Dec 29, 2022
Obsidian Sensors, Inc.
John HONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTIVELY CONTROLLED SURFACES
Publication number
20220388632
Publication date
Dec 8, 2022
The Boeing Company
Joshua Benjamin Guerry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD OF SEMICONDU...
Publication number
20220315415
Publication date
Oct 6, 2022
Mitsubishi Electric Corporation
Kimitoshi SATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEALED VACUUM MEMS DIE
Publication number
20220321986
Publication date
Oct 6, 2022
KNOWLES ELECTRONICS, LLC
Hung Chien Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHARGE CONTROLLED CLAMP FOR MEMS READOUT CIRCUITS
Publication number
20220041431
Publication date
Feb 10, 2022
INFINEON TECHNOLOGIES AG
Hong Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER
Publication number
20210238030
Publication date
Aug 5, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Package, MEMS Microphone and Method of Manufacturing the MEMS...
Publication number
20210227334
Publication date
Jul 22, 2021
SAE Magnetics (H.K.) Ltd.
Masashi Shiraishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WATER PROOFING AND WATER DETECTION SCHEMES FOR MEMS-BASED ENVIRONME...
Publication number
20200223686
Publication date
Jul 16, 2020
Apple Inc.
Krishna Prasad VUMMIDI MURALI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
Publication number
20200092659
Publication date
Mar 19, 2020
STMicroelectronics S.r.l.
Matteo PERLETTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BACKSIDE REINFORCEMENT STRUCTURE DESIGN FOR MIRROR FLATNESS
Publication number
20200048073
Publication date
Feb 13, 2020
Microsoft Technology Licensing, LLC
Utku BARAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE CHIP AND MEMS MICROPHONE
Publication number
20190394574
Publication date
Dec 26, 2019
Goertek, Inc.
JUNKAI ZHAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-MECHANICAL SENSOR AND METHOD FOR MANUFACTURING A MICRO-ELECTR...
Publication number
20190345027
Publication date
Nov 14, 2019
Infineon Technologies Dresden GmbH & Co. KG
Dirk MEINHOLD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES
Publication number
20190329872
Publication date
Oct 31, 2019
The Boeing Company
Joshua Benjamin Guerry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
Publication number
20190300362
Publication date
Oct 3, 2019
INFINEON TECHNOLOGIES AG
Florian BRANDL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
Publication number
20190161345
Publication date
May 30, 2019
INFINEON TECHNOLOGIES AG
Florian BRANDL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
Publication number
20190090067
Publication date
Mar 21, 2019
STMicroelectronics S.r.l.
Matteo PERLETTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Component Carrier With Integrated Wall Structure For Subsequent Ass...
Publication number
20190062150
Publication date
Feb 28, 2019
AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
Heinz Moitzi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC SENSOR INTEGRATED MEMS MICROPHONE STRUCTURE AND FABRICATIO...
Publication number
20180359571
Publication date
Dec 13, 2018
GOERTEK INC.
Junkai ZHAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-LAYER, STRESS-ISOLATION PLATFORM FOR A MEMS DIE
Publication number
20180319654
Publication date
Nov 8, 2018
DunAn Microstaq, Inc.
Wayne C. Long
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM FOR CONTROLLING THE APPLICATION OF ENERGY TO A CONSTRUCTION...
Publication number
20180186626
Publication date
Jul 5, 2018
NEWTONOID TECHNOLOGIES, L.L.C.
FIELDING B. STATON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC OPTICAL MEMS DEVICE WITH EMBEDDED MOISTURE LAYERS
Publication number
20180141804
Publication date
May 24, 2018
TEXAS INSTRUMENTS INCORPORATED
YungShan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Integrated Multi-Sensing Systems
Publication number
20180086628
Publication date
Mar 29, 2018
Kris Vossough
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vent Attachment System For Micro-Electromechanical Systems
Publication number
20180009655
Publication date
Jan 11, 2018
W.L. GORE & ASSOCIATES, INC.
Andrew J. Holliday
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
Publication number
20170320724
Publication date
Nov 9, 2017
MEMS DRIVE, INC.
Roman Gutierrez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
Publication number
20170088415
Publication date
Mar 30, 2017
MEMS DRIVE, INC.
ROMAN GUTIERREZ
B81 - MICRO-STRUCTURAL TECHNOLOGY