TREA

Rotation in a plane parallel to the substrate

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Industry

  • CPC
  • B81B2203/056
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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/056Rotation in a plane parallel to the substrate
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