Rotation in a plane parallel to the substrate

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/056Rotation in a plane parallel to the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
3-axis angular accelerometer
- Patent number 12,153,065
- Issue date Nov 26, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiaxial strain engineering of defect doped materials
- Patent number 12,077,428
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,898,845
- Issue date Feb 13, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor structure for reducing temperature-based error
- Patent number 11,852,649
- Issue date Dec 26, 2023
- Murata Manufacturing Co., Ltd.
- Akira Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 11,697,582
- Issue date Jul 11, 2023
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multidirectional translating and tilting platform using bending act...
- Patent number 11,697,584
- Issue date Jul 11, 2023
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Matthieu Gaudet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator, optical scanning device, and manufacturing methods
- Patent number 11,635,615
- Issue date Apr 25, 2023
- Mitsumi Electric Co., Ltd.
- Kensuke Yamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element with increased density
- Patent number 11,603,312
- Issue date Mar 14, 2023
- Murata Manufacturing Co., Ltd.
- Marko Peussa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Switchable displays with movable pixel units
- Patent number 11,475,805
- Issue date Oct 18, 2022
- Hewlett-Packard Development Company, L.P.
- Kuan-Ting Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 11,313,876
- Issue date Apr 26, 2022
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,085,766
- Issue date Aug 10, 2021
- Semiconductor Components Industries, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having an oscillator, a method for the ma...
- Patent number 11,066,295
- Issue date Jul 20, 2021
- Robert Bosch GmbH
- Philip Kaupmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor
- Patent number 10,989,731
- Issue date Apr 27, 2021
- HITACHI AUTOMOTIVE SYSTEMS, LTD.
- Masatoshi Kanamaru
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectronic sensor device with an out-of-plane detection having...
- Patent number 10,968,096
- Issue date Apr 6, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loic Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bidirectional MEMS driving arrangements with a force absorbing system
- Patent number 10,838,366
- Issue date Nov 17, 2020
- Timex Group USA, Inc.
- Wolfgang Burkhardt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having tiltable structure, with det...
- Patent number 10,725,286
- Issue date Jul 28, 2020
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical component and manufacturing method for a mechanical comp...
- Patent number 10,589,988
- Issue date Mar 17, 2020
- Robert Bosch GmbH
- Wolfgang Heinzelmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 10,585,111
- Issue date Mar 10, 2020
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Miniature kinetic energy harvester for generating electrical energy...
- Patent number 10,581,344
- Issue date Mar 3, 2020
- Chambre de Commerce et D'Industrie de Region Paris Ile de France
- Francesco Cottone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for adjusting an adjustable pa...
- Patent number 10,488,650
- Issue date Nov 26, 2019
- Robert Bosch GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movable reflection device and reflection surface drive system utili...
- Patent number 10,473,917
- Issue date Nov 12, 2019
- Dai-Ichi Seiko Co., Ltd.
- Kazuhiro Okada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for quasi-resonant-mode voltage control of a swit...
- Patent number 10,241,322
- Issue date Mar 26, 2019
- STMicroelectronics S.r.l.
- Giovanni Gritti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having a tiltable structure, with d...
- Patent number 10,101,578
- Issue date Oct 16, 2018
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined monolithic 3-axis gyroscope with single drive
- Patent number 10,050,155
- Issue date Aug 14, 2018
- FAIRCHILD SEMICONDUCTOR CORPORATION
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor with multiple spring bars
- Patent number 9,103,850
- Issue date Aug 11, 2015
- Maxim Integrated Products, Inc.
- Hanno Hammer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-compatible movable microstructure based devices
- Patent number 8,552,464
- Issue date Oct 8, 2013
- Long-Sheng Fan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating lateral-moving micromachined thermal bimorph
- Patent number 7,749,793
- Issue date Jul 6, 2010
- Morgan Research Corporation
- Robert Faye Elliott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for an actuator system having buried interconn...
- Patent number 7,741,685
- Issue date Jun 22, 2010
- Iris AO, Inc.
- Clifford F. Knollenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for an actuator having an intermediate frame
- Patent number 7,699,296
- Issue date Apr 20, 2010
- Iris AO, Inc.
- Clifford F. Knollenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROME...
- Publication number 20250033952
- Publication date Jan 30, 2025
- ROBERT BOSCH GmbH
- Daniel Baumgaertner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-axis Gyroscope
- Publication number 20240425355
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Hsiung TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor
- Publication number 20240425357
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Yuan LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
- Publication number 20240400380
- Publication date Dec 5, 2024
- STMicroelectronics International N.V.
- Patrick FEDELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
- Publication number 20240262680
- Publication date Aug 8, 2024
- SILMACH
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP ON ROTOR
- Publication number 20240190698
- Publication date Jun 13, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOTION LIMITER WITH REDUCED STICTION
- Publication number 20240051816
- Publication date Feb 15, 2024
- Murata Manufacturing Co., Ltd.
- Pekka LEHTINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER
- Publication number 20230312335
- Publication date Oct 5, 2023
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A SCANNING MEMS MIRROR DEVICE
- Publication number 20230257255
- Publication date Aug 17, 2023
- Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO SCANNING MIRROR
- Publication number 20230056353
- Publication date Feb 23, 2023
- Coretronic MEMS Corporation
- Shih-Chi Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER
- Publication number 20220396470
- Publication date Dec 15, 2022
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE FOR REDUCING TEMPERATURE-BASED ERROR
- Publication number 20220268799
- Publication date Aug 25, 2022
- Murata Manufacturing Co., Ltd.
- Akira KONNO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
- Publication number 20220171341
- Publication date Jun 2, 2022
- TIMEX GROUP USA, INC.
- Wolfgang Burkhardt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3-AXIS ANGULAR ACCELEROMETER
- Publication number 20220155336
- Publication date May 19, 2022
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS
- Publication number 20220063986
- Publication date Mar 3, 2022
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY
- Publication number 20210372795
- Publication date Dec 2, 2021
- Semiconductor Components Industries, LLC
- Cenk ACAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SWITCHABLE DISPLAYS WITH MOVABLE PIXEL UNITS
- Publication number 20210217331
- Publication date Jul 15, 2021
- Hewlett-Packard Development Company, L.P.
- Kuan-Ting Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT WITH INCREASED DENSITY
- Publication number 20210122628
- Publication date Apr 29, 2021
- Murata Manufacturing Co., Ltd.
- Marko PEUSSA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WATERPROOF MEMS BUTTON DEVICE, INPUT DEVICE COMPRISING THE MEMS BUT...
- Publication number 20210095949
- Publication date Apr 1, 2021
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
- Publication number 20210041837
- Publication date Feb 11, 2021
- TIMEX GROUP USA, INC.
- Wolfgang Burkhardt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3-AXIS ANGULAR ACCELEROMETER
- Publication number 20200241036
- Publication date Jul 30, 2020
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTRONIC SENSOR DEVICE WITH AN OUT-OF-PLANE DETECTION HAVING...
- Publication number 20200102211
- Publication date Apr 2, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Loic JOET
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT HAVING AN OSCILLATOR, A METHOD FOR THE MA...
- Publication number 20190359478
- Publication date Nov 28, 2019
- ROBERT BOSCH GmbH
- Philip Kaupmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR, OPTICAL SCANNING DEVICE, AND MANUFACTURING METHODS
- Publication number 20190196181
- Publication date Jun 27, 2019
- MITSUMI ELECTRIC CO., LTD.
- Kensuke YAMADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY
- Publication number 20190145772
- Publication date May 16, 2019
- Semiconductor Components Industries, LLC
- Cenk ACAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
- Publication number 20190079458
- Publication date Mar 14, 2019
- TIMEX GROUP USA, INC.
- Wolfgang Burkhardt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING A TILTABLE STRUCTURE, WITH D...
- Publication number 20190011694
- Publication date Jan 10, 2019
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR
- Publication number 20180275159
- Publication date Sep 27, 2018
- Hitachi Automotive Systems, Ltd.
- Masatoshi KANAMARU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOVABLE REFLECTION DEVICE AND REFLECTION SURFACE DRIVE SYSTEM UTILI...
- Publication number 20180172982
- Publication date Jun 21, 2018
- DAI-ICHI SEIKO CO., LTD.
- Kazuhiro Okada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING A TILTABLE STRUCTURE, WITH D...
- Publication number 20180003950
- Publication date Jan 4, 2018
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Rotation in a plane parallel to the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

3-axis angular accelerometer

Multiaxial strain engineering of defect doped materials

Waterproof MEMS button device, input device comprising the MEMS but...

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Anchor structure for reducing temperature-based error

MEMS transducer

Multidirectional translating and tilting platform using bending act...

Actuator, optical scanning device, and manufacturing methods

MEMS element with increased density

Switchable displays with movable pixel units

3-axis angular accelerometer

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Micromechanical component having an oscillator, a method for the ma...

Physical quantity sensor

Microelectronic sensor device with an out-of-plane detection having...

Bidirectional MEMS driving arrangements with a force absorbing system

Micro-electro-mechanical device having tiltable structure, with det...

Mechanical component and manufacturing method for a mechanical comp...

3-axis angular accelerometer

Miniature kinetic energy harvester for generating electrical energy...

Micromechanical component and method for adjusting an adjustable pa...

Movable reflection device and reflection surface drive system utili...

Device and method for quasi-resonant-mode voltage control of a swit...

Micro-electro-mechanical device having a tiltable structure, with d...

Micromachined monolithic 3-axis gyroscope with single drive

Micromechanical sensor with multiple spring bars

CMOS-compatible movable microstructure based devices

Method for fabricating lateral-moving micromachined thermal bimorph

Method and apparatus for an actuator system having buried interconn...

Method and apparatus for an actuator having an intermediate frame

Patents Applicationslast 30 patents

MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROME...

Three-axis Gyroscope

Inertial Sensor

MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

STOPPER BUMP ON ROTOR

MOTION LIMITER WITH REDUCED STICTION

MEMS TRANSDUCER

A SCANNING MEMS MIRROR DEVICE

MICRO SCANNING MIRROR

MEMS TRANSDUCER

ANCHOR STRUCTURE FOR REDUCING TEMPERATURE-BASED ERROR

BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM

3-AXIS ANGULAR ACCELEROMETER

MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS

MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY

SWITCHABLE DISPLAYS WITH MOVABLE PIXEL UNITS

MEMS ELEMENT WITH INCREASED DENSITY

WATERPROOF MEMS BUTTON DEVICE, INPUT DEVICE COMPRISING THE MEMS BUT...

BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM

3-AXIS ANGULAR ACCELEROMETER

MICROELECTRONIC SENSOR DEVICE WITH AN OUT-OF-PLANE DETECTION HAVING...

MICROMECHANICAL COMPONENT HAVING AN OSCILLATOR, A METHOD FOR THE MA...

ACTUATOR, OPTICAL SCANNING DEVICE, AND MANUFACTURING METHODS

MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY

BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM

MICRO-ELECTRO-MECHANICAL DEVICE HAVING A TILTABLE STRUCTURE, WITH D...

PHYSICAL QUANTITY SENSOR

MOVABLE REFLECTION DEVICE AND REFLECTION SURFACE DRIVE SYSTEM UTILI...

MICRO-ELECTRO-MECHANICAL DEVICE HAVING A TILTABLE STRUCTURE, WITH D...