Synchronise set points of processes

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CPC
G05B2219/32065

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/32065Synchronise set points of processes

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Patents Grantslast 30 patents

Information Patent Grant
Control device and control method
- Patent number 10,120,349
- Issue date Nov 6, 2018
- AZBIL CORPORATION
- Hayato Motohashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for synchronizing chamber down times by controlli...
- Patent number 8,798,778
- Issue date Aug 5, 2014
- Advanced Micro Devices, Inc.
- Kilian Schmidt
- G05 - CONTROLLING REGULATING
Information Patent Grant
Feedback control of a chemical mechanical polishing device providin...
- Patent number 8,694,145
- Issue date Apr 8, 2014
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Feedback control of chemical mechanical polishing device providing...
- Patent number 8,070,909
- Issue date Dec 6, 2011
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Dynamic metrology schemes and sampling schemes for advanced process...
- Patent number 7,783,375
- Issue date Aug 24, 2010
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Dynamic metrology schemes and sampling schemes for advanced process...
- Patent number 7,725,208
- Issue date May 25, 2010
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Dynamic metrology schemes and sampling schemes for advanced process...
- Patent number 7,698,012
- Issue date Apr 13, 2010
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Feedforward and feedback control for conditioning of chemical mecha...
- Patent number 7,413,986
- Issue date Aug 19, 2008
- Applied Materials, Inc.
- Young Joseph Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Method of feedback control of sub-atmospheric chemical vapor deposi...
- Patent number 7,201,936
- Issue date Apr 10, 2007
- Applied Materials, Inc.
- Alexander T. Schwarm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Feedback control of a chemical mechanical polishing device providin...
- Patent number 7,160,739
- Issue date Jan 9, 2007
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Feedforward and feedback control for conditioning of chemical mecha...
- Patent number 7,101,799
- Issue date Sep 5, 2006
- Applied Materials, Inc.
- Young Joseph Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Method, system and medium for process control for the matching of t...
- Patent number 7,082,345
- Issue date Jul 25, 2006
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Integrating tool, module, and fab level control
- Patent number 7,047,099
- Issue date May 16, 2006
- Applied Materials Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Control of chemical mechanical polishing pad conditioner directiona...
- Patent number 7,040,956
- Issue date May 9, 2006
- Applied Materials, Inc.
- Young Joseph Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Feedback control of plasma-enhanced chemical vapor deposition proce...
- Patent number 6,913,938
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of chemical mechanical polishing pad conditioner directiona...
- Patent number 6,910,947
- Issue date Jun 28, 2005
- Applied Materials, Inc.
- Young Joseph Paik
- B24 - GRINDING POLISHING
Information Patent Grant
Method for synchronizing at least two control devices
- Patent number 6,836,219
- Issue date Dec 28, 2004
- Siemens Aktiengesellschaft
- Michael Haimerl
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for resolving conflicts in a substrate process...
- Patent number 6,768,930
- Issue date Jul 27, 2004
- ASML Holding N.V.
- Hilario Oh
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
SIMULATOR LINKAGE DEVICE, CONTROL METHOD OF SIMULATOR LINKAGE DEVIC...
- Publication number 20180059649
- Publication date Mar 1, 2018
- Omron Corporation
- Takashi FUJII
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROL DEVICE AND CONTROL METHOD
- Publication number 20160274567
- Publication date Sep 22, 2016
- AZBIL CORPORATION
- Hayato MOTOHASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
FEEDBACK CONTROL OF A CHEMICAL MECHANICAL POLISHING DEVICE PROVIDIN...
- Publication number 20120053721
- Publication date Mar 1, 2012
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM FOR SYNCHRONIZING CHAMBER DOWN TIMES BY CONTROLLI...
- Publication number 20100168892
- Publication date Jul 1, 2010
- Kilian Schmidt
- G05 - CONTROLLING REGULATING
Information Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
- Publication number 20080133163
- Publication date Jun 5, 2008
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING
Information Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
- Publication number 20080109089
- Publication date May 8, 2008
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING
Information Patent Application
UNIT TO UNIT TRANSFER SYNCHRONIZATION
- Publication number 20080095196
- Publication date Apr 24, 2008
- Rockwell Automation Technologies, Inc.
- N. Andrew Weatherhead
- G05 - CONTROLLING REGULATING
Information Patent Application
Feedback control of sub-atmospheric chemical vapor deposition proce...
- Publication number 20070169694
- Publication date Jul 26, 2007
- Applied Materials, Inc.
- Alexander T. Schwarm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Feedback control of chemical mechanical polishing device providing...
- Publication number 20070102116
- Publication date May 10, 2007
- APPLIED MATERIALS, INC.
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING
Information Patent Application
Feedforward and feedback control for conditioning of chemical mecha...
- Publication number 20060009129
- Publication date Jan 12, 2006
- Applied Materials, Inc.
- Young Joseph Paik
- G05 - CONTROLLING REGULATING
Information Patent Application
Control of chemical mechanical polishing pad conditioner directiona...
- Publication number 20050208879
- Publication date Sep 22, 2005
- Applied Materials
- Young Joseph Paik
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for resolving conflicts in a substrate process...
- Publication number 20030154001
- Publication date Aug 14, 2003
- Hilario Oh
- G05 - CONTROLLING REGULATING
Information Patent Application
Feedback control of sub-atmospheric chemical vapor deposition proce...
- Publication number 20030049376
- Publication date Mar 13, 2003
- Applied Materials, Inc.
- Alexander T. Schwarm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Feedback control of plasma-enhanced chemical vapor deposition proce...
- Publication number 20030049390
- Publication date Mar 13, 2003
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Feedforward and feedback control for conditioning of chemical mecha...
- Publication number 20030027424
- Publication date Feb 6, 2003
- Young Joseph Paik
- B24 - GRINDING POLISHING
Information Patent Application
Feedback control of a chemical mechanical polishing device providin...
- Publication number 20020197745
- Publication date Dec 26, 2002
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Application
Control of chemical mechanical polishing pad conditioner directiona...
- Publication number 20020197934
- Publication date Dec 26, 2002
- Young Joseph Paik
- B24 - GRINDING POLISHING
Information Patent Application
Method, system and medium for process control for the matching of t...
- Publication number 20020199082
- Publication date Dec 26, 2002
- APPLIED MATERIALS, INC.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Application
In situ sensor based control of semiconductor processing procedure
- Publication number 20020192966
- Publication date Dec 19, 2002
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
- Publication number 20020193899
- Publication date Dec 19, 2002
- APPLIED MATERIALS, INC.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Application
Integrating tool, module, and fab level control
- Publication number 20020193902
- Publication date Dec 19, 2002
- APPLIED MATERIALS, INC.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Application
Method for synchronizing at least two control devices
- Publication number 20020167419
- Publication date Nov 14, 2002
- Michael Haimerl
- G05 - CONTROLLING REGULATING

Synchronise set points of processes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Control device and control method

Method and system for synchronizing chamber down times by controlli...

Feedback control of a chemical mechanical polishing device providin...

Feedback control of chemical mechanical polishing device providing...

Dynamic metrology schemes and sampling schemes for advanced process...

Dynamic metrology schemes and sampling schemes for advanced process...

Dynamic metrology schemes and sampling schemes for advanced process...

Feedforward and feedback control for conditioning of chemical mecha...

Method of feedback control of sub-atmospheric chemical vapor deposi...

Feedback control of a chemical mechanical polishing device providin...

Feedforward and feedback control for conditioning of chemical mecha...

Method, system and medium for process control for the matching of t...

Integrating tool, module, and fab level control

Control of chemical mechanical polishing pad conditioner directiona...

Feedback control of plasma-enhanced chemical vapor deposition proce...

Control of chemical mechanical polishing pad conditioner directiona...

Method for synchronizing at least two control devices

Method and apparatus for resolving conflicts in a substrate process...

Patents Applicationslast 30 patents

SIMULATOR LINKAGE DEVICE, CONTROL METHOD OF SIMULATOR LINKAGE DEVIC...

CONTROL DEVICE AND CONTROL METHOD

FEEDBACK CONTROL OF A CHEMICAL MECHANICAL POLISHING DEVICE PROVIDIN...

METHOD AND SYSTEM FOR SYNCHRONIZING CHAMBER DOWN TIMES BY CONTROLLI...

Dynamic metrology schemes and sampling schemes for advanced process...

Dynamic metrology schemes and sampling schemes for advanced process...

UNIT TO UNIT TRANSFER SYNCHRONIZATION

Feedback control of sub-atmospheric chemical vapor deposition proce...

Feedback control of chemical mechanical polishing device providing...

Feedforward and feedback control for conditioning of chemical mecha...

Control of chemical mechanical polishing pad conditioner directiona...

Method and apparatus for resolving conflicts in a substrate process...

Feedback control of sub-atmospheric chemical vapor deposition proce...

Feedback control of plasma-enhanced chemical vapor deposition proce...

Feedforward and feedback control for conditioning of chemical mecha...

Feedback control of a chemical mechanical polishing device providin...

Control of chemical mechanical polishing pad conditioner directiona...

Method, system and medium for process control for the matching of t...

In situ sensor based control of semiconductor processing procedure

Dynamic metrology schemes and sampling schemes for advanced process...

Integrating tool, module, and fab level control

Method for synchronizing at least two control devices