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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

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B81B2203/05Type of movement

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Patents Grantslast 30 patents

Information Patent Grant
3-axis angular accelerometer
- Patent number 12,153,065
- Issue date Nov 26, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator system
- Patent number 12,135,437
- Issue date Nov 5, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 12,116,268
- Issue date Oct 15, 2024
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiaxial strain engineering of defect doped materials
- Patent number 12,077,428
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical scanning system using micro-electro-mechanical system (mems...
- Patent number 12,061,334
- Issue date Aug 13, 2024
- Raytheon Company
- David J. Knapp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal metamaterial for low power MEMS thermal control
- Patent number 12,055,927
- Issue date Aug 6, 2024
- Honeywell International Inc.
- Robert Compton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
- Patent number 12,043,537
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflection device, distance measurement device, and mobile body
- Patent number 11,971,537
- Issue date Apr 30, 2024
- Ricoh Company, Ltd.
- Kazuhiko Adachi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Dual-layer micro-ribbon MEMS light modulator
- Patent number 11,958,738
- Issue date Apr 16, 2024
- Silicon Light Machines Corporation
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 11,952,265
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
- Patent number 11,953,813
- Issue date Apr 9, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,898,845
- Issue date Feb 13, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator systems and methods
- Patent number 11,879,524
- Issue date Jan 23, 2024
- C. Anthony Hester
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor structure for reducing temperature-based error
- Patent number 11,852,649
- Issue date Dec 26, 2023
- Murata Manufacturing Co., Ltd.
- Akira Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device comprising a membrane and an actuator
- Patent number 11,807,517
- Issue date Nov 7, 2023
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 11,772,959
- Issue date Oct 3, 2023
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode configuration for tilting micro-electro-mechanical system...
- Patent number 11,726,311
- Issue date Aug 15, 2023
- Lumentum Operations LLC
- Gonzalo Wills
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cellular array electrostatic actuator
- Patent number 11,713,240
- Issue date Aug 1, 2023
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deployable KiriForm flexures
- Patent number 11,697,585
- Issue date Jul 11, 2023
- President and Fellows of Harvard College
- Saurabh Avinash Mhatre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 11,697,582
- Issue date Jul 11, 2023
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multidirectional translating and tilting platform using bending act...
- Patent number 11,697,584
- Issue date Jul 11, 2023
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Matthieu Gaudet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Out-of-plane hinge for micro and nanoelectromechanical systems with...
- Patent number 11,674,344
- Issue date Jun 13, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Samer Dagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor
- Patent number 11,656,110
- Issue date May 23, 2023
- Kabushiki Kaisha Toshiba
- Hiroaki Yamazaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic apparatus, and vehicle
- Patent number 11,656,243
- Issue date May 23, 2023
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
- Patent number 11,656,539
- Issue date May 23, 2023
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
- Publication number 20240400380
- Publication date Dec 5, 2024
- STMicroelectronics International N.V.
- Patrick FEDELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
- Publication number 20240391757
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Marco GARBARINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATING APPARATUS
- Publication number 20240365670
- Publication date Oct 31, 2024
- Coretronic MEMS Corporation
- Hao-Chien Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
- Publication number 20240351862
- Publication date Oct 24, 2024
- Frore Systems Inc.
- Suryaprakash Ganti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...
- Publication number 20240351860
- Publication date Oct 24, 2024
- Atomic Machines, Inc.
- William A. Boettcher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
- Publication number 20240327198
- Publication date Oct 3, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
- Publication number 20240279050
- Publication date Aug 22, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Zibo CAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
- Publication number 20240262680
- Publication date Aug 8, 2024
- SILMACH
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL Z-ACCELERATION SENSOR
- Publication number 20240199409
- Publication date Jun 20, 2024
- ROBERT BOSCH GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP ON ROTOR
- Publication number 20240190698
- Publication date Jun 13, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190699
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...
- Publication number 20240174510
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...
- Publication number 20240174509
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device for Interaction with Fluids
- Publication number 20240158221
- Publication date May 16, 2024
- ROBERT BOSCH GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL MICROPHONE
- Publication number 20240101410
- Publication date Mar 28, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Taimoor Ali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL MICROPHONE
- Publication number 20240101411
- Publication date Mar 28, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Taimoor Ali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOTION LIMITER WITH REDUCED STICTION
- Publication number 20240051816
- Publication date Feb 15, 2024
- Murata Manufacturing Co., Ltd.
- Pekka LEHTINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Compliant Structure
- Publication number 20240044388
- Publication date Feb 8, 2024
- Technische Universiteit Delft
- Thijs Willem Albert Blad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
- Publication number 20240012237
- Publication date Jan 11, 2024
- Magic Leap, Inc.
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...
- Publication number 20230399224
- Publication date Dec 14, 2023
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
- Publication number 20230373781
- Publication date Nov 23, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Jan Rockstroh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLIP CHIP MICROMIRROR TECHNOLOGY
- Publication number 20230375822
- Publication date Nov 23, 2023
- Microsoft Technology Licensing, LLC
- Xiao Chuan ONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...
- Publication number 20230358975
- Publication date Nov 9, 2023
- NIHARIKA KOHLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC DRIVE ELEMENT
- Publication number 20230356997
- Publication date Nov 9, 2023
- Panasonic Intellectual Property Management Co., Ltd.
- Ryouichi TAKAYAMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE
- Publication number 20230339742
- Publication date Oct 26, 2023
- Fortemedia, Inc.
- Jien-Ming CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Type of movement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

3-axis angular accelerometer

Micromechanical structure, micromechanical system and method of pro...

MEMS actuator system

MEMS actuator package architecture

MEMS device with improved dynamic mechanical performance through da...

Multiaxial strain engineering of defect doped materials

Micromechanical structure and method of providing the same

Optical scanning system using micro-electro-mechanical system (mems...

Thermal metamaterial for low power MEMS thermal control

Waterproof MEMS button device, input device comprising the MEMS but...

Method of manufacturing a microelectromechanical systems (MEMS) device

Self-aligned vertical comb drive assembly

Light deflection device, distance measurement device, and mobile body

Dual-layer micro-ribbon MEMS light modulator

Actuator device

Microelectromechanical device with a structure tiltable by piezoele...

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Actuator systems and methods

Anchor structure for reducing temperature-based error

MEMS device comprising a membrane and an actuator

MEMS device with improved dynamic mechanical performance through da...

Electrode configuration for tilting micro-electro-mechanical system...

Cellular array electrostatic actuator

Deployable KiriForm flexures

MEMS transducer

Multidirectional translating and tilting platform using bending act...

Out-of-plane hinge for micro and nanoelectromechanical systems with...

Sensor

Physical quantity sensor, electronic apparatus, and vehicle

Microelectromechanical device with a structure tiltable by piezoele...

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION

MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP

PIEZOELECTRIC ACTUATING APPARATUS

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR

OPTICAL REFLECTIVE DEVICE

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

MICROMECHANICAL Z-ACCELERATION SENSOR

STOPPER BUMP ON ROTOR

ACTUATOR DEVICE

FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...

MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...

MEMS Device for Interaction with Fluids

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...

MEMS OPTICAL MICROPHONE

MEMS OPTICAL MICROPHONE

MOTION LIMITER WITH REDUCED STICTION

Compliant Structure

SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...

FLIP CHIP MICROMIRROR TECHNOLOGY

INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...

PIEZOELECTRIC DRIVE ELEMENT

MEMS STRUCTURE