Type of movement

Industry

CPC
B81B2203/05

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/05Type of movement

Industries

Patents Grantslast 30 patents

Information Patent Grant
Comb-driven MEMS resonant scanner with full-circumferential range a...
- Patent number 12,332,428
- Issue date Jun 17, 2025
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,304,806
- Issue date May 20, 2025
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 12,297,096
- Issue date May 13, 2025
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vehicle operator awareness system
- Patent number 12,269,494
- Issue date Apr 8, 2025
- AURORA OPERATIONS, INC.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Optoelectronic component comprising, on a single substrate, an opti...
- Patent number 12,219,878
- Issue date Feb 4, 2025
- Thales
- François Duport
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with damping fluid vertically sandwiched between moving...
- Patent number 12,215,020
- Issue date Feb 4, 2025
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS device with automated dispensing of damping flu...
- Patent number 12,195,326
- Issue date Jan 14, 2025
- Mirrocle Technologies Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 12,153,065
- Issue date Nov 26, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator system
- Patent number 12,135,437
- Issue date Nov 5, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 12,116,268
- Issue date Oct 15, 2024
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiaxial strain engineering of defect doped materials
- Patent number 12,077,428
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical scanning system using micro-electro-mechanical system (mems...
- Patent number 12,061,334
- Issue date Aug 13, 2024
- Raytheon Company
- David J. Knapp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal metamaterial for low power MEMS thermal control
- Patent number 12,055,927
- Issue date Aug 6, 2024
- Honeywell International Inc.
- Robert Compton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
- Patent number 12,043,537
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflection device, distance measurement device, and mobile body
- Patent number 11,971,537
- Issue date Apr 30, 2024
- Ricoh Company, Ltd.
- Kazuhiko Adachi
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Dual-layer micro-ribbon MEMS light modulator
- Patent number 11,958,738
- Issue date Apr 16, 2024
- Silicon Light Machines Corporation
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 11,952,265
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
- Patent number 11,953,813
- Issue date Apr 9, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,898,845
- Issue date Feb 13, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator systems and methods
- Patent number 11,879,524
- Issue date Jan 23, 2024
- C. Anthony Hester
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor structure for reducing temperature-based error
- Patent number 11,852,649
- Issue date Dec 26, 2023
- Murata Manufacturing Co., Ltd.
- Akira Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device comprising a membrane and an actuator
- Patent number 11,807,517
- Issue date Nov 7, 2023
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 11,772,959
- Issue date Oct 3, 2023
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode configuration for tilting micro-electro-mechanical system...
- Patent number 11,726,311
- Issue date Aug 15, 2023
- Lumentum Operations LLC
- Gonzalo Wills
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
- Publication number 20250208405
- Publication date Jun 26, 2025
- FUJIFILM CORPORATION
- Keisuke AOSHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250206595
- Publication date Jun 26, 2025
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250206596
- Publication date Jun 26, 2025
- Seoul National University R&DB Foundation
- Woo Young CHOI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ELECTRODES
- Publication number 20250197193
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezoelectric Motion Limiters for MEMS Autofocus Actuator
- Publication number 20250187903
- Publication date Jun 12, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew NG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device
- Publication number 20250187902
- Publication date Jun 12, 2025
- SensorTek technology Corp.
- Chao-Lin Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
- Publication number 20250178885
- Publication date Jun 5, 2025
- STMicroelectronics International N.V.
- Massimiliano PESATURO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB STRUCTURE FOR MEMS ACCELEROMETER
- Publication number 20250138044
- Publication date May 1, 2025
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND...
- Publication number 20250128934
- Publication date Apr 24, 2025
- ROBERT BOSCH GmbH
- Paul Fehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vehicle Operator Awareness System
- Publication number 20250115264
- Publication date Apr 10, 2025
- Aurora Operations, Inc.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
- Publication number 20250115472
- Publication date Apr 10, 2025
- Rohm Co., Ltd.
- Andrew Scott HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE
- Publication number 20250109010
- Publication date Apr 3, 2025
- KNOWLES ELECTRONICS, LLC
- Faisal Zaman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...
- Publication number 20250083949
- Publication date Mar 13, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS
- Publication number 20250066185
- Publication date Feb 27, 2025
- NORTHROP GRUMMAN LITEF GMBH
- Jan Daniel RENDE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
- Publication number 20250042718
- Publication date Feb 6, 2025
- STMicroelectronics International N.V.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROME...
- Publication number 20250033952
- Publication date Jan 30, 2025
- ROBERT BOSCH GmbH
- Daniel Baumgaertner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICA...
- Publication number 20250019223
- Publication date Jan 16, 2025
- Kaunas University of Technology
- Darius VIRZONIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-axis Gyroscope
- Publication number 20240425355
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Hsiung TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor
- Publication number 20240425357
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Yuan LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
- Publication number 20240400380
- Publication date Dec 5, 2024
- STMicroelectronics International N.V.
- Patrick FEDELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
- Publication number 20240391757
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Marco GARBARINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATING APPARATUS
- Publication number 20240365670
- Publication date Oct 31, 2024
- Coretronic MEMS Corporation
- Hao-Chien Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
- Publication number 20240351862
- Publication date Oct 24, 2024
- Frore Systems Inc.
- Suryaprakash Ganti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...
- Publication number 20240351860
- Publication date Oct 24, 2024
- Atomic Machines, Inc.
- William A. Boettcher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
- Publication number 20240327198
- Publication date Oct 3, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Type of movement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Comb-driven MEMS resonant scanner with full-circumferential range a...

Actuator device

MEMS transducer

Vehicle operator awareness system

Optoelectronic component comprising, on a single substrate, an opti...

MEMS device with damping fluid vertically sandwiched between moving...

MEMS and method of manufacturing the same

Fabrication of MEMS device with automated dispensing of damping flu...

3-axis angular accelerometer

Micromechanical structure, micromechanical system and method of pro...

MEMS actuator system

MEMS actuator package architecture

MEMS device with improved dynamic mechanical performance through da...

Multiaxial strain engineering of defect doped materials

Micromechanical structure and method of providing the same

Optical scanning system using micro-electro-mechanical system (mems...

Thermal metamaterial for low power MEMS thermal control

Waterproof MEMS button device, input device comprising the MEMS but...

Method of manufacturing a microelectromechanical systems (MEMS) device

Self-aligned vertical comb drive assembly

Light deflection device, distance measurement device, and mobile body

Dual-layer micro-ribbon MEMS light modulator

Actuator device

Microelectromechanical device with a structure tiltable by piezoele...

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Actuator systems and methods

Anchor structure for reducing temperature-based error

MEMS device comprising a membrane and an actuator

MEMS device with improved dynamic mechanical performance through da...

Electrode configuration for tilting micro-electro-mechanical system...

Patents Applicationslast 30 patents

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

MEMS DEVICE

NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF

ANTI-STICTION ELECTRODES

Piezoelectric Motion Limiters for MEMS Autofocus Actuator

MEMS Device

MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS

COMB STRUCTURE FOR MEMS ACCELEROMETER

METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND...

Vehicle Operator Awareness System

MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS

PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE

MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...

COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS

MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS

MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROME...

Dual-Layer Micro-ribbon MEMS Light Modulator

ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICA...

Three-axis Gyroscope

Inertial Sensor

MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION

MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP

PIEZOELECTRIC ACTUATING APPARATUS

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR

OPTICAL REFLECTIVE DEVICE

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION