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2802760
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Information
Patent Grant
2802760
References
Source
Patent Number
2,802,760
Date Filed
Not available
Date Issued
Tuesday, August 13, 1957
67 years ago
CPC
H01L21/31662 - of silicon in uncombined form
C04B41/52 - Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02238 - silicon in uncombined form
H01L21/02255 - formation by thermal treatment
Y10S148/036 - Diffusion, nonselective
Y10S148/037 - Diffusion-deposition
Y10S148/043 - Dual dielectric
Y10S148/049 - Equivalence and options
Y10S148/118 - Oxide films
Y10S148/144 - Shallow diffusion
Y10S148/151 - Simultaneous diffusion
Y10S438/92 - Controlling diffusion profile by oxidation
Y10S438/923 - Diffusion through a layer
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
250 - Radiant energy
257 - Active solid-state devices
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