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3676228
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Information
Patent Grant
3676228
References
Source
Patent Number
3,676,228
Date Filed
Not available
Date Issued
Tuesday, July 11, 1972
52 years ago
CPC
C30B19/08 - Heating of the reaction chamber or the substrate
C30B19/10 - Controlling or regulating
H01L21/02395 - Arsenides
H01L21/02463 - Arsenides
H01L21/02502 - consisting of two layers
H01L21/02546 - Arsenides
H01L21/02576 - N-type
H01L21/02579 - P-type
H01L21/02625 - using melted materials
Y10S438/915 - Amphoteric doping
US Classifications
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
257 - Active solid-state devices
438 - Semiconductor device manufacturing: process
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