Claims
- 1. An emitting capillary discharge source, comprising:an electrode; an insulated capillary discharge chamber having an initial inner bore diameter, the capillary discharge chamber being adjacent to the electrode; a gas for being inserted within the capillary discharge chamber; voltage means for causing a light emission from the capillary discharge chamber; and, means for maintaining the initial inner bore diameter of the capillary discharge chamber inner diameter at a constant value over time, for additional light emissions, the constant value being at least approximately 110% of the initial inner bore diameter for lithographic applications.
- 2. The emitting capillary discharge source of claim 1, wherein the constant value is at least approximately 105% of the initial inner bore diameter, for the lithographic applications.
- 3. The emitting capillary discharge source of claim 1, wherein said means for maintaining the initial bore diameter at a constant value is a spring.
- 4. The emitting capillary discharge source of claim 1, wherein said means for maintaining the initial bore diameter at a constant value is selected from one of: a mechanically actuated plunger, and an electrically actuated plunger.
- 5. The emitting capillary discharge source of claim 1, wherein said means for maintaining the initial bore diameter at a constant value includes a remote detector of said light emissions.
- 6. The emitting capillary discharge source of claim 1, wherein the means for maintaining at a constant value provides inwardly directed radial force toward the bore.
- 7. The emitting capillary discharge source of claim 1, wherein the capillary discharge chamber has an inner core diameter between approximately 0.5 mm and approximately 2.5 mm and an overall length which ranges between approximately 1 mm and approximately 10 mm.
- 8. The emitting capillary discharge source of claim 1, wherein said means for maintaining the initial bore diameter at a constant value is a quasi-circularly shaped capillary using elongated segments of capillary material, the ends of which are flat and angularly arranged to form the inner wall of said discharge chamber.
- 9. The emitting capillary discharges of claim 8, wherein there are six of said elongated pieces.
- 10. An emitting capillary discharge source, comprising:an electrode; an insulated capillary discharge chamber having an initial inner bore diameter, the capillary discharge chamber being adjacent to the electrode; a gas for being inserted within the capillary discharge chamber; voltage means for causing a light emission from the capillary discharge chamber; and, means for maintaining the initial inner bore diameter of the capillary discharge chamber inner diameter at a constant value over time, for additional light emissions, said means for maintaining the initial bore diameter at a constant value being a spring.
- 11. An emitting capillary discharge source, comprising:an electrode; an insulated capillary discharge chamber having an initial inner bore diameter, the capillary discharge chamber being adjacent to the electrode; a gas for being inserted within the capillary discharge chamber; voltage means for causing a light emission from the capillary discharge chamber; and, means for maintaining the initial inner bore diameter of the capillary discharge chamber inner diameter at a constant value over time, for additional light emissions, said means for maintaining said initial bore diameter at a constant value being selected from one of: a mechanically actuated plunger, and an electrically actuated plunger.
- 12. An emitting capillary discharge source, comprising:an electrode; an insulated capillary discharge chamber having an initial inner bore diameter, the capillary discharge chamber being adjacent to the electrode; a gas for being inserted within the capillary discharge chamber; voltage means for causing a light emission from the capillary discharge chamber; and, means for maintaining the initial inner bore diameter of the capillary discharge chamber inner diameter at a constant value over time, for additional light emissions, said means for maintaining the initial bore diameter at a constant value is a quasi-circularly shaped capillary using elongated segments of capillary material, the ends of which are flat and angularly arranged to form the inner wall of said discharge chamber.
Parent Case Info
This invention relates to emitting capillary discharge light sources, and in particular to a constant bore diameter emitting capillary discharge light source useful in applications in extreme ultraviolet (EUV) lithography, microscopy, materials processing, metrology, resist analysis, as well as applications in other spectral regions such as the visible, ultraviolet, and vacuum ultraviolet for laser pumping and the like, where a small and very intense light source is required and this invention is a Continuation-In-Part of U.S. Ser. No. 09/001,696 filed on Dec. 31, 1997 now U.S. Pat. No. 6,031,241, which is a Continuation-in-Part of U.S. Ser. No. 08/815,283 filed on Mar. 11, 1997 now U.S. Pat. No. 5,963,616 both by the same assignee thereof, both of which are incorporated by reference and further claims the benefit of priority based on U.S. Provisional Application No. 60/117,177 filed Jan. 25, 1999.
US Referenced Citations (23)
Provisional Applications (1)
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Number |
Date |
Country |
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60/117177 |
Jan 1999 |
US |
Continuation in Parts (2)
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Number |
Date |
Country |
Parent |
09/001696 |
Dec 1997 |
US |
Child |
09/490662 |
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US |
Parent |
08/815283 |
Mar 1997 |
US |
Child |
09/001696 |
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US |