A push for higher performance and smaller die size drives the semiconductor industry to reduce circuit chip area by approximately 50% every two years. The chip area reduction provides an economic benefit for migrating to newer technologies. The 50% chip area reduction is achieved by reducing the feature sizes between 25% and 30%. The reduction in feature size is enabled by improvements in manufacturing equipment and materials. For example, improvement in the lithographic process has enabled smaller feature sizes to be achieved, while improvement in chemical mechanical polishing (CMP) has in-part enabled a higher number of interconnect layers.
In the evolution of lithography, as the minimum feature size approached the wavelength of the light source used to expose the feature shapes, unintended interactions occurred between neighboring features. Today minimum feature sizes are approaching 45 nm (nanometers), while the wavelength of the light source used in the photolithography process remains at 193 nm. The difference between the minimum feature size and the wavelength of light used in the photolithography process is defined as the lithographic gap. As the lithographic gap grows, the resolution capability of the lithographic process decreases.
An interference pattern occurs as each shape on the mask interacts with the light. The interference patterns from neighboring shapes can create constructive or destructive interference. In the case of constructive interference, unwanted shapes may be inadvertently created. In the case of destructive interference, desired shapes may be inadvertently removed. In either case, a particular shape is printed in a different manner than intended, possibly causing a device failure. Correction methodologies, such as optical proximity correction (OPC), attempt to predict the impact from neighboring shapes and modify the mask such that the printed shape is fabricated as desired. The quality of the light interaction prediction is declining as process geometries shrink and as the light interactions become more complex.
In view of the foregoing, a solution is needed for managing lithographic gap issues as technology continues to progress toward smaller semiconductor device features sizes.
In one embodiment, a cross-coupled transistor circuit is disclosed. The circuit includes a first PMOS transistor defined by a gate electrode extending along a first gate electrode track. The circuit includes a first NMOS transistor defined by a gate electrode extending along a second gate electrode track. The circuit includes a second PMOS transistor defined by a gate electrode extending along the second gate electrode track. The circuit includes a second NMOS transistor defined by a gate electrode extending along the first gate electrode track. The gate electrodes of the first PMOS transistor and the first NMOS transistor are electrically connected to a first gate node. The gate electrodes of the second PMOS transistor and the second NMOS transistor are electrically connected to a second gate node. Each of the first PMOS transistor, the first NMOS transistor, the second PMOS transistor, and the second NMOS transistor has a respective diffusion terminal electrically connected to a common output node.
In one embodiment, a semiconductor device is disclosed. The semiconductor device includes a substrate having a portion of the substrate formed to include a plurality of diffusion regions. The plurality of diffusion regions respectively correspond to active areas of the portion of the substrate within which one or more processes are applied to modify one or more electrical characteristics of the active areas of the portion of the substrate. The plurality of diffusion regions include a first p-type diffusion region, a second p-type diffusion region, a first n-type diffusion region, and a second n-type diffusion region. The first p-type diffusion region includes a first p-type active area electrically connected to a common node. The second p-type diffusion region includes a second p-type active area electrically connected to the common node. The first n-type diffusion region includes a first n-type active area electrically connected to the common node. The second n-type diffusion region includes a second n-type active area electrically connected to the common node.
The semiconductor device also includes a gate electrode level region formed above the portion of the substrate. The gate electrode level region includes a number of conductive features defined to extend over the substrate in only a first parallel direction. Each of the number of conductive features within the gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature, such that a centerline of each respective originating rectangular-shaped layout feature is aligned with a corresponding gate electrode track extending across the substrate the first parallel direction. The number of conductive features include conductive features that respectively form a first PMOS transistor device gate electrode, a second PMOS transistor device gate electrode, a first NMOS transistor device gate electrode, and a second NMOS transistor device gate electrode.
The first PMOS transistor device gate electrode is formed to extend along a first gate electrode track over the first p-type diffusion region to electrically interface with the first p-type active area and thereby form a first PMOS transistor device. The second PMOS transistor device gate electrode is formed to extend along a second gate electrode track over the second p-type diffusion region to electrically interface with the second p-type active area and thereby form a second PMOS transistor device. The first NMOS transistor device gate electrode is formed to extend along the first gate electrode track over the first n-type diffusion region to electrically interface with the first n-type active area and thereby form a first NMOS transistor device. The second NMOS transistor device gate electrode is formed to extend along the second gate electrode track over the second n-type diffusion region to electrically interface with the second n-type active area and thereby form a second NMOS transistor device.
The first PMOS transistor device gate electrode is electrically connected to the second NMOS transistor device gate electrode through a first set of interconnected conductors. The second PMOS transistor device gate electrode is electrically connected to the first NMOS transistor device gate electrode through a second set of interconnected conductors. The first and second sets of interconnected conductors traverse across each other within different levels of the semiconductor chip. The first PMOS transistor device, the second PMOS transistor device, the first NMOS transistor device, and the second NMOS transistor device define a cross-coupled transistor configuration having commonly oriented gate electrodes formed from respective rectangular-shaped layout features.
Other aspects and advantages of the invention will become more apparent from the following detailed description, taken in conjunction with the accompanying drawings, illustrating by way of example the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well known process operations have not been described in detail in order not to unnecessarily obscure the present invention.
SRAM Bit Cell Configuration
The inverter 102 is defined in an identical manner to inverter 106. The inverter 102 include a PMOS transistor 121 and an NMOS transistor 123. The respective gates of the PMOS and NMOS transistors 121, 123 are connected together to form the input 102A of inverter 102. Also, each of PMOS and NMOS transistors 121, 123 have one of their respective terminals connected together to form the output 102B of inverter 102. A remaining terminal of PMOS transistor 121 is connected to the power supply 117. A remaining terminal of NMOS transistor 123 is connected to the ground potential 119. Therefore, PMOS and NMOS transistors 121, 123 are activated in a complementary manner. When a high logic state is present at the input 102A of the inverter 102, the NMOS transistor 123 is turned on and the PMOS transistor 121 is turned off, thereby causing a low logic state to be generated at output 102B of the inverter 102. When a low logic state is present at the input 102A of the inverter 102, the NMOS transistor 123 is turned off and the PMOS transistor 121 is turned on, thereby causing a high logic state to be generated at output 102B of the inverter 102.
Cross-Coupled Transistor Configuration
Based on the foregoing, the cross-coupled transistor configuration includes four transistors: 1) a first PMOS transistor, 2) a first NMOS transistor, 3) a second PMOS transistor, and 4) a second NMOS transistor. Furthermore, the cross-coupled transistor configuration includes three required electrical connections: 1) each of the four transistors has one of its terminals connected to a same common node, 2) gates of one PMOS transistor and one NMOS transistor are both connected to a first gate node, and 3) gates of the other PMOS transistor and the other NMOS transistor are both connected to a second gate node.
It should be understood that the cross-coupled transistor configuration of
Difference Between SRAM Bit Cell and Cross-Coupled Transistor Configurations
It should be understood that the SRAM bit cell of
With reference to the SRAM bit cell in
Restricted Gate Level Layout Architecture
The present invention implements a restricted gate level layout architecture within a portion of a semiconductor chip. For the gate level, a number of parallel virtual lines are defined to extend across the layout. These parallel virtual lines are referred to as gate electrode tracks, as they are used to index placement of gate electrodes of various transistors within the layout. In one embodiment, the parallel virtual lines which form the gate electrode tracks are defined by a perpendicular spacing therebetween equal to a specified gate electrode pitch. Therefore, placement of gate electrode segments on the gate electrode tracks corresponds to the specified gate electrode pitch. In another embodiment the gate electrode tracks are spaced at variable pitches greater than or equal to a specified gate electrode pitch.
Within the restricted gate level layout architecture, a gate level feature layout channel is defined about a given gate electrode track so as to extend between gate electrode tracks adjacent to the given gate electrode track. For example, gate level feature layout channels 301A-1 through 301E-1 are defined about gate electrode tracks 301A through 301E, respectively. It should be understood that each gate electrode track has a corresponding gate level feature layout channel. Also, for gate electrode tracks positioned adjacent to an edge of a prescribed layout space, e.g., adjacent to a cell boundary, the corresponding gate level feature layout channel extends as if there were a virtual gate electrode track outside the prescribed layout space, as illustrated by gate level feature layout channels 301A-1 and 301E-1. It should be further understood that each gate level feature layout channel is defined to extend along an entire length of its corresponding gate electrode track. Thus, each gate level feature layout channel is defined to extend across the gate level layout within the portion of the chip to which the gate level layout is associated.
Within the restricted gate level layout architecture, gate level features associated with a given gate electrode track are defined within the gate level feature layout channel associated with the given gate electrode track. A contiguous gate level feature can include both a portion which defines a gate electrode of a transistor, and a portion that does not define a gate electrode of a transistor. Thus, a contiguous gate level feature can extend over both a diffusion region and a dielectric region of an underlying chip level. In one embodiment, each portion of a gate level feature that forms a gate electrode of a transistor is positioned to be substantially centered upon a given gate electrode track. Furthermore, in this embodiment, portions of the gate level feature that do not form a gate electrode of a transistor can be positioned within the gate level feature layout channel associated with the given gate electrode track. Therefore, a given gate level feature can be defined essentially anywhere within a given gate level feature layout channel, so long as gate electrode portions of the given gate level feature are centered upon the gate electrode track corresponding to the given gate level feature layout channel, and so long as the given gate level feature complies with design rule spacing requirements relative to other gate level features in adjacent gate level layout channels. Additionally, physical contact is prohibited between gate level features defined in gate level feature layout channels that are associated with adjacent gate electrode tracks.
A gate electrode corresponds to a portion of a respective gate level feature that extends over a diffusion region, wherein the respective gate level feature is defined in its entirety within a gate level feature layout channel. Each gate level feature is defined within its gate level feature layout channel without physically contacting another gate level feature defined within an adjoining gate level feature layout channel. As illustrated by the example gate level feature layout channels 301A-1 through 301E-1 of
Some gate level features may have one or more contact head portions defined at any number of locations along their length. A contact head portion of a given gate level feature is defined as a segment of the gate level feature having a height and a width of sufficient size to receive a gate contact structure, wherein “width” is defined across the substrate in a direction perpendicular to the gate electrode track of the given gate level feature, and wherein “height” is defined across the substrate in a direction parallel to the gate electrode track of the given gate level feature. It should be appreciated that a contact head of a gate level feature, when viewed from above, can be defined by essentially any layout shape, including a square or a rectangle. Also, depending on layout requirements and circuit design, a given contact head portion of a gate level feature may or may not have a gate contact defined thereabove.
A gate level of the various embodiments disclosed herein is defined as a restricted gate level, as discussed above. Some of the gate level features form gate electrodes of transistor devices. Others of the gate level features can form conductive segments extending between two points within the gate level. Also, others of the gate level features may be non-functional with respect to integrated circuit operation. It should be understood that the each of the gate level features, regardless of function, is defined to extend across the gate level within their respective gate level feature layout channels without physically contacting other gate level features defined with adjacent gate level feature layout channels.
In one embodiment, the gate level features are defined to provide a finite number of controlled layout shape-to-shape lithographic interactions which can be accurately predicted and optimized for in manufacturing and design processes. In this embodiment, the gate level features are defined to avoid layout shape-to-shape spatial relationships which would introduce adverse lithographic interaction within the layout that cannot be accurately predicted and mitigated with high probability. However, it should be understood that changes in direction of gate level features within their gate level layout channels are acceptable when corresponding lithographic interactions are predictable and manageable.
It should be understood that each of the gate level features, regardless of function, is defined such that no gate level feature along a given gate electrode track is configured to connect directly within the gate level to another gate level feature defined along a different gate electrode track without utilizing a non-gate level feature. Moreover, each connection between gate level features that are placed within different gate level layout channels associated with different gate electrode tracks is made through one or more non-gate level features, which may be defined in higher interconnect levels, i.e., through one or more interconnect levels above the gate level, or by way of local interconnect features at or below the gate level.
Cross-Coupled Transistor Layouts
As discussed above, the cross-coupled transistor configuration includes four transistors (2 PMOS transistors and 2 NMOS transistors). In various embodiments of the present invention, gate electrodes defined in accordance with the restricted gate level layout architecture are respectively used to form the four transistors of a cross-coupled transistor configuration layout.
The gate electrodes 401A and 407A of the first PMOS transistor 401 and first NMOS transistor 407, respectively, are electrically connected to the first gate node 491 so as to be exposed to a substantially equivalent gate electrode voltage. Similarly, the gate electrodes 403A and 405A of the second PMOS transistor 403 and second NMOS transistor 405, respectively, are electrically connected to the second gate node 493 so as to be exposed to a substantially equivalent gate electrode voltage. Also, each of the four transistors 401, 403, 405, 407 has a respective diffusion terminal electrically connected to the common output node 495.
The cross-coupled transistor layout can be implemented in a number of different ways within the restricted gate level layout architecture. In the exemplary embodiment of
It should be appreciated that although the cross-coupled transistors 401, 403, 405, 407 of
For example, the cross-coupled transistor layout of
The gate electrode tracks 450 and 456 extend in a first parallel direction. At least a portion of the first p-type diffusion region 480 and at least a portion of the second p-type diffusion region 482 are formed over a first common line of extent that extends across the substrate perpendicular to the first parallel direction of the gate electrode tracks 450 and 456. Additionally, at least a portion of the first n-type diffusion region 486 and at least a portion of the second n-type diffusion region 484 are formed over a second common line of extent that extends across the substrate perpendicular to the first parallel direction of the gate electrode tracks 450 and 456.
In another embodiment, two PMOS transistors of the cross-coupled transistors are respectively disposed over physically separated p-type diffusion regions, two NMOS transistors of the cross-coupled transistors are disposed over a common n-type diffusion region, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node.
In another embodiment, two PMOS transistors of the cross-coupled transistors are disposed over a common p-type diffusion region, two NMOS transistors of the cross-coupled transistors are respectively disposed over physically separated n-type diffusion regions, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node.
In yet another embodiment, two PMOS transistors of the cross-coupled transistors are respectively disposed over physically separated p-type diffusion regions, two NMOS transistors of the cross-coupled transistors are respectively disposed over physically separated n-type diffusion regions, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node.
In
Further with regard to
In one embodiment, electrical connection of the diffusion regions of the cross-coupled transistors to the common node 495 can be made using one or more local interconnect conductors defined at or below the gate level itself. This embodiment may also combine local interconnect conductors with conductors in higher levels (above the gate level) by way of contacts and/or vias to make the electrical connection of the diffusion regions of the cross-coupled transistors to the common node 495. Additionally, in various embodiments, conductive paths used to electrically connect the diffusion regions of the cross-coupled transistors to the common node 495 can be defined to traverse over essentially any area of the chip as required to accommodate a routing solution for the chip.
Also, it should be appreciated that because the n-type and p-type diffusion regions are physically separate, and because the p-type diffusion regions for the two PMOS transistors of the cross-coupled transistors can be physically separate, and because the n-type diffusion regions for the two NMOS transistors of the cross-coupled transistors can be physically separate, it is possible in various embodiments to have each of the four cross-coupled transistors disposed at arbitrary locations in the layout relative to each other. Therefore, unless necessitated by electrical performance or other layout influencing conditions, it is not required that the four cross-coupled transistors be located within a prescribed proximity to each other in the layout. Although, location of the cross-coupled transistors within a prescribed proximity to each other is not precluded, and may be desirable in certain circuit layouts.
In the exemplary embodiments disclosed herein, it should be understood that diffusion regions are not restricted in size. In other words, any given diffusion region can be sized in an arbitrary manner as required to satisfy electrical and/or layout requirements. Additionally, any given diffusion region can be shaped in an arbitrary manner as required to satisfy electrical and/or layout requirements. Also, it should be understood that the four transistors of the cross-coupled transistor configuration, as defined in accordance with the restricted gate level layout architecture, are not required to be the same size. In different embodiments, the four transistors of the cross-coupled transistor configuration can either vary in size (transistor width or transistor gate length) or have the same size, depending on the applicable electrical and/or layout requirements.
Additionally, it should be understood that the four transistors of the cross-coupled transistor configuration are not required to be placed in close proximity to each, although they may be closely placed in some embodiments. More specifically, because connections between the transistors of the cross-coupled transistor configuration can be made by routing through as least one higher interconnect level, there is freedom in placement of the four transistors of the cross-coupled transistor configuration relative to each other. Although, it should be understood that a proximity of the four transistors of the cross-coupled transistor configuration may be governed in certain embodiments by electrical and/or layout optimization requirements.
It should be appreciated that the cross-coupled transistor configurations and corresponding layouts implemented using the restricted gate level layout architecture, as described with regard to
Example Multiplexer Embodiments
Example Latch Embodiments
Exemplary Embodiments
In one embodiment, a cross-coupled transistor configuration is defined within a semiconductor chip. This embodiment is illustrated in part with regard to
It should be understood that in some embodiments, one or more of the first P channel transistor (401), the first N channel transistor (407), the second P channel transistor (403), and the second N channel transistor (405) can be respectively implemented by a number of transistors electrically connected in parallel. In this instance, the transistors that are electrically connected in parallel can be considered as one device corresponding to either of the first P channel transistor (401), the first N channel transistor (407), the second P channel transistor (403), and the second N channel transistor (405). It should be understood that electrical connection of multiple transistors in parallel to form a given transistor of the cross-coupled transistor configuration can be utilized to achieve a desired drive strength for the given transistor.
In one embodiment, each of the first (401A), second (407A), third (403A), and fourth (405A) gate electrodes is defined to extend along any of a number of gate electrode tracks, such as described with regard to
In various implementations of the above-described embodiment, such as in the exemplary layouts of
In various implementations of the above-described embodiment, such as in the exemplary layout of
In various implementations of the above-described embodiment, such as in the exemplary layouts of
In one embodiment, the above-described gate electrode cross-coupled transistor configuration is used to implement a multiplexer having no transmission gates. This embodiment is illustrated in part with regard to
In the particular embodiments of
In one embodiment, the above-described gate electrode cross-coupled transistor configuration is used to implement a multiplexer having one transmission gate. This embodiment is illustrated in part with regard to
In the exemplary embodiment of
In one embodiment, the above-described gate electrode cross-coupled transistor configuration is used to implement a latch having no transmission gates. This embodiment is illustrated in part with regard to
In the exemplary embodiments of
In one embodiment, the above-described gate electrode cross-coupled transistor configuration is used to implement a latch having two transmission gates. This embodiment is illustrated in part with regard to
In one embodiment, the above-described gate electrode cross-coupled transistor configuration is used to implement a latch having one transmission gate. This embodiment is illustrated in part with regard to
In one embodiment, cross-coupled transistors devices are defined and connected to form part of an integrated circuit within a semiconductor chip (“chip” hereafter). The chip includes a number of levels within which different features are defined to form the integrated circuit and cross-coupled transistors therein. The chip includes a substrate within which a number of diffusion regions are formed. The chip also includes a gate level in which a number of gate electrodes are formed. The chip further includes a number of interconnect levels successively defined above the gate level. A dielectric material is used to electrically separate a given level from its vertically adjacent levels. A number of contact features are defined to extend vertically through the chip to connect gate electrode features and diffusion regions, respectively, to various interconnect level features. Also, a number of via features are defined to extend vertically through the chip to connect various interconnect level features.
The gate level of the various embodiments disclosed herein is defined as a linear gate level and includes a number of commonly oriented linear gate level features. Some of the linear gate level features form gate electrodes of transistor devices. Others of the linear gate level features can form conductive segments extending between two points within the gate level. Also, others of the linear gate level features may be non-functional with respect to integrated circuit operation. It should be understood that the each of the linear gate level features, regardless of function, is defined to extend across the gate level in a common direction and to be devoid of a substantial change in direction along its length. Therefore, each of the gate level features is defined to be parallel to each other when viewed from a perspective perpendicular to the gate level.
It should be understood that each of the linear gate electrode features, regardless of function, is defined such that no linear gate electrode feature along a given line of extent is configured to connect directly within the gate electrode level to another linear gate electrode feature defined along another parallel line of extent, without utilizing a non-gate electrode feature. Moreover, each connection between linear gate electrode features that are placed on different, yet parallel, lines of extent is made through one or more non-gate electrode features, which may be defined in higher interconnect level(s), i.e., through one or more interconnect level(s) above the gate electrode level, or by way of local interconnect features within the linear gate level. In one embodiment, the linear gate electrode features are placed according to a virtual grid or virtual grate. However, it should be understood that in other embodiments the linear gate electrode features, although oriented to have a common direction of extent, are placed without regard to a virtual grid or virtual grate.
Additionally, it should be understood that while each linear gate electrode feature is defined to be devoid of a substantial change in direction along its line of extent, each linear gate electrode feature may have one or more contact head portion(s) defined at any number of location(s) along its length. A contact head portion of a given linear gate electrode feature is defined as a segment of the linear gate electrode feature having a different width than a gate portion of the linear gate electrode feature, i.e., than a portion of the linear gate electrode feature that extends over a diffusion region, wherein “width” is defined across the substrate in a direction perpendicular to the line of extent of the given linear gate electrode feature. It should be appreciated that a contact head of linear gate electrode feature, when viewed from above, can be defined by essentially any rectangular layout shape, including a square and a rectangle. Also, depending on layout requirements and circuit design, a given contact head portion of a linear gate electrode feature may or may not have a gate contact defined thereabove.
In one embodiment, a substantial change in direction of a linear gate level feature exists when the width of the linear gate level feature at any point thereon changes by more than 50% of the nominal width of the linear gate level feature along its entire length. In another embodiment, a substantial change in direction of a linear gate level feature exists when the width of the linear gate level feature changes from any first location on the linear gate level feature to any second location on the linear gate level feature by more that 50% of the linear gate level feature width at the first location. Therefore, it should be appreciated that the use of non-linear-shaped gate level features is specifically avoided, wherein a non-linear-shaped gate level feature includes one or more significant bends within a plane of the gate level.
Each of the linear gate level features has a width defined perpendicular to its direction of extent across the gate level. In one embodiment, the various gate level features can be defined to have different widths. In another embodiment, the various gate level features can be defined to have the same width. Also, a center-to-center spacing between adjacent linear gate level features, as measured perpendicular to their direction of extent across the gate level, is referred to as gate pitch. In one embodiment, a uniform gate pitch is used. However, in another embodiment, the gate pitch can vary across the gate level. It should be understood that linear gate level feature width and pitch specifications can be established for a portion of the chip and can be different for separate portions of the chip, wherein the portion of the chip may be of any size and shape.
Various embodiments are disclosed herein for cross-coupled transistor layouts defined using the linear gate level as described above. Each cross-coupled transistor layout embodiment includes four cross-coupled transistors, wherein each of these four cross-coupled transistors is defined in part by a respective linear gate electrode feature, and wherein the linear gate electrode features of the cross-coupled transistors are oriented to extend across the layout in a parallel relationship to each other.
Also, in each cross-coupled transistor layout, each of the gate electrodes of the four cross-coupled transistors is associated with, i.e., electrically interfaced with, a respective diffusion region. The diffusion regions associated with the gate electrodes of the cross-coupled transistors are electrically connected to a common node. In various embodiments, connection of the cross-coupled transistor's diffusion regions to the common node can be made in many different ways.
For example, in one embodiment, two PMOS transistors of the cross-coupled transistors are disposed over a common p-type diffusion region, two NMOS transistors of the cross-coupled transistors are disposed over a common n-type diffusion region, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node.
In another embodiment, two PMOS transistors of the cross-coupled transistors are respectively disposed over physically separated p-type diffusion regions, two NMOS transistors of the cross-coupled transistors are disposed over a common n-type diffusion region, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node.
In another embodiment, two PMOS transistors of the cross-coupled transistors are disposed over a common p-type diffusion region, two NMOS transistors of the cross-coupled transistors are respectively disposed over physically separated n-type diffusion regions, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node.
In yet another embodiment, two PMOS transistors of the cross-coupled transistors are respectively disposed over physically separated p-type diffusion regions, two NMOS transistors of the cross-coupled transistors are respectively disposed over physically separated n-type diffusion regions, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node. FIGS. 158-166, 173-183, 185, and 187-191 illustrate various cross-coupled transistor layout embodiments in which two PMOS transistors of the cross-coupled transistors are respectively disposed over physically separated p-type diffusion regions, two NMOS transistors of the cross-coupled transistors are respectively disposed over physically separated n-type diffusion regions, and the p-type and n-type diffusion regions associated with the cross-coupled transistors are electrically connected to a common node.
It should be understood that the electrical connection of the various p-type and n-type diffusion regions associated with the cross-coupled transistors to the common node can be made using electrical conductors defined within any level of the chip and within any number of levels of the chip, by way of contact and/or vias, so as to accommodate essentially any cross-coupled layout configuration defined in accordance with the linear gate level restrictions. In one embodiment, electrical connection of the diffusion regions of the cross-coupled transistors to the common node can be made using one or more local interconnect conductors defined within the gate level itself. This embodiment may also combine local interconnect conductors with conductors in higher levels (above the linear gate level) by way of contacts and/or vias to make the electrical connection of the diffusion regions of the cross-coupled transistors to the common node. Additionally, in various embodiments, conductive paths used to electrically connect the diffusion regions of the cross-coupled transistors to the common node can be defined to traverse over essentially any area of the chip as required to accommodate a routing solution for the chip.
Also, it should be appreciated that because the n-type and p-type diffusion regions are physically separate, and because the p-type diffusion regions for the two PMOS transistors of the cross-coupled transistors can be physically separate, and because the n-type diffusion regions for the two NMOS transistors of the cross-coupled transistors can be physically separate, it is possible in various embodiments to have each of the four cross-coupled transistors disposed at arbitrary locations in the layout relative to each other. Therefore, unless necessitated by electrical performance or other layout influencing conditions, it is not required that the four cross-coupled transistors be located within a prescribed proximity to each other in the layout. Although, location of the cross-coupled transistors within a prescribed proximity to each other is not precluded, and may be desirable in certain circuit layouts.
In the exemplary embodiments disclosed herein, it should be understood that diffusion regions are not restricted in size. In other words, any given diffusion region can be sized in an arbitrary manner as required to satisfy electrical and/or layout requirements. Additionally, any given diffusion region can be shaped in an arbitrary manner as required to satisfy electrical and/or layout requirements. Additionally, as discussed above, in various embodiments a cross-coupled transistor configuration can utilize physically separate n-channel diffusion regions and/or physically separate p-channel diffusion regions. More specifically, the two N-MOS transistors of the cross-coupled transistor configuration can utilize physically separate n-channel diffusion regions, and/or the two PMOS transistors of the cross-coupled transistor configuration can utilize physically separate p-channel diffusion regions.
Also, it should be understood that the four transistors of the cross-coupled transistor configuration, as defined in accordance with the linear gate level, are not required to be the same size. In different embodiments, the four transistors of the cross-coupled transistor configuration can either vary in size (transistor width or transistor gate length) or have the same size, depending on the applicable electrical and/or layout requirements. Additionally, it should be understood that the four transistors of the cross-coupled transistor configuration are not required to be placed in close proximity to each, although they may be closely placed in some embodiments. More specifically, because connections between the transistors of the cross-coupled transistor configuration can be made by routing through as least one higher interconnect level, there is freedom in placement of the four transistors of the cross-coupled transistor configuration relative to each other. Although, it should be understood that a proximity of the four transistors of the cross-coupled transistor configuration may be governed in certain embodiments by electrical and/or layout optimization requirements.
The layout of
In the illustrated embodiment, to facilitate fabrication (e.g., lithographic resolution) of the interconnect level feature 101p, edges of the interconnect level feature 101p are substantially aligned with edges of neighboring interconnect level features 103p, 105p. However, it should be understood that other embodiments may have interconnect level features placed without regard to interconnect level feature alignment or an interconnect level grid. Additionally, in the illustrated embodiment, to facilitate fabrication (e.g., lithographic resolution), the gate contacts 118p and 120p are substantially aligned with neighboring contact features 122p and 124p, respectively, such that the gate contacts are placed according to a gate contact grid. However, it should be understood that other embodiments may have gate contacts placed without regard to gate contact alignment or gate contact grid.
The gate electrode of transistor 102p is connected to the gate electrode of transistor 104p through gate contact 126p, through interconnect level (e.g., Metal-1 level) feature 130p, through via 132p, through higher interconnect level (e.g., Metal-2 level) feature 134p, through via 136p, through interconnect level (e.g., Metal-1 level) feature 138p, and through gate contacts 128p. Although the illustrated embodiment of
It should be appreciated that the cross-coupled transistor layout of
In describing the cross-coupled layout embodiments illustrated in the various Figures herein, including that of
In one embodiment, the gate contacts 118p and 120p are adjusted vertically so as to be edge-aligned with the interconnect level feature 101p. However, such edge alignment between gate contact and interconnect level feature is not required in all embodiments. For example, so long as the gate contacts 118p and 120p are placed to enable substantial vertical alignment of the line end spacings 142p and 140p, the gate contacts 118p and 120p may not be edge-aligned with the interconnect level feature 101p, although they could be if so desired. The above-discussed flexibility with regard to gate contact placement in the direction of extent of the linear gate electrode features is further exemplified in the embodiments of
Also, because of the reduced size of the diffusion regions 110p and 112p for the keeping transistors 102p and 108p, the inner gate contacts 120p and 118p can be vertically aligned. Vertical alignment of the inner gate contacts 120p and 118p may facilitate contact fabrication, e.g., contact lithographic resolution. Also, vertical alignment of the inner gate contacts 120p and 118p allows for use of simple linear-shaped interconnect level feature 156p to connect the inner gate contacts 120p and 118p. Also, vertical alignment of the inner gate contacts 120p and 118p allows for increased vertical separation of the line end spacings 142p and 140p, which may facilitate creation of the line end spacings 142p and 140p when formed using separate cut shapes in a cut mask.
It should be appreciated that placement of gate contacts 126p, 128p, 120p, and 118p within three consecutive horizontal interconnect level tracks allows for an interconnect level track 414p to pass through the cross-coupled transistor layout. Also, it should be understood that the interconnect level features 402p, 424p, and 190p can be defined in the same interconnect level or in different interconnect levels. In one embodiment, each of the interconnect level features 402p, 424p, and 190p is defined in a first interconnect level (Metal-1 level).
In the example layout of
In the example layout of
In each
As previously mentioned,
For example,
It should be appreciated that the cross-coupled transistor layout defined using two gate contacts to connect one pair of complementary transistors and no gate contact to connect the other pair of complementary transistors can be implemented in as few as two gate electrode tracks, wherein a gate electrode track is defined as a virtual line extending across the gate level in a parallel relationship to its neighboring gate electrode tracks. These two gate electrode tracks can be located essentially anywhere in the layout with regard to each other. In other words, these two gate electrode tracks are not required to be located adjacent to each other, although such an arrangement is permitted, and in some embodiments may be desirable. The cross-coupled transistor layout embodiments of
For example,
As illustrated in
It should be appreciated that in the embodiments of
Based on the foregoing, a cross-coupled transistor layout using commonly oriented linear gate level features and transistors having physically separate gate electrodes can be defined according to either of the following embodiments, among others:
It should be understood that the cross-coupled transistor layouts implemented within the restricted gate level layout architecture as disclosed herein can be stored in a tangible form, such as in a digital format on a computer readable medium. Also, the invention described herein can be embodied as computer readable code on a computer readable medium. The computer readable medium is any data storage device that can store data which can thereafter be read by a computer system. Examples of the computer readable medium include hard drives, network attached storage (NAS), read-only memory, random-access memory, CD-ROMs, CD-Rs, CD-RWs, magnetic tapes, and other optical and non-optical data storage devices. The computer readable medium can also be distributed over a network of coupled computer systems so that the computer readable code is stored and executed in a distributed fashion.
Any of the operations described herein that form part of the invention are useful machine operations. The invention also relates to a device or an apparatus for performing these operations. The apparatus may be specially constructed for the required purpose, such as a special purpose computer. When defined as a special purpose computer, the computer can also perform other processing, program execution or routines that are not part of the special purpose, while still being capable of operating for the special purpose. Alternatively, the operations may be processed by a general purpose computer selectively activated or configured by one or more computer programs stored in the computer memory, cache, or obtained over a network. When data is obtained over a network the data maybe processed by other computers on the network, e.g., a cloud of computing resources.
The embodiments of the present invention can also be defined as a machine that transforms data from one state to another state. The data may represent an article, that can be represented as an electronic signal and electronically manipulate data. The transformed data can, in some cases, be visually depicted on a display, representing the physical object that results from the transformation of data. The transformed data can be saved to storage generally, or in particular formats that enable the construction or depiction of a physical and tangible object. In some embodiments, the manipulation can be performed by a processor. In such an example, the processor thus transforms the data from one thing to another. Still further, the methods can be processed by one or more machines or processors that can be connected over a network. Each machine can transform data from one state or thing to another, and can also process data, save data to storage, transmit data over a network, display the result, or communicate the result to another machine.
While this invention has been described in terms of several embodiments, it will be appreciated that those skilled in the art upon reading the preceding specifications and studying the drawings will realize various alterations, additions, permutations and equivalents thereof. Therefore, it is intended that the present invention includes all such alterations, additions, permutations, and equivalents as fall within the true spirit and scope of the invention.
This application is a continuation application under 35 U.S.C. 120 of prior U.S. application Ser. No. 13/741,305, filed Jan. 14, 2013, which is a continuation application under 35 U.S.C. 120 of prior U.S. application Ser. No. 12/753,798, filed Apr. 2, 2010, which is a continuation application under 35 U.S.C. 120 of prior U.S. application Ser. No. 12/402,465, filed Mar. 11, 2009, issued as U.S. Pat. No. 7,956,421, which claims priority under 35 U.S.C. 119(e) to each of 1) U.S. Provisional Patent Application No. 61/036,460, filed Mar. 13, 2008, 2) U.S. Provisional Patent Application No. 61/042,709, filed Apr. 4, 2008, 3) U.S. Provisional Patent Application No. 61/045,953, filed Apr. 17, 2008, and 4) U.S. Provisional Patent Application No. 61/050,136, filed May 2, 2008. The disclosure of each above-identified patent application is incorporated in its entirety herein by reference. This application is related to each application identified in the table below. The disclosure of each application identified in the table below is incorporated herein by reference in its entirety. AttorneyFilingDocket No.Application No.DateTELAP015AC112/753,711Apr. 2, 2010TELAP015AC212/753,727Apr. 2, 2010TELAP015AC312/753,733Apr. 2, 2010TELAP015AC412/753,740Apr. 2, 2010TELAP015AC512/753,753Apr. 2, 2010TELAP015AC612/753,758Apr. 2, 2010TELAP015AC712/753,766Apr. 2, 2010TELAP015AC812/753,776Apr. 2, 2010TELAP015AC912/753,789Apr. 2, 2010TELAP015AC1012/753,793Apr. 2, 2010TELAP015AC1112/753,795Apr. 2, 2010TELAP015AC1312/753,805Apr. 2, 2010TELAP015AC1412/753,810Apr. 2, 2010TELAP015AC1512/753,817Apr. 2, 2010TELAP015AC1612/754,050Apr. 5, 2010TELAP015AC1712/754,061Apr. 5, 2010TELAP015AC1812/754,078Apr. 5, 2010TELAP015AC1912/754,091Apr. 5, 2010TELAP015AC2012/754,103Apr. 5, 2010TELAP015AC2112/754,114Apr. 5, 2010TELAP015AC2212/754,129Apr. 5, 2010TELAP015AC2312/754,147Apr. 5, 2010TELAP015AC2412/754,168Apr. 5, 2010TELAP015AC2512/754,215Apr. 5, 2010TELAP015AC2612/754,233Apr. 5, 2010TELAP015AC2712/754,351Apr. 5, 2010TELAP015AC2812/754,384Apr. 5, 2010TELAP015AC2912/754,563Apr. 5, 2010TELAP015AC3012/754,566Apr. 5, 2010
Number | Name | Date | Kind |
---|---|---|---|
3521242 | Katz | Jul 1970 | A |
4069493 | Bobenrieth | Jan 1978 | A |
4197555 | Uehara et al. | Apr 1980 | A |
4417161 | Uya | Nov 1983 | A |
4424460 | Best | Jan 1984 | A |
4575648 | Lee | Mar 1986 | A |
4602270 | Finegold | Jul 1986 | A |
4613940 | Shenton et al. | Sep 1986 | A |
4627152 | DeHond | Dec 1986 | A |
4657628 | Holloway et al. | Apr 1987 | A |
4682202 | Tanizawa | Jul 1987 | A |
4745084 | Rowson et al. | May 1988 | A |
4780753 | Ohkura et al. | Oct 1988 | A |
4801986 | Chang et al. | Jan 1989 | A |
4804636 | Groover, III et al. | Feb 1989 | A |
4812688 | Chu et al. | Mar 1989 | A |
4884115 | Michel et al. | Nov 1989 | A |
4890148 | Ikeda | Dec 1989 | A |
4928160 | Crafts | May 1990 | A |
4975756 | Haken et al. | Dec 1990 | A |
5005068 | Ikeda | Apr 1991 | A |
5047979 | Leung | Sep 1991 | A |
5068603 | Mahoney | Nov 1991 | A |
5079614 | Khatakhotan | Jan 1992 | A |
5097422 | Corbin et al. | Mar 1992 | A |
5117277 | Yuyama et al. | May 1992 | A |
5121186 | Wong et al. | Jun 1992 | A |
5208765 | Turnbull | May 1993 | A |
5224057 | Igarashi et al. | Jun 1993 | A |
5242770 | Chen et al. | Sep 1993 | A |
5268319 | Harari | Dec 1993 | A |
5298774 | Ueda et al. | Mar 1994 | A |
5313426 | Sakuma et al. | May 1994 | A |
5338963 | Klaasen | Aug 1994 | A |
5351197 | Upton et al. | Sep 1994 | A |
5359226 | DeJong | Oct 1994 | A |
5365454 | Nakagawa et al. | Nov 1994 | A |
5367187 | Yuen | Nov 1994 | A |
5378649 | Huang | Jan 1995 | A |
5396128 | Dunning et al. | Mar 1995 | A |
5420447 | Waggoner | May 1995 | A |
5461577 | Shaw et al. | Oct 1995 | A |
5471403 | Fujimaga | Nov 1995 | A |
5486717 | Kokubo | Jan 1996 | A |
5497334 | Russell et al. | Mar 1996 | A |
5497337 | Ponnapalli et al. | Mar 1996 | A |
5526307 | Lin et al. | Jun 1996 | A |
5536955 | Ali | Jul 1996 | A |
5545904 | Orbach | Aug 1996 | A |
5581098 | Chang | Dec 1996 | A |
5581202 | Yano et al. | Dec 1996 | A |
5612893 | Hao et al. | Mar 1997 | A |
5636002 | Garofalo | Jun 1997 | A |
5656861 | Godinho et al. | Aug 1997 | A |
5682323 | Pasch et al. | Oct 1997 | A |
5684311 | Shaw | Nov 1997 | A |
5684733 | Wu et al. | Nov 1997 | A |
5698873 | Colwell | Dec 1997 | A |
5705301 | Garza et al. | Jan 1998 | A |
5723883 | Gheewalla | Mar 1998 | A |
5723908 | Fuchida et al. | Mar 1998 | A |
5740068 | Liebmann et al. | Apr 1998 | A |
5745374 | Matsumoto | Apr 1998 | A |
5754826 | Gamal | May 1998 | A |
5764533 | deDood | Jun 1998 | A |
5774367 | Reyes et al. | Jun 1998 | A |
5780909 | Hayashi | Jul 1998 | A |
5789776 | Lancaster et al. | Aug 1998 | A |
5790417 | Chao et al. | Aug 1998 | A |
5796128 | Tran et al. | Aug 1998 | A |
5796624 | Sridhar et al. | Aug 1998 | A |
5798298 | Yang et al. | Aug 1998 | A |
5814844 | Nagata et al. | Sep 1998 | A |
5825203 | Kusunoki et al. | Oct 1998 | A |
5834851 | Ikeda et al. | Nov 1998 | A |
5838594 | Kojima | Nov 1998 | A |
5841663 | Sharma et al. | Nov 1998 | A |
5847421 | Yamaguchi | Dec 1998 | A |
5850362 | Sakuma et al. | Dec 1998 | A |
5852562 | Shinomiya et al. | Dec 1998 | A |
5858580 | Wang et al. | Jan 1999 | A |
5898194 | Gheewala | Apr 1999 | A |
5900340 | Reich et al. | May 1999 | A |
5905287 | Hirata | May 1999 | A |
5908827 | Sirna | Jun 1999 | A |
5915199 | Hsu | Jun 1999 | A |
5917207 | Colwell et al. | Jun 1999 | A |
5920486 | Beahm et al. | Jul 1999 | A |
5923059 | Gheewala | Jul 1999 | A |
5923060 | Gheewala | Jul 1999 | A |
5929469 | Mimoto et al. | Jul 1999 | A |
5930163 | Hara et al. | Jul 1999 | A |
5935763 | Caterer et al. | Aug 1999 | A |
5949101 | Aritome | Sep 1999 | A |
5973369 | Hayashi | Oct 1999 | A |
5973507 | Yamazaki | Oct 1999 | A |
5977305 | Wigler et al. | Nov 1999 | A |
5977574 | Schmitt et al. | Nov 1999 | A |
5984510 | Guruswamy et al. | Nov 1999 | A |
5998879 | Iwaki et al. | Dec 1999 | A |
6009251 | Ho et al. | Dec 1999 | A |
6026223 | Scepanovic et al. | Feb 2000 | A |
6026225 | Iwasaki | Feb 2000 | A |
6037613 | Mariyama | Mar 2000 | A |
6037617 | Kumagai | Mar 2000 | A |
6040991 | Ellis-Monaghan | Mar 2000 | A |
6044007 | Capodieci | Mar 2000 | A |
6054872 | Fudanuki et al. | Apr 2000 | A |
6063132 | DeCamp et al. | May 2000 | A |
6077310 | Yamamoto et al. | Jun 2000 | A |
6080206 | Tadokoro et al. | Jun 2000 | A |
6084255 | Ueda | Jul 2000 | A |
6084437 | Sako | Jul 2000 | A |
6091845 | Pierrat et al. | Jul 2000 | A |
6099584 | Arnold et al. | Aug 2000 | A |
6100025 | Wigler et al. | Aug 2000 | A |
6114071 | Chen et al. | Sep 2000 | A |
6144227 | Sato | Nov 2000 | A |
6159839 | Jeng et al. | Dec 2000 | A |
6166415 | Sakemi et al. | Dec 2000 | A |
6166560 | Ogura et al. | Dec 2000 | A |
6174742 | Sudhindranath et al. | Jan 2001 | B1 |
6182272 | Andreev et al. | Jan 2001 | B1 |
6194104 | Hsu | Feb 2001 | B1 |
6194252 | Yamaguchi | Feb 2001 | B1 |
6194912 | Or-Bach | Feb 2001 | B1 |
6209123 | Maziasz et al. | Mar 2001 | B1 |
6230299 | McSherry et al. | May 2001 | B1 |
6232173 | Hsu et al. | May 2001 | B1 |
6240542 | Kapur | May 2001 | B1 |
6249902 | Igusa et al. | Jun 2001 | B1 |
6255600 | Schaper | Jul 2001 | B1 |
6255845 | Wong et al. | Jul 2001 | B1 |
6262487 | Igarashi et al. | Jul 2001 | B1 |
6269472 | Garza et al. | Jul 2001 | B1 |
6275973 | Wein | Aug 2001 | B1 |
6282696 | Garza et al. | Aug 2001 | B1 |
6291276 | Gonzalez | Sep 2001 | B1 |
6295224 | Chan | Sep 2001 | B1 |
6297668 | Schober | Oct 2001 | B1 |
6297674 | Kono et al. | Oct 2001 | B1 |
6303252 | Lin | Oct 2001 | B1 |
6323117 | Noguchi | Nov 2001 | B1 |
6331733 | Or-Bach et al. | Dec 2001 | B1 |
6331791 | Huang | Dec 2001 | B1 |
6335250 | Egi | Jan 2002 | B1 |
6338972 | Sudhindranath et al. | Jan 2002 | B1 |
6347062 | Nii et al. | Feb 2002 | B2 |
6356112 | Tran et al. | Mar 2002 | B1 |
6359804 | Kuriyama et al. | Mar 2002 | B2 |
6370679 | Chang et al. | Apr 2002 | B1 |
6378110 | Ho | Apr 2002 | B1 |
6380592 | Tooher et al. | Apr 2002 | B2 |
6388296 | Hsu | May 2002 | B1 |
6393601 | Tanaka et al. | May 2002 | B1 |
6399972 | Masuda et al. | Jun 2002 | B1 |
6400183 | Yamashita et al. | Jun 2002 | B2 |
6408427 | Cong et al. | Jun 2002 | B1 |
6415421 | Anderson et al. | Jul 2002 | B2 |
6416907 | Winder et al. | Jul 2002 | B1 |
6417549 | Oh | Jul 2002 | B1 |
6421820 | Mansfield et al. | Jul 2002 | B1 |
6425112 | Bula et al. | Jul 2002 | B1 |
6425117 | Pasch et al. | Jul 2002 | B1 |
6426269 | Haffner et al. | Jul 2002 | B1 |
6436805 | Trivedi | Aug 2002 | B1 |
6445049 | Iranmanesh | Sep 2002 | B1 |
6445065 | Gheewala et al. | Sep 2002 | B1 |
6462364 | Horiuchi | Oct 2002 | B1 |
6467072 | Yang et al. | Oct 2002 | B1 |
6469328 | Yanai et al. | Oct 2002 | B2 |
6470489 | Chang et al. | Oct 2002 | B1 |
6476493 | Or-Bach et al. | Nov 2002 | B2 |
6477695 | Gandhi | Nov 2002 | B1 |
6480032 | Aksamit | Nov 2002 | B1 |
6480989 | Chan et al. | Nov 2002 | B2 |
6492066 | Capodieci et al. | Dec 2002 | B1 |
6496965 | van Ginneken et al. | Dec 2002 | B1 |
6504186 | Kanamoto et al. | Jan 2003 | B2 |
6505327 | Lin | Jan 2003 | B2 |
6505328 | van Ginneken et al. | Jan 2003 | B1 |
6507941 | Leung et al. | Jan 2003 | B1 |
6509952 | Govil et al. | Jan 2003 | B1 |
6514849 | Hui et al. | Feb 2003 | B1 |
6516459 | Sahouria | Feb 2003 | B1 |
6523156 | Cirit | Feb 2003 | B2 |
6525350 | Kinoshita et al. | Feb 2003 | B1 |
6536028 | Katsioulas et al. | Mar 2003 | B1 |
6543039 | Watanabe | Apr 2003 | B1 |
6553544 | Tanaka et al. | Apr 2003 | B2 |
6553559 | Liebmann et al. | Apr 2003 | B2 |
6553562 | Capodieci et al. | Apr 2003 | B2 |
6566720 | Aldrich | May 2003 | B2 |
6570234 | Gardner | May 2003 | B1 |
6571140 | Wewalaarachchi | May 2003 | B1 |
6571379 | Takayama | May 2003 | B2 |
6574786 | Pohlenz et al. | Jun 2003 | B1 |
6578190 | Ferguson et al. | Jun 2003 | B2 |
6583041 | Capodieci | Jun 2003 | B1 |
6588005 | Kobayashi et al. | Jul 2003 | B1 |
6590289 | Shively | Jul 2003 | B2 |
6591207 | Naya et al. | Jul 2003 | B2 |
6609235 | Ramaswamy et al. | Aug 2003 | B2 |
6610607 | Armbrust et al. | Aug 2003 | B1 |
6617621 | Gheewala et al. | Sep 2003 | B1 |
6620561 | Winder et al. | Sep 2003 | B2 |
6621132 | Onishi et al. | Sep 2003 | B2 |
6624459 | Dachtera | Sep 2003 | B1 |
6627960 | Nii | Sep 2003 | B2 |
6632741 | Clevenger et al. | Oct 2003 | B1 |
6633182 | Pileggi et al. | Oct 2003 | B2 |
6635935 | Makino | Oct 2003 | B2 |
6642744 | Or-Bach et al. | Nov 2003 | B2 |
6643831 | Chang et al. | Nov 2003 | B2 |
6650014 | Kariyazaki | Nov 2003 | B2 |
6661041 | Keeth | Dec 2003 | B2 |
6662350 | Fried et al. | Dec 2003 | B2 |
6664587 | Guterman et al. | Dec 2003 | B2 |
6673638 | Bendik et al. | Jan 2004 | B1 |
6675361 | Crafts | Jan 2004 | B1 |
6677649 | Minami et al. | Jan 2004 | B2 |
6687895 | Zhang | Feb 2004 | B2 |
6690206 | Rikino et al. | Feb 2004 | B2 |
6691297 | Misaka et al. | Feb 2004 | B1 |
6700405 | Hirairi | Mar 2004 | B1 |
6703170 | Pindo | Mar 2004 | B1 |
6709880 | Yamamoto et al. | Mar 2004 | B2 |
6714903 | Chu et al. | Mar 2004 | B1 |
6732334 | Nakatsuka | May 2004 | B2 |
6732338 | Crouse et al. | May 2004 | B2 |
6732344 | Sakamoto et al. | May 2004 | B2 |
6734506 | Oyamatsu | May 2004 | B2 |
6737199 | Hsieh | May 2004 | B1 |
6737318 | Murata et al. | May 2004 | B2 |
6737347 | Houston et al. | May 2004 | B1 |
6745372 | Cote et al. | Jun 2004 | B2 |
6745380 | Bodendorf et al. | Jun 2004 | B2 |
6749972 | Yu | Jun 2004 | B2 |
6750555 | Satomi et al. | Jun 2004 | B2 |
6760269 | Nakase et al. | Jul 2004 | B2 |
6765245 | Bansal | Jul 2004 | B2 |
6777138 | Pierrat et al. | Aug 2004 | B2 |
6777146 | Samuels | Aug 2004 | B1 |
6787823 | Shibutani | Sep 2004 | B2 |
6789244 | Dasasathyan et al. | Sep 2004 | B1 |
6789246 | Mohan et al. | Sep 2004 | B1 |
6792591 | Shi et al. | Sep 2004 | B2 |
6792593 | Takashima et al. | Sep 2004 | B2 |
6794677 | Tamaki et al. | Sep 2004 | B2 |
6794914 | Sani et al. | Sep 2004 | B2 |
6795332 | Yamaoka et al. | Sep 2004 | B2 |
6795358 | Tanaka et al. | Sep 2004 | B2 |
6795952 | Stine et al. | Sep 2004 | B1 |
6795953 | Bakarian et al. | Sep 2004 | B2 |
6800883 | Furuya et al. | Oct 2004 | B2 |
6806180 | Cho | Oct 2004 | B2 |
6807663 | Cote et al. | Oct 2004 | B2 |
6809399 | Ikeda et al. | Oct 2004 | B2 |
6812574 | Tomita et al. | Nov 2004 | B2 |
6818389 | Fritze et al. | Nov 2004 | B2 |
6818929 | Tsutsumi et al. | Nov 2004 | B2 |
6819136 | Or-Bach | Nov 2004 | B2 |
6820248 | Gan | Nov 2004 | B1 |
6826738 | Cadouri | Nov 2004 | B2 |
6834375 | Stine et al. | Dec 2004 | B1 |
6835991 | Pell, III | Dec 2004 | B2 |
6841880 | Matsumoto et al. | Jan 2005 | B2 |
6850854 | Naya et al. | Feb 2005 | B2 |
6854096 | Eaton et al. | Feb 2005 | B2 |
6854100 | Chuang et al. | Feb 2005 | B1 |
6867073 | Enquist | Mar 2005 | B1 |
6871338 | Yamauchi | Mar 2005 | B2 |
6872990 | Kang | Mar 2005 | B1 |
6877144 | Rittman et al. | Apr 2005 | B1 |
6879511 | Dufourt | Apr 2005 | B2 |
6881523 | Smith | Apr 2005 | B2 |
6884712 | Yelehanka et al. | Apr 2005 | B2 |
6885045 | Hidaka | Apr 2005 | B2 |
6889370 | Kerzman et al. | May 2005 | B1 |
6897517 | Houdt et al. | May 2005 | B2 |
6897536 | Nomura et al. | May 2005 | B2 |
6898770 | Boluki et al. | May 2005 | B2 |
6904582 | Rittman et al. | Jun 2005 | B1 |
6918104 | Pierrat et al. | Jul 2005 | B2 |
6920079 | Shibayama | Jul 2005 | B2 |
6921982 | Joshi et al. | Jul 2005 | B2 |
6922354 | Ishikura et al. | Jul 2005 | B2 |
6924560 | Wang et al. | Aug 2005 | B2 |
6928635 | Pramanik et al. | Aug 2005 | B2 |
6931617 | Sanie et al. | Aug 2005 | B2 |
6953956 | Or-Bach et al. | Oct 2005 | B2 |
6954918 | Houston | Oct 2005 | B2 |
6957402 | Templeton et al. | Oct 2005 | B2 |
6968527 | Pierrat | Nov 2005 | B2 |
6974978 | Possley | Dec 2005 | B1 |
6977856 | Tanaka et al. | Dec 2005 | B2 |
6978436 | Cote et al. | Dec 2005 | B2 |
6978437 | Rittman et al. | Dec 2005 | B1 |
6980211 | Lin et al. | Dec 2005 | B2 |
6992394 | Park | Jan 2006 | B2 |
6992925 | Peng | Jan 2006 | B2 |
6993741 | Liebmann et al. | Jan 2006 | B2 |
6994939 | Ghandehari et al. | Feb 2006 | B1 |
6998722 | Madurawe | Feb 2006 | B2 |
7003068 | Kushner et al. | Feb 2006 | B2 |
7009862 | Higeta et al. | Mar 2006 | B2 |
7016214 | Kawamata | Mar 2006 | B2 |
7022559 | Barnak et al. | Apr 2006 | B2 |
7028285 | Cote et al. | Apr 2006 | B2 |
7041568 | Goldbach et al. | May 2006 | B2 |
7052972 | Sandhu et al. | May 2006 | B2 |
7053424 | Ono | May 2006 | B2 |
7063920 | Baba-Ali | Jun 2006 | B2 |
7064068 | Chou et al. | Jun 2006 | B2 |
7065731 | Jacques et al. | Jun 2006 | B2 |
7079413 | Tsukamoto et al. | Jul 2006 | B2 |
7079989 | Wimer | Jul 2006 | B2 |
7093208 | Williams et al. | Aug 2006 | B2 |
7093228 | Andreev et al. | Aug 2006 | B2 |
7103870 | Misaka et al. | Sep 2006 | B2 |
7105871 | Or-Bach et al. | Sep 2006 | B2 |
7107551 | de Dood et al. | Sep 2006 | B1 |
7115343 | Gordon et al. | Oct 2006 | B2 |
7115920 | Bernstein et al. | Oct 2006 | B2 |
7120882 | Kotani et al. | Oct 2006 | B2 |
7124386 | Smith et al. | Oct 2006 | B2 |
7126837 | Banachowicz et al. | Oct 2006 | B1 |
7132203 | Pierrat | Nov 2006 | B2 |
7137092 | Maeda | Nov 2006 | B2 |
7141853 | Campbell et al. | Nov 2006 | B2 |
7143380 | Anderson et al. | Nov 2006 | B1 |
7149999 | Kahng et al. | Dec 2006 | B2 |
7152215 | Smith et al. | Dec 2006 | B2 |
7155685 | Mori et al. | Dec 2006 | B2 |
7155689 | Pierrat et al. | Dec 2006 | B2 |
7159197 | Falbo et al. | Jan 2007 | B2 |
7174520 | White et al. | Feb 2007 | B2 |
7175940 | Laidig et al. | Feb 2007 | B2 |
7176508 | Joshi et al. | Feb 2007 | B2 |
7177215 | Tanaka et al. | Feb 2007 | B2 |
7183611 | Bhattacharyya | Feb 2007 | B2 |
7185294 | Zhang | Feb 2007 | B2 |
7188322 | Cohn et al. | Mar 2007 | B2 |
7194712 | Wu | Mar 2007 | B2 |
7200835 | Zhang et al. | Apr 2007 | B2 |
7202517 | Dixit et al. | Apr 2007 | B2 |
7205191 | Kobayashi | Apr 2007 | B2 |
7208794 | Hofmann et al. | Apr 2007 | B2 |
7214579 | Widdershoven et al. | May 2007 | B2 |
7219326 | Reed et al. | May 2007 | B2 |
7221031 | Ryoo et al. | May 2007 | B2 |
7225423 | Bhattacharya et al. | May 2007 | B2 |
7227183 | Donze et al. | Jun 2007 | B2 |
7228510 | Ono | Jun 2007 | B2 |
7231628 | Pack et al. | Jun 2007 | B2 |
7235424 | Chen et al. | Jun 2007 | B2 |
7243316 | White et al. | Jul 2007 | B2 |
7252909 | Shin et al. | Aug 2007 | B2 |
7257017 | Liaw | Aug 2007 | B2 |
7264990 | Rueckes et al. | Sep 2007 | B2 |
7266787 | Hughes et al. | Sep 2007 | B2 |
7269803 | Khakzadi et al. | Sep 2007 | B2 |
7278118 | Pileggi et al. | Oct 2007 | B2 |
7279727 | Ikoma et al. | Oct 2007 | B2 |
7287320 | Wang et al. | Oct 2007 | B2 |
7294534 | Iwaki | Nov 2007 | B2 |
7302651 | Allen et al. | Nov 2007 | B2 |
7308669 | Buehler et al. | Dec 2007 | B2 |
7312003 | Cote et al. | Dec 2007 | B2 |
7312144 | Cho | Dec 2007 | B2 |
7315994 | Aller et al. | Jan 2008 | B2 |
7327591 | Sadra et al. | Feb 2008 | B2 |
7329938 | Kinoshita | Feb 2008 | B2 |
7329953 | Tu | Feb 2008 | B2 |
7335966 | Ihme et al. | Feb 2008 | B2 |
7337421 | Kamat | Feb 2008 | B2 |
7338896 | Vanhaelemeersch et al. | Mar 2008 | B2 |
7345511 | Morgenshtein | Mar 2008 | B2 |
7345909 | Chang et al. | Mar 2008 | B2 |
7346885 | Semmler | Mar 2008 | B2 |
7350183 | Cui et al. | Mar 2008 | B2 |
7353492 | Gupta et al. | Apr 2008 | B2 |
7358131 | Bhattacharyya | Apr 2008 | B2 |
7360179 | Smith et al. | Apr 2008 | B2 |
7360198 | Rana et al. | Apr 2008 | B2 |
7366997 | Rahmat et al. | Apr 2008 | B1 |
7367008 | White et al. | Apr 2008 | B2 |
7376931 | Kokubun | May 2008 | B2 |
7383521 | Smith et al. | Jun 2008 | B2 |
7397260 | Chanda et al. | Jul 2008 | B2 |
7400627 | Wu et al. | Jul 2008 | B2 |
7402848 | Chang et al. | Jul 2008 | B2 |
7404154 | Venkatraman et al. | Jul 2008 | B1 |
7404173 | Wu et al. | Jul 2008 | B2 |
7411252 | Anderson et al. | Aug 2008 | B2 |
7421678 | Barnes et al. | Sep 2008 | B2 |
7423298 | Mariyama et al. | Sep 2008 | B2 |
7424694 | Ikeda | Sep 2008 | B2 |
7424695 | Tamura et al. | Sep 2008 | B2 |
7424696 | Vogel et al. | Sep 2008 | B2 |
7426710 | Zhang et al. | Sep 2008 | B2 |
7432562 | Bhattacharyya | Oct 2008 | B2 |
7434185 | Dooling et al. | Oct 2008 | B2 |
7441211 | Gupta et al. | Oct 2008 | B1 |
7442630 | Kelberlau et al. | Oct 2008 | B2 |
7444609 | Charlebois et al. | Oct 2008 | B2 |
7446352 | Becker et al. | Nov 2008 | B2 |
7449371 | Kemerling et al. | Nov 2008 | B2 |
7458045 | Cote et al. | Nov 2008 | B2 |
7459792 | Chen | Dec 2008 | B2 |
7465973 | Chang et al. | Dec 2008 | B2 |
7466607 | Hollis et al. | Dec 2008 | B2 |
7469396 | Hayashi et al. | Dec 2008 | B2 |
7480880 | Visweswariah et al. | Jan 2009 | B2 |
7480891 | Sezginer | Jan 2009 | B2 |
7484197 | Allen et al. | Jan 2009 | B2 |
7485934 | Liaw | Feb 2009 | B2 |
7487475 | Kriplani et al. | Feb 2009 | B1 |
7492013 | Correale, Jr. | Feb 2009 | B2 |
7500211 | Komaki | Mar 2009 | B2 |
7502275 | Nii et al. | Mar 2009 | B2 |
7503026 | Ichiryu et al. | Mar 2009 | B2 |
7504184 | Hung et al. | Mar 2009 | B2 |
7506300 | Sezginer et al. | Mar 2009 | B2 |
7508238 | Yamagami | Mar 2009 | B2 |
7509621 | Melvin, III | Mar 2009 | B2 |
7509622 | Sinha et al. | Mar 2009 | B2 |
7512017 | Chang | Mar 2009 | B2 |
7512921 | Shibuya | Mar 2009 | B2 |
7514355 | Katase | Apr 2009 | B2 |
7514959 | Or-Bach et al. | Apr 2009 | B2 |
7523429 | Kroyan et al. | Apr 2009 | B2 |
7527900 | Zhou et al. | May 2009 | B2 |
7535751 | Huang | May 2009 | B2 |
7538368 | Yano | May 2009 | B2 |
7543262 | Wang et al. | Jun 2009 | B2 |
7563701 | Chang et al. | Jul 2009 | B2 |
7564134 | Lee et al. | Jul 2009 | B2 |
7568174 | Sezginer et al. | Jul 2009 | B2 |
7569309 | Blatchford et al. | Aug 2009 | B2 |
7569310 | Wallace et al. | Aug 2009 | B2 |
7569894 | Suzuki | Aug 2009 | B2 |
7575973 | Mokhlesi et al. | Aug 2009 | B2 |
7592676 | Nakanishi | Sep 2009 | B2 |
7598541 | Okamoto et al. | Oct 2009 | B2 |
7598558 | Hashimoto et al. | Oct 2009 | B2 |
7614030 | Hsu | Nov 2009 | B2 |
7625790 | Yang | Dec 2009 | B2 |
7632610 | Wallace et al. | Dec 2009 | B2 |
7640522 | Gupta et al. | Dec 2009 | B2 |
7646651 | Lee et al. | Jan 2010 | B2 |
7647574 | Haruki | Jan 2010 | B2 |
7653884 | Furnish et al. | Jan 2010 | B2 |
7665051 | Ludwig et al. | Feb 2010 | B2 |
7700466 | Booth et al. | Apr 2010 | B2 |
7712056 | White et al. | May 2010 | B2 |
7739627 | Chew et al. | Jun 2010 | B2 |
7749662 | Matthew et al. | Jul 2010 | B2 |
7755110 | Gliese et al. | Jul 2010 | B2 |
7770144 | Dellinger | Aug 2010 | B2 |
7781847 | Yang | Aug 2010 | B2 |
7791109 | Wann et al. | Sep 2010 | B2 |
7802219 | Tomar et al. | Sep 2010 | B2 |
7816740 | Houston | Oct 2010 | B2 |
7825437 | Pillarisetty et al. | Nov 2010 | B2 |
7842975 | Becker et al. | Nov 2010 | B2 |
7873929 | Kahng et al. | Jan 2011 | B2 |
7882456 | Zach | Feb 2011 | B2 |
7888705 | Becker et al. | Feb 2011 | B2 |
7898040 | Nawaz | Mar 2011 | B2 |
7906801 | Becker et al. | Mar 2011 | B2 |
7908578 | Becker et al. | Mar 2011 | B2 |
7910958 | Becker et al. | Mar 2011 | B2 |
7910959 | Becker et al. | Mar 2011 | B2 |
7917877 | Singh et al. | Mar 2011 | B2 |
7917879 | Becker et al. | Mar 2011 | B2 |
7923266 | Thijs et al. | Apr 2011 | B2 |
7923337 | Chang et al. | Apr 2011 | B2 |
7923757 | Becker et al. | Apr 2011 | B2 |
7926001 | Pierrat | Apr 2011 | B2 |
7932544 | Becker et al. | Apr 2011 | B2 |
7932545 | Becker et al. | Apr 2011 | B2 |
7934184 | Zhang | Apr 2011 | B2 |
7939443 | Fox et al. | May 2011 | B2 |
7943966 | Becker et al. | May 2011 | B2 |
7943967 | Becker et al. | May 2011 | B2 |
7948012 | Becker et al. | May 2011 | B2 |
7948013 | Becker et al. | May 2011 | B2 |
7952119 | Becker et al. | May 2011 | B2 |
7956421 | Becker | Jun 2011 | B2 |
7958465 | Lu et al. | Jun 2011 | B2 |
7962867 | White et al. | Jun 2011 | B2 |
7962878 | Melzner | Jun 2011 | B2 |
7962879 | Tang et al. | Jun 2011 | B2 |
7964267 | Lyons et al. | Jun 2011 | B1 |
7971160 | Osawa et al. | Jun 2011 | B2 |
7989847 | Becker et al. | Aug 2011 | B2 |
7989848 | Becker et al. | Aug 2011 | B2 |
7992122 | Burstein et al. | Aug 2011 | B1 |
7994583 | Inaba | Aug 2011 | B2 |
8004042 | Yang et al. | Aug 2011 | B2 |
8022441 | Becker et al. | Sep 2011 | B2 |
8030689 | Becker et al. | Oct 2011 | B2 |
8035133 | Becker et al. | Oct 2011 | B2 |
8044437 | Venkatraman et al. | Oct 2011 | B1 |
8058671 | Becker et al. | Nov 2011 | B2 |
8058690 | Chang | Nov 2011 | B2 |
8072003 | Becker et al. | Dec 2011 | B2 |
8072053 | Li | Dec 2011 | B2 |
8088679 | Becker et al. | Jan 2012 | B2 |
8088680 | Becker et al. | Jan 2012 | B2 |
8088681 | Becker et al. | Jan 2012 | B2 |
8088682 | Becker et al. | Jan 2012 | B2 |
8089098 | Becker et al. | Jan 2012 | B2 |
8089099 | Becker et al. | Jan 2012 | B2 |
8089100 | Becker et al. | Jan 2012 | B2 |
8089101 | Becker et al. | Jan 2012 | B2 |
8089102 | Becker et al. | Jan 2012 | B2 |
8089103 | Becker et al. | Jan 2012 | B2 |
8089104 | Becker et al. | Jan 2012 | B2 |
8101975 | Becker et al. | Jan 2012 | B2 |
8110854 | Becker et al. | Feb 2012 | B2 |
8129750 | Becker et al. | Mar 2012 | B2 |
8129751 | Becker et al. | Mar 2012 | B2 |
8129752 | Becker et al. | Mar 2012 | B2 |
8129754 | Becker et al. | Mar 2012 | B2 |
8129755 | Becker et al. | Mar 2012 | B2 |
8129756 | Becker et al. | Mar 2012 | B2 |
8129757 | Becker et al. | Mar 2012 | B2 |
8129819 | Becker et al. | Mar 2012 | B2 |
8130529 | Tanaka | Mar 2012 | B2 |
8134183 | Becker et al. | Mar 2012 | B2 |
8134184 | Becker et al. | Mar 2012 | B2 |
8134185 | Becker et al. | Mar 2012 | B2 |
8134186 | Becker et al. | Mar 2012 | B2 |
8138525 | Becker et al. | Mar 2012 | B2 |
8161427 | Morgenshtein et al. | Apr 2012 | B2 |
8178905 | Toubou | May 2012 | B2 |
8178909 | Venkatraman et al. | May 2012 | B2 |
8198656 | Becker et al. | Jun 2012 | B2 |
8207053 | Becker et al. | Jun 2012 | B2 |
8214778 | Quandt et al. | Jul 2012 | B2 |
8217428 | Becker et al. | Jul 2012 | B2 |
8225239 | Reed et al. | Jul 2012 | B2 |
8225261 | Hong et al. | Jul 2012 | B2 |
8245180 | Smayling et al. | Aug 2012 | B2 |
8247846 | Becker | Aug 2012 | B2 |
8253172 | Becker et al. | Aug 2012 | B2 |
8253173 | Becker et al. | Aug 2012 | B2 |
8258547 | Becker et al. | Sep 2012 | B2 |
8258548 | Becker et al. | Sep 2012 | B2 |
8258549 | Becker et al. | Sep 2012 | B2 |
8258550 | Becker et al. | Sep 2012 | B2 |
8258551 | Becker et al. | Sep 2012 | B2 |
8258552 | Becker et al. | Sep 2012 | B2 |
8258581 | Becker et al. | Sep 2012 | B2 |
8264007 | Becker et al. | Sep 2012 | B2 |
8264008 | Becker et al. | Sep 2012 | B2 |
8264009 | Becker et al. | Sep 2012 | B2 |
8264044 | Becker | Sep 2012 | B2 |
8274099 | Becker | Sep 2012 | B2 |
8283701 | Becker et al. | Oct 2012 | B2 |
8294212 | Wang et al. | Oct 2012 | B2 |
8316327 | Herold | Nov 2012 | B2 |
8356268 | Becker et al. | Jan 2013 | B2 |
8363455 | Rennie | Jan 2013 | B2 |
8378407 | Audzeyeu et al. | Feb 2013 | B2 |
8395224 | Becker et al. | Mar 2013 | B2 |
8402397 | Robles et al. | Mar 2013 | B2 |
8405163 | Becker et al. | Mar 2013 | B2 |
8422274 | Tomita et al. | Apr 2013 | B2 |
8436400 | Becker et al. | May 2013 | B2 |
8453094 | Kornachuk et al. | May 2013 | B2 |
8575706 | Becker et al. | Nov 2013 | B2 |
8667443 | Smayling et al. | Mar 2014 | B2 |
8701071 | Kornachuk et al. | Apr 2014 | B2 |
8735995 | Becker et al. | May 2014 | B2 |
8756551 | Becker et al. | Jun 2014 | B2 |
8836045 | Becker et al. | Sep 2014 | B2 |
8839162 | Amundson et al. | Sep 2014 | B2 |
8839175 | Smayling et al. | Sep 2014 | B2 |
8847329 | Becker et al. | Sep 2014 | B2 |
8863063 | Becker et al. | Oct 2014 | B2 |
9006841 | Kumar | Apr 2015 | B2 |
9035359 | Becker | May 2015 | B2 |
9202779 | Kornachuk et al. | Dec 2015 | B2 |
9269423 | Sever | Feb 2016 | B2 |
9336344 | Smayling | May 2016 | B2 |
9425272 | Becker | Aug 2016 | B2 |
9425273 | Becker | Aug 2016 | B2 |
9443947 | Becker | Sep 2016 | B2 |
9613844 | Or-Bach | Apr 2017 | B2 |
9633987 | Smayling | Apr 2017 | B2 |
20010049813 | Chan et al. | Dec 2001 | A1 |
20020003270 | Makino | Jan 2002 | A1 |
20020015899 | Chen et al. | Feb 2002 | A1 |
20020024049 | Nii | Feb 2002 | A1 |
20020030510 | Kono et al. | Mar 2002 | A1 |
20020063582 | Rikino | May 2002 | A1 |
20020068423 | Park et al. | Jun 2002 | A1 |
20020079516 | Lim | Jun 2002 | A1 |
20020079927 | Katoh et al. | Jun 2002 | A1 |
20020149392 | Cho | Oct 2002 | A1 |
20020166107 | Capodieci et al. | Nov 2002 | A1 |
20020194575 | Allen et al. | Dec 2002 | A1 |
20030042930 | Pileggi et al. | Mar 2003 | A1 |
20030046653 | Liu | Mar 2003 | A1 |
20030061592 | Agrawal et al. | Mar 2003 | A1 |
20030088839 | Watanabe | May 2003 | A1 |
20030088842 | Cirit | May 2003 | A1 |
20030090924 | Nii | May 2003 | A1 |
20030103176 | Abe et al. | Jun 2003 | A1 |
20030106037 | Moniwa et al. | Jun 2003 | A1 |
20030117168 | Uneme et al. | Jun 2003 | A1 |
20030124847 | Houston et al. | Jul 2003 | A1 |
20030125917 | Rich et al. | Jul 2003 | A1 |
20030126569 | Rich et al. | Jul 2003 | A1 |
20030128565 | Tomita | Jul 2003 | A1 |
20030145288 | Wang et al. | Jul 2003 | A1 |
20030145299 | Fried et al. | Jul 2003 | A1 |
20030177465 | MacLean et al. | Sep 2003 | A1 |
20030185076 | Worley | Oct 2003 | A1 |
20030203287 | Miyagawa | Oct 2003 | A1 |
20030229868 | White et al. | Dec 2003 | A1 |
20030229875 | Smith et al. | Dec 2003 | A1 |
20040029372 | Jang et al. | Feb 2004 | A1 |
20040049754 | Liao et al. | Mar 2004 | A1 |
20040063038 | Shin et al. | Apr 2004 | A1 |
20040115539 | Broeke et al. | Jun 2004 | A1 |
20040139412 | Ito et al. | Jul 2004 | A1 |
20040145028 | Matsumoto et al. | Jul 2004 | A1 |
20040153979 | Chang | Aug 2004 | A1 |
20040161878 | Or-Bach et al. | Aug 2004 | A1 |
20040164360 | Nishida et al. | Aug 2004 | A1 |
20040169201 | Hidaka | Sep 2004 | A1 |
20040194050 | Hwang et al. | Sep 2004 | A1 |
20040196705 | Ishikura et al. | Oct 2004 | A1 |
20040229135 | Wang et al. | Nov 2004 | A1 |
20040232444 | Shimizu | Nov 2004 | A1 |
20040243966 | Dellinger | Dec 2004 | A1 |
20040262640 | Suga | Dec 2004 | A1 |
20050001271 | Kobayashi | Jan 2005 | A1 |
20050009312 | Butt et al. | Jan 2005 | A1 |
20050009344 | Hwang et al. | Jan 2005 | A1 |
20050012157 | Cho et al. | Jan 2005 | A1 |
20050044522 | Maeda | Feb 2005 | A1 |
20050055828 | Wang et al. | Mar 2005 | A1 |
20050076320 | Maeda | Apr 2005 | A1 |
20050087806 | Hokazono | Apr 2005 | A1 |
20050093147 | Tu | May 2005 | A1 |
20050101112 | Rueckes et al. | May 2005 | A1 |
20050110130 | Kitabayashi et al. | May 2005 | A1 |
20050135134 | Yen | Jun 2005 | A1 |
20050136340 | Baselmans et al. | Jun 2005 | A1 |
20050138598 | Kokubun | Jun 2005 | A1 |
20050156200 | Kinoshita | Jul 2005 | A1 |
20050185325 | Hur | Aug 2005 | A1 |
20050189604 | Gupta et al. | Sep 2005 | A1 |
20050189614 | Ihme et al. | Sep 2005 | A1 |
20050196685 | Wang et al. | Sep 2005 | A1 |
20050205894 | Sumikawa et al. | Sep 2005 | A1 |
20050212018 | Schoellkopf et al. | Sep 2005 | A1 |
20050224982 | Kemerling et al. | Oct 2005 | A1 |
20050229130 | Wu et al. | Oct 2005 | A1 |
20050251771 | Robles | Nov 2005 | A1 |
20050264320 | Chung et al. | Dec 2005 | A1 |
20050264324 | Nakazato | Dec 2005 | A1 |
20050266621 | Kim | Dec 2005 | A1 |
20050268256 | Tsai et al. | Dec 2005 | A1 |
20050274983 | Hayashi et al. | Dec 2005 | A1 |
20050278673 | Kawachi | Dec 2005 | A1 |
20050280031 | Yano | Dec 2005 | A1 |
20060036976 | Cohn | Feb 2006 | A1 |
20060038234 | Liaw | Feb 2006 | A1 |
20060063334 | Donze et al. | Mar 2006 | A1 |
20060070018 | Semmler | Mar 2006 | A1 |
20060084261 | Iwaki | Apr 2006 | A1 |
20060091550 | Shimazaki et al. | May 2006 | A1 |
20060095872 | McElvain | May 2006 | A1 |
20060101370 | Cui et al. | May 2006 | A1 |
20060112355 | Pileggi et al. | May 2006 | A1 |
20060113533 | Tamaki et al. | Jun 2006 | A1 |
20060113567 | Ohmori et al. | Jun 2006 | A1 |
20060120143 | Liaw | Jun 2006 | A1 |
20060121715 | Chang et al. | Jun 2006 | A1 |
20060123376 | Vogel et al. | Jun 2006 | A1 |
20060125024 | Ishigaki | Jun 2006 | A1 |
20060131609 | Kinoshita et al. | Jun 2006 | A1 |
20060136848 | Ichiryu et al. | Jun 2006 | A1 |
20060146638 | Chang et al. | Jul 2006 | A1 |
20060151810 | Ohshige | Jul 2006 | A1 |
20060158270 | Gibet et al. | Jul 2006 | A1 |
20060170108 | Hiroi | Aug 2006 | A1 |
20060177744 | Bodendorf et al. | Aug 2006 | A1 |
20060181310 | Rhee | Aug 2006 | A1 |
20060195809 | Cohn et al. | Aug 2006 | A1 |
20060195810 | Morton | Aug 2006 | A1 |
20060197557 | Chung | Sep 2006 | A1 |
20060203530 | Venkatraman | Sep 2006 | A1 |
20060206854 | Barnes et al. | Sep 2006 | A1 |
20060223302 | Chang et al. | Oct 2006 | A1 |
20060248495 | Sezginer | Nov 2006 | A1 |
20060261417 | Suzuki | Nov 2006 | A1 |
20060277521 | Chen | Dec 2006 | A1 |
20060289861 | Correale, Jr. | Dec 2006 | A1 |
20070001304 | Liaw | Jan 2007 | A1 |
20070002617 | Houston | Jan 2007 | A1 |
20070004147 | Toubou | Jan 2007 | A1 |
20070007574 | Ohsawa | Jan 2007 | A1 |
20070038973 | Li et al. | Feb 2007 | A1 |
20070074145 | Tanaka | Mar 2007 | A1 |
20070094634 | Seizginer et al. | Apr 2007 | A1 |
20070101305 | Smith et al. | May 2007 | A1 |
20070105023 | Zhou et al. | May 2007 | A1 |
20070106971 | Lien et al. | May 2007 | A1 |
20070113216 | Zhang | May 2007 | A1 |
20070138510 | Uchida | Jun 2007 | A1 |
20070172770 | Witters et al. | Jul 2007 | A1 |
20070186196 | Tanaka | Aug 2007 | A1 |
20070196958 | Bhattacharya et al. | Aug 2007 | A1 |
20070204253 | Murakawa | Aug 2007 | A1 |
20070209029 | Ivonin et al. | Sep 2007 | A1 |
20070210391 | Becker et al. | Sep 2007 | A1 |
20070234252 | Visweswariah et al. | Oct 2007 | A1 |
20070234262 | Uedi et al. | Oct 2007 | A1 |
20070241810 | Onda | Oct 2007 | A1 |
20070251771 | Huang | Nov 2007 | A1 |
20070256039 | White | Nov 2007 | A1 |
20070257277 | Takeda et al. | Nov 2007 | A1 |
20070264758 | Correale | Nov 2007 | A1 |
20070274140 | Joshi et al. | Nov 2007 | A1 |
20070277129 | Allen et al. | Nov 2007 | A1 |
20070288882 | Kniffin et al. | Dec 2007 | A1 |
20070290361 | Chen | Dec 2007 | A1 |
20070294652 | Bowen | Dec 2007 | A1 |
20070297249 | Chang et al. | Dec 2007 | A1 |
20070300202 | Uchida | Dec 2007 | A1 |
20080001176 | Gopalakrishnan | Jan 2008 | A1 |
20080005712 | Charlebois et al. | Jan 2008 | A1 |
20080021689 | Yamashita et al. | Jan 2008 | A1 |
20080022247 | Kojima et al. | Jan 2008 | A1 |
20080046846 | Chew et al. | Feb 2008 | A1 |
20080073717 | Ha | Mar 2008 | A1 |
20080081472 | Tanaka | Apr 2008 | A1 |
20080082952 | O'Brien | Apr 2008 | A1 |
20080086712 | Fujimoto | Apr 2008 | A1 |
20080097641 | Miyashita et al. | Apr 2008 | A1 |
20080098334 | Pileggi et al. | Apr 2008 | A1 |
20080098341 | Kobayashi et al. | Apr 2008 | A1 |
20080099795 | Bernstein et al. | May 2008 | A1 |
20080127000 | Majumder et al. | May 2008 | A1 |
20080127029 | Graur et al. | May 2008 | A1 |
20080134128 | Blatchford et al. | Jun 2008 | A1 |
20080144361 | Wong | Jun 2008 | A1 |
20080148216 | Chan et al. | Jun 2008 | A1 |
20080163141 | Scheffer et al. | Jul 2008 | A1 |
20080168406 | Rahmat et al. | Jul 2008 | A1 |
20080169868 | Toubou | Jul 2008 | A1 |
20080211028 | Suzuki | Sep 2008 | A1 |
20080216207 | Tsai | Sep 2008 | A1 |
20080244494 | McCullen | Oct 2008 | A1 |
20080251779 | Kakoschke et al. | Oct 2008 | A1 |
20080265290 | Nielsen et al. | Oct 2008 | A1 |
20080276105 | Hoberman et al. | Nov 2008 | A1 |
20080283910 | Dreeskornfeld et al. | Nov 2008 | A1 |
20080285331 | Torok et al. | Nov 2008 | A1 |
20080308848 | Inaba | Dec 2008 | A1 |
20080308880 | Inaba | Dec 2008 | A1 |
20080315258 | Masuda et al. | Dec 2008 | A1 |
20090014811 | Becker et al. | Jan 2009 | A1 |
20090024974 | Yamada | Jan 2009 | A1 |
20090031261 | Smith et al. | Jan 2009 | A1 |
20090032898 | Becker et al. | Feb 2009 | A1 |
20090032967 | Becker et al. | Feb 2009 | A1 |
20090037864 | Becker et al. | Feb 2009 | A1 |
20090044163 | Wang | Feb 2009 | A1 |
20090057780 | Wong et al. | Mar 2009 | A1 |
20090075485 | Ban et al. | Mar 2009 | A1 |
20090077524 | Nagamura et al. | Mar 2009 | A1 |
20090085067 | Hayashi et al. | Apr 2009 | A1 |
20090087991 | Yatsuda et al. | Apr 2009 | A1 |
20090101940 | Barrows et al. | Apr 2009 | A1 |
20090106714 | Culp et al. | Apr 2009 | A1 |
20090155990 | Yanagidaira et al. | Jun 2009 | A1 |
20090181314 | Shyu et al. | Jul 2009 | A1 |
20090187871 | Cork | Jul 2009 | A1 |
20090206443 | Juengling | Aug 2009 | A1 |
20090224408 | Fox | Sep 2009 | A1 |
20090228853 | Hong et al. | Sep 2009 | A1 |
20090228857 | Kornachuk et al. | Sep 2009 | A1 |
20090235215 | Lavin | Sep 2009 | A1 |
20090273100 | Aton et al. | Nov 2009 | A1 |
20090280582 | Thijs et al. | Nov 2009 | A1 |
20090283921 | Wang | Nov 2009 | A1 |
20090302372 | Chang et al. | Dec 2009 | A1 |
20090319977 | Saxena et al. | Dec 2009 | A1 |
20100001321 | Becker et al. | Jan 2010 | A1 |
20100006897 | Becker et al. | Jan 2010 | A1 |
20100006898 | Becker et al. | Jan 2010 | A1 |
20100006899 | Becker et al. | Jan 2010 | A1 |
20100006900 | Becker et al. | Jan 2010 | A1 |
20100006901 | Becker et al. | Jan 2010 | A1 |
20100006902 | Becker et al. | Jan 2010 | A1 |
20100006903 | Becker et al. | Jan 2010 | A1 |
20100006947 | Becker et al. | Jan 2010 | A1 |
20100006948 | Becker et al. | Jan 2010 | A1 |
20100006950 | Becker et al. | Jan 2010 | A1 |
20100006951 | Becker et al. | Jan 2010 | A1 |
20100006986 | Becker et al. | Jan 2010 | A1 |
20100011327 | Becker et al. | Jan 2010 | A1 |
20100011328 | Becker et al. | Jan 2010 | A1 |
20100011329 | Becker et al. | Jan 2010 | A1 |
20100011330 | Becker et al. | Jan 2010 | A1 |
20100011331 | Becker et al. | Jan 2010 | A1 |
20100011332 | Becker et al. | Jan 2010 | A1 |
20100011333 | Becker et al. | Jan 2010 | A1 |
20100012981 | Becker et al. | Jan 2010 | A1 |
20100012982 | Becker et al. | Jan 2010 | A1 |
20100012983 | Becker et al. | Jan 2010 | A1 |
20100012984 | Becker et al. | Jan 2010 | A1 |
20100012985 | Becker et al. | Jan 2010 | A1 |
20100012986 | Becker et al. | Jan 2010 | A1 |
20100017766 | Becker et al. | Jan 2010 | A1 |
20100017767 | Becker et al. | Jan 2010 | A1 |
20100017768 | Becker et al. | Jan 2010 | A1 |
20100017769 | Becker et al. | Jan 2010 | A1 |
20100017770 | Becker et al. | Jan 2010 | A1 |
20100017771 | Becker et al. | Jan 2010 | A1 |
20100017772 | Becker et al. | Jan 2010 | A1 |
20100019280 | Becker et al. | Jan 2010 | A1 |
20100019281 | Becker et al. | Jan 2010 | A1 |
20100019282 | Becker et al. | Jan 2010 | A1 |
20100019283 | Becker et al. | Jan 2010 | A1 |
20100019284 | Becker et al. | Jan 2010 | A1 |
20100019285 | Becker et al. | Jan 2010 | A1 |
20100019286 | Becker et al. | Jan 2010 | A1 |
20100019287 | Becker et al. | Jan 2010 | A1 |
20100019288 | Becker et al. | Jan 2010 | A1 |
20100019308 | Chan et al. | Jan 2010 | A1 |
20100023906 | Becker et al. | Jan 2010 | A1 |
20100023907 | Becker et al. | Jan 2010 | A1 |
20100023908 | Becker et al. | Jan 2010 | A1 |
20100023911 | Becker et al. | Jan 2010 | A1 |
20100025731 | Becker et al. | Feb 2010 | A1 |
20100025732 | Becker et al. | Feb 2010 | A1 |
20100025733 | Becker et al. | Feb 2010 | A1 |
20100025734 | Becker et al. | Feb 2010 | A1 |
20100025735 | Becker et al. | Feb 2010 | A1 |
20100025736 | Becker et al. | Feb 2010 | A1 |
20100032722 | Becker et al. | Feb 2010 | A1 |
20100032723 | Becker et al. | Feb 2010 | A1 |
20100032724 | Becker et al. | Feb 2010 | A1 |
20100032726 | Becker et al. | Feb 2010 | A1 |
20100037194 | Becker et al. | Feb 2010 | A1 |
20100037195 | Becker et al. | Feb 2010 | A1 |
20100096671 | Becker et al. | Apr 2010 | A1 |
20100115484 | Frederick | May 2010 | A1 |
20100203689 | Bernstein et al. | Aug 2010 | A1 |
20100224943 | Kawasaki | Sep 2010 | A1 |
20100229140 | Strolenberg et al. | Sep 2010 | A1 |
20100232212 | Anderson et al. | Sep 2010 | A1 |
20100252865 | Van Der Zanden | Oct 2010 | A1 |
20100252896 | Smayling | Oct 2010 | A1 |
20100264468 | Xu | Oct 2010 | A1 |
20100270681 | Bird et al. | Oct 2010 | A1 |
20100287518 | Becker | Nov 2010 | A1 |
20100301482 | Schultz et al. | Dec 2010 | A1 |
20110014786 | Sezginer | Jan 2011 | A1 |
20110016909 | Mirza et al. | Jan 2011 | A1 |
20110108890 | Becker et al. | May 2011 | A1 |
20110108891 | Becker et al. | May 2011 | A1 |
20110154281 | Zach | Jun 2011 | A1 |
20110207298 | Anderson et al. | Aug 2011 | A1 |
20110260253 | Inaba | Oct 2011 | A1 |
20110298025 | Haensch et al. | Dec 2011 | A1 |
20110317477 | Liaw | Dec 2011 | A1 |
20120012932 | Perng et al. | Jan 2012 | A1 |
20120118854 | Smayling | May 2012 | A1 |
20120131528 | Chen | May 2012 | A1 |
20120273841 | Quandt et al. | Nov 2012 | A1 |
20120299065 | Shimizu | Nov 2012 | A1 |
20130065389 | Kagawa | Mar 2013 | A1 |
20130097574 | Balabanov et al. | Apr 2013 | A1 |
20130162293 | Lija | Jun 2013 | A1 |
20130200465 | Becker et al. | Aug 2013 | A1 |
20130200469 | Becker et al. | Aug 2013 | A1 |
20130207198 | Becker et al. | Aug 2013 | A1 |
20130207199 | Becker et al. | Aug 2013 | A1 |
20130254732 | Kornachuk et al. | Sep 2013 | A1 |
20140197543 | Kornachuk et al. | Jul 2014 | A1 |
20150249041 | Becker et al. | Sep 2015 | A1 |
20150270218 | Becker et al. | Sep 2015 | A1 |
20160079159 | Kornachuk et al. | Mar 2016 | A1 |
Number | Date | Country |
---|---|---|
0102644 | Jul 1989 | EP |
0788166 | Aug 1997 | EP |
1394858 | Mar 2004 | EP |
1670062 | Jun 2006 | EP |
1833091 | Aug 2007 | EP |
1730777 | Sep 2007 | EP |
2251901 | Nov 2010 | EP |
2860920 | Apr 2005 | FR |
58-182242 | Oct 1983 | JP |
58-215827 | Dec 1983 | JP |
61-182244 | Aug 1986 | JP |
S61-202451 | Sep 1986 | JP |
S62-047148 | Feb 1987 | JP |
563-310136 | Dec 1988 | JP |
H01284115 | Nov 1989 | JP |
03-165061 | Jul 1991 | JP |
H05152937 | Jun 1993 | JP |
H05211437 | Aug 1993 | JP |
H05218362 | Aug 1993 | JP |
H07-153927 | Jun 1995 | JP |
2684980 | Jul 1995 | JP |
1995-302706 | Nov 1995 | JP |
09-282349 | Oct 1997 | JP |
1997-09289251 | Nov 1997 | JP |
10-116911 | May 1998 | JP |
1999-045948 | Feb 1999 | JP |
2000-164811 | Jun 2000 | JP |
2001-068558 | Mar 2001 | JP |
2001-168707 | Jun 2001 | JP |
2001-306641 | Nov 2001 | JP |
2002-026125 | Jan 2002 | JP |
2002-026296 | Jan 2002 | JP |
2002-184870 | Jun 2002 | JP |
2001-056463 | Sep 2002 | JP |
2002-258463 | Sep 2002 | JP |
2002-289703 | Oct 2002 | JP |
2001-272228 | Mar 2003 | JP |
2003-100872 | Apr 2003 | JP |
2003-264231 | Sep 2003 | JP |
2004-013920 | Jan 2004 | JP |
2004-200300 | Jul 2004 | JP |
2004-241529 | Aug 2004 | JP |
2004-342757 | Dec 2004 | JP |
2005-020008 | Jan 2005 | JP |
2003-359375 | May 2005 | JP |
2005-123537 | May 2005 | JP |
2005-135971 | May 2005 | JP |
2005-149265 | Jun 2005 | JP |
2005-183793 | Jul 2005 | JP |
2005-203447 | Jul 2005 | JP |
2005-268610 | Sep 2005 | JP |
2006-073696 | Mar 2006 | JP |
2005-114752 | Oct 2006 | JP |
2006-303022 | Nov 2006 | JP |
2007-012855 | Jan 2007 | JP |
2007-013060 | Jan 2007 | JP |
2007-043049 | Feb 2007 | JP |
2007-141971 | Jun 2007 | JP |
10-0417093 | Jun 1997 | KR |
10-1998-087485 | Dec 1998 | KR |
1998-0084215 | Dec 1998 | KR |
10-1999-0057943 | Jul 1999 | KR |
2000-0005660 | Jan 2000 | KR |
10-2000-0028830 | May 2000 | KR |
10-2002-0034313 | May 2002 | KR |
10-2002-0070777 | Sep 2002 | KR |
2003-0022006 | Mar 2003 | KR |
2004-0005609 | Jan 2004 | KR |
10-2005-0030347 | Mar 2005 | KR |
2005-0037965 | Apr 2005 | KR |
2006-0108233 | Oct 2006 | KR |
386288 | Apr 2000 | TW |
200423404 | Nov 2004 | TW |
200426632 | Dec 2004 | TW |
200534132 | Oct 2005 | TW |
200620017 | Jun 2006 | TW |
200630838 | Sep 2006 | TW |
200709309 | Mar 2007 | TW |
200709565 | Mar 2007 | TW |
200811704 | Mar 2008 | TW |
200947567 | Nov 2009 | TW |
WO 2005104356 | Nov 2005 | WO |
WO 2006014849 | Feb 2006 | WO |
WO 2006052738 | May 2006 | WO |
WO 2006090445 | Aug 2006 | WO |
WO 2007014053 | Feb 2007 | WO |
WO 2007063990 | Jun 2007 | WO |
WO 2007103587 | Sep 2007 | WO |
WO 2009054936 | Apr 2009 | WO |
Entry |
---|
U.S. Appl. No. 60/625,342, Pileggi et al., dated May 25, 2006. |
Acar, et al., “A Linear-Centric Simulation Framework for Parametric Fluctuations”, 2002, IEEE, Carnegie Mellon University USA, pp. 1-8, Jan. 28, 2002. |
Amazawa, et al., “Fully Planarized Four-Level Interconnection with Stacked VLAS Using CMP of Selective CVD-A1 and Insulator and its Application to Quarter Micron Gate Array LSIs”, 1995, IEEE, Japan, pp. 473-476, Dec. 10, 1995. |
Axelrad et al. “Efficient Full-Chip Yield Analysis Methodology for OPC-Corrected VLSI Design”, 2000, International Symposium on Quality Electronic Design (ISQED), Mar. 20, 2000. |
Balasinski et al. “Impact of Subwavelength CD Tolerance on Device Performance”, 2002, SPIE vol. 4692, Jul. 11, 2002. |
Burkhardt, et al., “Dark Field Double Dipole Lithography (DDL) for Back-End-Of-Line Processes”, 2007, SPIE Proceeding Series, vol. 6520; Mar. 26, 2007. |
Capetti, et al., “Sub k1 = 0.25 Lithography with Double Patterning Technique for 45nm Technology Node Flash Memory Devices at λ = 193nm”, 2007, SPIE Proceeding Series, vol. 6520; Mar. 27, 2007. |
Capodieci, L., et al., “Toward a Methodology for Manufacturability-Driven Design Rule Exploration,” DAC 2004, Jun. 7, 2004, San Diego, CA. |
Chandra, et al., “An Interconnect Channel Design Methodology for High Performance Integrated Circuits”, 2004, IEEE, Carnegie Mellon University, pp. 1-6, Feb. 16, 2004. |
Cheng, et al., “Feasibility Study of Splitting Pitch Technology on 45nm Contact Patterning with 0.93 NA”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Chow, et al., “The Design of a SRAM-Based Field-Programmable Gate Array—Part II: Circuit Design and Layout”, 1999, IEEE, vol. 7 # 3 pp. 321-330, Sep. 1, 1999. |
Clark et al. “Managing Standby and Active Mode Leakage Power in Deep Sub-Micron Design”, Aug. 9, 2004, ACM. |
Cobb et al. “Using OPC to Optimize for Image Slope and Improve Process Window”, 2003, SPIE vol. 5130, Apr. 16, 2003. |
Devgan “Leakage Issues in IC Design: Part 3”, 2003, ICCAD, Nov. 9, 2003. |
DeVor, et al., “Statistical Quality Design and Control”, 1992, Macmillan Publishing Company, pp. 264-267, Jan. 3, 1992. |
Dictionary.com, “channel,” in Collins English Dictionary—Complete & Unabridged 10th Edition. Source location: HarperCollins Publishers. Sep. 3, 2009. |
Dusa, et al. “Pitch Doubling Through Dual Patterning Lithography Challenges in Integration and Litho Budgets”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
El-Gamal, “Fast, Cheap and Under Control: The Next Implementation Fabric”, Jun. 2, 2003, ACM Press, pp. 354-355. |
Firedberg, et al., “Modeling Within-Field Gate Length Spatial Variation for Process-Design Co-Optimization,” 2005 Proc. of SPIE vol. 5756, pp. 178-188, Feb. 27, 2005. |
Frankel, “Quantum State Control Interference Lithography and Trim Double Patterning for 32-16nm Lithography”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 27, 2007. |
Garg, et al. “ Lithography Driven Layout Design”, 2005, IEEE VLSI Design 2005, Jan. 3, 2005. |
Grobman et al. “Reticle Enhancement Technology Trends: Resource and Manufacturability Implications for the Implementation of Physical Designs” Apr. 1, 2001, ACM. |
Grobman et al. “Reticle Enhancement Technology: Implications and Challenges for Physical Design” Jun. 18, 2001, ACM. |
Gupta et al. “Enhanced Resist and Etch CD Control by Design Perturbation”, Oct. 4, 2006, Society of Photo-Optical Instrumentation Engineers. |
Gupta et al. “A Practical Transistor-Level Dual Threshold Voltage Assignment Methodology”, 2005, Sixth International Symposium on Quality Electronic Design (ISQED), Mar. 21, 2005. |
Gupta et al. “Detailed Placement for Improved Depth of Focus and CD Control”, 2005, ACM, Jan. 18, 2005. |
Gupta et al. “Joining the Design and Mask Flows for Better and Cheaper Masks”, Oct. 14, 2004, Society of Photo-Optical Instrumentation Engineers. |
Gupta et al. “Manufacturing-Aware Physical Design”, ICCAD 2003, Nov. 9, 2003. |
Gupta et al. “Selective Gate-Length Biasing for Cost-Effective Runtime Leakage Control”, Jun. 7, 2004, ACM. |
Gupta et al. “Wafer Topography-Aware Optical Proximity Correction for Better DOF Margin and CD Control”, Apr. 13, 2005, SPIE. |
Gupta, Puneet, et al., “Manufacturing-aware Design Methodology for Assist Feature Correctness,” SPIE vol. 5756, May 13, 2005. |
Ha et al., “Reduction in the Mask Error Factor by Optimizing the Diffraction Order of a Scattering Bar in Lithography,” Journal of the Korean Physical Society, vol. 46, No. 5, May 5, 2005, pp. 1213-1217. |
Hakko, et al., “Extension of the 2D-TCC Technique to Optimize Mask Pattern Layouts,” 2008 Proc. of SPIE vol. 7028, 11 pages, Apr. 16, 2008. |
Halpin et al., “Detailed Placement with Net Length Constraints,” Publication Year 2003, Proceedings of the 3rd IEEE International Workshop on System-on-Chip for Real-Time Applications, pp. 22-27, Jun. 30, 2003. |
Hayashida, et al., “Manufacturable Local Interconnect technology Fully Compatible with Titanium Salicide Process”, Jun. 11, 1991, VMIC Conference. |
Heng, et al., “A VLSI Artwork Legalization Technique Base on a New Criterion of Minimum Layout Perturbation”, Proceedings of 1997 International Symposium on Physical Design, pp. 116-121, Apr. 14, 1997. |
Heng, et al., “Toward Through-Process Layout Quality Metrics”, Mar. 3, 2005, Society of Photo-Optical Instrumentation Engineers. |
Hu, et al., “Synthesis and Placement Flow for Gain-Based Programmable Regular Fabrics”, Apr. 6, 2003, ACM Press, pp. 197-203. |
Hur et al., “Mongrel: Hybrid Techniques for Standard Cell Placement,” Publication Year 2000, IEEE/ACM International Conference on Computer Aided Design, ICCAD-2000, pp. 165-170, Nov. 5, 2000. |
Hutton, et al., “A Methodology for FPGA to Structured-ASIC Synthesis and Verification”, 2006, EDAA, pp. 64-69, Mar. 6, 2006. |
Intel Core Microarchitecture White Paper “Introducing the 45 nm Next-Generation Intel Core Microarchitecture,” Intel Corporation, 2007 (best available publication date). |
Jayakumar, et al., “A Metal and VIA Maskset Programmable VLSI Design Methodology using PLAs”, 2004, IEEE, pp. 590-594, Nov. 7, 2004. |
Jhaveri, T. et al., Maximization of Layout Printability/Manufacturability by Extreme Layout Regularity, Proc. of the SPIE vol. 6156, Feb. 19, 2006. |
Kang, S.M., Metal-Metal Matrix (M3) for High-Speed MOS VLSI Layout, IEEE Trans. on CAD, vol. CAD-6, No. 5, Sep. 1, 1987. |
Kawashima, et al., “Mask Optimization for Arbitrary Patterns with 2D-TCC Resolution Enhancement Technique,” 2008 Proc. of SPIE vol. 6924, 12 pages, Feb. 24, 2008. |
Kheterpal, et al., “Design Methodology for IC Manufacturability Based on Regular Logic-Bricks”, DAC, Jun. 13, 2005, IEEE/AMC, vol. 6520. |
Kheterpal, et al., “Routing Architecture Exploration for Regular Fabrics”, DAC, Jun. 7, 2004, ACM Press, pp. 204-207. |
Kim, et al., “Double Exposure Using 193nm Negative Tone Photoresist”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Kim, et al., “Issues and Challenges of Double Patterning Lithography in DRAM”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Koorapaty, et al., “Exploring Logic Block Granularity for Regular Fabrics”, 2004, IEEE, pp. 1-6, Feb. 16, 2004. |
Koorapaty, et al., “Heterogeneous Logic Block Architectures for Via-Patterned Programmable Fabric”, 13th International Conference on Field Programmable Logic and Applications (FPL) 2003, Lecture Notes in Computer Science (LNCS), Sep. 1, 2003, Springer-Verlag, vol. 2778, pp. 426-436. |
Koorapaty, et al., “Modular, Fabric-Specific Synthesis for Programmable Architectures”, 12th International Conference on Field Programmable Logic and Applications (FPL_2002, Lecture Notes in Computer Science (LNCS)), Sep. 2, 2002, Springer-Verlag, vol. 2438 pp. 132-141. |
Kuh et al., “Recent Advances in VLSI Layout,” Proceedings of the IEEE, vol. 78, Issue 2, pp. 237-263, Feb. 1, 1990. |
Lavin et al. “Backend DAC Flows for “Restrictive Design Rules””, 2004, IEEE, Nov. 7, 2004. |
Li, et al., “A Linear-Centric Modeling Approach to Harmonic Balance Analysis”, 2002, IEEE, pp. 1-6, Mar. 4, 2002. |
Li, et al., “Nonlinear Distortion Analysis Via Linear-Centric Models”, 2003, IEEE, pp. 897-903, Jan. 21, 2003. |
Liebmann et al., “Integrating DfM Components into a Cohesive Design-to-Silicon Solution,” Proc. SPIE 5756, Design and Process Integration for Microelectronic Manufacturing III, Feb. 27, 2005. |
Liebmann et al., “Optimizing Style Options for Sub-Resolution Assist Features,” Proc. of SPIE vol. 4346, Feb. 25, 2001, pp. 141-152. |
Liebmann, et al., “High-Performance Circuit Design for the RET-Enabled 65nm Technology Node”, Feb. 26, 2004, SPIE Proceeding Series, vol. 5379 pp. 20-29. |
Liebmann, L. W., Layout Impact of Resolution Enhancement Techniques: Impediment or Opportunity?, International Symposium on Physical Design, Apr. 6, 2003. |
Liu et al., “Double Patterning with Multilayer Hard Mask Shrinkage for Sub 0.25 k1 Lithography,” Proc. SPIE 6520, Optical Microlithography XX, Feb. 25, 2007. |
Mansfield et al., “Lithographic Comparison of Assist Feature Design Strategies,” Proc. of SPIE vol. 4000, Feb. 27, 2000, pp. 63-76. |
Miller, “Manufacturing-Aware Design Helps Boost IC Yield”, Sep. 9, 2004, http://www.eetimes.com/showArticle.jhtml?articleID=47102054. |
Mishra, P., et al., “FinFET Circuit Design,” Nanoelectronic Circuit Design, pp. 23-54, Dec. 21, 2010. |
Mo, et al., “Checkerboard: A Regular Structure and its Synthesis, International Workshop on Logic and Synthesis”, Department of Electrical Engineering and Computer Sciences, UC Berkeley, California, pp. 1-7, Jun. 1, 2003. |
Mo, et al., “PLA-Based Regular Structures and Their Synthesis”, Department of Electrical Engineering and Computer Sciences, IEEE, pp. 723-729, Jun. 1, 2003. |
Mo, et al., “Regular Fabrics in Deep Sub-Micron Integrated-Circuit Design”, Kluwer Academic Publishers, Entire Book, Jun. 1, 2002. |
Moore, Samuel K., “Intel 45-nanometer Penryn Processors Arrive,” Nov. 13, 2007, IEEE Spectrum, http://spectrum.ieee.org/semiconductors/design/intel-45nanometer-penryn-processors-arrive. |
Mutoh et al. “1-V Power Supply High-Speed Digital Circuit Technology with Multithreshold-Voltage CMOS”, 1995, IEEE, Aug. 1, 1995. |
Op de Beek, et al., “Manufacturability issues with Double Patterning for 50nm half pitch damascene applications, using RELACS® shrink and corresponding OPC”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Or-Bach, “Programmable Circuit Fabrics”, Sep. 18, 2001, e-ASIC, pp. 1-36. |
Otten, et al., “Planning for Performance”, DAC 1998, ACM Inc., pp. 122-127, Jun. 15, 1998. |
Pack et al. “Physical & Timing Verification of Subwavelength-Scale Designs-Part I: Lithography Impact on MOSFETs”, 2003, SPIE vol. 5042, Feb. 23, 2003. |
Pandini, et al., “Congestion-Aware Logic Synthesis”, 2002, IEEE, pp. 1-8, Mar. 4, 2002. |
Pandini, et al., “Understanding and Addressing the Impact of Wiring Congestion During Technology Mapping”, ISPD Apr. 7, 2002, ACM Press, pp. 131-136. |
Patel, et al., “An Architectural Exploration of Via Patterned Gate Arrays, ISPD 2003”, Apr. 6, 2003, pp. 184-189. |
Pham, D., et al., “FINFET Device Junction Formation Challenges,” 2006 International Workshop on Junction Technology, pp. 73-77, Aug. 1, 2006. |
Pileggi, et al., “Exploring Regular Fabrics to Optimize the Performance-Cost Trade-Offs, Proceedings of the 40th ACM/IEEE Design Automation Conference (DAC) 2003”, Jun. 2, 2003, ACM Press, pp. 782-787. |
Poonawala, et al., “ILT for Double Exposure Lithography with Conventional and Novel Materials”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Qian et al. “Advanced Physical Models for Mask Data Verification and Impacts on Physical Layout Synthesis” 2003 IEEE, Mar. 24, 2003. |
Ran, et al., “An Integrated Design Flow for a Via-Configurable Gate Array”, 2004, IEEE, pp. 582-589, Nov. 7, 2004. |
Ran, et al., “Designing a Via-Configurable Regular Fabric”, Custom Integrated Circuits Conference (CICC). Proceedings of the IEEE, Oct. 1, 2004, pp. 423-426. |
Ran, et al., “On Designing Via-Configurable Cell Blocks for Regular Fabrics” Proceedings of the Design Automation Conference (DAC) 2004, Jun. 7, 2004, ACM Press, s 198-203. |
Ran, et al., “The Magic of a Via-Configurable Regular Fabric”, Proceedings of the IEEE International Conference on Computer Design (ICCD) Oct. 11, 2004. |
Ran, et al., “Via-Configurable Routing Architectures and Fast Design Mappability Estimation for Regular Fabrics”, 2005, IEEE, pp. 25-32, Sep. 1, 2006. |
Reis, et al., “Physical Design Methodologies for Performance Predictability and Manufacturability”, Apr. 14, 2004, ACM Press, pp. 390-397. |
Robertson, et al., “The Modeling of Double Patterning Lithographic Processes”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Rosenbluth, et al., “Optimum Mask and Source Patterns to Print a Given Shape,” 2001 Proc. of SPIE vol. 4346, pp. 486-502, Feb. 25, 2001. |
Rovner, “Design for Manufacturability in Via Programmable Gate Arrays”, May 1, 2003, Graduate School of Carnegie Mellon University. |
Sengupta, “An Integrated CAD Framework Linking VLSI Layout Editors and Process Simulators”, 1998, Thesis for Rice University, pp. 1-101, Nov. 1, 1998. |
Sengupta, et al., “An Integrated CAD Framework Linking VLSI Layout Editors and Process Simulators”, 1996, SPIE Proceeding Series, vol. 2726; pp. 244-252, Mar. 10, 1996. |
Sherlekar, “Design Considerations for Regular Fabrics”, Apr. 18, 2004, ACM Press, pp. 97-102. |
Shi et al., “Understanding the Forbidden Pitch and Assist Feature Placement,” Proc. of SPIE vol. 4562, pp. 968-979, Mar. 11, 2002. |
Smayling et al., “APF Pitch Halving for 22 nm Logic Cells Using Gridded Design Rules,” Proceedings of SPIE, USA, vol. 6925, Jan. 1, 2008, pp. 69251E-1-69251E-7. |
Socha, et al., “Simultaneous Source Mask Optimization (SMO),” 2005 Proc. of SPIE vol. 5853, pp. 180-193, Apr. 13, 2005. |
Sreedhar et al. “ Statistical Yield Modeling for Sub-Wavelength Lithography”, 2008 IEEE, Oct. 28, 2008. |
Stapper, “Modeling of Defects in Integrated Circuit Photolithographic Patterns”, Jul. 1, 1984, IBM, vol. 28 # 4, pp. 461-475. |
Taylor, et al., “Enabling Energy Efficiency in Via-Patterned Gate Array Devices”, Jun. 7, 2004, ACM Press, pp. 874-877. |
Tian et al. “Model-Based Dummy Feature Placement for Oxide Chemical_ Mechanical Polishing Manufacturability” IEEE, vol. 20, Issue 7, Jul. 1, 2001. |
Tong, et al., “Regular Logic Fabrics for a Via Patterned Gate Array (VPGA), Custom Integrated Circuits Conference”, Sep. 21, 2003, Proceedings of the IEEE, pp. 53-56. |
Vanleenhove, et al., “A Litho-Only Approach to Double Patterning”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Wang, et al., “Performance Optimization for Gridded-Layout Standard Cells”, vol. 5567 SPIE, Sep. 13, 2004. |
Wang, J. et al., Standard Cell Layout with Regular Contact Placement, IEEE Trans. on Semicon. Mfg., vol. 17, No. 3, Aug. 9, 2004. |
Webb, Clair, “45nm Design for Manufacturing,” Intel Technology Journal, vol. 12, Issue 02, Jun. 17, 2008, ISSN 1535-864X, pp. 121-130. |
Webb, Clair, “Layout Rule Trends and Affect upon CPU Design”, vol. 6156 SPIE, Feb. 19, 2006. |
Wenren, et al., “The Improvement of Photolithographic Fidelity of Two-dimensional Structures Though Double Exposure Method”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Wilcox, et al., “Design for Manufacturability: A Key to Semiconductor Manufacturing Excellence”, 1998 IEEE, pp. 308-313, Sep. 23, 1998. |
Wong, et al., “Resolution Enhancement Techniques and Design for Manufacturability: Containing and Accounting for Variabilities in Integrated Circuit Creation,” J. Micro/Nanolith. MEMS MOEMS, Sep. 27, 2007, vol. 6(3), 2 pages. |
Wu, et al., “A Study of Process Window Capabilities for Two-dimensional Structures under Double Exposure Condition”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Xiong, et al., “The Constrained Via Minimization Problem for PCB and VLSI Design”, 1988 ACM Press/IEEE, pp. 573-578, Jun. 12, 1998. |
Yamamaoto, et al., “New Double Exposure Technique without Alternating Phase Shift Mask”, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Yamazoe, et al., “Resolution Enhancement by Aerial Image Approximation with 2D-TCC,” 2007 Proc. of SPIE vol. 6730, 12 pages, Sep. 17, 2007. |
Yang, et al., “Interconnection Driven VLSI Module Placement Based on Quadratic Programming and Considering Congestion Using LFF Principles”, 2004 IEEE, pp. 1243-1247, Jun. 27, 2004. |
Yao, et al., “Multilevel Routing With Redundant Via Insertion”, Oct. 23, 2006, IEEE, pp. 1148-1152. |
Yu, et al., “True Process Variation Aware Optical Proximity Correction with Variational Lithography Modeling and Model Calibration,” J. Micro/Nanolith. MEMS MOEMS, Sep. 11, 2007, vol. 6(3), 16 pages. |
Zheng, et al.“Modeling and Analysis of Regular Symmetrically Structured Power/Ground Distribution Networks”, DAC, Jun. 10, 2002, ACM Press, pp. 395-398. |
Zhu, et al., “A Stochastic Integral Equation Method for Modeling the Rough Surface Effect on Interconnect Capacitance”, 2004 IEEE, Nov. 7, 2004. |
Zhu, et al., “A Study of Double Exposure Process Design with Balanced Performance Parameters for Line/Space Applications”, 2007, SPIE Proceeding Series, vol. 6520; Feb. 25, 2007. |
Zuchowski, et al., “A Hybrid ASIC and FPGA Architecture”, 2003 IEEE, pp. 187-194, Nov. 10, 2002. |
Alam, Syed M. et al., “A Comprehensive Layout Methodology and Layout-Specific Circuit Analyses for Three-Dimensional Integrated Circuits,” Mar. 21, 2002. |
Alam, Syed M. et al., “Layout-Specific Circuit Evaluation in 3-D Integrated Circuits,” May 1, 2003. |
Aubusson, Russel, “Wafer-Scale Integration of Semiconductor Memory,” Apr. 1, 1979. |
Bachtold, “Logic Circuits with Carbon,” Nov. 9, 2001. |
Baker, R. Jacob, “CMOS: Circuit Design, Layout, and Simulation (2nd Edition),” Nov. 1, 2004. |
Baldi et al., “A Scalable Single Poly EEPROM Cell for Embedded Memory Applications,” pp. 1-4, Fig. 1, Sep. 1, 1997. |
Cao, Ke, “Design for Manufacturing (DFM) in Submicron VLSI Design,” Aug. 1, 2007. |
Capodieci, Luigi, “From Optical Proximity Correction to Lithography-Driven Physical Design (1996-2006): 10 years of Resolution Enhancement Technology and the roadmap enablers for the next decade,” Proc. SPIE 6154, Optical Microlithography XIX, 615401, Mar. 20, 2006. |
Chang, Leland et al., “Stable SRAM Cell Design for the 32 nm Node and Beyond,” Jun. 16, 2005. |
Cheung, Peter, “Layout Design,” Apr. 4, 2004. |
Chinnery, David, “Closing the Gap Between ASIC & Custom: Tools and Techniques for High-Performance ASIC Design,” Jun. 30, 2002. |
Chou, Dyiann et al., “Line End Optimization through Optical Proximity Correction (OPC): A Case Study,” Feb. 19, 2006. |
Clein, Dan, “CMOS IC Layout: Concepts, Methodologies, and Tools,” Dec. 22, 1999. |
Cowell, “Exploiting Non-Uniform Access Time,” Jul. 1, 2003. |
Das, Shamik, “Design Automation and Analysis of Three-Dimensional Integrated Circuits,” May 1, 2004. |
Dehaene, W. et al., “Technology-Aware Design of SRAM Memory Circuits,” Mar. 1, 2007. |
Deng, Liang et al., “Coupling-aware Dummy Metal Insertion for Lithography,” p. 1, col. 2, Jan. 23, 2007. |
Devoivre et al., “Validated 90nm CMOS Technology Platform with Low-k Copper Interconnects for Advanced System-on-Chip (SoC),” Jul. 12, 2002. |
Enbody, R. J., “Near-Optimal n-Layer Channel Routing,” Jun. 29, 1986. |
Ferretti, Marcos et al., “High Performance Asynchronous ASIC Back-End Design Flow Using Single-Track Full-Buffer Standard Cells,” Apr. 23, 2004. |
Garg, Manish et al., “Litho-driven Layouts for Reducing Performance Variability,” p. 2, Figs. 2b-2c, May 23, 2005. |
Greenway, Robert et al., “32nm 1-D Regular Pitch SRAM Bitcell Design for Interference-Assisted Lithography,” Oct. 6, 2008. |
Gupta et al., “Modeling Edge Placement Error Distribution in Standard Cell Library,” Feb. 23, 2006. |
Grad, Johannes et al., “A standard cell library for student projects,” Proceedings of the 2003 IEEE International Conference on Microelectronic Systems Education, Jun. 2, 2003. |
Hartono, Roy et al., “Active Device Generation for Automatic Analog Layout Retargeting Tool,” May 13, 2004. |
Hartono, Roy et al., “IPRAIL—Intellectual Property Reuse-based Analog IC Layout Automation,” Mar. 17, 2003. |
Hastings, Alan, “The Art of Analog Layout (2nd Edition),” Jul. 4, 2005. |
Hurat et al., “A Genuine Design Manufacturability Check for Designers,” Feb. 19, 2006. |
Institute of Microelectronic Systems, “Digital Subsystem Design,” Oct. 13, 2006. |
Ishida, M. et al., “A Novel 6T-SRAM Cell Technology Designed with Rectangular Patterns Scalable beyond 0.18 pm Generation and Desirable for Ultra High Speed Operation,” IEDM 1998, Dec. 6, 1998. |
Jakusovszky, “Linear IC Parasitic Element Simulation Methodology,” Oct. 1, 1993. |
Jangkrajarng, Nuttorn et al., “Template-Based Parasitic-Aware Optimization and Retargeting of Analog and RF Integrated Circuit Layouts,” Nov. 5, 2006. |
Kahng, Andrew B., “Design Optimizations DAC-2006 DFM Tutorial, part V),” Jul. 24, 2006. |
Kang, Sung-Mo et al., “CMOS Digital Integrated Circuits Analysis & Design,” Oct. 29, 2002. |
Kottoor, Mathew Francis, “Development of a Standard Cell Library based on Deep Sub-Micron SCMOS Design Rules using Open Source Software (MS Thesis),” Aug. 1, 2005. |
Kubicki, “Intel 65nm and Beyond (or Below): IDE Day 2 Coverage (available at http://www.anandtech.com/show/1468/4),” Sep. 9, 2004. |
Kuhn, Kelin J., “Reducing Variation in Advanced Logic Technologies: Approaches to Process and Design for Manufacturability of Nanoscale CMOS,” p. 27, Dec. 12, 2007. |
Kurokawa, Atsushi et al., “Dummy Filling Methods for Reducing Interconnect Capacitance and Number of Fills, Proc. of ISQED,” pp. 586-591, Mar. 21, 2005. |
Lavin, Mark, “Open Access Requirements from RDR Design Flows,” Nov. 11, 2004. |
Liebmann, Lars et al., “Layout Methodology Impact of Resolution Enhancement Techniques,” pp. 5-6, Apr. 6, 2003. |
Liebmann, Lars et al., “TCAD development for lithography resolution enhancement,” Sep. 1, 2001. |
Lin, Chung-Wei et al., “Recent Research and Emerging Challenges in Physical Design for Manufacturability/Reliability,” Jan. 26, 2007. |
McCullen, Kevin W., “Layout Techniques for Phase Correct and Gridded Wiring,” pp. 13, 17, Fig. 5, Dec. 1, 2006. |
Mosis, “Design Rules MOSIS Scalable CMOS (SCMOS) (Revision 8.00),” Oct. 4, 2004. |
Mosis, “MOSIS Scalable CMOS (SCMOS) Design Rules (Revision 7.2),” Jan. 1, 1995. |
Muta et al., “Manufacturability-Aware Design of Standard Cells,” pp. 2686-2690, Figs. 3, 12, Dec. 1, 2007. |
Na, Kee-Yeol et al., “A Novel Single Polysilicon EEPROM Cell With a Polyfinger Capacitor,” Nov. 30, 2007. |
Pan et al., “Redundant Via Enhanced Maze Routing for Yield Improvement,” DAC 2005, Jan. 18, 2005. |
Park, Tae Hong, “Characterization and Modeling of Pattern Dependencies in Copper Interconnects for Integrated Circuits,” Ph.D. Thesis, MIT, May 24, 2002. |
Patel, Chetan, “An Architectural Exploration of Via Patterned Gate Arrays (CMU Master's Project),” May 1, 2003. |
Pease, R. Fabian et al., “Lithography and Other Patterning Techniques for Future Electronics,” IEEE 2008, vol. 96, Issue 2, Jan. 16, 2008. |
Serrano, Diego Emilio, Pontificia Universidad Javeriana Facultad De Ingenicria, Departamento De Electronica, “Diseño De Multiplicador 4 X 8 en VLSI, Introduction al VLSI,” 2006 (best available publication date). |
Pramanik, “Impact of layout on variability of devices for sub 90nm technologies,” 2004 (best available publication date). |
Pramanik, Dipankar et al., “Lithography-driven layout of logic cells for 65-nm node (SPIE Proceedings vol. 5042),” Jul. 10, 2003. |
Roy et al., “Extending Aggressive Low-K1 Design Rule Requirements for 90 And 65 Nm Nodes Via Simultaneous Optimization Of Numerical Aperture, Illumination And Optical Proximity Correction,” J.Micro/Nanolith, MEMS MOEMS, 4(2), 023003, Apr. 26, 2005. |
Saint, Christopher et al., “IC Layout Basics: A Practical Guide,” Chapter 3, Nov. 5, 2001. |
Saint, Christopher et al., “IC Mask Design: Essential Layout Techniques,” May 24, 2002. |
Scheffer, “Physical CAD Changes to Incorporate Design for Lithography and Manufacturability,” Feb. 4, 2004. |
Smayling, Michael C., “Part 3: Test Structures, Test Chips, In-Line Metrology & Inspection,” Jul. 24, 2006. |
Spence, Chris, “Full-Chip Lithography Simulation and Design Analysis: How OPC is changing IC Design, Emerging Lithographic Technologies IX,” May 6, 2005. |
Subramaniam, Anupama R., “Design Rule Optimization of Regular layout for Leakage Reduction in Nanoscale Design,” pp. 474-478, Mar. 24, 2008. |
Tang, C. W. et al., “A compact large signal model of LDMOS,” Solid-State Electronics 46(2002) 2111-2115, May 17, 2002. |
Taylor, Brian et al., “Exact Combinatorial Optimization Methods for Physical Design of Regular Logic Bricks,” Jun. 8, 2007. |
Tian, Ruiqi et al., “Dummy Feature Placement for Chemical-Mechanical Uniformity in a Shallow Trench Isolation Process,” IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, vol. 21, No. 1, pp. 63-71, Jan. 1, 2002. |
Tian, Ruiqi et al., “Proximity Dummy Feature Placement and Selective Via Sizing for Process Uniformity in a Trench-First-Via-Last Dual-Inlaid Metal Process,” Proc. of IITC, pp. 48-50, Jun. 6, 2001. |
Torres, J. A. et al., “RET Compliant Cell Generation for sub-130nm Processes,” SPIE vol. 4692, Mar. 6, 2002. |
Uyemura, John P., “Introduction to VLSI Circuits and Systems,” Chapters 2, 3, 5, and Part 3, Jul. 30, 2001. |
Uyemura, John, “Chip Design for Submicron VLSI: CMOS Layout and Simulation,” Chapters 2-5, 7-9, Feb. 8, 2005. |
Verhaegen et al., “Litho Enhancements for 45nm-nod MuGFETs,” Aug. 1, 2005. |
Wong, Ban P., “Bridging the Gap between Dreams and Nano-Scale Reality (DAC-2006 DFM Tutorial),” Jul. 28, 2006. |
Wang, Dunwei et al., “Complementary Symmetry Silicon Nanowire Logic: Power-Efficient Inverters with Gain,” Aug. 17, 2006. |
Wang, Jun et al., “Effects of grid-placed contacts on circuit performance,” pp. 135-139, Figs. 2, 4-8, Feb. 28, 2003. |
Wang, Jun et al., “Standard cell design with regularly placed contacts and gates (SPIE vol. 5379),” Feb. 22, 2004. |
Wang, Jun et al., “Standard cell design with resolution-enhancement-technique-driven regularly placed contacts and gates,” J. Micro/Nanolith, MEMS MOEMS, 4(1), 013001, Mar. 16, 2005. |
Watson, Bruce, “Challenges and Automata Applications in Chip-Design Software,” pp. 38-40, Jul. 16, 2007. |
Weste, Neil et al., “CMOS VLSI Design: A Circuits and Systems Perspective, 3rd Edition,” May 21, 2004. |
Wingerden, Johannes van, “Experimental verification of improved printability for litho-driven designs,” Mar. 14, 2005. |
Wong, Alfred K., “Microlithography: Trends, Challenges, Solutions, and Their Impact on Design,” Micro IEEE vol. 23, Issue 2, Apr. 29, 2003. |
Xu, Gang, “Redundant-Via Enhanced Maze Routing for Yield Improvement,” Proceedings of ASP-DAC 2005, Jan. 18, 2005. |
Yang, Jie, “Manufacturability Aware Design,” pp. 93, 102, Fig. 5.2, Jan. 16, 2008. |
Yongshun, Wang et al., “Static Induction Devices with Planar Type Buried Gate,” Chinese Journal of Semiconductors, vol. 25, No. 2, Feb. 1, 2004. |
Zobrist, George (editor), “Progress in Computer Aided VLSI Design: Implementations (Ch. 5),” Ablex Publishing Corporation, Feb. 1, 1990. |
Petley, Graham, “VLSI and ASIC Technology Standard Cell Library Design,” from website www.vlsitechnology.org, Jan. 11, 2005. |
Liebmann, Lars, et al., “Layout Optimization at the Pinnacle of Optical Lithography,” Design and Process Integration for Microelectronic Manufacturing II, Proceedings of SPIE vol. 5042, Jul. 8, 2003. |
Kawasaki, H., et al., “Challenges and Solutions of FinFET Integration in an SRAM Cell and a Logic Circuit for 22 nm node and beyond,” Electron Devices Meeting (IEDM), 2009 IEEE International, IEEE, Piscataway, NJ, USA, Dec. 7, 2009, pp. 1-4. |
Number | Date | Country | |
---|---|---|---|
20130200463 A1 | Aug 2013 | US |
Number | Date | Country | |
---|---|---|---|
61036460 | Mar 2008 | US | |
61042709 | Apr 2008 | US | |
61045953 | Apr 2008 | US | |
61050136 | May 2008 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 13741305 | Jan 2013 | US |
Child | 13831530 | US | |
Parent | 12753798 | Apr 2010 | US |
Child | 13741305 | US | |
Parent | 12402465 | Mar 2009 | US |
Child | 12753798 | US |