Patent Grant
9879343
The present application claims the benefit of Chinese Patent Application No. 201410188927.2, filed May 6, 2014, the entire disclosure of which is incorporated herein by reference.
1. Field of the Disclosure
The present disclosure relates to technical field of vacuum coating, and particularly to a detection device for detecting a service life of a baffle mechanism in a vacuum coating apparatus.
2. Description of the Prior Art
At present, vacuum coating technology is extensively applied to various fields of industrial production. Particularly when applied to fields such as Thin Film Transistor-Liquid Crystal Display (TFT-LCD) and Organic Light Emitting Diode (OLED), a vacuum apparatus may generate extra thin film deposition. As is commonly known in the technical field of vacuum coating, a vacuum coating apparatus includes a vacuum cavity or chamber and a coating material generating device in the vacuum cavity or chamber for generating coating material that is to be deposited as a thin film. In order to prevent the extra-generated thin film from polluting a vacuum cavity, a baffle mechanism is usually provided in the vacuum cavity so that the extra-generated thin film will deposit on the baffle mechanism. Then the baffle mechanism is cleaned regularly to effectively protect the vacuum cavity. Such coating manner is extensively applied to various vacuum apparatuses such as apparatuses for Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), Dry Etching, and sputter coating.
The service life of the baffle mechanism, as an important part of the vacuum apparatus, depends on a thickness of the adhered thin film. The service life of the baffle mechanism can be effectively detected only when the thickness of the adhered thin film is accurately mastered. However, currently human experience cannot suffice to accurately judge the expiration of the service life of the baffle mechanism and to perform precise management of the baffle mechanism service life. If the baffle mechanism is replaced in advance and sent to a dedicated manufacturer for cleaning, unnecessary operation cost will be caused; if the baffle mechanism is replaced when it expires, a qualified rate of products will be affected.
Therefore, with respect to the above drawbacks, it is desirable to provide a detection device which is capable of accurately detecting the service life of the baffle mechanism, achieving precise apparatus management and reducing the operation cost.
The technical problem to be solved by the present disclosure is to provide a detection device which is capable of accurately detecting the service life of the baffle mechanism, achieving precise apparatus management and reducing the operation cost
To solve the above technical problem, the present disclosure provides a detection device comprising: a chamber for vacuum coating; a capacitance measurement device and a baffle mechanism located in the chamber. The baffle mechanism is a closed structure encompassed by a plurality of baffle walls, wherein at least one baffle wall comprises a fixed baffle plate and a moveable baffle plate. The moveable baffle plate is pivotable about the fixed baffle plate. The moveable baffle plate, after pivoting, may get parallel with an adjacent baffle wall. The adjacent baffle wall and the moveable baffle plate are respectively connected to the capacitance measurement device, and the capacitance measurement device is used to measure the capacitance between the adjacent baffle wall and the moveable baffle plate.
The baffle mechanism is in shape of a cube. The fixed baffle plate and the moveable baffle plate are both located at the top or bottom of the cube. The moveable baffle plate, after pivoting by a 90° angle about the fixed baffle plate, gets parallel with the adjacent baffle wall.
An edge of the moveable baffle plate is provided with a first connection portion and a second connection portion. During closing the baffle mechanism, the moveable baffle plate is pivoted to connect the first connection portion thereof to an end of the fixed baffle plate, and the second connection portion to another end of the fixed baffle plate.
A seal strip is disposed on the first connection portion, and located at a slit between the fixed baffle plate and the moveable baffle plate.
The first connection portion and the second connection portion are both made of an insulative material.
The moveable baffle plate is rectangular, and the number of the moveable baffle plates is one or plural.
The adjacent baffle wall and the moveable baffle plate are respectively connected to the capacitance measurement device via a lead wire.
The capacitance measurement device is a multimeter, a capacitance meter or an electrical bridge testing instrument for measuring the capacitance.
A thin film is deposited inside the baffle wall.
The above technical solution of the present disclosure achieves the following advantages: the baffle mechanism of the detection device of the present disclosure is a closed structure encompassed by a plurality of baffle walls, wherein at least one baffle wall comprises a fixed baffle plate and a moveable baffle plate. The moveable baffle plate is pivotable about the fixed baffle plate. The moveable baffle plate, after pivoting, may get parallel with an adjacent baffle wall. The adjacent baffle wall and the moveable baffle plate are respectively connected to the capacitance measurement device, and the capacitance measurement device is used to measure the capacitance between the adjacent baffle wall and the moveable baffle plate. The detection device may accurately detect the service life of the baffle mechanism and achieve precise management of the apparatus. The detection device is simple in structure and may not greatly increase the manufacture and operation costs. The precise management of the service life of the baffle mechanism may be performed without opening the chamber, thus the operation cost of apparatuses in production line may be effectively reduced.
Embodiments of the present disclosure will be further described in detail with reference to the figures. The following embodiments are used to illustrate the present disclosure, not to limit the scope of the present disclosure.
In the specification, unless otherwise specified, “a plurality of” means two or more; orientations or positional relationships indicated by the terms such as “up”, “down”, “left”, “right”, “in”, “out”, “front end”, “rear end”, “leading portion”, “trailing portion” are based on orientations or positional relationships shown in the accompanying drawings, are merely used to facilitate the description of the present disclosure and simplify the description, but do not indicate or imply that the intended device or elements must have a particular orientation and are configured and operated in a particular orientation. Therefore, the orientations or positional relationships should not be construed to limit the present disclosure. Besides, the terms “first”, “second”, “third” and the like are only used for illustration purpose and cannot be understood as indicating or implying relative significance.
In the specification, unless specified or limited otherwise, terms “mount”, “connect” and “couple” should be understood in a broad sense, for example, the connection may be either fixed connection or detachable connection or unitary connection; the connection may be either mechanical connection or electrical connection; the connection may be direct connection or indirect connection via an intermediate medium. Those having ordinary skill in the art appreciate that specific meaning of the above terms in the present disclosure may be understood according to specific situations.
As shown in
The detection device is simple in structure and may not greatly increase the manufacture and operation costs. The precise management of the service life of the baffle mechanism 2 may be performed without opening the chamber, thus the operation cost of apparatuses in production line may be effectively reduced.
For instance, a measurement window is provided at the original baffle mechanism 2, namely, an independent and pivotally moveable baffle 22 is provided at a junction of two baffle walls. When the apparatus is idle, the moveable baffle plate 22 is pivoted to a position parallel with the adjacent baffle wall (as shown in
The service life of the baffle mechanism 2 depends on the thickness of the adhered thin film. The thickness of the thin film may be calculated by measuring the capacitance between the moveable baffle plate 22 and the adjacent baffle wall, thus a precise service life of the baffle mechanism 2 may be calculated and evaluated without opening the chamber. Upon coating, the independent moveable baffle plate 22 may be pivoted to be closed (as shown in
As shown in
In addition, according to actual needs of the coating apparatus, the shape of the baffle mechanism 2 is not limited to this, and other closed structures for preventing thin film deposition from polluting the chamber all fall within the protection scope of the present disclosure. For example, the baffle mechanism 2 may be a cylinder or an irregular body.
As shown in
Optionally, a seal strip 5 is disposed on the first connection portion 3, and located at a slit between the fixed baffle plate 21 and the moveable baffle plate 22 to achieve prevention of leakage. Meanwhile, an edge of the fixed baffle plate 21 is overlappingly connected to the second connection portion 4 to prevent the leakage via concave-convex mating.
Furthermore, the first connection portion 3 and the second connection portion 4 are both made of an insulative material, which effectively prevents free movement of electrons between the moveable baffle plate 22 and the adjacent baffle wall to affect accuracy of the capacitance measurement.
Preferably, the moveable baffle plate 22 is rectangular, and a local capacitance measuring method is used to ensure integrity of the baffle mechanism 2. The number of the moveable baffle plates 22 of the baffle mechanism 2 may be one or plural according to needs.
To prevent waste of resources and save the cost, an individual moveable baffle plate 22 serving as a measurement window is provided on a currently-available massive baffle mechanism 2, and the adjacent baffle wall and the moveable baffle plate 22 are resepctively connected to the capacitance measurement device 1 via a lead wire so as to accurately detect the service life of the baffle mechanism 2, achieve precise management of the apparatus and reduce the operation cost. The capacitance measurement device 1 used by the detection device may be a multimeter or a capacitance meter or an electrical bridge testing instrument for measuring a capacitance which will be described in detail as follows.
The multimeter comprises three major portions, namely, a meter head, a measuring circuit and a changeover switch. In use, the adjacent baffle wall and the moveable baffle plate 22 are respectively communicated with a measuring circuit via a lead wire. The changeover switch is regulated to a capacitance measuring state, and then a capacitance value may be read on the meter head. The multimeter is advantageous in high sensitivity, high precision, clear display, a strong overload capacity and portability.
The capacitance meter comprises an integrated circuit capable of directly driving a microprocessor of an LCD and a double integral A/D converter, and a digital display drive of a high resolution and a high precision. The capacitance meter is a smart-type, stable-performance and highly reliable capacitance measurement tool. The adjacent baffle wall and the moveable baffle plate 22 are respectively connected to a capacitance input receptacle or terminals via a lead wire, and then adjust a measuring range to measure.
In the electrical bridge testing instrument, the adjacent baffle wall and the moveable baffle plate 22 are respectively communicated with a capacitance terminal of the electrical bridge testing instrument via a lead wire to achieve precise capacitance measurement.
The working procedure of the detection device according to the present disclosure includes the following steps: a first step of pivoting the moveable baffle plate to a position parallel with the adjacent baffle wall when the vacuum coating apparatus is idle; a second step of connecting the back side of the moveable baffle plate and the back side of the adjacent baffle wall which are parallel with each other to the multimeter or capacitance meter or electrical bridge testing instrument respectively via the lead wire; a third step of measuring and recording the capacitance between the moveable baffle plate and the adjacent baffle wall; a fourth step of calculating the spacing between the moveable baffle plate and the adjacent baffle wall after coating according to the capacitance calculating formula C=∈S/d, wherein ∈ is a dielectric constant of a medium between polar plates, S is a polar plate area, and d is a distance between polar plates. A thickness of the thin film already adhered on the baffle mechanism may be calculated by comparing the resultant spacing with a spacing between the moveable baffle plate and the adjacent baffle wall before the coating. A fifth step of pivoting the independent moveable baffle plate to close with the fixed baffle plate to achieve the integrity of the baffle mechanism when the vacuum coating apparatus operates.
To conclude, the baffle mechanism of the detection device of the present disclosure is a closed structure encompassed by a plurality of baffle walls, wherein at least one baffle wall comprises a fixed baffle plate and a moveable baffle plate. The moveable baffle plate is pivotable about the fixed baffle plate. The moveable baffle plate, after pivoting, may get parallel with an adjacent baffle wall. The adjacent baffle wall and the moveable baffle plate are respectively connected to the capacitance measurement device, and the capacitance measurement device is used to measure the capacitance between the adjacent baffle wall and the moveable baffle plate. The detection device may accurately detect the service life of the baffle mechanism and achieve precise management of the apparatus. The detection device is simple in structure and may not greatly increase the manufacture and operation costs. The precise management of the service life of the baffle mechanism may be performed without opening the chamber, thus the operation cost of apparatuses in production line may be effectively reduced.
Embodiments of the present disclosure are presented for the sake of illustration and description, and not intended to exhaust embodiments and limit the present disclosure to the disclosed forms. Many modification and variations are obvious for those having ordinary skill in the art. Embodiments are selected and described to better illustrate principles and actual application of the present disclosure and enable those having ordinary skill in the art to understand the present disclosure and thereby design various embodiments with diverse modifications suitable for specific use.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2014 1 0188927 | May 2014 | CN | national |
| Number | Name | Date | Kind |
|---|---|---|---|
| 3031617 | Paquette | Apr 1962 | A |
| 3278843 | Deming | Oct 1966 | A |
| 3775277 | Pompei | Nov 1973 | A |
| 5382911 | Cotler | Jan 1995 | A |
| 6132805 | Moslehi | Oct 2000 | A |
| 6543459 | Annapragada | Apr 2003 | B1 |
| 6616818 | Gibson | Sep 2003 | B2 |
| 20020179013 | Kido | Dec 2002 | A1 |
| 20050235917 | Fordemwalt | Oct 2005 | A1 |
| 20120216955 | Eto | Aug 2012 | A1 |
| 20140299577 | Chung | Oct 2014 | A1 |
| Number | Date | Country |
|---|---|---|
| 101078613 | Nov 2007 | CN |
| 101958232 | Jan 2011 | CN |
| 2010-236040 | Oct 2010 | JP |
| Entry |
|---|
| Office action from Chinese Application No. 201410188927.2 dated Oct. 29, 2015. |
| Number | Date | Country | |
|---|---|---|---|
| 20150323483 A1 | Nov 2015 | US |
