| Number | Name | Date | Kind |
|---|---|---|---|
| 5168344 | Ehlert et al. | Dec 1992 | |
| 5280413 | Pai | Jan 1994 | |
| 5315486 | Fillion et al. | May 1994 | |
| 5488256 | Tsunoda | Jan 1996 | |
| 5497033 | Fillion et al. | Mar 1996 | |
| 5600181 | Scott et al. | Feb 1997 | |
| 5751554 | Williams et al. | May 1998 | |
| 5764484 | Hoffman et al. | Jun 1998 | |
| 5834705 | Jonaidi | Nov 1998 | |
| 5869894 | Degani et al. | Feb 1999 |
| Entry |
|---|
| Electronic Materials and Processes Handbook, 2nd ed., Harper & Sampson eds., McGraw-Hill, Inc.: Metals by Harrison et al., pp. 5.1,5.5,5.6; Thin and Thick Films by Licari, pp. 8.1,8.18-8.20, 1994. |