Number | Name | Date | Kind |
---|---|---|---|
5168344 | Ehlert et al. | Dec 1992 | |
5280413 | Pai | Jan 1994 | |
5315486 | Fillion et al. | May 1994 | |
5488256 | Tsunoda | Jan 1996 | |
5497033 | Fillion et al. | Mar 1996 | |
5600181 | Scott et al. | Feb 1997 | |
5751554 | Williams et al. | May 1998 | |
5764484 | Hoffman et al. | Jun 1998 | |
5834705 | Jonaidi | Nov 1998 | |
5869894 | Degani et al. | Feb 1999 |
Entry |
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Electronic Materials and Processes Handbook, 2nd ed., Harper & Sampson eds., McGraw-Hill, Inc.: Metals by Harrison et al., pp. 5.1,5.5,5.6; Thin and Thick Films by Licari, pp. 8.1,8.18-8.20, 1994. |