This is a continuation of application Ser. No. 104,323, filed Dec. 17, 1979 now abandoned.
Number | Name | Date | Kind |
---|---|---|---|
2968530 | Forgeng et al. | Jan 1961 | |
3117838 | Sterling et al. | Jan 1964 | |
3496037 | Jackson et al. | Feb 1970 | |
3620827 | Collet | May 1967 | |
3632433 | Tokuyama | Jan 1972 | |
3637434 | Nakanuma et al. | Jan 1972 | |
3650929 | Lertes | Mar 1972 | |
3698948 | Barone et al. | Oct 1972 | |
3907616 | Wiemer | Sep 1975 | |
4001762 | Aoki et al. | Jan 1977 | |
4002512 | Lim | Jan 1977 | |
4098923 | Alberti et al. | Jul 1978 | |
4100310 | Ura et al. | Jul 1978 | |
4181751 | Hall et al. | Jan 1980 | |
4194021 | Messick | Mar 1980 | |
4232057 | Ray et al. | Nov 1980 |
Number | Date | Country |
---|---|---|
38-19828 | Sep 1963 | JPX |
38-21456 | Oct 1963 | JPX |
42-12408 | Jul 1967 | JPX |
51-54770 | May 1976 | JPX |
Entry |
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Collet, "Depositing Silicon Nitride Layers at Low Temperature Using a Photochemical Reaction," J. Electrochem. Soc. pp. 110-111, Jan. 1969. |
H. J. Emeleus and K. Stewart, "Effect of Light on the Ignition of Monosilane-Oxygen Mixtures," Transactions of the Faraday Society, vol. 32, 1936, pp. 1577-1584. |
R. J. Cvetanovic, "Mercury Photosensitized Decomposition of Nitrous Oxide," Journal of Chemical Physics, vol. 23, No. 7, Jul. 1955, pp. 1203-1207. |
Number | Date | Country | |
---|---|---|---|
Parent | 104323 | Dec 1979 |