The present invention relates to a memory device and a method for manufacturing a memory device, and more specifically relates to a structure of a memory device in which both DRAM and PCRAM are mounted, and to a method for manufacturing this memory device.
DRAM is memory with excellent cell area, access speed, and rewrite endurance, but the data is volatile and there are considerable limitations in the use of the data. Various nonvolatile memory that may replace DRAM have been proposed in prior art. However, there is no known memory that surpasses DRAM performance with respect to cell area, access speed, and rewrite endurance, as shown in TABLE 1 below.
Described in Japanese Patent Application Laid Open No. 2003-91463 is a memory device in which SDRAM with high operational speed is mounted together with nonvolatile flash memory. With the memory device described in the publication, write data sent from the host device to the memory device is temporarily stored in SDRAM and thereafter transferred from SDRAM to flash memory when a store command is received from the host device or when power is switched off. The data transferred to flash memory is transferred to SDRAM when power is switch on, and the host device writes and reads data at high speed to and from the SDRAM.
Described in Japanese Patent Application Laid Open No. 2003-229537 is a phase-change RAM (PCRAM) in which a phase-change memory cell is used. The PCRAM described in the publication is receiving much attention very recently because it has advantages in that the footprint of the memory cell is small and the access speed is high. Since DRAM (which is volatile memory) loses data when power is switched OFF, it is effective to dually mount nonvolatile memory to compensate for this drawback. However, there is a drawback when both DRAM and flash memory or other nonvolatile memory are mounted as described in the above publications in that the circuit configuration for transferring data between the two mounted memories is made more complex due to the differences in data structure between the two memories, and the access speed (write and erase speed) of flash memory decreases.
When, for example, both DRAM and MJT-RAM or FeRAM are mounted in structures in which DRAM is mounted together with a nonvolatile memory other than flash memory, the complexity of the cell structure and the cell area increases, and there are other problems. Thus, the mounting of both DRAM and nonvolatile memory proposed in the prior art makes it difficult to select nonvolatile memory that would provide a consolidated chip architecture that has excellent compatibility with DRAM. In view of the above, the combined mounting of PCRAM and DRAM described in Japanese Patent Application Laid Open No. 2003-229537 is under consideration. However, when both the PCRAM and DRAM are mounted, a considerable number of points must be considered regarding the circuit configuration, structure, and other aspects.
In view of the problems of the above-described prior art, an object of the present invention is to provide a memory device and a method for manufacturing a memory device that make it possible to configure a consolidated chip that uses PCRAM, which is nonvolatile memory with excellent compatibility with DRAM, does not increase the complexity of the circuitry, restrains the increase in footprint size, and increases the access speed.
In order to achieve the above-stated object, the memory device according to one aspect of the present invention is a memory device on which both a DRAM and a phase-change memory (PCRAM) are mounted and which has a DRAM bit line, a PCRAM bit line or a PCRAM source line formed on an conductive layer shared with the DRAM bit line, and a sense amplifier connected between the DRAM bit line and the PCRAM bit line.
The memory device according to another aspect of the present invention is provided with a DRAM array area and a PCRAM array area, wherein the DRAM array area has a cell capacitor having a capacitive lower electrode, a capacitive insulation film, and a capacitive upper electrode, and further has a DRAM select transistor connected to the capacitive lower electrode of the cell capacitor; the PCRAM array area has a capacitor structure comprising a capacitive lower electrode, a capacitive insulation film, and a capacitive upper electrode, and further has a phase-change element and a PCRAM select transistor that are mutually connected via the capacitive lower electrode of the capacitor structure; and the cell capacitor and the capacitor structure are formed on the same layer.
The method for manufacturing a memory device according to another aspect of the present invention is a method for manufacturing a memory device in which both DRAM and phase-change memory (PCRAM) are mounted, the method having a step for forming a DRAM bit line and a PCRAM bit line or a PCRAM source line on a shared conductive layer, and a step for connecting the DRAM bit line and the PCRAM bit line via a sense amplifier.
The method for manufacturing a memory device according to another aspect of the present invention is a method for manufacturing a memory device in which both DRAM and phase-change memory (PCRAM) are mounted, the method having a transistor layer formation step for forming in substantially the same step a transistor layer on both the DRAM array area and PCRAM array area; a capacitive layer formation step for forming in substantially the same step a capacitive layer that is the upper layer of the transistor layer and has a structure in which a capacitive lower electrode, a capacitive insulation film, and a capacitive upper electrode are sequentially laminated on both the DRAM array area and the PCRAM array area; a step for maintaining a phase-change material formation area wherein the capacitive upper electrode is partially removed in at least the PCRAM array area; and a phase-change material formation step for forming a phase-change material in the area in which at least the capacitive upper electrode has been removed.
The above and other objects, features and advantages of the present invention will become more apparent by reference to the following detailed description of the invention taken in conjunction with the accompanying drawings, wherein:
The memory device of the present invention is a consolidated chip with DRAM and PC (Phase Change) RAM, which is superior in terms of compatibility with DRAM processes and which is nonvolatile memory most proximate to DRAM in terms of cell area and access speed. The memory device according to the present invention ordinarily operates as DRAM, but information can be retained when power is off by periodically transferring data to PCRAM, which is nonvolatile memory. When a command to write data to the PCRAM is sent, the data is not immediately written to the PCRAM, but is temporarily written to the DRAM and then later written to the PCRAM, thereby compensating for the drawback of a PCRAM alone, which has a limited write endurance (up to 1E12 times).
The circuit configuration in the memory device is one in which a bit line and a sense amplifier are shared between the DRAM and PCRAM. The circuit configuration can thereby be simplified, and a consolidated chip with a small area can be achieved with fewer process steps. From the aspect of device structure, a capacitor having substantially the same structure is fabricated for both the DRAM and PCRAM, the capacitor is used as a cell capacitor in the DRAM area, and the capacitor lower electrode is used as the lower electrode of the PCRAM in the PCRAM area. The manufacturing step of the DRAM cell and the PCRAM cell can thereby be shared.
The memory array of the PCRAM (PCRAM_Array) similarly has a plurality of word lines WL_P (WL_P0, WL_P1, WL_P2, WL_P3) disposed in the form of a matrix, a plurality of bit lines BL_P (BL_P0, BL_P1), and a plurality of memory cells (PCRAM_Cell) disposed at the intersections of the word lines and bit lines. A single memory cell of the PCRAM has a single chalcogenide element (phase-change element) CND and a single select transistor (MISFET) T2 that is connected in series to the element. The source of the select transistor T2 is electrically connected to one end of the chalcogenide element CND, and the drain is electrically connected to the bit line BL_P. The bit lines BL_P of the PCRAM are connected to the sense amplifiers SA, and the sense amplifiers SA are shared with the DRAM array. One end of the word lines WL_P of the PCRAM are connected to a word driver WD. In the first embodiment, electric current flows from the source lines SLP to the bit lines BL_P.
In the present embodiment, data is transferred between the DRAM memory cell connected to a pair of complimentary bit lines BL_D0 and {tilde over ( )}BL_D0, which are themselves connected to the sense amplifier SA, and the PCRAM memory cell connected to a single bit line BL_P0 that is connected to the sense amplifier SA. When data is transferred from the DRAM to the PCRAM, for example, the word lines WL_D of the DRAM and the corresponding word lines WL_P of the PCRAM are simultaneously activated. At this time, the sense amplifier SA connects to the DRAM side by using an internal switch (not shown), and disconnects from the PCRAM side by using an internal switch (not shown). A signal from the DRAM memory cell is amplified in the sense amplifier SA, and data is written to the memory cell on the PCRAM side by using a write transistor inside the sense amplifier SA.
The above-described write operation is performed as follows. The PCRAM is a device that holds data by controlling two states: a high-resistance Reset state (the phase-change element is in an amorphous state) and a low-resistance Set state (the phase-change element is in a crystallized state) In order to allow the phase-change element to transition between the Reset and Set states, separately required electric currents must be allowed to flow to the phase-change element for a fixed length of time to cause heating. A large electric current must generally be allowed to flow for a short length of time to create a Reset state, and in order to create a Set state a smaller electric current than that for setting a Reset state must be allowed to flow for a long period of time. For this reason, the time and magnitude of the write electric current that corresponds to the write data must be separately controlled. Although not shown, a first driver element for feeding Set current to the phase-change element and a second driver element for feeding Reset current are each provided in order to carry out this control, and the signals of the pair of complimentary bit lines of the DRAM are used as the drive signals of the driver elements. The desired electric current can be allowed to flow to the phase-change element by operating only one of driver elements by using the data signals of the pair of complimentary bit lines.
The write time is controlled by opening for a required length of time the write transistor (not shown) gate disposed inside the sense amplifier SA. Such a configuration allows the required amount of electric current to flow to the memory cells of the PCRAM for the required length of time in accordance with the transfer data. When the data recorded in the memory cells of the DRAM are transferred to the corresponding memory cells of the PCRAM in this manner, batch transfer in word line units is made possible.
The method for manufacturing the memory device of the first embodiment of the present invention is described below with reference to
A photoresist is subsequently used as a mask, and phosphorus (P) ions are injected to form a deep n well 5. Another next photoresist is used as a mask, and phosphorus (P) ions are then injected to form an n well 4. Yet another photoresist is used as a mask, and boron (B) ions are then injected to form p wells 2 and 3.
Next, a gate insulation film 9 is formed by thermal oxidation in the active area in which the p wells 2 and 3 and the n well 4 were formed, as shown in
A polysilicon film 10a in which phosphorus (P) is introduced as an impurity at a concentration of 3×1012 atoms/cm3 is subsequently deposited to a thickness of 50 nm on the entire surface of the semiconductor substrate 1, and a tungsten film 10b is then deposited to a thickness of 100 nm, for example. Although not depicted in the diagrams, a tungsten nitride (WN) film, for example, is inserted at this time at the interface between the tungsten film 10b and polysilicon film 10a with the aim of preventing a reaction between the two. The polysilicon film 10a may be formed by CVD (Chemical Vapor Deposition), and the tungsten film 10b and tungsten nitride film may be formed by sputtering.
A silicon nitride film 12 is thereafter deposited to a thickness of 200 nm, for example. The laminated films are then patterned using photolithography and dry etching, and gate electrodes (word lines WL_D, WL_P) 11 and a cap insulation layer 12 are formed. The pattern of the word lines at this time are shown in
The PCRAM array area is constructed in the same manner as the DRAM array area, and the word lines 11 in the PCRAM array area are formed by the same process as the word lines in the DRAM array area. Preferably formed in the PCRAM array area in particular is a shallow and highly concentrated semiconductor area 13b for the purpose of assuring the electric current of select transistor T2 as well as reducing the contact resistance of the memory cell contact of the PCRAM_lower electrode and the contact resistance of the bit line contact of the PCRAM_memory cell described hereinbelow.
Next, the cap insulation film 12 and gate electrodes are masked using a photoresist (not shown), and arsenic (As) or phosphorus (P) ions, for example, are injected as impurities in the area in which the n-channel MISFET of the peripheral circuit area and the DRAM memory cell area are formed, forming a low-concentration impurity area 14a of the n-channel MISFET and a semiconductor area 13. Boron (B) ions are then injected as impurities, for example, in the area in which the p-channel transistor of the peripheral circuit area is formed, and a low-concentration impurity area 14a of the p-channel transistor is formed.
A silicon nitride film 15 is then deposited to a thickness of 30 nm, for example, on the entire surface of the semiconductor substrate 1. The silicon nitride film 15 is thereafter subjected to anisotropic dry etching, leaving the remainder on the side walls of the gate electrodes and the cap insulation film 12. Next, a photoresist film is formed on the DRAM memory cell area and on the area in which the n-channel MISFETQn of the peripheral circuit area is to be formed; boron (B) ions, for example, are injected as impurities with the photoresist film and silicon nitride film 15 acting as a mask; and a high-concentration impurity area 14b of the p-channel MISFETQp is formed. A photoresist film is formed on the DRAM memory cell area and on the area in which the p-channel MISFETQp of the peripheral circuit area is to be formed, the photoresist film and the silicon nitride film 15 are used as a mask, phosphorus (P) ions are injected as impurities, and the high-concentration impurity area 14b of the n-channel MISFETQn is formed (
Next, a silicon oxide film is formed to a thickness of 400 nm by CVD, for example, as shown in
Memory cell contacts 18 (18a and 18b) of the DRAM array area are then opened using photolithography and dry etching, as shown in
An insulation film 20 is then formed on the entire surface of the semiconductor substrate 1. The TEOS oxide film described above is formed to a thickness of 50 nm, for example, on the surface of the insulation film 20 (shown in
Next, in the PCRAM array area, memory contacts 21 (21a and 21b) are opened by using photolithography and dry etching, as shown in
Next, a bit line 25 shared by the PCRAM and DRAM is formed, as shown in
Next, in order to form the bit line 25, a tungsten film, for example, is deposited on the entire surface of the semiconductor substrate 1 to a thickness of twice or more of the diameter of the connection holes 24 (24a to 24c) by CVD. The connection holes 24 are thereby covered by the tungsten film, and the embedded tungsten film forms a metal plug. A desired bit line is then patterned by photolithography and dry etching. The wiring represents the bit lines 25a and 25c in the DRAM array area and PCRAM array area, and the local wiring 25b in the peripheral circuit area.
Here, a cobalt (Co), titanium (Ti), tantalum (Ta), tungsten (W), or other silicide film is preferably formed prior to the formation of the bit line 25 in order to assure good electrical conductivity with the undercoating elements with which the metal plugs make contact, that is to say, with the polysilicon plug 19 in the DRAM array area and with the high-concentration impurity area 14b. The latter is the source and drain areas of the MISFET in the peripheral circuit area.
When there is a difference between the metal film thickness required to embed the connection holes 24 and the film thickness required for the bit line 25, the plug portion may be first embedded in the connection holes 24, and the bit line portion is then formed. In such a case, the metal material of the bit line may be different than the material of the metal plug that fills the through holes 24. When, for example, tungsten is selected as the metal material of the bit line, a copper film or another metal film may be used as the metal plug material that fills the through holes 24. However, considering the reduction in reliability due to thermal diffusion of the metal atoms into the semiconductor substrate 1, the metal plug material is preferably a high melting metal. Examples thereof include molybdenum (Mo), tantalum (Ta), and niobium (Nb).
In this manner, the bit line 25a of the DRAM array area and the bit line 25c of the PCRAM array area are simultaneously formed on the same conductive layer.
Next, an insulation film 26 is formed on the upper layer of the bit line 25, as shown in
Simultaneously opened thereafter by suitably applying photolithography and dry etching are a connection hole 28a for connecting a plug 18b and a capacitive lower electrode 34a described hereinbelow in the DRAM array area, and a connection hole 28b for connecting a plug 21b and a lower electrode 34b of a chalcogenide element described hereinbelow in the PCRAM array area. However, since the connection holes 28a and 28b are disposed between the bit lines BL_D and BL_P, as shown in
Next, connection holes 29a and 29b are simultaneously formed by using the above-described pattern as a mask, and dry etching the insulation films 26, 23, and 20.
A film that acts as a plug 31 (31a and 31b) is deposited on the entire surface of the semiconductor substrate 1 to a thickness of twice or more of the diameter of the connection holes 29 (29a and 29b), as shown in
Next, plugs 31 (31a and 32b) embedded only inside the connection holes 29 are formed by performing, for example, CMP-based polishing on the conductive film 30 deposited in order to embed the connection holes 29, as shown in
As described above, the sidewall spacer 27b and the hard mask 27a are preferably the same material as the film 30 for embedding the connection holes 29. The spacer and the mask have been formed in order to form the connection holes 29 shown in
Constructed next are the capacitive lower electrode 34a in the DRAM array area and the lower electrode 34b of the chalcogenide element in the PCRAM array area, as shown in
A method for opening a cylinder 33a in the insulation film 32 and forming the capacitive lower electrode 34a inside the cylinder is adopted in the formation of the capacitive lower electrode 34a. In accordance with this method, a difference in the height between the DRAM array area and the peripheral circuit area due to the height of the capacitive lower electrode 34a can be prevented, the focal depth in photolithography can be provided with greater tolerance, and wiring in the upper layer in particular can be made stable for microfabrication.
First, an insulation layer 32 (32a, 32b, and 32c) is formed to a thickness that is greater than the height required for the capacitive lower electrode 34a, and a cylinder 33a for forming a lower electrode is formed. Plasma TEOS oxide film, for example, is preferably used as the thick intermediate insulation film 32b of the insulation films 32, and silicon nitride films are preferably used as the upper and lower thin insulation films 32a and 32c. The cylinder 33a for forming a lower electrode is preferably formed by three-stage etching that has a first etching step for etching a silicon nitride film 32c with the TEOS oxide film 32b acting as a stopper, a second etching step for etching TEOS oxide film 32b with the silicon nitride film 32a acting as a stopper, and a third etching step for etching the silicon nitride film 32a. Excessive etching of the insulation film 26 formed below the cylinder 33a for forming a lower electrode can thereby be prevented.
The capacitive lower electrode 34a is formed next. Titanium nitride (TiN), tantalum nitride (TaN), tungsten nitride (WN), titanium aluminum nitride (TiAlN), ruthenium (Ru), iridium (Ir), platinum (Pt), or the like is deposited by CVD or ALD (Atomic Layer Deposition) on the capacitive lower electrode 34a to a thickness that is about ⅓ that of the narrow side of the lower electrode cylinder 37. To separate the lower electrode of the adjacent cell, the electrode may be embedded in a photoresist to protect the lower electrode inside the cylinder, and etchback by dry etching may be performed in this state to remove the capacitive lower electrode 34a formed on the upper surface of the silicon nitride film 32a. The capacitive lower electrode 34a is thereby left remaining only inside the cylinder. Polishing by CMP may be used in lieu of etching back as the method of removing the unnecessary capacitive lower electrode 34a. The photoresist previously used for embedding is removed following the etchback to complete the formation of the capacitive lower electrode 34a.
The capacitive insulation film 35 and capacitive upper electrode 36 are then formed as shown in
Envisioned in the above description is the case in which an MIM (Metal Insulator Metal) structure capacitor is used as the DRAM capacitance, but in addition to this, an MIS (Metal Insulator Semiconductor) structure that uses a polysilicon film, for example, may be used as the lower electrode. In this case, the polysilicon film which will serve as the lower electrode is preferably subjected to thermal nitridation before the capacitive insulation film is formed on the lower electrode, in order to minimize the formation of a layer with a low dielectric constant at the boundary.
Since the steps described above are carried out simultaneously in the PCRAM array area, a capacitor having the same structure as the DRAM array area can also be formed in the PCRAM array area, as shown in
A chalcogenide element is formed next, as shown in
Next, the lower electrode 34b of the chalcogenide element formed earlier simultaneously with the DRAM capacitive lower electrode 34a is exposed by removing the capacitive upper electrode 36 of the exposed PCRAM array area and the underlying capacitive insulation film 35 by dry etching.
Ge2Sb2Te5may then be deposited to a thickness of between 50 nm and 200 nm as the chalcogenide film 39 on the entire surface of the semiconductor substrate 1, and a tungsten film may be further deposited to a thickness of 100 nm as the upper electrode 40, by sputtering, for example. A chalcogenide element CDN such as that shown in
Silicon oxide film is deposited by plasma deposition, for example, as the interlayer insulation film 41 on the entire surface of the semiconductor substrate 1, as shown in
A second layer wiring 43 is furthermore formed, and the second layer wiring 43 and capacitive upper electrode 36 or first layer wiring (bit line) 25b are connected via a connection hole 42. A laminate composed of titanium nitride (TiN), aluminum (Al), and a titanium nitride, for example, may be used as the second layer wiring 43, and laminate composed of titanium (Ti), titanium nitride, and tungsten may be used at the connection hole 42. A third layer of wiring or more layers of wiring may be disposed on the second layer wiring 43 by way of an interlayer insulation film, but a description thereof is omitted.
First, the bit line 25 and interlayer insulation film 26 as the overlying layer are formed by the same steps as those used up to
The DRAM capacitive insulation film 35 and DRAM capacitive upper electrode 36 are thereafter formed by the same method and with the same materials as the first embodiment. A new interlayer insulation film 38 is furthermore deposited thereon, and the uneven portions of the DRAM capacitive portion are smoothed.
Capacitors having the same structure are thereby formed in the DRAM array area and PCRAM array area.
Next, a connection hole 44 is formed in the interlayer insulation film 38 in the PCRAM array area by using photolithography and dry etching. Since the narrow side direction of the lower electrode 34c is ordinarily equal to the smallest workable dimension, the narrow side dimensions of the connection hole 44 and lower electrode 34c are substantially equal in the direction orthogonal to this direction, although this is not depicted in
Metal or a nitride thereof is next deposited by CVD, for example, as the PCRAM lower electrode 46 inside the connection hole 44 in which the side wall 45 is formed, and a plug-shaped PCRAM lower electrode 46 is subsequently constructed by polishing with CMP, for example.
Next, a chalcogenide film 39 and an upper electrode 40 (source line) are deposited to a desired thickness by sputtering, for example, and patterning is performed by using photolithography and dry etching.
Since the PCRAM lower electrode 46, chalcogenide film 39, and upper electrode 40 are the same as the first embodiment, a description thereof is omitted.
Next, the fourth embodiment of the present invention is described in detail with reference to
First, a transistor layer LT and capacitive layer LC are sequentially constructed by the same steps as those used from
Next, an opening 52 for forming a chalcogenide element is formed in the interlayer insulation film 51 in the PCRAM array area using photolithography and dry etching, as shown in
Next, Ge2Sb2Te5, for example, is then deposited by sputtering as the chalcogenide film 54 inside the opening 52 in which the side wall 53 is formed, as shown in
A tungsten film is subsequently deposited by sputtering to a thickness of, for example, about 100 nm as an upper electrode 55 of the chalcogenide element on the surface of the interlayer insulation film 51 that includes the upper surface of the chalcogenide film 54, as shown in
Next, a silicon oxide film is formed by plasma deposition, for example, as the interlayer insulation film 41 on the entire surface of the semiconductor substrate 1, and the surface of the silicon oxide film is smoothed by polishing with the CMP method in order to remove the uneven portions of the silicon oxide film. The connection hole 42 and second layer wiring 43 are then formed, and a connection is formed via the connection hole 42 between the second layer wiring 43 and capacitive upper electrode 36, or the second layer wiring 43 and first layer wiring (bit line) 25b.
The PCRAM manufactured in this manner is configured with a capacitive insulation film 35 disposed between the chalcogenide film 54 and lower electrode 34b. Therefore, electric current does not flow, and the phase state of the chalcogenide film 54 cannot be changed. However, the insulation of the capacitive insulation film 35 is destroyed by applying a prescribed electric field to the capacitive insulation film 35, and since a very small hole (pinhole) is formed, the electrical conductivity of the capacitive insulation film 35 can be obtained, enabling the phase-change of the chalcogenide element. In this case, since the electric current pathway inside the chalcogenide film 54 is not dispersed and the electric current concentrates in the pinhole, the phase change of the chalcogenide film 54 can be efficiently carried out. Depending on the selection of the material of the capacitive insulation film, it is also possible to dispose with a special step for forming a pinhole.
Thus, in accordance with the present embodiment, in addition to the effects of the invention of the fourth embodiment described above, it is possible to eliminate the step for embedding a chalcogenide film 54 and the step for removing excess chalcogenide film by CMP, for example. Since the chalcogenide film 54 is not directly worked, it is also possible to reduce damage to the chalcogenide film 54.
The manufacturing method of the memory device in accordance with the present embodiment is described next. First, an opening 52 is formed in the interlayer insulation film 38, as shown in
The present invention is not limited to the embodiments described above, and it is possible to make various modifications within a scope that does not depart from the spirit of the present invention, and such modifications naturally are included in the scope of the present invention.
As described above, in accordance with the memory device of the present invention and the memory device obtained by the manufacturing method of the present invention, the configuration of the memory device is made simple because the complimentary bit line of the DRAM and the bit line of the PCRAM are configured on a shared conductive layer, and a sense amplifier is disposed between the two.
Since the structure of the PCRAM array area and DRAM array area can be made substantially the same, the manufacturing process is not made more complicated. It is thereby possible to fabricate a memory device in which both DRAM and PCRAM are mounted by adding a few processes to the conventional DRAM process. In particular, PCRAM is formed at a lower temperature than the DRAM capacitive layer. Therefore, forming the DRAM capacitive layer after the PCRAM makes it impossible to control the PCRAM crystals in the high-temperature process. However, forming the PCRAM at a lower process temperature after forming the DRAM capacitive layer makes it possible to form PCRAM without degradation in characteristics.
The present invention is particularly advantageously used in semiconductor devices that are used in cases in which both DRAM and PCRAM (nonvolatile memory) are mounted in a plane on the same chip.
Number | Date | Country | Kind |
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2005-072469 | Mar 2005 | JP | national |
2006-037090 | Feb 2006 | JP | national |
Number | Name | Date | Kind |
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20050185444 | Yang et al. | Aug 2005 | A1 |
20060148135 | Matsuoka et al. | Jul 2006 | A1 |
Number | Date | Country |
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2003-91463 | Mar 2003 | JP |
2003-229537 | Aug 2003 | JP |
Number | Date | Country | |
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20060211231 A1 | Sep 2006 | US |