The present patent document relates generally to random access memory (RAM). More particularly, the present patent document relates to write-verify operations in RAM comprising bipolar memory elements. The methods and devices described herein are particularly useful in spin-transfer torque magnetic memory (STT-MRAM) devices.
Magnetoresistive random-access memory (“MRAM”) is a non-volatile memory technology that stores data through magnetic storage elements. These elements are two ferromagnetic plates or electrodes that can hold a magnetic field and are separated by a non-magnetic material, such as a non-magnetic metal or insulator. This structure is known as a magnetic tunnel junction (“MTJ”). In general, one of the plates has its magnetization pinned (i.e., a “reference layer”), meaning that this layer has a higher coercivity than the other layer and requires a larger magnetic field or spin-polarized current to change the orientation of its magnetization. The second plate is typically referred to as the free layer and its magnetization direction can be changed by a smaller magnetic field or spin-polarized current relative to the reference layer.
MRAM devices store information by changing the orientation of the magnetization of the free layer. In particular, based on whether the free layer is in a parallel or anti-parallel alignment relative to the reference layer, either a “1” or a “0” can be stored in each MRAM cell. Due to the spin-polarized electron tunneling effect, the electrical resistance of the cell change due to the orientation of the magnetic fields of the two layers. The cell's resistance will be different for the parallel and anti-parallel states and thus the cell's resistance can be used to distinguish between a “1” and a “0”. One important feature of MRAM devices is that they are non-volatile memory devices, since they maintain the information even when the power is off. The two plates can be sub-micron in lateral size and the magnetization direction can still be stable with respect to thermal fluctuations.
MRAM devices are considered as the next generation structures for a wide range of memory applications. MRAM products based on spin torque transfer switching are already making its way into large data storage devices. Spin transfer torque magnetic random access memory (“STT-MRAM”) or spin transfer switching, uses spin-aligned (“polarized”) electrons to change the magnetization orientation of the free layer in the magnetic tunnel junction. In general, electrons possess a spin, a quantized number of angular momentum intrinsic to the electron. An electrical current is generally unpolarized, i.e., it consists of 50% spin up and 50% spin down electrons. Passing a current though a magnetic layer polarizes electrons with the spin orientation corresponding to the magnetization direction of the magnetic layer (i.e., polarizer), thus produces a spin-polarized current. If a spin-polarized current is passed to the magnetic region of a free layer in the magnetic tunnel junction device, the electrons will transfer a portion of their spin-angular momentum to the magnetization layer to produce a torque on the magnetization of the free layer. Thus, this spin transfer torque can switch the magnetization of the free layer, which, in effect, writes either a “1” or a “0” based on whether the free layer is in the parallel or anti-parallel states relative to the reference layer.
STT-MRAM devices belong to a class of devices relying on bipolar memory elements. Bipolar memory elements use currents to “write” data to a memory element. Depending on the direction of current flow, a logic high (1) or logic low (0) bit may be written to the memory element. Such bipolar memory devices may include MRAM, resistive random-access memory (RRAM), phase-change memory (PCM), among others. For example, RRAM devices may utilize memristors as a memory element. Current flowing in one direction may be used to write a logic (1) to the memristor. Current flowing in the opposite direction may be used to write a logic (0) to the memristor.
A typical MRAM device with a polarizer layer and an MTJ is shown in
The first magnetic layer 114 in the SAF layer 120 is disposed over seed layer 110. SAF layer 120 also has a antiferromagnetic coupling layer 116 disposed over the first magnetic layer 114. Furthermore, a nonmagnetic spacer 140 is disposed on top of MTJ 130 and an optional polarizer 150 is disposed on top of the nonmagnetic spacer 140. Polarizer 150 is a magnetic layer that in an embodiment has a magnetic direction in its plane, but is perpendicular to the magnetic direction of the reference layer 132 and free layer 136. Polarizer 150 is provided to polarize a current of electrons (“spin-aligned electrons”) applied to MTJ structure 100. Note that in other embodiments, polarizer 150, if present, can also have a magnetic direction perpendicular to its plane, just as the reference layer 132 and free layer 136. Further, one or more capping layers 160 can be provided on top of polarizer 150 to protect the layers below on MTJ stack 100. Finally, a hard mask 170 is deposited over capping layers 160 and is provided to pattern the underlying layers of the MTJ structure 100, using a reactive ion etch (RIE) process.
The resistance of the magnetic memory device is sensitive to the relative orientation of the magnetization vector of the free magnetic layer and the magnetization vector of the reference layer. The resistance of the magnetic memory device is highest when the magnetization vectors of the free magnetic layer and the reference layer, respectively, are in anti-parallel alignment. The resistance of the magnetic device is lowest when the magnetization vectors of the layers free magnetic layer and the reference layer, respectively, are in parallel alignment. Thus, a resistance measurement or its equivalent can determine the orientation of the magnetization vector of the free magnetic layer.
In an MRAM memory write operation, a verify operation can be used to check if a write operation has completed successfully and that the correct data has been written. Typically, a verify operation is performed in a similar fashion to a read operation. For example, a read could be implemented with a bias condition where the bit line is driven to a high potential, while the source line is driven to a low potential to generate current across the MTJ so that the resistance measurement can be made. A verify operation may also be implemented in other bipolar memory elements including RRAM and PCM among others.
In these devices, data is stored in program latches during both write and verify operations. Data stored in the latches (write buffer) determines the voltage condition on bit lines during write operations. In write operations, bit line and source line bias are dependent on the data stored. For example, if the data to be written is logic zero (0), the bit line can be driven high while the source line is driven low. If the data to be written is logic one (1), the opposite bias condition would need to exist in order to reverse the polarity of current flow across the MTJ. In this case for writing logic one (1), the source line would be driven high while the bit line would be driven low.
During either read or verify operations, the bit line is usually at a high voltage (but at a lower voltage than during a write operation) while the source line is at a low voltage, generally close to zero volts. Normally, a write verify operation can be implemented in a similar manner to a read operation. However, the operation presented above can result in what is known as a disturb condition, which occurs when a verify operation is performed after a write logic one (1) operation. In this case, the memory bit is written with the source being driven to a high voltage while the bit line is driven to a low voltage. Thus, during a verify operation, the data would be read with the opposite polarity of the bit line and source line than would normally be done during a read operation. Prior circuitry used for write, read, and verify operations is shown in
During write (0), verify, and read operations, voltage node 214 on source line is driven low while voltage node 216 on bit line is driven high. The opposite bias conditions may also be applied for write (0), verify, and read operations and are dependent simply on naming convention for write (0). The reader will also appreciate that verify and read operations occur with the same bias conditions. Voltage node 214 may be driven to ground or otherwise held close to 0V. Voltage node 216 may be driven to a positive voltage. Voltage node 216 is driven to for example, 1.0 V for verify operations; 1.2 V for read operations; and a higher voltage for write operations. Voltage is applied to word line 212 to activate select transistor 206 to allow current i to flow between bit line and source line.
During write (0) operation, the voltage differential across memory cell 202 causes current i to flow. Current i causes the magnetization of free layer of MTJ 204 to align, or become parallel, with the reference layer of MTJ 204. During verify and read operation, the current i is not sufficient to alter the state of free layer and the bit stored in MTJ 204 may be ascertained.
Bipolar memory device 250 of
However, performing a write (1) operation as shown in
Thus, advantageous write-verify operation is necessary to reduce disturb conditions when verifying data bits in bipolar memory devices.
Exemplary embodiments of the present disclosure are directed to advantageous write verify operations in bipolar memory devices. Moreover, the present disclosure discloses a beneficial read operation.
An advantageous write verify operation for bipolar memory devices is disclosed. The verify operation is performed under the same bias conditions as the write operation. Thus, the verify operation reduces disturb conditions caused when verify operation is performed in opposite bias to write operation.
In one embodiment, the method comprises writing a data bit into a memory cell. The memory cell comprises a bipolar memory element and a select transistor. The memory cell is coupled between a bit line and a source line. The write operation is performed by applying a first voltage across the source line and bit line to supply a first current to write the data bit into the memory cell. The first voltage differential may comprise a first polarity if a logic high is to be written to the memory cell. The first voltage differential may be a second polarity if a logic low is to be written to the memory cell.
The method may further comprise verifying the data bit written to the memory cell by applying a second voltage across the memory cell. The second voltage differential may be the first polarity if a logic high was written. Likewise, the second voltage differential may be the second polarity if a logic low was written.
In an embodiment, the first voltage differential may be applied using a first bias circuit couple to the source line and a second bias circuit coupled to the bit line. In an embodiment, the second voltage differential may likewise be applied with a first bias circuit coupled to the source line and a second bias circuit coupled to the bit line. In another embodiment, the verify operation may detect a logic level corresponding to the data bit in the bipolar memory element using a sense amplifier coupled to the source line. In another embodiment, the verify operation may detect a logic level corresponding to the data bit in the bipolar memory element using a sense amplifier coupled to the bit line. In another embodiment, the second voltage differential may applied by trimming a voltage applied when applying the second voltage differential. The second voltage differential being of opposite polarity to a voltage differential applied during a read operation.
In another embodiment, bias circuits coupled to a mux may apply the first voltage differential. The mux may be coupled to the source line and the bit line. The mux may select whether to drive the voltage high on the source line or the bit line based on data in a program latch. In another embodiment, bias circuits coupled to a mux may apply the second voltage differential. The mux may be coupled to the source line and the bit line. The mux may select whether to drive the voltage high on the source line or the bit line based on data in a program latch.
In another embodiment, an advantageous read operation is disclosed. The read operation may comprise reading a data bit written into the memory cell by applying a second voltage differential. The read operation may be performed by selecting whether to drive the source line or the bit line high based on a register bit in a mux coupled to the source line and the bit line. In an embodiment, the source line is selected to be driven high to perform the read operation. In another embodiment, the bit line is selected to be driven high to perform the read operation.
In embodiments, the bipolar memory element may comprise a magnetic tunnel junction, a perpendicular magnetic tunnel junction, a memristor, or chalcogenide glass.
The advantageous write verify operation may be performed with control logic on source and bit lines. In another embodiment, the advantageous write operation is performed with a multiplexer (mux) coupled to control logic. The mux determines whether verify (0) or verify (1) operation should be performed based on data in a program latch. Moreover, the mux may select bias conditions for read operations based on a register bit. Trim circuits optionally provide guard banding and modify reference voltages for verify operations performed in opposite polarity to normal read operation.
The present disclosure performs a verify operation for a bipolar memory device under the same bias conditions as a write operation. Thus, if a write (0) operation is performed with bit line high and source line low, the verify (0) operation is also performed with bit line high and source line low. Likewise, if a write (1) operation is performed with bit line low and source line high, the verify (1) operation may be also performed with bit line low and source line high. This is different compared to past verify operations that were performed under one bias condition, for example, with bit line high and source line low. If that was the case, the verify (1) operation was performed in opposite bias to the write (1) operation which resulted in a disturb condition.
Moreover, the present disclosure performs the verify operations utilizing several exemplary bipolar memory devices. In one embodiment, control of logic levels place on the source and bit lines can be implemented by coupling one or more bias circuits to each of the source and bit lines, respectively. In an alternative embodiment, the control of the logic levels placed on the source and bit lines can be implemented with bias circuits coupled to a mux. In an alternative embodiment, the bias circuits may be themselves be integrated into the sense amplifier.
In an embodiment, trimming circuits compensate for the fact that verify (1) operation, for example, is performed in opposite bias condition to a read operation. Because voltage drop across the transistor may be different depending upon the read/verify bias, trimming circuits may adjust the voltage as needed.
Because verify operations are performed similar to read operation, in an embodiment, the mux may select the direction of read operation based on a register bit. If read operation should be performed in verify (0) direction a register bit can determine that source line should be driven low while bit line should be driven high. If read operation should be performed in verify (1) direction a register bit can determine that source line should be driven high while bit line should be driven high.
The accompanying drawings, which are included as part of the present specification, illustrate the presently preferred embodiments and together with the general description given above and the detailed description of the preferred embodiments given below serve to explain and teach the principles described herein.
The following description is presented to enable any person skilled in the art to create and use a bipolar memory devices with an advantageous write verify operation. Each of the features and teachings disclosed herein can be utilized separately or in conjunction with other features to implement the disclosed apparatus and method. Representative examples utilizing many of these additional features and teachings, both separately and in combination, are described in further detail with reference to the attached drawings. This detailed description is merely intended to teach a person of skill in the art further details for practicing preferred aspects of the present teachings and is not intended to limit the scope of the claims. Therefore, combinations of features disclosed in the following detailed description may not be necessary to practice the teachings in the broadest sense, and are instead taught merely to describe particularly representative examples of the present teachings.
In the following description, for purposes of explanation only, specific nomenclature is set forth to provide a thorough understanding of the present teachings. However, it will be apparent to one skilled in the art that these specific details are not required to practice the present teachings. The features and advantages of the present disclosure are taught through exemplary STT-MRAM devices. However, one of ordinary skill in the art will understand that the teachings of the present disclosure apply to other bipolar memory elements including MRAM, RRAM, PCM, and RAM using other bipolar memory elements.
Since data is known during a verify operation, a verify operation can be implemented with the same operational polarity as during the write operation. Doing so avoids disturb issues since the current flow is in the same direction for both write and verify operations. As is the case with a write operation, during a verify operation, the data (e.g., logic low (0) or logic high (1)) stored in the write latch/buffer will determine the bias condition (e.g., low voltage or high voltage on the source line and bit line). Note that the write latch/buffer is disposed adjacent to the memory array. There may or may not be decoding between the memory array and the write/latch buffer to reduce the total number of required write/latch buffers. In an alternative embodiment, write latch/buffer may be combined with the Sense Amplifier Block.
During write (0), verify (0), and read operations, voltage node 314 on source line 308 is driven low while voltage node 316 on bit line 310 is driven high. The opposite bias conditions may also be applied for write (0), verify (0), and read operations and are dependent simply on naming convention for write (0). Voltage node 314 may be driven to ground or otherwise held close to 0V. Voltage node 316 may be driven to a positive voltage. Voltage node 316 is driven to, for example, 1.0 V for verify operations; 1.2 V for read operations; and a higher voltage for write operations. Note that verify operations are typically more stringent than read operations. This is to ensure that future read operations occur correctly. Thus, verify and read operations could also be completed at the same voltage, for example, 1.2 V. However, voltage for verify operation could be applied for less time, for example 18 ns, than is applied for read operations, for example, 20 ns. Alternatively read and verify could be performed at same voltage and timing, using different reference voltages for the two operations. Voltage is applied to word line 312 to activate select transistor 306 to allow current i to flow between bit line and source line.
Consistent with operation of exemplary bipolar memory device 350, during write (0) operation, current i causes the magnetization of free layer of MTJ 304 to align, or become parallel, with the reference layer of MTJ 304. One of ordinary skill in the art will understand that in other embodiments, current i could cause free layer of MTJ 304 to become anti-parallel with reference layer which would result in write (1) or (0) operation depending on naming conventions. During read operation, the current i is not sufficient to alter the state of free layer and the bit stored in MTJ 304 may be ascertained. Typically, verify voltage applied to voltage node 316 is lower than the voltage for read operation to ensure that future read operations are accurate. However, this may not necessarily be the case and verify voltage could be at the same voltage value as read voltage, but simply applied for a shorter time as discussed above.
In summary, when a logic low (0) is written, a high voltage will also be placed on the bit line and a low voltage will be placed on the source line. During the verify operation for this write operation, a high voltage will also be placed on the bit line while a low voltage will be placed on the source line.
Bipolar memory device 350 of
Unlike the situation where a logic low (0) is written, when a logic high (1) is written, low voltage was placed on the bit line and a high voltage was placed on the source line. During the verify operation for this write operation, unlike in past devices, a low voltage is also placed on the bit line while a high voltage is also placed on the source line. This is exactly the opposite of prior devices, and may provide for faster verify operations. Moreover, because write (1) and verify (1) operations are performed under the same polarity, such verify operations do not result in a disturb condition, since the bit line and source line does not need to change to opposite polarities when transitioning from a write operation to a verify operation. The bit line remains at a low voltage for both write and verify. Likewise, the source line remains at high voltage for both write and verify, although the voltage level itself should be lower than the voltage level on the source line during the write operation.
Bipolar memory device 400 further includes control logic 414 coupled to source line 408. Moreover, bipolar memory device 400 includes control logic 416 coupled to bit line 410. Control logic 414 and 416 may comprise sense amplifier, bias circuits and program latches. As can be seen in
During write operations, bias circuits coupled to bit line 408 and source line 410 drive the voltage on bit and source lines as described in
During write and verify operations, program latch coupled to bias circuits may be used to determine the voltages to be placed on source and bit lines. That is program latch determines that logic high (1) should have been written to MTJ 404 during the previous write cycle. Bias circuits would then drive source line high and bit line low as described in
Bias circuits may optionally include trim circuits. Trim circuits perform a variety of functions. First, during verify (0) operation, trim circuits may reduce the voltage or the time that the voltage is applied for verify operation. That is because verify operation should be performed more stringently than read operation. Thus, trim circuits perform guard banding functions during verify operation. Moreover, verify (1) operation occurs at an opposite polarity to read operation. Thus, trim circuits may flip the voltage as applied during normal read operation in order to perform verify (1) operation. Because verify (1) operation as described in
Designers of bipolar memory devices also commonly adjust trim circuits during testing to ensure proper operation of bipolar memory devices in the field. Typically, trim circuits are adjusted for process variation and temperature effects (PVT) to ensure that source and bit lines are driven to proper voltages. Moreover, trim circuits may be adjusted so that currents through bipolar memory devices to not damage components of bipolar memory devices such as select transistors and bipolar memory elements. Thus, trim circuits may be used to increase yields of bipolar memory devices after fabrication of a bipolar memory device.
Bipolar memory device 500 further includes mux 514 coupled to source line 508 and bit line 510. Moreover, bipolar memory device 500 includes control logic 516 coupled to mux 514. Control logic 516 may comprise sense amplifier, bias circuits and program latches.
Control of the logic levels placed on the source and bit lines can be implemented with a single sense amplifier that is multiplexed, as is shown in
As described in the context of the embodiment shown in
Mux 514 may also be used to determine whether read operation should be performed by driving source line high or bit line high. As previously discussed, read operation is implemented similarly to verify operation. Thus, although described as performed with bit line high and source line low in
The above description and drawings are only to be considered illustrative of specific embodiments, which achieve the features and advantages described herein. Modifications and substitutions to specific process conditions can be made. Accordingly, the embodiments in this patent document are not considered as being limited by the foregoing description and drawings.
This application claims the benefit of Provisional Application No. 62/205,178, filed Aug. 14, 2015. Priority to this provisional application is expressly claimed, and the disclosure of the provisional application is hereby incorporated herein by reference in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
341801 | Fox | May 1886 | A |
5541868 | Prinz | Jul 1996 | A |
5629549 | Johnson | May 1997 | A |
5640343 | Gallagher et al. | Jun 1997 | A |
5654566 | Johnson | Aug 1997 | A |
5691936 | Sakakima et al. | Nov 1997 | A |
5695846 | Lange et al. | Dec 1997 | A |
5695864 | Slonczewski | Dec 1997 | A |
5732016 | Chen et al. | Mar 1998 | A |
5856897 | Mauri | Jan 1999 | A |
5896252 | Kanai | Apr 1999 | A |
5966323 | Chen et al. | Oct 1999 | A |
6016269 | Peterson et al. | Jan 2000 | A |
6055179 | Koganei et al. | Apr 2000 | A |
6097579 | Gill | Aug 2000 | A |
6124711 | Tanaka et al. | Sep 2000 | A |
6134138 | Lu et al. | Oct 2000 | A |
6140838 | Johnson | Oct 2000 | A |
6154349 | Kanai et al. | Nov 2000 | A |
6172902 | Wegrowe et al. | Jan 2001 | B1 |
6233172 | Chen et al. | May 2001 | B1 |
6243288 | Ishikawa et al. | Jun 2001 | B1 |
6252798 | Satoh et al. | Jun 2001 | B1 |
6256223 | Sun | Jul 2001 | B1 |
6292389 | Chen et al. | Sep 2001 | B1 |
6347049 | Childress et al. | Feb 2002 | B1 |
6376260 | Chen et al. | Apr 2002 | B1 |
6385082 | Abraham et al. | May 2002 | B1 |
6436526 | Odagawa et al. | Aug 2002 | B1 |
6458603 | Kersch et al. | Oct 2002 | B1 |
6493197 | Ito et al. | Dec 2002 | B2 |
6522137 | Sun et al. | Feb 2003 | B1 |
6532164 | Redon et al. | Mar 2003 | B2 |
6538918 | Swanson et al. | Mar 2003 | B2 |
6545906 | Savtchenko et al. | Apr 2003 | B1 |
6563681 | Sasaki et al. | May 2003 | B1 |
6566246 | deFelipe et al. | May 2003 | B1 |
6603677 | Redon et al. | Aug 2003 | B2 |
6653153 | Doan et al. | Nov 2003 | B2 |
6654278 | Engel et al. | Nov 2003 | B1 |
6677165 | Lu et al. | Jan 2004 | B1 |
6710984 | Yuasa et al. | Mar 2004 | B1 |
6713195 | Wang et al. | Mar 2004 | B2 |
6714444 | Huai et al. | Mar 2004 | B2 |
6744086 | Daughton et al. | Jun 2004 | B2 |
6750491 | Sharma et al. | Jun 2004 | B2 |
6765824 | Kishi et al. | Jul 2004 | B2 |
6772036 | You et al. | Aug 2004 | B2 |
6773515 | Li et al. | Aug 2004 | B2 |
6777730 | Daughton et al. | Aug 2004 | B2 |
6785159 | Tuttle | Aug 2004 | B2 |
6812437 | Levy et al. | Nov 2004 | B2 |
6829161 | Huai et al. | Dec 2004 | B2 |
6835423 | Chen et al. | Dec 2004 | B2 |
6838740 | Huai et al. | Jan 2005 | B2 |
6842317 | Sugita et al. | Jan 2005 | B2 |
6847547 | Albert et al. | Jan 2005 | B2 |
6887719 | Lu et al. | May 2005 | B2 |
6888742 | Nguyen et al. | May 2005 | B1 |
6902807 | Argoitia et al. | Jun 2005 | B1 |
6906369 | Ross et al. | Jun 2005 | B2 |
6920063 | Huai et al. | Jul 2005 | B2 |
6933155 | Albert et al. | Aug 2005 | B2 |
6958927 | Nguyen et al. | Oct 2005 | B1 |
6967863 | Huai | Nov 2005 | B2 |
6980469 | Kent et al. | Dec 2005 | B2 |
6985385 | Nguyen et al. | Jan 2006 | B2 |
6992359 | Nguyen et al. | Jan 2006 | B2 |
6995962 | Saito et al. | Feb 2006 | B2 |
7002839 | Kawabata et al. | Feb 2006 | B2 |
7005958 | Wan | Feb 2006 | B2 |
7006375 | Covington | Feb 2006 | B2 |
7009877 | Huai et al. | Mar 2006 | B1 |
7041598 | Sharma | May 2006 | B2 |
7045368 | Hong et al. | May 2006 | B2 |
7170778 | Kent et al. | Jan 2007 | B2 |
7190611 | Nguyen et al. | Mar 2007 | B2 |
7203129 | Lin et al. | Apr 2007 | B2 |
7227773 | Nguyen et al. | Jun 2007 | B1 |
7262941 | Li et al. | Aug 2007 | B2 |
7307876 | Kent et al. | Dec 2007 | B2 |
7324387 | Bergemont | Jan 2008 | B1 |
7335960 | Han et al. | Feb 2008 | B2 |
7351594 | Bae et al. | Apr 2008 | B2 |
7352021 | Bae et al. | Apr 2008 | B2 |
7376006 | Bednorz et al. | May 2008 | B2 |
7449345 | Horng et al. | Nov 2008 | B2 |
7476919 | Hong et al. | Jan 2009 | B2 |
7502249 | Ding | Mar 2009 | B1 |
7573737 | Kent et al. | Aug 2009 | B2 |
7598555 | Papworth-Parkin | Oct 2009 | B1 |
7619431 | DeWilde et al. | Nov 2009 | B2 |
7881095 | Lu | Feb 2011 | B2 |
7911832 | Kent et al. | Mar 2011 | B2 |
7936595 | Han et al. | May 2011 | B2 |
7986544 | Kent et al. | Jul 2011 | B2 |
8279666 | Dieny et al. | Oct 2012 | B2 |
8334213 | Mao | Dec 2012 | B2 |
8363465 | Kent et al. | Jan 2013 | B2 |
8456883 | Liu | Jun 2013 | B1 |
8492881 | Kuroiwa et al. | Jul 2013 | B2 |
8535952 | Ranjan et al. | Sep 2013 | B2 |
8574928 | Satoh et al. | Nov 2013 | B2 |
8582353 | Lee | Nov 2013 | B2 |
8617408 | Balamane | Dec 2013 | B2 |
8716817 | Saida | May 2014 | B2 |
8737137 | Choy et al. | May 2014 | B1 |
8852760 | Wang et al. | Oct 2014 | B2 |
9019754 | Bedeschi | Apr 2015 | B1 |
9082888 | Kent et al. | Jul 2015 | B2 |
9245608 | Chen et al. | Jan 2016 | B2 |
9263667 | Pinarbasi | Feb 2016 | B1 |
9337412 | Pinarbasi et al. | Mar 2016 | B2 |
9362486 | Kim et al. | Jun 2016 | B2 |
9378817 | Kawai | Jun 2016 | B2 |
9406876 | Pinarbasi | Aug 2016 | B2 |
9472282 | Lee | Oct 2016 | B2 |
9472748 | Kuo et al. | Oct 2016 | B2 |
9484527 | Han et al. | Nov 2016 | B2 |
9548445 | Lee et al. | Jan 2017 | B2 |
20020090533 | Zhang et al. | Jul 2002 | A1 |
20020105823 | Redon et al. | Aug 2002 | A1 |
20020132140 | Igarashi et al. | Sep 2002 | A1 |
20030117840 | Sharma et al. | Jun 2003 | A1 |
20030151944 | Saito | Aug 2003 | A1 |
20030197984 | Inomata et al. | Oct 2003 | A1 |
20030218903 | Luo | Nov 2003 | A1 |
20040012994 | Slaughter et al. | Jan 2004 | A1 |
20040061154 | Huai et al. | Apr 2004 | A1 |
20040094785 | Zhu et al. | May 2004 | A1 |
20040130936 | Nguyen et al. | Jul 2004 | A1 |
20040257717 | Sharma et al. | Dec 2004 | A1 |
20050041342 | Huai et al. | Feb 2005 | A1 |
20050051820 | Stojakovic et al. | Mar 2005 | A1 |
20050063222 | Huai et al. | Mar 2005 | A1 |
20050104101 | Sun et al. | May 2005 | A1 |
20050128842 | Wei | Jun 2005 | A1 |
20050136600 | Huai | Jun 2005 | A1 |
20050158881 | Sharma | Jul 2005 | A1 |
20050174702 | Gill | Aug 2005 | A1 |
20050180202 | Huai et al. | Aug 2005 | A1 |
20050184839 | Nguyen et al. | Aug 2005 | A1 |
20050201023 | Huai et al. | Sep 2005 | A1 |
20050237787 | Huai et al. | Oct 2005 | A1 |
20050280058 | Pakala et al. | Dec 2005 | A1 |
20060018057 | Huai | Jan 2006 | A1 |
20060049472 | Diao et al. | Mar 2006 | A1 |
20060087880 | Mancoff et al. | Apr 2006 | A1 |
20060092696 | Bessho | May 2006 | A1 |
20060132990 | Morise et al. | Jun 2006 | A1 |
20060227465 | Inokuchi et al. | Oct 2006 | A1 |
20070019337 | Apalkov et al. | Jan 2007 | A1 |
20070242501 | Hung et al. | Oct 2007 | A1 |
20080049488 | Rizzo | Feb 2008 | A1 |
20080112094 | Kent et al. | May 2008 | A1 |
20080151614 | Guo | Jun 2008 | A1 |
20080259508 | Kent et al. | Oct 2008 | A2 |
20080297292 | Viala et al. | Dec 2008 | A1 |
20090046501 | Ranjan et al. | Feb 2009 | A1 |
20090072185 | Raksha et al. | Mar 2009 | A1 |
20090091037 | Assefa et al. | Apr 2009 | A1 |
20090098413 | Kanegae | Apr 2009 | A1 |
20090161421 | Cho et al. | Jun 2009 | A1 |
20090209102 | Zhong et al. | Aug 2009 | A1 |
20090231909 | Dieny et al. | Sep 2009 | A1 |
20100080040 | Choi | Apr 2010 | A1 |
20100124091 | Cowburn | May 2010 | A1 |
20100193891 | Wang et al. | Aug 2010 | A1 |
20100232206 | Li | Sep 2010 | A1 |
20100246254 | Prejbeanu et al. | Sep 2010 | A1 |
20100271870 | Zheng et al. | Oct 2010 | A1 |
20100290275 | Park et al. | Nov 2010 | A1 |
20110001108 | Greene | Jan 2011 | A1 |
20110032645 | Noel et al. | Feb 2011 | A1 |
20110058412 | Zheng et al. | Mar 2011 | A1 |
20110089511 | Keshtbod et al. | Apr 2011 | A1 |
20110133298 | Chen et al. | Jun 2011 | A1 |
20120052258 | Op DeBeeck et al. | Mar 2012 | A1 |
20120069649 | Ranjan et al. | Mar 2012 | A1 |
20120155156 | Watts | Jun 2012 | A1 |
20120181642 | Prejbeanu et al. | Jul 2012 | A1 |
20120188818 | Ranjan et al. | Jul 2012 | A1 |
20120228728 | Ueki et al. | Sep 2012 | A1 |
20120280336 | Jan | Nov 2012 | A1 |
20120280339 | Zhang et al. | Nov 2012 | A1 |
20120294078 | Kent et al. | Nov 2012 | A1 |
20120299133 | Son et al. | Nov 2012 | A1 |
20130001506 | Sato et al. | Jan 2013 | A1 |
20130001652 | Yoshikawa et al. | Jan 2013 | A1 |
20130021841 | Zhou et al. | Jan 2013 | A1 |
20130075845 | Chen et al. | Mar 2013 | A1 |
20130244344 | Malmhall et al. | Sep 2013 | A1 |
20130267042 | Satoh et al. | Oct 2013 | A1 |
20130270523 | Wang et al. | Oct 2013 | A1 |
20130270661 | Yi et al. | Oct 2013 | A1 |
20130307097 | Yi et al. | Nov 2013 | A1 |
20130341801 | Satoh et al. | Dec 2013 | A1 |
20140009994 | Parkin et al. | Jan 2014 | A1 |
20140036573 | Ishihara | Feb 2014 | A1 |
20140042571 | Gan et al. | Feb 2014 | A1 |
20140048896 | Huang et al. | Feb 2014 | A1 |
20140070341 | Beach et al. | Mar 2014 | A1 |
20140103472 | Kent et al. | Apr 2014 | A1 |
20140169085 | Wang et al. | Jun 2014 | A1 |
20140177316 | Otsuka et al. | Jun 2014 | A1 |
20140217531 | Jan | Aug 2014 | A1 |
20140252439 | Guo | Sep 2014 | A1 |
20140264671 | Chepulskyy et al. | Sep 2014 | A1 |
20140321196 | Ikeda | Oct 2014 | A1 |
20150056368 | Wang et al. | Feb 2015 | A1 |
20150171316 | Park et al. | Jun 2015 | A1 |
20150279904 | Pinarbasi | Oct 2015 | A1 |
20160027999 | Pinarbasi | Jan 2016 | A1 |
20160087193 | Pinarbasi et al. | Mar 2016 | A1 |
20160093798 | Kim et al. | Mar 2016 | A1 |
20160111634 | Lee et al. | Apr 2016 | A1 |
20160126452 | Kuo et al. | May 2016 | A1 |
20160126453 | Chen et al. | May 2016 | A1 |
20160148685 | Roy | May 2016 | A1 |
20160163965 | Han et al. | Jun 2016 | A1 |
20160163973 | Pinarbasi | Jun 2016 | A1 |
20160181508 | Lee et al. | Jun 2016 | A1 |
20160218278 | Pinarbasi et al. | Jul 2016 | A1 |
20160284762 | Wang et al. | Sep 2016 | A1 |
20160315118 | Kardasz et al. | Oct 2016 | A1 |
20160315259 | Kardasz et al. | Oct 2016 | A1 |
20160372656 | Pinarbasi et al. | Dec 2016 | A1 |
20170025472 | Kim et al. | Jan 2017 | A1 |
20170033156 | Gan et al. | Feb 2017 | A1 |
20170033283 | Pinarbasi et al. | Feb 2017 | A1 |
20170084826 | Zhou et al. | Mar 2017 | A1 |
Number | Date | Country |
---|---|---|
2766141 | Jan 2011 | AL |
105706259 | Jun 2013 | CN |
1345277 | Sep 2003 | EP |
2817998 | Jun 2002 | FR |
2832542 | May 2003 | FR |
2910716 | Jun 2008 | FR |
H10-004012 | Jan 1998 | JP |
H11-120758 | Apr 1999 | JP |
H11-352867 | Dec 1999 | JP |
2001-195878 | Jul 2001 | JP |
2002-261352 | Sep 2002 | JP |
2002-357489 | Dec 2002 | JP |
2003-318461 | Nov 2003 | JP |
2005-044848 | Feb 2005 | JP |
2005-150482 | Jun 2005 | JP |
2005-535111 | Nov 2005 | JP |
2006-128579 | May 2006 | JP |
2008-524830 | Jul 2008 | JP |
2009-027177 | Feb 2009 | JP |
2013-012546 | Apr 2013 | JP |
2014-039061 | Apr 2014 | JP |
2015-002352 | Jan 2015 | JP |
5635666 | Jan 2015 | JP |
10-2014-0115246 | Sep 2014 | KR |
WO 2009-080636 | Jul 2009 | WO |
WO 2011-005484 | Jan 2011 | WO |
WO 2014-062681 | Apr 2014 | WO |
WO-2015-153142 | Oct 2015 | WO |
WO-2016-014326 | Jan 2016 | WO |
WO-2016-048603 | Mar 2016 | WO |
2016171800 | Oct 2016 | WO |
2016171920 | Oct 2016 | WO |
2016204835 | Dec 2016 | WO |
2017019134 | Feb 2017 | WO |
2017030647 | Feb 2017 | WO |
Entry |
---|
R.H. Koch, et al., “Thermally Assisted Magnetization Reversal in Submicron-Sized Magnetic Thin Films”; Physical Review Letters; The American Physical Society; vol. 84, No. 23; Jun. 5, 2000, pp. 5419-5422 (4 pages). |
K.J. Lee, et al., “Analytical investigation of spin-transfer dynamics using a perpendicular-to-plane polarizer”; Applied Physics Letters; American Institute of Physics; vol. 86, (2005); pp. 022505-1 to 022505-3 (3 pages). |
Kirsten Martens, et al., “Thermally Induced Magnetic Switching in Thin Ferromagnetic Annuli”; NSF grants PHY-0351964 (DLS); 2005; 11 pages. |
Kirsten Martens, et al., “Magnetic Reversal in Nanoscopic Ferromagnetic Rings”; NSF grants PHY-0351964 (DLS); 2006; 23 pages. |
“Magnetic Technology Sprintronics, Media and Interface”; Data Storage Institute, R&D Highlights; Sep. 2010; 3 pages. |
Andrew Kent, et al.; U.S. Appl. No. 61/715,111, filed Oct. 17, 2012, entitled “Inverted Orthogonal Spin Transfer Layer Stack”. |
International Search Report and Written Opinion dated Jul. 10, 2015 in PCT/US2015/021580; 12 pages. |
Kardasz, et al.; U.S. Appl. No. 14/866,359, filed Sep. 25, 2015, entitled “Spin Transfer Torque Structure for MRAM Devices Having a Spin Current Injection Capping Layer”. |
International Search Report and Written Opinion dated Oct. 30, 2015 in PCT/US2015/040700; 11 pages. |
International Search Report and Written Opinion dated Dec. 14, 2015 in PCT/US2015/047875; 13 pages. |
Kardasz, et al.; U.S. Appl. No. 15/091,853, filed Apr. 6, 2016, entitled “High Annealing Temperature Perpendicular Magnetic Anisotropy Structure for Magnetic Random Access Memory”. |
Pinarbasi, et al.; U.S. Appl. No. 15/093,367, filed Apr. 7, 2016, entitled “Magnetic Tunnel Junction Structure for MRAM Device”. |
Pinarbasi, et al.; U.S. Appl. No. 15/097,576, filed Apr. 13, 2016, entitled “Polishing Stop Layer(s) for Processing Arrays of Semiconductor Elements”. |
Pinarbasi, et al.; U.S. Appl. No. 15/157,783, filed May 18, 2016, entitled “Memory Cell Having Magnetic Tunnel Junction and Thermal Stability Enhancement Layer”. |
Berger, et al.; U.S. Appl. No. 15/174,482, filed Jun. 6, 2016, entitled “Method and Apparatus for Bipolar Memory Write-Verify”. |
International Search Report and Written Opinion dated Jun. 17, 2016 in PCT/US2016/021324; 9 pages. |
International Search Report and Written Opinion dated Jun. 17, 2016 in PCT/US2016/021691; 9 pages. |
International Search Report and Written Opinion dated Jul. 15, 2016 in PCT/US2016/026473; 9 pages. |
International Search Report and Written Opinion dated Jul. 21, 2016 in PCT/US2016/027445; 10 pages. |
Pinarbasi, et al.; U.S. Appl. No. 14/814,036, filed Jul. 30, 2016, entitled “Precessional Spin Current Structure for MRAM”. |
International Search Report and Written Opinion dated Sep. 26, 2016 in PCT/US2016/037843; 10 pages. |
S. Ikeda, et al.; “A perpendicular-anisotropy CoFeB—MgO magnetic tunnel junction”; Nature Materials, vol. 9, Sep. 2010; pp. 721-724 (4 pages). |
Pinarbasi, et al.; U.S. Appl. No. 15/445,260, filed Feb. 28, 2017, entitled “Precessional Spin Current Structure for MRAM”. |
Pinarbasi, et al.; U.S. Appl. No. 15/445,362, filed Feb. 28, 2017, entitled “Precessional Spin Current Structure for MRAM”. |
NonFinal Office Action dated Jan. 20, 2016 in U.S. Appl. No. 14/242,419; 17 pages. |
Final Office Action dated Jul. 9, 2015 in U.S. Appl. No. 14/242,419; 19 pages. |
NonFinal Office Action dated Mar. 20, 2015 in U.S. Appl. No. 14/242,419; 18 pages. |
NonFinal Office Action dated Sep. 11, 2015 in U.S. Appl. No. 14/492,943; 13 pages. |
NonFinal Office Action dated Feb. 6, 2017 in U.S. Appl. No. 14/814,036; 22 pages. |
NonFinal Office Action dated Dec. 9, 2017 in U.S. Appl. No. 14/866,359; 26 pages. |
NonFinal Office Action dated Jan. 25, 2017 in U.S. Appl. No. 15/097,576; 17 pages. |
NonFinal Office Action dated Dec. 23, 2016 in U.S. Appl. No. 15/093,367; 13 pages. |
International Search Report and Written Opinion dated Apr. 7, 2017 in PCT/US2016/067444; 13 pages. |
Notice of Allowance dated Apr. 21, 2017 in U.S. Appl. No. 15/157,783; 36 pages. |
Number | Date | Country | |
---|---|---|---|
20170047107 A1 | Feb 2017 | US |
Number | Date | Country | |
---|---|---|---|
62205178 | Aug 2015 | US |