Number | Date | Country | Kind |
---|---|---|---|
6-006381 | Jan 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4708884 | Chandross et al. | Nov 1987 | |
5051380 | Maeda et al. | Sep 1991 | |
5120680 | Foo et al. | Jun 1992 | |
5124014 | Foo et al. | Jun 1992 | |
5378510 | Thomas et al. | Jan 1995 | |
5403630 | Matsui et al. | Apr 1995 |
Entry |
---|
Process Technology, vol. 1, pp. 182-190, Wolf et al. Silicon Processing for the VLSI Era. |