Number | Name | Date | Kind |
---|---|---|---|
5319226 | Sohn et al. | Jun 1994 | |
5436481 | Egawa et al. | Jul 1995 | |
5464792 | Tseng et al. | Nov 1995 | |
5834353 | Wu | Nov 1998 |
Entry |
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Ghandhi, S.K., "VLSI Fabrication Principles, Silicon and Gallium Arsenide", pp. 372-373, 427-430, 1983. |