The present patent document relates generally to spin-transfer torque magnetic random access memory and, more particularly, to a magnetic tunnel junction stack having improved performance of the free layer in the magnetic tunnel junction structure.
Magnetoresistive random-access memory (“MRAM”) is a non-volatile memory technology that stores data through magnetic storage elements. These elements are two ferromagnetic plates or electrodes that can hold a magnetic field and are separated by a non-magnetic material, such as a non-magnetic metal or insulator. In general, one of the plates has its magnetization pinned (i.e., a “reference layer”), meaning that this layer has a higher coercivity than the other layer(s) and requires a larger magnetic field or spin-polarized current to change the orientation of its magnetization. The second plate is typically referred to as the free layer and its magnetization direction can be changed by a smaller magnetic field or spin-polarized current relative to the reference layer.
MRAM devices store information by changing the orientation of the magnetization of the free layer. In particular, based on whether the free layer is in a parallel or anti-parallel alignment relative to the reference layer, either a “1” or a “0” can be stored in each MRAM cell. Due to the spin-polarized electron tunneling effect, the electrical resistance of the cell changes due to the orientation of the magnetic fields of the two layers. The cell's resistance will be different for the parallel and anti-parallel states and thus the cell's resistance can be used to distinguish between a “1” and a “0”. One important feature of MRAM devices is that they are non-volatile memory devices, since they maintain the information even when the power is off. The two plates can be sub-micron in lateral size and the magnetization direction can still be stable with respect to thermal fluctuations.
Spin transfer torque or spin transfer switching, uses spin-aligned (“polarized”) electrons to change the magnetization orientation of the free layer in the magnetic tunnel junction (“MTJ”). In general, electrons possess a spin, a quantized number of angular momentum intrinsic to the electron. An electrical current is generally unpolarized, i.e., it consists of 50% spin up and 50% spin down electrons. Passing a current though a magnetic layer polarizes electrons with the spin orientation corresponding to the magnetization direction of the magnetic layer thus produces a spin-polarized current. If a spin-polarized current is passed to the magnetic region of a free layer in the MTJ device, the electrons will transfer a portion of their spin-angular momentum to the magnetization layer to produce a torque on the magnetization of the free layer. Thus, this spin transfer torque can switch the magnetization of the free layer, which, in effect, writes either a “1” or a “0” based on whether the free layer is in the parallel or anti-parallel states relative to the reference layer.
When a current is passed through a magnetic layer (e.g., a polarizer), the spin orientation of the electrons that flow out of the magnetic layer is generally aligned in the direction of the magnetization of the magnetic layer and will exert a spin-transfer torque in that direction (forming a transverse spin current) upon impinging on another magnetic layer. However, due to the conservation of angular moment for the system, the electrons on the opposite side of magnetic layer, those that do not go through the magnetic layer, generally have a spin orientation that is aligned in the direction that is anti-parallel to the magnetization direction of the magnetic layer. The net effect of this process is that the current applied to the magnetic layer undergoes spin filtering, which creates a spin current on one side of the magnetic layer, with spins that are aligned with magnetization direction of the magnetic layer, and a reflected spin current on the other side of the magnetic layer, with spins that are anti-parallel to the magnetization direction of the magnetic layer. This effect occurs upon application of a current to any magnetic layer, including an in-plane polarization layer or an out-of-plane reference magnetic layer. Thus, in a typical MTJ, when switching the magnetization direction of the free layer in one direction (e.g., from the parallel to anti-parallel state) is achieved using spin transfer torque from the transverse spin current, switching the free layer in the other direction (e.g., from the anti-parallel to parallel states) would be achieved using spin transfer torque from the reflected spin current. This is typically accomplished by running electrical current through the MTJ in one direction when switching from the anti-parallel to parallel state and running the electrical current through the MTJ in the other direction when switching from the parallel to anti-parallel state.
The first magnetic layer 114 in the SAF layer 120 is disposed over seed layer 110. SAF layer 120 also has an antiferromagnetic coupling layer 116 disposed over the first magnetic layer 114. Furthermore, a nonmagnetic spacer 140 is disposed on top of MTJ 130 and a polarizer 150 is disposed on top of the nonmagnetic spacer 140. Polarizer 150 is a magnetic layer that has a magnetic direction in its plane, but is perpendicular to the magnetic direction of the reference layer 132 and free layer 136. Polarizer 150 is provided to polarize a current of electrons (“spin-aligned electrons”) applied to MTJ structure 100. Polarizer 150 polarizes the current in a direction perpendicular (orthogonal) to those of the magnetizations of the free magnetic layer 136 and reference magnetic layer 132. Further, one or more capping layers 160 can be provided on top of polarizer 150 to protect the layers below on MTJ stack 100. Finally, a hard mask 170 is deposited over capping layers 160 and is provided to pattern the underlying layers of the MTJ structure 100, using a combination of reactive ion etch (RIE) and ion beam etching (IBE) processes.
Various mechanisms have been proposed to assist the free-layer magnetization switching in MTJ devices. One issue has been that to realize the orthogonal spin transfer effect for in-plane MTJ structures, large spin currents may be required for switching. The need for large switching currents may limit such device's commercial applicability. One way proposed to reduce switching current is to lower the magnetization of the free layer. However, if the effective magnetization of the free layer is lowered significantly, the orthogonal effect has to be limited so that the free-layer does not go into precessional mode that would make the end state of the free-layer magnetization un-deterministic. This defines the operation window for the in-plane OST structures. In an in-plane device, unlike that shown in
In contrast to MTJ structures with an in-plane free layer and perpendicular polarizer perpendicular MTJ structures such as those shown in
In most prior MTJ devices using a polarizer such as polarizer 150, the magnetization direction of polarizer 150 is fixed, which is shown in
The precession of the magnetization vector during switching of the free layer can be assisted by spin transfer torque exerted by the electrons of a spin-polarized current, which is generated in part by the orthogonal polarizer 150. Applying a voltage across the MTJ device 100 produces a charge current through the device. This charge current, in turn, produces a spin-polarized current via spin filtering through the magnetic layers of the device (i.e., the orthogonal polarizer 150 and the reference layer 132). The spin-polarized electrons of the spin-polarized current exerts a spin transfer torque on the magnetic vector 200. This spin transfer torque has an in-plane component of the spin transfer torque 210, which pushes magnetization vector 200′ in the direction of the magnetic vector of polarizer 150 throughout precession of magnetic vector 200′. In addition to the in-plane spin transfer torque 210 from the polarizer, the perpendicular spin transfer torque (not shown), generated by reference layer 132, pulls the magnetic vector 200′ towards the direction antiparallel to its initial direction 200, thereby causing switching of the free layer 136. In devices like those shown in
One solution that has been proposed to overcome this limitation is the use of a precessional spin current (“PSC”) magnetic layer having a magnetization vector that can freely rotate in any magnetic direction, shown in
As seen in on the right-hand side of
However, because of the chirality of perpendicular MTJ structures that utilize a PSC, such as the structure shown in
Thus, in prior devices that utilize in-plane polarization layers having a fixed magnetization direction and having a free magnetic layer 150 that is perpendicular to the plane of the device, once the precession holds, the in-plane spin transfer torque has no net positive effect on the switching mechanism for a full three hundred sixty degree precession. Moreover, in prior devices that utilize a PSC magnetic layer 350, the in-plane spin transfer torque enhances the switching of the free layer 336 throughout the precession from the first direction to the second direction, but might not enhance the switching of the free layer 336 from the second direction to the first direction. This is due at least in part to the magnetic and/or electronic coupling between the PSC layer 350 and free layer 336.
Therefore, there is a need for a spin torque transfer device that reduces the amount of current needed for switching from both magnetization directions while also switching at high speeds and requiring reduced chip area.
An MRAM device is disclosed that has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure that requires significantly lower switching currents and which significantly reduces switching times for MRAM applications and maintains this characteristic for both switching directions (AP to P and P to AP)
In one embodiment, a magnetic device includes a reference magnetic layer in a first plane. The reference magnetic layer has a magnetization vector that is perpendicular to the first plane and has a fixed magnetization direction. The magnetic device also has a non-magnetic tunnel barrier layer in a second plane and disposed over the reference magnetic layer. The magnetic device also includes a free magnetic layer in a third plane and disposed over the non-magnetic tunnel barrier layer. The free magnetic layer has a magnetization vector that is perpendicular to the third plane and has a magnetization direction that can switch from a first magnetization direction to a second magnetization direction and from the second magnetization direction to the first magnetization direction. The switching process involves precessions at a precession radius around an axis perpendicular to the first plane, and the magnetization vector of the free magnetic layer has a predetermined precession frequency. The reference magnetic layer, the non-magnetic tunnel barrier layer, and the free magnetic layer form a magnetic tunnel junction (MTJ). The magnetic device also includes a non-magnetic spacer in a fourth plane and disposed over the free magnetic layer. The magnetic device also includes an inducible precessional magnetic layer in a fifth plane and disposed over the non-magnetic spacer. The inducible precessional magnetic layer has a magnetization vector with a magnetization component in the fifth plane that rotates at an induced rotation frequency in the presence of an external alternating magnetic field. The magnetization vector of the inducible precessional magnetic layer is fixed in the absence of the external alternating magnetic field. The magnetic device also includes an external wire that is physically separate from the MTJ, the non-magnetic spacer and the inducible precessional magnetic layer. The external wire generates the external alternating magnetic field upon direction of an alternating current through the external wire. The external wire is proximate to the inducible precessional magnetic layer, thereby enabling the external alternating magnetic field to induce rotation of the magnetization vector of the inducible precessional magnetic layer. The magnetic device also includes a first current source that is physically separate from the MTJ, the non-magnetic spacer and the inducible precessional magnetic layer. The first current source directs an alternating current through the external wire, thereby generating the external alternating magnetic field. The magnetic device also includes a second current source that directs a programming current through the inducible precessional magnetic layer, the non-magnetic spacer, and the MTJ. Application of the programming current to the inducible precessional magnetic layer, the non-magnetic spacer, and the MTJ produces a spin-polarized current having spin-polarized electrons. The spin-polarized electrons exert a spin transfer torque on the magnetization vector of the free magnetic layer. The direction of the spin transfer torque determined in part by the direction of the magnetization vector of the inducible precessional magnetic layer. The induced rotation frequency is synchronized with the predetermined precession frequency of the free magnetic layer, thereby causing spin transfer torque to assist switching of the magnetization vector of the free magnetic layer from the first magnetization direction to the second magnetization direction and from the second magnetization direction to the first magnetization direction. In this way, the efficiency of the switching process of the free magnetic layer is improved from the first magnetization direction to the second magnetization direction and from the second magnetization direction to the first magnetization direction.
In another embodiment, a difference in frequency between the induced rotation frequency and the predetermined precession frequency of the free magnetic layer is less than twenty percent of the predetermined precession frequency of the free magnetic layer.
In another embodiment, a difference in frequency between the induced rotation frequency and the predetermined precession frequency of the free magnetic layer is less than ten percent of the predetermined precession frequency of the free magnetic layer.
In another embodiment, a difference in frequency between the induced rotation frequency and the predetermined precession frequency of the free magnetic layer is less than five percent of the predetermined precession frequency of the free magnetic layer.
In another embodiment, a difference in frequency between the induced rotation frequency and the predetermined precession frequency of the free magnetic layer is less than two percent of the predetermined precession frequency of the free magnetic layer.
In another embodiment, the external alternating magnetic field exerts a force on the magnetization vector of the free magnetic layer, thereby assisting in the switching of the magnetization direction of the free magnetic layer.
In another embodiment, the external alternating magnetic field enhances the precession of the magnetization vector of the free magnetic layer.
In another embodiment, the programming current comprises a direct current.
In another embodiment, switching the magnetization direction of the free magnetic layer requires both the first current source directing the alternating current through the external wire and the second current source directing the electrical current through the inducible precessional magnetic layer, the non-magnetic spacer, the free magnetic layer, the non-magnetic tunnel barrier layer, and the reference magnetic layer.
In another embodiment, switching the magnetization direction of the free magnetic layer requires the magnetization vector of the inducible precessional magnetic layer to rotate at the induced rotation frequency.
In another embodiment, switching the magnetization direction of the free magnetic layer requires generating the external alternating magnetic field.
In another embodiment, the inducible precessional magnetic layer has a weak in-plane anisotropy.
In another embodiment, the inducible precessional magnetic layer comprises CoFeB.
In another embodiment, the non-magnetic spacer comprises MgO.
In another embodiment, the non-magnetic spacer has a thickness that prevents coupling of the free magnetic layer to the inducible precessional magnetic layer.
In another embodiment, a magnetic device includes a magnetic tunnel junction (MTJ) in a first plane. The MTJ comprises a reference magnetic layer, a non-magnetic tunnel barrier layer, and a free magnetic layer. The free magnetic layer and the reference magnetic layer are separated by the non-magnetic tunnel barrier layer. The reference magnetic layer has a magnetization vector that is perpendicular to the first plane and has a fixed magnetization direction. The free magnetic layer has a magnetization vector that is perpendicular to the first plane and has a magnetization direction that can switch from a first magnetization direction to a second magnetization direction and from the second magnetization direction to the first magnetization direction. The switching process involves precessions at a precession radius around an axis perpendicular to the first plane, and the magnetization vector of the free magnetic layer has a predetermined precession frequency. The magnetic device also includes a non-magnetic spacer in a second plane. The non-magnetic spacer separates the MTJ from an inducible precessional magnetic layer. The magnetic device also includes the inducible precessional magnetic layer in a third plane and coupled to the non-magnetic spacer. The inducible precessional magnetic layer has a magnetization vector with a magnetization component in the third plane that rotates at an induced rotation frequency in the presence of an external alternating magnetic field. The magnetization vector of the inducible precessional magnetic layer is fixed in the absence of the external alternating magnetic field. The magnetic device also includes an external wire that is physically separate from the MTJ, the non-magnetic spacer and the inducible precessional magnetic layer. The external wire generates the external alternating magnetic field upon direction of an alternating current through the external wire. The external wire is proximate to the inducible precessional magnetic layer, thereby enabling the external alternating magnetic field to induce rotation of the magnetization vector of the inducible precessional magnetic layer. Application of a programming current to the inducible precessional magnetic layer, the non-magnetic spacer, and the MTJ produces a spin-polarized current having spin-polarized electrons. The spin-polarized electrons exert a spin transfer torque on the magnetization vector of the free magnetic layer. The direction of the spin transfer torque is in part determined by the direction of the magnetization vector of the inducible precessional magnetic layer. The induced rotation frequency is synchronized with the predetermined precession frequency of the free magnetic layer, thereby causing spin transfer torque to assist switching of the magnetization vector of the free magnetic layer from the first magnetization direction to the second magnetization direction and from the second magnetization direction to the first magnetization direction. In this way, the efficiency of the switching process of the free magnetic layer is improved from the first magnetization direction to the second magnetization direction and from the second magnetization direction to the first magnetization direction.
In another embodiment, the magnetic device also includes a first current source that is physically separate from the MTJ, the non-magnetic spacer and the inducible precessional magnetic layer The first current source directs the alternating current through the external wire, thereby generating the external alternating magnetic field. The magnetic device also includes a second current source that directs the programming current through the inducible precessional magnetic layer, the non-magnetic spacer, and the MTJ.
In another embodiment, a magnetic device includes an inducible precessional magnetic layer in a first plane. The inducible precessional magnetic layer has a magnetization vector with a magnetization component in the first plane that rotates at an induced rotation frequency in the presence of an external alternating magnetic field. The magnetization vector of the inducible precessional magnetic layer is fixed in the absence of the external alternating magnetic field. The magnetic device also includes a non-magnetic spacer in a second plane and disposed over the inducible precessional magnetic layer. The magnetic device also includes a free magnetic layer in a third plane and disposed over the non-magnetic spacer. The free magnetic layer has a magnetization vector that is perpendicular to the third plane and has a magnetization direction that can switch from a first magnetization direction to a second magnetization direction and from the second magnetization direction to the first magnetization direction. The switching process involves precessions at a precession radius around an axis perpendicular to the third plane, and the magnetization vector of the free magnetic layer has a predetermined precession frequency. The magnetic device also includes a non-magnetic tunnel barrier layer in a fourth plane and disposed over the free magnetic layer. The magnetic device also includes a reference magnetic layer in a fifth plane and disposed over the non-magnetic tunnel barrier layer. The reference magnetic layer has a magnetization vector that is perpendicular to the fifth plane and has a fixed magnetization direction. The reference magnetic layer, the non-magnetic tunnel barrier layer and the free magnetic layer form a magnetic tunnel junction (MTJ). The magnetic device also includes an external wire that is physically separate from the MTJ, the non-magnetic spacer and the inducible precessional magnetic layer. The external wire generates the external alternating magnetic field upon direction of an alternating current through the external wire. The external wire is proximate to the inducible precessional magnetic layer, thereby enabling the external alternating magnetic field to induce rotation of the magnetization vector of the inducible precessional magnetic layer. The magnetic device also includes a first current source that is physically separate from the MTJ, the non-magnetic spacer and the inducible precessional magnetic layer. The first current source directs an alternating current through the external wire, thereby generating the external alternating magnetic field. The magnetic device also includes a second current source that directs a programming current through the inducible precessional magnetic layer, the non-magnetic spacer, the free magnetic layer, the non-magnetic tunnel barrier layer, and the reference magnetic layer. Application of the programming current to the inducible precessional magnetic layer, the non-magnetic spacer, and the MTJ produces a spin-polarized current having spin-polarized electrons. The spin-polarized electrons exert a spin transfer torque on the magnetization vector of the free magnetic layer. The direction of the spin transfer torque is in part determined by the direction of the magnetization vector of the inducible precessional magnetic layer. The induced rotation frequency is synchronized with the predetermined precession frequency of the free magnetic layer, thereby causing spin transfer torque to assist switching of the magnetization vector of the free magnetic layer from the first magnetization direction to the second magnetization direction and from the second magnetization direction to the first magnetization direction. In this way, the efficiency of the switching process of the free magnetic layer is improved from the first magnetization direction to the second magnetization direction and from the second magnetization direction to the first magnetization direction.
In another embodiment, an external uniform magnetic field is used to set the direction of precession of the inducible precessional magnetic layer.
In another embodiment the fringing fields from the reference layer are used to set the direction of rotation of the inducible precessional magnetic layer.
The accompanying drawings, which are included as part of the present specification, illustrate the presently preferred embodiments and, together with the general description given above and the detailed description given below, serve to explain and teach the principles of the MTJ devices described herein.
The figures are not necessarily drawn to scale and the elements of similar structures or functions are generally represented by like reference numerals for illustrative purposes throughout the figures. The figures are only intended to facilitate the description of the various embodiments described herein; the figures do not describe every aspect of the teachings disclosed herein and do not limit the scope of the claims.
The following description is presented to enable any person skilled in the art to create and use methods and magnetic devices that utilize an inducible precessional magnetic layer to assist in the switching of a magnetization vector for a magnetic semiconductor device such as an MRAM device. Each of the features and teachings disclosed herein can be utilized separately or in conjunction with other features to implement the disclosed system and method. Representative examples utilizing many of these additional features and teachings, both separately and in combination, are described in further detail with reference to the attached drawings. This detailed description is merely intended to teach a person of skill in the art further details for practicing preferred aspects of the present teachings and is not intended to limit the scope of the claims. Therefore, combinations of features disclosed in the following detailed description may not be necessary to practice the teachings in the broadest sense, and are instead taught merely to describe particularly representative examples of the present teachings.
In the following description, for purposes of explanation only, specific nomenclature is set forth to provide a thorough understanding of the present teachings. However, it will be apparent to one skilled in the art that these specific details are not required to practice the present teachings.
The present patent document discloses a MRAM device that comprises a perpendicular MTJ and an inducible precessional magnetic layer (i.e., inducible polarizer) that has a magnetization vector that precesses upon exposure to an external alternating magnetic field. This device is described with reference to
The present patent document also discloses a method for switching the magnetization vector of a free layer in a magnetic device that comprises a perpendicular MTJ and an inducible polarizer that has a magnetization vector that precesses upon exposure to an external alternating magnetic field. This method comprises generating a first current pulse and applying the first current pulse to an external wire, thereby generating an external alternating magnetic field. The external alternating magnetic field then induces precession of the magnetization vector of the inducible polarizer at an induced rotation frequency. Next, a second current pulse (i.e., a programming current) is generated and applied to the MTJ stack comprising an MTJ and an inducible polarizer. Application of this programming current pulse to the inducible polarizer and the MTJ generates a spin-polarized current having spin polarized electrons. The spin-polarized electrons exert a spin transfer torque on the magnetization vector of the free magnetic layer in the direction of the magnetization vector of the inducible polarizer. In some embodiments, the induced rotation frequency is synchronized with the predetermined precession frequency of magnetization vector of the free layer, thereby causing spin transfer torque to assist switching of the magnetization vector of the free layer.
As described above, when a programming current pulse is applied to the PSC layer 350 and a perpendicular MTJ 330, a spin-polarized current having spin-polarized electrons is formed. Also as described above, when switching the magnetization vector of the free layer 336 from the parallel direction to the antiparallel direction, the spin-polarized electrons exert an in-plane spin transfer torque on the magnetization vector of the free layer 336 that is in the direction of the magnetization vector of the PSC layer 350. However, when switching free layer 336 from the antiparallel direction to the parallel direction, the spin-polarized electrons exert an in-plane spin transfer torque (generated by the reflected spin current from PSC layer 350) on the magnetization vector of free layer 336 that is antiparallel to the direction of the magnetization vector of the PSC layer 350. In devices such as MTJ stack 300, the PSC layer 350 is magnetically and/or electronically coupled with free layer 336 such that the rotation of the magnetization vector of PSC 350 follows the precession of free layer 336. Thus, the in-plane spin transfer torque generated by PSC layer 350 assists during switching from the parallel direction to antiparallel direction (i.e., when the in-plane spin transfer torque is generated from the transverse spin current) but can impede switching from the antiparallel direction to the parallel direction (i.e., when the in-plane spin transfer torque is generated from the reflected spin current).
The various embodiments described herein, such as magnetic device 500, benefit from the advantages of devices comprising PSC layers, but offer at least two additional significant improvements: (1) improved switching efficiency when switching the free layer 536 in both directions (i.e., from parallel to antiparallel and from parallel to antiparallel); and (2) reduced probability of inadvertent free layer switching when reading the resistance across the MTJ stack 560.
Upon application of an electrical current comprising an alternating current to external wire 580, an external alternating magnetic field is generated. The external alternating magnetic field induces the magnetization vector of inducible polarizer 550 to rotate around an axis perpendicular to the plane of the inducible polarizer layer (i.e., precess around a perpendicular axis). In some embodiments, the external alternating magnetic field causes the magnetization vector of inducible polarizer 550 to rotate in the plane. In some embodiments, the external alternating magnetic field also interacts with the magnetization vector of free layer 536, thereby assisting the precession of the magnetization vector of the free layer 536. An electrical current pulse (i.e., a programming current pulse) can then be applied to MTJ stack 560 comprising inducible polarizer 550 and MTJ 530. Application of the programming current to MTJ stack 560 generates a spin current that exerts a spin transfer torque on the magnetization vector of free layer 536. The spin transfer torque comprises an in-plane spin transfer torque that exerts torque on the free layer is determined in part by the direction of the magnetization vector of the inducible polarizer 550. In some embodiments, the alternating frequency of the external alternating magnetic field is set to a frequency value such that the external alternating magnetic field causes the magnetization vector of inducible polarizer 550 to precess at a frequency that is synchronized with the predetermined precession frequency of the magnetization vector of free layer 536. In such embodiments, the in-plane spin transfer torque will assist switching of the free layer in a manner similar to the switching enhancement offered by PSC layer 350, described above.
However, in contrast to magnetic device 300, the inducible polarizer 550 is not magnetically or electronically coupled to free layer 536; rather, the precession of the inducible polarizer 550 is controlled by the external alternating magnetic field. Therefore, the magnetization vector of inducible polarizer 550 can rotate in such a manner as to apply an in-plane spin transfer torque that enhances the precession of free layer 536 even when the in-plane spin transfer torque is generated by the reflected spin current from inducible polarizer 550 (i.e., when switching free layer 536 from the antiparallel direction to the parallel direction).
Moreover, unlike magnetic device 300, where precession of the magnetization vector of PSC layer 350 is caused by application of an electrical current to MTJ stack 300, application of an electrical current to MTJ stack 560 in magnetic device 500 does not cause precession of the magnetization vector of inducible polarizer 550. Precession of the magnetization vector of inducible polarizer 550 occurs when the external alternating magnetic field is interacting with inducible polarizer 550. Thus, precession of the magnetization vector of inducible polarizer 550 is effectively decoupled from the programming current applied to MTJ stack 560. In some embodiments, the magnetization vector of free layer 532 will not switch unless the magnetization vector of inducible polarizer 550 is precessing. In such embodiments, an electrical current can be applied to MTJ stack 560 and the magnetization vector of inducible polarizer 560 will not precess unless the external alternating magnetic field has been generated. Therefore, the resistance across MTJ stack 560 can be measured (i.e., the bit can be read) in the absence of the external alternating magnetic field and there will be an extremely low probability of inadvertently switching the free layer 536 (i.e., read disturb) when reading the bit in this manner. Thus, the various embodiments disclosed herein, such as magnetic device 500, offer several advantages to the magnetic devices described in the prior art.
Like the PSC layer 550 previously discussed, the inducible precessional magnetic layer 550 has a magnetic vector 570 with an in-plane component that can freely rotate (top of
The spin-polarized electrons of the spin-polarized current exert a spin transfer torque on the magnetization vector 200 of the free layer 536. This spin transfer torque has both an in-plane spin torque component 610 and a perpendicular spin torque component (not shown in
As discussed above, the magnetization vector 570 of inducible precessional magnetic layer 550 precesses at an induced rotation frequency due to the application of an external alternating magnetic field to the inducible precessional magnetic layer 550. The induced rotation frequency is dependent on, inter alia, the dimensions and composition of inducible precessional magnetic layer 550 and the frequency at which the external alternating magnetic field oscillates between the first magnetic field direction and the second magnetic field direction. This magnetic field oscillating frequency is, in turn, dependent on the dimensions and composition of external wire 580 and the frequency of the alternating current that is directed through the external wire 580. Therefore, the induced rotation frequency can be set to match the predetermined precession frequency of the magnetization vector of the free magnetic layer 536.
When the induced rotation frequency of the inducible precessional magnetic layer 550 is matched to the predetermined precession frequency of the free magnetic layer 536, the in-plane spin transfer torque 610 generated by the inducible polarizer 550 enhances the precession of the free magnetic layer 536 throughout the entire 360 degree precession, as shown on the bottom of
The magnetization dynamics during switching the free layer 536 from the antiparallel direction to the parallel direction, shown in
Magnetic devices that utilize inducible polarizers, such as magnetic device 500, also possess the advantage of greatly reduced read disturb probabilities (i.e., the probability that the free layer will be switched when reading the bit). In the absence of the external alternating magnetic field, the magnetic vector of the inducible polarizer 550 does not rotate; rather the magnetization vector of the inducible polarizer 550 is fixed and its magnetization dynamics are similar to those depicted in
A memory cell with an inducible precessional magnetic layer 550, an external wire 580 and an MTJ structure 530 is shown in
Seed layer 510 in the MTJ structure shown in
Nonmagnetic spacer 540 has a number of properties. For example, nonmagnetic spacer 540 physically separates the free layer 536 and the in-plane polarization magnetic layer 550. Nonmagnetic spacer 540 transmits spin current efficiently from the in-plane polarization magnetic layer 550 into the free layer 536 because it preferably has a long spin diffusion length if made metallic. Nonmagnetic spacer 540 also promotes good microstructure and high tunneling magnetoresistance (TMR) and helps keep the damping constant of the free layer 536 low. In one embodiment, nonmagnetic space 540 comprises MgO. In one embodiment, nonmagnetic spacer 540 is of a thickness sufficient to prevent electronic and/or magnetic coupling of free magnetic layer 536 with inducible precessional magnetic layer 550.
The inducible precessional magnetic layer 550 is preferably made from CoFeB. It can also be made with Co, Fe, Ni magnetic layers or can be made out of their alloys. The magnetic alloys can also have boron, tantalum, copper or other materials. In some embodiments, the inducible precessional magnetic layer preferably has a weak or nonexistent in-plane uniaxial anisotropy and preferably a low magnetic moment. This allows the magnetic vector of the inducible polarizer to be driven by the alternating magnetic field, thereby remaining at the inducible precession frequency set, in part, by the oscillating frequency of the magnetic field. If the in-plane anisotropy or magnetic moment is too strong, the magnetization vector of the inducible polarizer would not properly follow the applied alternating magnetic field when being driven at a high frequency. Finally capping layer 590 can be any material that provides good interface to the in-plane layer such as Ta, TaN, Ru, MgO, Cu, etc.
External wire 580 has a number of properties. External wire 580 is preferably a good conductor of electrical current. In some embodiments, external wire 580 is a metal or a metallic material. External wire 580 preferably generates an alternating magnetic field upon application of an alternating electrical current to the external wire 580. In some embodiments, external wire 580 is not directly connected to MTJ stack 560. In some embodiments, external wire 580 is preferably proximate to MTJ stack 560 such that the alternating magnetic field, generated by the passage of an alternating current through external wire 580, can interact with the magnetization vector of the inducible precessional magnetic layer 550. In some embodiments, external wire 580 is preferably proximate to MTJ stack 560 such that the alternating magnetic field, generated by the passage of an alternating current through external wire 580, can interact with the magnetization vector of the free magnetic layer 536. In one embodiment, the distance between the external wire 580 and the MTJ stack 560 is less than 200 nanometers. In one embodiment, the distance between the external wire 580 and the MTJ stack 560 is less than 50 nanometers. In one embodiment, the distance between the external wire 580 and the MTJ stack 560 is less than 10 nanometers.
In some embodiments, first current source 585 generates an alternating current. In some embodiments, first current source 585 generates electrical current comprising an alternating current. In some embodiments, first current source 585 generates an electrical current that comprises an alternating current and a direct current. In some embodiments, first current source 585 directs an electrical current comprising an alternating current through the external wire 580 thereby generating an external alternating magnetic field. In addition, first current source 585 can be configured to produce an alternating current having an oscillation frequency that generates an external alternating magnetic field that is matched to the predetermined precession frequency of the free magnetic layer 536. In addition, first current source 585 can be configured to produce an alternating current having an oscillation frequency, which is matched to the predetermined precession frequency of the free magnetic layer 536. In some embodiments, second current source 575 can generate a programming current pulse that comprises a direct current. In some embodiments, second current source 575 can generate a direct current. Second current source 575 can also generate programming currents with various ratios of alternating current and direct current. In some embodiments, second current source 575 can generate a programming current comprising a direct current and the current strength of the direct current can be changed from a first direct current value to a second direct current value.
The manner in which a bit is written using magnetic device 500 comprising MTJ 530, inducible precessional magnetic layer 550 and external wire 580 will now be described. In particular, a first electrical current is supplied, for example, by first current source 585, which passes electrical current through external wire 580. Passage of the first electrical current through external wire 580 generates an external magnetic field proximate to the external wire 580. In one embodiment, the first electrical current comprises an alternating current. Application of this alternating current to external wire 580 generates an external alternating magnetic field proximate to external wire 580. The magnetization direction of the external magnetic field oscillates between a first direction and a second direction at an oscillation frequency, which is at least in part determined by the alternating current frequency and the structure of external wire 830. In some embodiments, the external alternating magnetic field exerts a force on the magnetization vector of inducible precessional magnetic layer (i.e., inducible polarizer) 550. The external alternating magnetic field causes the magnetization vector of inducible polarizer 550 to precess at an specified precession frequency (i.e., the induced rotation frequency) around an axis perpendicular to the plane of the inducible polarizer 550. The induced rotation frequency is at least in part determined by oscillating frequency of the external alternating magnetic field and the structure (i.e., dimensions and composition) of the inducible polarizer 550. The magnetization vector of the inducible polarizer 550 continues to precess at this induced rotation frequency as long as the external alternating magnetic field is being applied to the inducible polarizer 550.
A second electrical current is supplied, for example, by second current source 575, which passes electrical current through the inducible polarizer 550, the non-magnetic spacer 540, the free magnetic layer 536, the non-magnetic tunneling barrier layer 534, and the reference layer 532. Application of the second electrical current (i.e., programming current) to the MTJ stack 560 creates a spin polarized current that passes through non-magnetic spacer layer 540, free magnetic layer 536, tunneling barrier layer 534, and reference magnetic layer 532. The spin polarized current exerts a spin transfer torque on free magnetic layer 536, which helps overcome the inherent damping of the magnetic material making up the free layer 536. The spin transfer torque is composed of an in-plane spin transfer torque and a perpendicular spin transfer torque. In one embodiment, when switching the free layer 536 in one direction (i.e., from the parallel direction to the anti-parallel direction), the in-plane spin transfer torque is caused by the transverse spin current generated by the inducible polarizer 550 and the perpendicular spin transfer torque is caused by the reflected spin current generated by the reference magnetic layer 532. As discussed above, the transverse spin current from inducible polarizer 550 exerts an in-plane spin transfer torque 610 on the magnetization vector that is aligned with the magnetization vector 570 of the inducible polarizer 550. Because the external alternating magnetic field causes rotation of the in-plane component of magnetization vector 570 at the induced rotation frequency, the direction of in-plane spin transfer torque 610 rotates at the same induced rotation frequency.
The spin current causes the magnetization vector the free magnetic layer 536 to precess about its axis, which is shown in
A similar process is utilized when writing the bit from the antiparallel state to the parallel state. In one embodiment, the magnetization vector 570 rotates at the predetermined rotation frequency in the same direction as the precessions of magnetization vector 200′; however the in-plane direction the in-plane component of magnetization vector 570 is antiparallel to the in-plane magnetization vector of 200′. As discussed above, the spin transfer torque 610′ (generated by the reflected spin current from inducible polarizer 550) is aligned with the in-plane magnetization vector of 200′ when the in-plane components of magnetization vectors 570 and 200′ are antiparallel to each other. Therefore, in embodiments where the induced rotation frequency is matched to the predetermined precession frequency, magnetization vectors 570 and 200′ can maintain this antiparallel orientation throughout the precession of magnetization vector 200′. Such antiparallel synchronization is possible because free layer 536 and inducible polarizer 550 are not electronically or magnetically coupled; rather, the rotation of magnetization vector 570 is controlled by the external alternating magnetic field. As a result of this synchronization, as depicted in
The rotational direction of the inducible polarization magnetic layer 550 is preferably set externally, such that the rotation direction of the inducible polarizer 550 is decoupled from the precession direction of free layer 536. In some embodiments, the rotational direction of the inducible polarizer 550 is set by an external uniform magnetic field. In one embodiment, the rotational direction of the inducible polarizer 550 is set by the fringing fields from the magnetization vector of the reference magnetic layer 532.
Magnetic devices that utilize inducible polarizers, such as magnetic device 500, offer additional advantages during the reading process. In particular, these devices offer all of the advantages, described above, for improved switching during the writing process, but also allow a significantly reduced read disturb probability. Synchronization of the inducible polarizer 550 with the precession of free layer 536 allows for a reduced threshold switching current (i.e., lower current values are required to switch the magnetization direction of free layer 536. Advantages afforded by this lower switching threshold include reduction in write error rate, reduced damage to the device during each writing process, and an increase in device stability over time. However, lower switching threshold currents can increase the probability of inadvertently writing the bit during the read process. Typically, a weaker current is used during the read process, allowing the resistance across the MTJ to be measured without generating a spin-current that is strong enough to switch the magnetic vector of the free layer. However, when an inducible polarizer is used as described above, the strength of the current required to switch the free layer is greatly reduced. Therefore, unless these systems can be bypassed, there will be a substantial probability of inadvertently switching the free layer during the reading process (i.e., read disturb), even if a weaker read current is used.
In devices such as magnetic device 500, the rotation of the magnetization vector 570 of the inducible polarizer is controlled by the external alternating magnetic field. In the absence of the external alternating magnetic field, the magnetic vector of the inducible polarizer 550 does not rotate, and as a result, switching the bit requires a significantly stronger programming current. Thus, the bit can be read in the absence of the external alternating magnetic field (i.e., with no alternating current running through external wire 580), thereby allowing the resistance across MTJ structure 560 to be read with a very low read disturb probability. In some embodiments, the magnetization vector of the free layer 536 will not switch in the absence of the external alternating magnetic field, thereby allowing the bit to be read with essentially zero probability of read disturb.
An alternative embodiment is shown in
All of the layers of devices 500 and 700, illustrated in
It should be appreciated to one skilled in the art that a plurality of MTJ structures 500 and 700 can be manufactured and provided as respective bit cells of an STT-MRAM device. In other words, each MTJ stack can be implemented as a bit cell for a memory array having a plurality of bit cells.
The above description and drawings are only to be considered illustrative of specific embodiments, which achieve the features and advantages described herein. Modifications and substitutions to specific process conditions can be made. Accordingly, the embodiments in this patent document are not considered as being limited by the foregoing description and drawings.
Number | Name | Date | Kind |
---|---|---|---|
341801 | Fox | May 1886 | A |
5541868 | Prinz | Jul 1996 | A |
5629549 | Johnson | May 1997 | A |
5640343 | Gallagher et al. | Jun 1997 | A |
5654566 | Johnson | Aug 1997 | A |
5691936 | Sakakima et al. | Nov 1997 | A |
5695846 | Lange et al. | Dec 1997 | A |
5695864 | Slonczewski | Dec 1997 | A |
5732016 | Chen et al. | Mar 1998 | A |
5856897 | Mauri | Jan 1999 | A |
5896252 | Kanai | Apr 1999 | A |
5966323 | Chen et al. | Oct 1999 | A |
6016269 | Peterson et al. | Jan 2000 | A |
6055179 | Koganei et al. | Apr 2000 | A |
6097579 | Gill | Aug 2000 | A |
6124711 | Tanaka et al. | Sep 2000 | A |
6134138 | Lu et al. | Oct 2000 | A |
6140838 | Johnson | Oct 2000 | A |
6154349 | Kanai et al. | Nov 2000 | A |
6172902 | Wegrowe et al. | Jan 2001 | B1 |
6233172 | Chen et al. | May 2001 | B1 |
6243288 | Ishikawa et al. | Jun 2001 | B1 |
6252798 | Satoh et al. | Jun 2001 | B1 |
6256223 | Sun | Jul 2001 | B1 |
6292389 | Chen et al. | Sep 2001 | B1 |
6347049 | Childress et al. | Feb 2002 | B1 |
6376260 | Chen et al. | Apr 2002 | B1 |
6385082 | Abraham et al. | May 2002 | B1 |
6436526 | Odagawa et al. | Aug 2002 | B1 |
6458603 | Kersch et al. | Oct 2002 | B1 |
6493197 | Ito et al. | Dec 2002 | B2 |
6522137 | Sun et al. | Feb 2003 | B1 |
6532164 | Redon et al. | Mar 2003 | B2 |
6538918 | Swanson et al. | Mar 2003 | B2 |
6545906 | Savtchenko et al. | Apr 2003 | B1 |
6563681 | Sasaki et al. | May 2003 | B1 |
6566246 | deFelipe et al. | May 2003 | B1 |
6603677 | Redon et al. | Aug 2003 | B2 |
6653153 | Doan et al. | Nov 2003 | B2 |
6654278 | Engel et al. | Nov 2003 | B1 |
6677165 | Lu et al. | Jan 2004 | B1 |
6710984 | Yuasa et al. | Mar 2004 | B1 |
6713195 | Wang et al. | Mar 2004 | B2 |
6714444 | Huai et al. | Mar 2004 | B2 |
6744086 | Daughton et al. | Jun 2004 | B2 |
6750491 | Sharma et al. | Jun 2004 | B2 |
6765824 | Kishi et al. | Jul 2004 | B2 |
6772036 | Eryurek et al. | Aug 2004 | B2 |
6773515 | Li et al. | Aug 2004 | B2 |
6777730 | Daughton et al. | Aug 2004 | B2 |
6785159 | Tuttle | Aug 2004 | B2 |
6812437 | Levy et al. | Nov 2004 | B2 |
6829161 | Huai et al. | Dec 2004 | B2 |
6835423 | Chen et al. | Dec 2004 | B2 |
6838740 | Huai et al. | Jan 2005 | B2 |
6842317 | Sugita et al. | Jan 2005 | B2 |
6847547 | Albert et al. | Jan 2005 | B2 |
6887719 | Lu et al. | May 2005 | B2 |
6888742 | Nguyen et al. | May 2005 | B1 |
6902807 | Argoitia et al. | Jun 2005 | B1 |
6906369 | Ross et al. | Jun 2005 | B2 |
6920063 | Huai et al. | Jul 2005 | B2 |
6933155 | Albert et al. | Aug 2005 | B2 |
6958927 | Nguyen et al. | Oct 2005 | B1 |
6967863 | Huai | Nov 2005 | B2 |
6980469 | Kent et al. | Dec 2005 | B2 |
6985385 | Nguyen et al. | Jan 2006 | B2 |
6992359 | Nguyen et al. | Jan 2006 | B2 |
6995962 | Saito et al. | Feb 2006 | B2 |
7002839 | Kawabata et al. | Feb 2006 | B2 |
7005958 | Wan | Feb 2006 | B2 |
7006375 | Covington | Feb 2006 | B2 |
7009877 | Huai et al. | Mar 2006 | B1 |
7041598 | Sharma | May 2006 | B2 |
7045368 | Hong et al. | May 2006 | B2 |
7149106 | Mancoff et al. | Dec 2006 | B2 |
7170778 | Kent et al. | Jan 2007 | B2 |
7190611 | Nguyen et al. | Mar 2007 | B2 |
7203129 | Lin et al. | Apr 2007 | B2 |
7227773 | Nguyen et al. | Jun 2007 | B1 |
7262941 | Li et al. | Aug 2007 | B2 |
7307876 | Kent et al. | Dec 2007 | B2 |
7324387 | Bergemont et al. | Jan 2008 | B1 |
7335960 | Han et al. | Feb 2008 | B2 |
7351594 | Bae et al. | Apr 2008 | B2 |
7352021 | Bae et al. | Apr 2008 | B2 |
7376006 | Bednorz et al. | May 2008 | B2 |
7378699 | Chan et al. | May 2008 | B2 |
7449345 | Horng et al. | Nov 2008 | B2 |
7476919 | Hong et al. | Jan 2009 | B2 |
7502249 | Ding | Mar 2009 | B1 |
7573737 | Kent et al. | Aug 2009 | B2 |
7598555 | Papworth-Parkin | Oct 2009 | B1 |
7619431 | DeWilde et al. | Nov 2009 | B2 |
7630232 | Guo | Dec 2009 | B2 |
7643332 | Leuschner | Jan 2010 | B2 |
7679155 | Korenivski | Mar 2010 | B2 |
7911832 | Kent et al. | Mar 2011 | B2 |
7936595 | Han et al. | May 2011 | B2 |
7986544 | Kent et al. | Jul 2011 | B2 |
8014193 | Nakayama et al. | Sep 2011 | B2 |
8279663 | Nakayama et al. | Oct 2012 | B2 |
8279666 | Dieny et al. | Oct 2012 | B2 |
8334213 | Mao | Dec 2012 | B2 |
8357982 | Kajiyama | Jan 2013 | B2 |
8363465 | Kent et al. | Jan 2013 | B2 |
8456883 | Liu | Jun 2013 | B1 |
8488375 | Saida et al. | Jul 2013 | B2 |
8492881 | Kuroiwa et al. | Jul 2013 | B2 |
8508979 | Saida et al. | Aug 2013 | B2 |
8535952 | Ranjan et al. | Sep 2013 | B2 |
8574928 | Satoh et al. | Nov 2013 | B2 |
8576616 | Saida et al. | Nov 2013 | B2 |
8582355 | Saida et al. | Nov 2013 | B2 |
8617408 | Balamane | Dec 2013 | B2 |
8716817 | Saida et al. | May 2014 | B2 |
8737122 | Saida et al. | May 2014 | B2 |
8737137 | Choy et al. | May 2014 | B1 |
8779537 | Huai | Jul 2014 | B2 |
8823118 | Horng | Sep 2014 | B2 |
8852760 | Wang et al. | Oct 2014 | B2 |
8860156 | Beach | Oct 2014 | B2 |
8878317 | Daibou et al. | Nov 2014 | B2 |
9019754 | Bedeschi | Apr 2015 | B1 |
9025368 | Saida et al. | May 2015 | B2 |
9082888 | Kent et al. | Jul 2015 | B2 |
9117995 | Daibou et al. | Aug 2015 | B2 |
9159342 | Kudo et al. | Oct 2015 | B2 |
9245608 | Chen et al. | Jan 2016 | B2 |
9263667 | Pinarbasi | Feb 2016 | B1 |
9299918 | Daibou et al. | Mar 2016 | B2 |
9337412 | Pinarbasi et al. | Mar 2016 | B2 |
9362486 | Kim et al. | Jun 2016 | B2 |
9378817 | Lee et al. | Jun 2016 | B2 |
9379314 | Park | Jun 2016 | B2 |
9406876 | Pinarbasi | Aug 2016 | B2 |
9472282 | Lee et al. | Oct 2016 | B2 |
9472748 | Kuo et al. | Oct 2016 | B2 |
9484527 | Han et al. | Nov 2016 | B2 |
9548445 | Lee et al. | Jan 2017 | B2 |
9589616 | Meng et al. | Mar 2017 | B2 |
9728712 | Kardasz et al. | Aug 2017 | B2 |
9741926 | Pinarbasi et al. | Aug 2017 | B1 |
9773540 | Zang et al. | Sep 2017 | B2 |
9773974 | Pinarbasi et al. | Sep 2017 | B2 |
9777974 | Kamitani | Oct 2017 | B2 |
9853206 | Pinarbasi | Dec 2017 | B2 |
10008248 | Buhrman | Jun 2018 | B2 |
10026892 | Pinarbasi | Jul 2018 | B2 |
10032978 | Schabes et al. | Jul 2018 | B1 |
20020090533 | Zhang et al. | Jul 2002 | A1 |
20020105823 | Redon et al. | Aug 2002 | A1 |
20020132140 | Igarashi et al. | Sep 2002 | A1 |
20030117840 | Sharma et al. | Jun 2003 | A1 |
20030151944 | Saito | Aug 2003 | A1 |
20030197984 | Inomata et al. | Oct 2003 | A1 |
20030218903 | Luo | Nov 2003 | A1 |
20040012994 | Slaughter et al. | Jan 2004 | A1 |
20040061154 | Huai et al. | Apr 2004 | A1 |
20040094785 | Zhu et al. | May 2004 | A1 |
20040125649 | Durlam et al. | Jul 2004 | A1 |
20040130936 | Nguyen et al. | Jul 2004 | A1 |
20040257717 | Sharma et al. | Dec 2004 | A1 |
20050041342 | Huai et al. | Feb 2005 | A1 |
20050051820 | Stojakovic et al. | Mar 2005 | A1 |
20050063222 | Huai et al. | Mar 2005 | A1 |
20050104101 | Sun et al. | May 2005 | A1 |
20050128842 | Wei | Jun 2005 | A1 |
20050136600 | Huai | Jun 2005 | A1 |
20050158881 | Sharma | Jul 2005 | A1 |
20050174702 | Gill | Aug 2005 | A1 |
20050180202 | Huai et al. | Aug 2005 | A1 |
20050184839 | Nguyen et al. | Aug 2005 | A1 |
20050201023 | Huai et al. | Sep 2005 | A1 |
20050237787 | Huai et al. | Oct 2005 | A1 |
20050280058 | Pakala et al. | Dec 2005 | A1 |
20060018057 | Huai | Jan 2006 | A1 |
20060049472 | Diao et al. | Mar 2006 | A1 |
20060087880 | Mancoff et al. | Apr 2006 | A1 |
20060092696 | Bessho | May 2006 | A1 |
20060132990 | Morise et al. | Jun 2006 | A1 |
20060227465 | Inokuchi et al. | Oct 2006 | A1 |
20070019337 | Apalkov et al. | Jan 2007 | A1 |
20070047294 | Panchula | Mar 2007 | A1 |
20070096229 | Yoshikawa et al. | May 2007 | A1 |
20070242501 | Hung et al. | Oct 2007 | A1 |
20080031035 | Rodmacq et al. | Feb 2008 | A1 |
20080049488 | Rizzo | Feb 2008 | A1 |
20080112094 | Kent et al. | May 2008 | A1 |
20080151442 | Mauri et al. | Jun 2008 | A1 |
20080151614 | Guo | Jun 2008 | A1 |
20080259508 | Kent et al. | Oct 2008 | A2 |
20080297292 | Viala et al. | Dec 2008 | A1 |
20090046501 | Ranjan et al. | Feb 2009 | A1 |
20090072185 | Raksha et al. | Mar 2009 | A1 |
20090091037 | Assefa et al. | Apr 2009 | A1 |
20090098413 | Kanegae | Apr 2009 | A1 |
20090161421 | Cho et al. | Jun 2009 | A1 |
20090209050 | Wang et al. | Aug 2009 | A1 |
20090209102 | Zhong et al. | Aug 2009 | A1 |
20090231909 | Dieny et al. | Sep 2009 | A1 |
20100019333 | Zhao et al. | Jan 2010 | A1 |
20100124091 | Cowburn | May 2010 | A1 |
20100193891 | Wang et al. | Aug 2010 | A1 |
20100232206 | Li | Sep 2010 | A1 |
20100246254 | Prejbeanu et al. | Sep 2010 | A1 |
20100271870 | Zheng et al. | Oct 2010 | A1 |
20100290275 | Park et al. | Nov 2010 | A1 |
20100304204 | Routkevitch et al. | Dec 2010 | A1 |
20110001108 | Greene et al. | Jan 2011 | A1 |
20110032645 | Noel et al. | Feb 2011 | A1 |
20110058412 | Zheng et al. | Mar 2011 | A1 |
20110089511 | Keshtbod et al. | Apr 2011 | A1 |
20110121417 | Li | May 2011 | A1 |
20110133298 | Chen et al. | Jun 2011 | A1 |
20110141804 | Apalkov et al. | Jun 2011 | A1 |
20110149632 | Chen et al. | Jun 2011 | A1 |
20110216436 | Igarashi | Sep 2011 | A1 |
20120052258 | Op DeBeeck et al. | Mar 2012 | A1 |
20120069649 | Ranjan et al. | Mar 2012 | A1 |
20120120520 | Childress et al. | May 2012 | A1 |
20120155156 | Watts | Jun 2012 | A1 |
20120156390 | Araki | Jun 2012 | A1 |
20120181642 | Prejbeanu et al. | Jul 2012 | A1 |
20120188818 | Ranjan et al. | Jul 2012 | A1 |
20120228728 | Ueki et al. | Sep 2012 | A1 |
20120280336 | Jan | Nov 2012 | A1 |
20120280339 | Zhang et al. | Nov 2012 | A1 |
20120294078 | Kent et al. | Nov 2012 | A1 |
20120299133 | Son et al. | Nov 2012 | A1 |
20130001506 | Sato et al. | Jan 2013 | A1 |
20130001652 | Yoshikawa et al. | Jan 2013 | A1 |
20130021841 | Zhou et al. | Jan 2013 | A1 |
20130062714 | Zhu | Mar 2013 | A1 |
20130075845 | Chen et al. | Mar 2013 | A1 |
20130119495 | Vetro et al. | May 2013 | A1 |
20130157385 | Jung et al. | Jun 2013 | A1 |
20130244344 | Malmhall et al. | Sep 2013 | A1 |
20130267042 | Satoh et al. | Oct 2013 | A1 |
20130270523 | Wang et al. | Oct 2013 | A1 |
20130270661 | Yi et al. | Oct 2013 | A1 |
20130307097 | Yi et al. | Nov 2013 | A1 |
20130341801 | Satoh et al. | Dec 2013 | A1 |
20140009994 | Parkin et al. | Jan 2014 | A1 |
20140036573 | Ishihara et al. | Feb 2014 | A1 |
20140042571 | Gan et al. | Feb 2014 | A1 |
20140048896 | Huang et al. | Feb 2014 | A1 |
20140070341 | Beach et al. | Mar 2014 | A1 |
20140087483 | Ohsawa | Mar 2014 | A1 |
20140093701 | Sahoo et al. | Apr 2014 | A1 |
20140103472 | Kent et al. | Apr 2014 | A1 |
20140169085 | Wang et al. | Jun 2014 | A1 |
20140177316 | Otsuka et al. | Jun 2014 | A1 |
20140217531 | Jan | Aug 2014 | A1 |
20140252439 | Guo | Sep 2014 | A1 |
20140252519 | Kim | Sep 2014 | A1 |
20140264671 | Chepulskyy et al. | Sep 2014 | A1 |
20150008550 | Min et al. | Jan 2015 | A1 |
20150056368 | Wang et al. | Feb 2015 | A1 |
20150171316 | Park et al. | Jun 2015 | A1 |
20150279904 | Pinarbasi | Oct 2015 | A1 |
20150287910 | Lu | Oct 2015 | A1 |
20150357015 | Kent | Dec 2015 | A1 |
20160027999 | Pinarbasi | Jan 2016 | A1 |
20160087193 | Pinarbasi et al. | Mar 2016 | A1 |
20160093798 | Kim et al. | Mar 2016 | A1 |
20160099405 | Zimmer et al. | Apr 2016 | A1 |
20160111634 | Lee et al. | Apr 2016 | A1 |
20160126452 | Kuo et al. | May 2016 | A1 |
20160126453 | Chen et al. | May 2016 | A1 |
20160163965 | Han et al. | Jun 2016 | A1 |
20160163973 | Pinarbasi | Jun 2016 | A1 |
20160181508 | Lee et al. | Jun 2016 | A1 |
20160218278 | Pinarbasi et al. | Jul 2016 | A1 |
20160276006 | Ralph | Sep 2016 | A1 |
20160284762 | Wang et al. | Sep 2016 | A1 |
20160315118 | Kardasz et al. | Oct 2016 | A1 |
20160315259 | Kardasz et al. | Oct 2016 | A1 |
20160372656 | Pinarbasi et al. | Dec 2016 | A1 |
20170025472 | Kim et al. | Jan 2017 | A1 |
20170033156 | Gan et al. | Feb 2017 | A1 |
20170033283 | Pinarbasi et al. | Feb 2017 | A1 |
20170033742 | Akerman | Feb 2017 | A1 |
20170047107 | Berger et al. | Feb 2017 | A1 |
20170084826 | Zhou et al. | Mar 2017 | A1 |
20170222132 | Pinarbasi et al. | Aug 2017 | A1 |
20170236570 | Kent | Aug 2017 | A1 |
20170324029 | Pinarbasi et al. | Nov 2017 | A1 |
20170331032 | Chen et al. | Nov 2017 | A1 |
20170331033 | Kardasz et al. | Nov 2017 | A1 |
20170346002 | Pinarbasi et al. | Nov 2017 | A1 |
20180047894 | Pinarbasi et al. | Feb 2018 | A1 |
20180076382 | Park et al. | Mar 2018 | A1 |
20180114898 | Lee | Apr 2018 | A1 |
20180248110 | Kardasz et al. | Aug 2018 | A1 |
20180248113 | Pinarbasi et al. | Aug 2018 | A1 |
Number | Date | Country |
---|---|---|
2766141 | Jan 2011 | CA |
101036195 | Sep 2008 | CN |
102334207 | Jan 2012 | CN |
102959693 | Mar 2013 | CN |
105706259 | Jun 2016 | CN |
105917480 | Aug 2016 | CN |
106062979 | Oct 2016 | CN |
107750382 | Mar 2018 | CN |
107851712 | Mar 2018 | CN |
1345277 | Sep 2003 | EP |
3298636 | Mar 2018 | EP |
2817998 | Jun 2002 | FR |
2832542 | May 2003 | FR |
2910716 | Jun 2008 | FR |
H10-004012 | Jan 1998 | JP |
H11-120758 | Apr 1999 | JP |
H11-352867 | Dec 1999 | JP |
2001-195878 | Jul 2001 | JP |
2002-261352 | Sep 2002 | JP |
2002-357489 | Dec 2002 | JP |
2003-318461 | Nov 2003 | JP |
2005-044848 | Feb 2005 | JP |
2005-150482 | Jun 2005 | JP |
2005-535111 | Nov 2005 | JP |
4066477 | Mar 2006 | JP |
2006-128579 | May 2006 | JP |
2008-524830 | Jul 2008 | JP |
2009-027177 | Feb 2009 | JP |
2013-012546 | Jan 2013 | JP |
2013-219010 | Oct 2013 | JP |
2014-039061 | Feb 2014 | JP |
5635666 | Dec 2014 | JP |
2015-002352 | Jan 2015 | JP |
2017-510989 | Apr 2017 | JP |
2017-527097 | Sep 2017 | JP |
2017-532752 | Nov 2017 | JP |
10-2014-0115246 | Sep 2014 | KR |
10-2015-0016162 | Feb 2015 | KR |
WO 2009-080636 | Jul 2009 | WO |
WO 2011-005484 | Jan 2011 | WO |
WO 2014-062681 | Apr 2014 | WO |
WO-2015-153142 | Oct 2015 | WO |
2016011435 | Jan 2016 | WO |
WO-2016-014326 | Jan 2016 | WO |
WO-2016-048603 | Mar 2016 | WO |
WO-2016-171800 | Oct 2016 | WO |
WO-2016-171920 | Oct 2016 | WO |
WO-2016-204835 | Dec 2016 | WO |
WO-2017-019134 | Feb 2017 | WO |
WO-2017-030647 | Feb 2017 | WO |
WO-2017-131894 | Aug 2017 | WO |
Entry |
---|
International Search Report and Written Opinion dated May 10, 2018 in PCT/US2018/014645; 14 pages. |
International Search Report and Written Opinion dated May 30, 2018 in PCT/US2018/014641; 13 pages. |
Final Office Action dated Jul. 9, 2015 in U.S. Appl. No. 14/242,419; 19 pages. |
Final Office Action dated Jun. 9, 2017 in U.S. Appl. No. 14/814,038; 19 pages. |
Final Office Action dated Aug. 2, 2018 in U.S. Appl. No. 15/674,620. |
NonFinal Office Action dated Mar. 20, 2015 in U.S. Appl. No. 14/242,419; 18 pages. |
NonFinal Office Action dated Sep. 11, 2015 in U.S. Appl. No. 14/492,943; 13 pages. |
NonFinal Office Action dated Jan. 20, 2016 in U.S. Appl. No. 14/242,419; 17 pages. |
NonFinal Office Action dated Dec. 9, 2017 in U.S. Appl. No. 14/866,359; 26 pages. |
NonFinal Office Action dated Dec. 23, 2016 in U.S. Appl. No. 15/093,367; 13 pages. |
NonFinal Office Action dated Jan. 25, 2017 in U.S. Appl. No. 15/097,576; 17 pages. |
NonFinal Office Action dated Feb. 6, 2017 in U.S. Appl. No. 14/814,036; 22 pages. |
NonFinal Office Action dated Jun. 29, 2018 in U.S. Appl. No. 15/859,381. |
Nonfinal Office Action dated Jun. 26, 2018 in U.S. Appl. No. 15/859,384. |
NonFinal Office Action dated Jun. 29, 2018 in U.S. Appl. No. 15/859,374. |
Notice of Allowance dated Sep. 26, 2018 in U.S. Appl. No. 15/859,047; 10 pages. |
Notice of Allowance dated Oct. 24, 2018 in U.S. Appl. No. 15/859,517. |
Office Action dated Aug. 30, 2018 in Chinese Patent Application No. 201580009984.2. |
Office Action dated Oct. 9, 2018 in Japanese Patent Application No. 2016-526761. |
R.H. Koch, et al., “Thermally Assisted Magnetization Reversal in Submicron-Sized Magnetic Thin Films”; Physical Review Letters; The American Physical Society; vol. 84, No. 23; Jun. 5, 2000, pp. 5419-5422 (4 pages). |
K.J. Lee, et al., “Analytical investigation of spin-transfer dynamics using a perpendicular-to-plane polarizer”; Applied Physics Letters; American Institute of Physics; vol. 86, (2005); pp. 022505-1 to 022505-3 (3 pages). |
Kirsten Martens, et al., “Thermally Induced Magnetic Switching in Thin Ferromagnetic Annuli”; NSF grants PHY-0351964 (DLS); 2005; 11 pages. |
Kirsten Martens, et al., “Magnetic Reversal in Nanoscopic Ferromagnetic Rings”; NSF grants PHY-0351964 (DLS); 2006; 23 pages. |
“Magnetic Technology Sprintronics, Media and Interface”; Data Storage Institute, R&D Highlights; Sep. 2010; 3 pages. |
S. Ikeda, et al.; “A perpendicular-anisotropy CoFeB—MgO magnetic tunnel junction”; Nature Materials, vol. 9, Sep. 2010; pp. 721-724; 4 pages. |
Soo-Man Seo, et al.; “Current-induced synchronized switching of magnetization;” Applied Physics Letters 101; 2012 American Institute of Physics; Aug. 7, 2012; 6 pages. |
Kent, et al.; U.S. Appl. No. 61/715,111, filed Oct. 17, 2012, entitled “Inverted Orthogonal Spin Transfer Layer Stack”. |
Pinarbasi, et al.; U.S. Appl. No. 14/341,185, filed Jul. 25, 2014, entitled “Method for Manufacturing MTJ Memory Device”. |
Pinarbasi, et al.; U.S. Appl. No. 14/492,943, filed Sep. 22, 2014, entitled “Magnetic Tunnel Junction Structure for MRAM Device”. |
International Search Report and Written Opinion dated Jul. 10, 2015 in PCT/US2015/021580; 12 pages. |
Pinarbasi, et al.; U.S. Appl. No. 14/814,036, filed Jul. 30, 2015, entitled “Precessional Spin Current Structure for MRAM”. |
Kardasz, et al.; U.S. Appl. No. 14/866,359, filed Sep. 25, 2015, entitled “Spin Transfer Torque Structure for MRAM Devices Having a Spin Current Injection Capping Layer”. |
International Search Report and Written Opinion dated Oct. 30, 2015 in PCT/US2015/040700; 11 pages. |
International Search Report and Written Opinion dated Dec. 14, 2015 in PCT/US2015/047875; 13 pages. |
Pinarbasi, et al.; U.S. Appl. No. 15/041,325, filed Feb. 11, 2016, entitled “Method for Manufacturing MTJ Memory Device”. |
Kardasz, et al.; U.S. Appl. No. 15/091,853, filed Apr. 6, 2016, entitled “High Annealing Temperature Perpendicular Magnetic Anisotropy Structure for Magnetic Random Access Memory”. |
Pinarbasi, et al.; U.S. Appl. No. 15/093,367, filed Apr. 7, 2016, entitled “Magnetic Tunnel Junction Structure for MRAM Device”. |
Pinarbasi, et al.; U.S. Appl. No. 15/097,576, filed Apr. 13, 2016, entitled “Polishing Stop Layer(s) for Processing Arrays of Semiconductor Elements”. |
Pinarbasi, et al.; U.S. Appl. No. 15/157,783, filed May 18, 2016, entitled “Memory Cell Having Magnetic Tunnel Junction and Thermal Stability Enhancement Layer”. |
Berger, et al.; U.S. Appl. No. 15/174,482, filed Jun. 6, 2016, entitled “Method and Apparatus for Bipolar Memory Write-Verify”. |
International Search Report and Written Opinion dated Jun. 17, 2016 in PCT/US2016/021324; 9 pages. |
International Search Report and Written Opinion dated Jun. 17, 2016 in PCT/US2016/021691; 9 pages. |
International Search Report and Written Opinion dated Jul. 15, 2016 in PCT/US2016/026473; 9 pages. |
International Search Report and Written Opinion dated Jul. 21, 2016 in PCT/US2016/027445; 10 pages. |
International Search Report and Written Opinion dated Sep. 26, 2016 in PCT/US2016/037843; 10 pages. |
Pinarbasi, et al.; U.S. Appl. No. 15/445,260, filed Feb. 28, 2017, entitled “Precessional Spin Current Structure for MRAM”. |
Pinarbasi, et al.; U.S. Appl. No. 15/445,362, filed Feb. 28, 2017, entitled “Precessional Spin Current Structure for MRAM”. |
International Search Report and Written Opinion dated Apr. 7, 2017 in PCT/US2016/067444; 13 pages. |
Notice of Allowance dated Apr. 21, 2017 in U.S. Appl. No. 15/157,783; 36 pages. |
Pinarbasi, et al.; U.S. Appl. No. 15/656,398, filed Jul. 21, 2017, entitled “Memory Cell Having Magnetic Tunnel Junction and Thermal Stability Enhancement Layer”. |
Kardasz, et al.; U.S. Appl. No. 15/657,498, filed Jul. 24, 2017, entitled “Spin Transfer Torque Structure for MRAM Devices Having a Spin Current Injection Capping Layer”. |
Notice of Allowance dated Jul. 27, 2017 in U.S. Appl. No. 15/097,576; 22 pages. |
Pinarbasi, et al.; U.S. Appl. No. 15/674,620, filed Aug. 11, 2017, entitled “Polishing Stop Layer(s) for Processing Arrays of Semiconductor Elements”. |
Schabes, et al.; U.S. Appl. No. 15/634,629, filed Jun. 27, 2017, entitled “MRAM with Reduced Stray Magnetic Fields”. |
Notice of Allowance dated Oct. 16, 2017 in U.S. Appl. No. 14/814,036; 16 pages. |
Pinarbasi, et al.; U.S. Appl. No. 15/794,871, filed Oct. 26, 2017, entitled “Precessional Spin Current Structure for MRAM”. |
Tzoufras, et al.; U.S. Appl. No. 15/858,950, filed Dec. 29, 2017, entitled “AC Current Pre-Charge Write-Assist in Orthogonal STT-MRAM”. |
Gajek, et al.; U.S. Appl. No. 15/858,988, filed Dec. 29, 2017, entitled “Self-Generating AC Current Assist in Orthogonal STT MRAM”. |
Ryan, et al.; U.S. Appl. No. 15/859,015, filed Dec. 29, 2017, entitled “Shared Oscillator (STNO) for MRAM Array Write-Assist in Orthogonal STT-MRAM”. |
Tzoufras, et al.; U.S. Appl. No. 15/859,030, filed Dec. 29, 2017, entitled “AC Current Write-Assist in Orthogonal STT-MRAM”. |
Bozdag, et al.; U.S. Appl. No. 15/859,047, filed Dec. 29, 2017, entitled “Three-Terminal MRAM with AC Write-Assist for Low Read Disturb”. |
Schabes, et al.; U.S. Appl. No. 15/862,788, filed Jan. 5, 2018, entitled “Perpendicular Magnetic Tunnel Junction Device with Skyrmionic Enhancement Layers for the Precessional Spin Current Magnetic Layer”. |
Schabes, et al.; U.S. Appl. No. 15/859,384, filed Dec. 30, 2017, entitled “Perpendicular Magnetic Tunnel Junction Device with Skyrmionic Assist Layers for Free Layer Switching”. |
Schabes, et al.; U.S. Appl. No. 15/859,381, filed Dec. 30, 2017, entitled “Perpendicular Magnetic Tunnel Junction Device with Precessional Spin Current Layer Having a Modulated Moment Density”. |
Schabes, et al.; U.S. Appl. No. 15/859,379, filed Dec. 30, 2017, entitled “Perpendicular Magnetic Tunnel Junction Device with Offset Precessional Spin Current Layer”. |
Schabes, et al.; U.S. Appl. No. 15/859,374, filed Dec. 30, 2017, entitled “Switching and Stability Control for Perpendicular Magnetic Tunnel Junction Device”. |
El Baraji, et al.; U.S. Appl. No. 15/859,517, filed Dec. 30, 2017, entitled “Microwave Write-Assist in Series-Interconnected Orthogonal STT-MRAM Devices”. |