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5114780 | Mercer et al. | May 1992 | A |
5155175 | Mercer et al. | Oct 1992 | A |
5801094 | Yew et al. | Sep 1998 | A |
5858544 | Holl et al. | Jan 1999 | A |
5858877 | Dennison et al. | Jan 1999 | A |
5886410 | Chiang et al. | Mar 1999 | A |
5998522 | Nakano et al. | Dec 1999 | A |
6027995 | Chiang et al. | Feb 2000 | A |
6043145 | Suzuki et al. | Mar 2000 | A |
6071809 | Zhao | Jun 2000 | A |
6218317 | Allada et al. | Apr 2001 | B1 |
Entry |
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“High Stud-To-Line Contact Area in Damascene Metal Processing”; IBM Technical Disclosure Bulletin, vol. 33, No. IA, Jun. 1990. |