Number | Date | Country | Kind |
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10-165732 | Jun 1998 | JP |
Number | Name | Date | Kind |
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5482894 | Havemann | Jan 1996 | |
5759906 | Lou | Jun 1998 | |
6127256 | Matsuno | Oct 2000 | |
6184126 | Lee et al. | Feb 2001 |
Number | Date | Country |
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4-28232 | Jan 1992 | JP |
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Edelstein, D.C., et al., Picosecond Propagation on Multilevel Copper-Polyimide Back End of the Lone Interconnections, VMIC Conference, Jun. 8-9, 1993, pp. 511-513.* |
“Dual Damascene Copper Metallization Processing Using Chemical-Mechanical Polishing”, by S. Lakshiminarayanan, et al., Proceedings of 1994 VLSI Multilevel Interconnection Conference, pp. 49-55, 1994. |