Claims
- 1. A probe station comprising:(a) a chuck for supporting a test device; (b) at least one support for a probe to contact said test device; (c) an enclosure having a side member and an electrically conductive lower member having a substantially horizontal surface spaced vertically below said chuck; and (d) a member defining an aperture for receiving a positioner secured to said chuck, said aperture being capable of relative lateral movement with respect to said side member.
- 2. The probe station of claim 1 where said lower member comprises said member.
- 3. The probe station of claim 1 having a positioner extending through said aperture and where said member comprises overlapping, relatively slidable members extending laterally beneath said surface, said slidable members being of different sizes and defining openings of different sizes, and wherein one of said openings is said aperture.
- 4. The probe station of claim 3, wherein said enclosure has an upper member extending substantially laterally over said chuck, and said side member has a top that is substantially immovable laterally relative to said upper member.
- 5. The probe station of claim 3 wherein said positioner includes a motor assembly beneath said slidable members for moving said positioner.
- 6. The probe station of claim 1 wherein said enclosure includes a door for selectively accessing said chuck.
- 7. The probe station of claim 1, said enclosure substantially shielding said chuck against electromagnetic interference.
- 8. The probe station of claim 1, said enclosure substantially shielding said chuck against light.
- 9. The probe station of claim 1, said enclosure limiting fluid communication between the interior and exterior of said enclosure.
Parent Case Info
This application is a continuation of U.S. patent application Ser. No. 10/268,244, filed Oct. 9, 2002, now U.S. Pat. No. 6,636,059, which is a continuation of U.S. patent application Ser. No. 10/068,728, filed Feb. 6, 2002, now U.S. Pat. No. 6,486,687, which is a continuation of U.S. patent application Ser. No. 09/886,353, filed Jun. 20, 2001, now U.S. Pat. No. 6,380,751, which is a continuation of U.S. patent application Ser. No. 08/790,969, filed Jan. 29, 1997, now U.S. Pat. No. 6,313,649, which is a continuation of U.S. patent application Ser. No. 08/641,029, filed Apr. 29, 1996, now U.S. Pat. No. 5,604,444, which is a continuation of U.S. patent application Ser. No. 08/417,982, filed Apr. 6, 1995, now U.S. Pat. No. 5,532,609, which is a division of U.S. patent application Ser. No. 08/245,581, filed May 18, 1994, now U.S. Pat. No. 5,434,512, which is a division of U.S. patent application Ser. No. 07/896,853 filed Jun. 11, 1992, now U.S. Pat. No. 5,345,170.
US Referenced Citations (32)
Foreign Referenced Citations (5)
Number |
Date |
Country |
3114466 |
Mar 1982 |
DE |
201205 |
Dec 1986 |
EP |
02-022837 |
Jan 1990 |
JP |
2-220453 |
Sep 1990 |
JP |
04-000732 |
Jan 1992 |
JP |
Non-Patent Literature Citations (13)
Entry |
Micromanipulator Company, Inc., “Test Station Accessories,” (month unavailable) 1983. |
Temtronic Corporation, “Application Note I-Controlled Enclosure for Low Temperature Wafer Probing in a Moisture-Free Environment.” (month unavailable) (1990 or earlier). |
Temptronic Corporation, “Model TPO3000 Series Thermo Chuck Systems,” (month unavailable) (1990 or earlier). |
Y. Yamamoto, “A Compact Self-Shielding Prober for Accurate Measurement of On-Wafer Electron Devices,” IEEE Trans., Instrumentation and Measurement, vol. 38, pp. 1088-1093, (month unavailable) 1989. |
Signatone Model S-1240 Cross Section (month unavailable) (1987). |
Signatone Model S-1240 Promotional Brochure (month unavailable) (1987). |
Micromanipulator Company, Inc., “Model 8000 Test Station,” (month unavailable) 1986. |
Micromanipulator Company, Inc., “Model 8000 Test Station,” (month unavailable) 1988. |
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Applebay, Harry F., Deposition Transcript (pp. 5-8, 37-68, 77-84, and 89-96) with exhibits 572, 576-578, 581-583 and 585 describing Flexion MP-1, MP-2, MP-3, AP-1 and AP-4 probe stations sold in 1987 or earlier. (month unknown). |
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Continuations (6)
|
Number |
Date |
Country |
Parent |
10/268244 |
Oct 2002 |
US |
Child |
10/441646 |
|
US |
Parent |
10/068728 |
Feb 2002 |
US |
Child |
10/268244 |
|
US |
Parent |
09/886353 |
Jun 2001 |
US |
Child |
10/068728 |
|
US |
Parent |
08/790869 |
Jan 1997 |
US |
Child |
09/886353 |
|
US |
Parent |
08/641029 |
Apr 1996 |
US |
Child |
08/790869 |
|
US |
Parent |
08/417982 |
Apr 1995 |
US |
Child |
08/641029 |
|
US |