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James H. Rogers
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Santa Clara County, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma uniformity control in pulsed DC plasma chamber
Patent number
12,148,595
Issue date
Nov 19, 2024
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
L-motion slit door for substrate processing chamber
Patent number
12,125,688
Issue date
Oct 22, 2024
Applied Materials, Inc.
Hamid Noorbakhsh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feedback loop for controlling a pulsed voltage waveform
Patent number
12,057,292
Issue date
Aug 6, 2024
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma chamber and chamber component cleaning methods
Patent number
11,984,306
Issue date
May 14, 2024
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic electrostatic chuck bias compensation during plasma proce...
Patent number
11,948,780
Issue date
Apr 2, 2024
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for manipulating power at an edge ring in pla...
Patent number
11,908,661
Issue date
Feb 20, 2024
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for controlling ion energy distribution
Patent number
11,901,157
Issue date
Feb 13, 2024
Applied Materials, Inc.
Linying Cui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing using pulsed-voltage and radio-frequency power
Patent number
11,848,176
Issue date
Dec 19, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature and bias control of edge ring
Patent number
11,810,768
Issue date
Nov 7, 2023
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for controlling ion energy distribution
Patent number
11,798,790
Issue date
Oct 24, 2023
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic electrostatic chuck bias compensation during plasma proce...
Patent number
11,791,138
Issue date
Oct 17, 2023
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,776,789
Issue date
Oct 3, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Creating ion energy distribution functions (IEDF)
Patent number
11,728,124
Issue date
Aug 15, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feedback loop for controlling a pulsed voltage waveform
Patent number
11,699,572
Issue date
Jul 11, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for delivering a plurality of waveform signals...
Patent number
11,694,876
Issue date
Jul 4, 2023
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas splitting by time average injection into different zones by fas...
Patent number
11,610,759
Issue date
Mar 21, 2023
Applied Materials, Inc.
James Rogers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi zone gas injection upper electrode system
Patent number
11,594,400
Issue date
Feb 28, 2023
Lam Research Corporation
Ryan Bise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sheath and temperature control of a process kit in a substrate proc...
Patent number
11,551,916
Issue date
Jan 10, 2023
Applied Materials, Inc.
Jaeyong Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductively coupled plasma source
Patent number
11,521,828
Issue date
Dec 6, 2022
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High voltage filter assembly
Patent number
11,508,554
Issue date
Nov 22, 2022
Applied Materials, Inc.
Anurag Kumar Mishra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic ESC bias compensation when using pulsed DC bias
Patent number
11,476,145
Issue date
Oct 18, 2022
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,462,388
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed-voltage hardware assembly for use in a plasma processing system
Patent number
11,462,389
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for manipulating radio frequency power at an...
Patent number
11,367,593
Issue date
Jun 21, 2022
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Circuits for edge ring control in shaped DC pulsed plasma process d...
Patent number
11,289,310
Issue date
Mar 29, 2022
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlling ion energy distribution using a pulse generator
Patent number
11,284,500
Issue date
Mar 22, 2022
APPLIED MATERIALS, INC.
Leonid Dorf
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for manipulating power at an edge ring in a p...
Patent number
11,276,601
Issue date
Mar 15, 2022
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature and bias control of edge ring
Patent number
11,232,933
Issue date
Jan 25, 2022
APPLIED MATERIALS, INC.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual-level pulse tuning
Patent number
11,177,115
Issue date
Nov 16, 2021
Applied Materials, Inc.
Gary Leray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Peripheral RF feed and symmetric RF return for symmetric RF delivery
Patent number
11,127,571
Issue date
Sep 21, 2021
Lam Research Corporation
Sang Ki Nam
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING
Publication number
20240355586
Publication date
Oct 24, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING
Publication number
20240355587
Publication date
Oct 24, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER IMPEDANCE MANAGEMENT IN A PROCESSING CHAMBER
Publication number
20240194446
Publication date
Jun 13, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-SHAPE VOLTAGE PULSE TRAINS FOR UNIFORMITY AND ETCH PROFILE TU...
Publication number
20240153741
Publication date
May 9, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20240030002
Publication date
Jan 25, 2024
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR CONTROLLING ION ENERGY DISTRIBUTION
Publication number
20230420229
Publication date
Dec 28, 2023
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE AND BIAS CONTROL OF EDGE RING
Publication number
20230360892
Publication date
Nov 9, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Creating Ion Energy Distribution Functions (IEDF)
Publication number
20230352264
Publication date
Nov 2, 2023
Applied Materials, Inc.
LEONID DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FEEDBACK LOOP FOR CONTROLLING A PULSED VOLTAGE WAVEFORM
Publication number
20230326717
Publication date
Oct 12, 2023
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DELIVERING A PLURALITY OF WAVEFORM SIGNALS...
Publication number
20230298856
Publication date
Sep 21, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DELIVERING A PLURALITY OF WAVEFORM SIGNALS...
Publication number
20230178336
Publication date
Jun 8, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TO AN INDUCTIVELY COUPLED PLASMA SOURCE
Publication number
20230052071
Publication date
Feb 16, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20230030927
Publication date
Feb 2, 2023
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL IN PULSED DC PLASMA CHAMBER
Publication number
20220399193
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL IN PULSED DC PLASMA CHAMBER
Publication number
20220399184
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHAMBER AND CHAMBER COMPONENT CLEANING METHODS
Publication number
20220399194
Publication date
Dec 15, 2022
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHAMBER AND CHAMBER COMPONENT CLEANING METHODS
Publication number
20220399185
Publication date
Dec 15, 2022
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO REDUCE FEATURE CHARGING IN PLASMA PROCESSIN...
Publication number
20220399183
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO REDUCE FEATURE CHARGING IN PLASMA PROCESSIN...
Publication number
20220399186
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC ELECTROSTATIC CHUCK BIAS COMPENSATION DURING PLASMA PROCE...
Publication number
20220367157
Publication date
Nov 17, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC ELECTROSTATIC CHUCK BIAS COMPENSATION DURING PLASMA PROCE...
Publication number
20220367158
Publication date
Nov 17, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR MANIPULATING POWER AT AN EDGE RING IN PLA...
Publication number
20220319811
Publication date
Oct 6, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIFT PIN MECHANISM
Publication number
20220293452
Publication date
Sep 15, 2022
Alexander SULYMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...
Publication number
20220223386
Publication date
Jul 14, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
L-MOTION SLIT DOOR FOR SUBSTRATE PROCESSING CHAMBER
Publication number
20220165553
Publication date
May 26, 2022
Applied Materials, Inc.
Hamid NOORBAKHSH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR CONTROLLING ION ENERGY DISTRIBUTION
Publication number
20220157577
Publication date
May 19, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR CONTROLLING ION ENERGY DISTRIBUTION
Publication number
20220157561
Publication date
May 19, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED-VOLTAGE HARDWARE ASSEMBLY FOR USE IN A PLASMA PROCESSING SYSTEM
Publication number
20220037120
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20220037119
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER
Publication number
20220037121
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS