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G05B2219/32053
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PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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Program-control systems
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G05B2219/32053
Adjust work parameter as function of other cell
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last 30 patents
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Patent Grant
Control device for a production module, production module having a...
Patent number
10,671,035
Issue date
Jun 2, 2020
Siemens Aktiengesellshaft
Wendelin Feiten
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Automatic parameter adjustment device for adjusting parameter corre...
Patent number
10,216,169
Issue date
Feb 26, 2019
FANUC CORPORATION
Hajime Ogawa
G05 - CONTROLLING REGULATING
Information
Patent Grant
Feedback control of a chemical mechanical polishing device providin...
Patent number
8,694,145
Issue date
Apr 8, 2014
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Method and system for estimating context offsets for run-to-run con...
Patent number
8,355,810
Issue date
Jan 15, 2013
Applied Materials, Inc.
Jianping Zou
G05 - CONTROLLING REGULATING
Information
Patent Grant
Feedback control of chemical mechanical polishing device providing...
Patent number
8,070,909
Issue date
Dec 6, 2011
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Dynamic metrology schemes and sampling schemes for advanced process...
Patent number
7,783,375
Issue date
Aug 24, 2010
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Dynamic metrology schemes and sampling schemes for advanced process...
Patent number
7,725,208
Issue date
May 25, 2010
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Dynamic metrology schemes and sampling schemes for advanced process...
Patent number
7,698,012
Issue date
Apr 13, 2010
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Time weighted moving average filter
Patent number
7,542,880
Issue date
Jun 2, 2009
Advanced Micro Devices, Inc.
Richard P. Good
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Feedforward and feedback control for conditioning of chemical mecha...
Patent number
7,413,986
Issue date
Aug 19, 2008
Applied Materials, Inc.
Young Joseph Paik
B24 - GRINDING POLISHING
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Patent Grant
Process monitoring device for sample processing apparatus and contr...
Patent number
7,376,479
Issue date
May 20, 2008
Hitachi, Ltd.
Junichi Tanaka
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method of feedback control of sub-atmospheric chemical vapor deposi...
Patent number
7,201,936
Issue date
Apr 10, 2007
Applied Materials, Inc.
Alexander T. Schwarm
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for data stackification for run-to-run control
Patent number
7,181,354
Issue date
Feb 20, 2007
Advanced Micro Devices, Inc.
Christopher A. Bone
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Feedback control of a chemical mechanical polishing device providin...
Patent number
7,160,739
Issue date
Jan 9, 2007
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Process monitoring device for sample processing apparatus and contr...
Patent number
7,158,848
Issue date
Jan 2, 2007
Hitachi, Ltd.
Junichi Tanaka
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Feedforward and feedback control for conditioning of chemical mecha...
Patent number
7,101,799
Issue date
Sep 5, 2006
Applied Materials, Inc.
Young Joseph Paik
B24 - GRINDING POLISHING
Information
Patent Grant
Method, system and medium for process control for the matching of t...
Patent number
7,082,345
Issue date
Jul 25, 2006
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Process monitoring device for sample processing apparatus and contr...
Patent number
7,058,467
Issue date
Jun 6, 2006
Hitachi, Ltd.
Junichi Tanaka
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Integrating tool, module, and fab level control
Patent number
7,047,099
Issue date
May 16, 2006
Applied Materials Inc.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Grant
Control of chemical mechanical polishing pad conditioner directiona...
Patent number
7,040,956
Issue date
May 9, 2006
Applied Materials, Inc.
Young Joseph Paik
B24 - GRINDING POLISHING
Information
Patent Grant
Feedback control of plasma-enhanced chemical vapor deposition proce...
Patent number
6,913,938
Issue date
Jul 5, 2005
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Control of chemical mechanical polishing pad conditioner directiona...
Patent number
6,910,947
Issue date
Jun 28, 2005
Applied Materials, Inc.
Young Joseph Paik
B24 - GRINDING POLISHING
Information
Patent Grant
Method for adjusting processing parameters of at least one plate-sh...
Patent number
6,892,108
Issue date
May 10, 2005
Infineon Technologies SC300 GmbH & Co. KG
Karl Mautz
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Process monitoring device for sample processing apparatus and contr...
Patent number
6,879,867
Issue date
Apr 12, 2005
Hitachi, Ltd.
Junichi Tanaka
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method of manufacturing a semiconductor device and manufacturing sy...
Patent number
6,842,658
Issue date
Jan 11, 2005
Hitachi, Ltd.
Masaru Izawa
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method for global automated process control
Patent number
6,728,587
Issue date
Apr 27, 2004
Insyst Ltd.
Arnold J. Goldman
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method for identifying and applying families of part shape variations
Patent number
6,594,538
Issue date
Jul 15, 2003
General Electric Company
Michael E. Graham
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Method and apparatus for data stackification for run-to-run control
Patent number
6,460,002
Issue date
Oct 1, 2002
Advanced Micro Devices, Inc.
Christopher A. Bone
G05 - CONTROLLING REGULATING
Information
Patent Grant
Automated manufacture line
Patent number
5,262,954
Issue date
Nov 16, 1993
Hitachi, Ltd.
Motoaki Fujino
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
FREQUENCY DOMAIN-EMBEDDED, STATE SPACE METHOD AND SYSTEM FOR DECENT...
Publication number
20240077853
Publication date
Mar 7, 2024
KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
Ahmad A. MASOUD
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND SYSTEM FOR ADJUSTING INPUT VALUES WHEN OPERATING A MACHINE
Publication number
20220206478
Publication date
Jun 30, 2022
HOMAG GMBH
Eckhard BEILHARZ
B27 - WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL NAILING OR STAPLING MACH...
Information
Patent Application
AUTOMATIC PARAMETER ADJUSTMENT DEVICE FOR ADJUSTING PARAMETER CORRE...
Publication number
20160202688
Publication date
Jul 14, 2016
FANUC CORPORATION
Hajime Ogawa
G05 - CONTROLLING REGULATING
Information
Patent Application
FEEDBACK CONTROL OF A CHEMICAL MECHANICAL POLISHING DEVICE PROVIDIN...
Publication number
20120053721
Publication date
Mar 1, 2012
Arulkumar P. Shanmugasundram
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND SYSTEM FOR ESTIMATING CONTEXT OFFSETS FOR RUN-TO-RUN CON...
Publication number
20100191363
Publication date
Jul 29, 2010
Applied Materials, Inc.
Jianping Zou
G05 - CONTROLLING REGULATING
Information
Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
Publication number
20080133163
Publication date
Jun 5, 2008
Arulkumar P. Shanmugasundram
G05 - CONTROLLING REGULATING
Information
Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
Publication number
20080109089
Publication date
May 8, 2008
Arulkumar P. Shanmugasundram
G05 - CONTROLLING REGULATING
Information
Patent Application
TIME WEIGHTED MOVING AVERAGE FILTER
Publication number
20070239285
Publication date
Oct 11, 2007
Richard P. Good
G05 - CONTROLLING REGULATING
Information
Patent Application
Feedback control of sub-atmospheric chemical vapor deposition proce...
Publication number
20070169694
Publication date
Jul 26, 2007
Applied Materials, Inc.
Alexander T. Schwarm
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process monitoring device for sample processing apparatus and contr...
Publication number
20070162172
Publication date
Jul 12, 2007
Junichi Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Feedback control of chemical mechanical polishing device providing...
Publication number
20070102116
Publication date
May 10, 2007
APPLIED MATERIALS, INC.
Arulkumar P. Shanmugasundram
G05 - CONTROLLING REGULATING
Information
Patent Application
Process monitoring device for sample processing apparatus and contr...
Publication number
20060142888
Publication date
Jun 29, 2006
Junichi Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Feedforward and feedback control for conditioning of chemical mecha...
Publication number
20060009129
Publication date
Jan 12, 2006
Applied Materials, Inc.
Young Joseph Paik
G05 - CONTROLLING REGULATING
Information
Patent Application
Control of chemical mechanical polishing pad conditioner directiona...
Publication number
20050208879
Publication date
Sep 22, 2005
Applied Materials
Young Joseph Paik
G05 - CONTROLLING REGULATING
Information
Patent Application
Process monitoring device for sample processing apparatus and contr...
Publication number
20050090914
Publication date
Apr 28, 2005
Junichi Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for adjusting processing parameters of at least one plate-sh...
Publication number
20040125191
Publication date
Jul 1, 2004
Karl Mautz
G05 - CONTROLLING REGULATING
Information
Patent Application
Feedback control of sub-atmospheric chemical vapor deposition proce...
Publication number
20030049376
Publication date
Mar 13, 2003
Applied Materials, Inc.
Alexander T. Schwarm
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Feedback control of plasma-enhanced chemical vapor deposition proce...
Publication number
20030049390
Publication date
Mar 13, 2003
Applied Materials, Inc.
Arulkumar P. Shanmugasundram
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Feedforward and feedback control for conditioning of chemical mecha...
Publication number
20030027424
Publication date
Feb 6, 2003
Young Joseph Paik
B24 - GRINDING POLISHING
Information
Patent Application
Feedback control of a chemical mechanical polishing device providin...
Publication number
20020197745
Publication date
Dec 26, 2002
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Application
Control of chemical mechanical polishing pad conditioner directiona...
Publication number
20020197934
Publication date
Dec 26, 2002
Young Joseph Paik
B24 - GRINDING POLISHING
Information
Patent Application
Method, system and medium for process control for the matching of t...
Publication number
20020199082
Publication date
Dec 26, 2002
APPLIED MATERIALS, INC.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Application
In situ sensor based control of semiconductor processing procedure
Publication number
20020192966
Publication date
Dec 19, 2002
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Application
Dynamic metrology schemes and sampling schemes for advanced process...
Publication number
20020193899
Publication date
Dec 19, 2002
APPLIED MATERIALS, INC.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Application
Integrating tool, module, and fab level control
Publication number
20020193902
Publication date
Dec 19, 2002
APPLIED MATERIALS, INC.
Arulkumar P. Shanmugasundram
B24 - GRINDING POLISHING
Information
Patent Application
Process monitoring device for sample processing apparatus and contr...
Publication number
20020123816
Publication date
Sep 5, 2002
Junichi Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Method of manufacturing a semiconductor device and manufacturing sy...
Publication number
20020103563
Publication date
Aug 1, 2002
Masaru Izawa
G05 - CONTROLLING REGULATING
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Patent Application
Use of endpoint system to match individual processing stations wirh...
Publication number
20020087229
Publication date
Jul 4, 2002
Alexander J. Pasadyn
G05 - CONTROLLING REGULATING
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Patent Application
Method for global automated process control
Publication number
20020082738
Publication date
Jun 27, 2002
INSYST LTD.
Arnold J. Goldman
G05 - CONTROLLING REGULATING