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MICRO-STRUCTURAL DEVICES OR SYSTEMS
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B81B1/00
Devices without movable or flexible elements
B81B2201/00
Specific applications of micro-electromechanical systems
B81B2203/00
Basic micro-electromechanical structures
B81B2207/00
Micro-structural systems or auxiliary parts thereof
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Devices comprising flexible or deformable elements
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Devices comprising elements which are movable in relation to each other
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
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Patents Grants
last 30 patents
Information
Patent Grant
Actuator device and method for manufacturing actuator device
Patent number
11,970,389
Issue date
Apr 30, 2024
Hamamatsu Photonics K.K.
Daiki Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package and method for manufacturing the same
Patent number
11,973,048
Issue date
Apr 30, 2024
Advanced Semiconductor Engineering, Inc.
An-Nong Wen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure and method for manufacturing the same
Patent number
11,970,388
Issue date
Apr 30, 2024
Winbond Electronics Corp.
Jin-Neng Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plate
Patent number
11,970,681
Issue date
Apr 30, 2024
Ushio Denki Kabushiki Kaisha
Daisuke Nomoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Light deflection device, distance measurement device, and mobile body
Patent number
11,971,537
Issue date
Apr 30, 2024
Ricoh Company, Ltd.
Kazuhiko Adachi
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Mechanical shock resistant MEMS accelerometer arrangement, associat...
Patent number
11,971,428
Issue date
Apr 30, 2024
Merlin Technology, Inc.
Albert W. Chau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Application specific integrated circuit (ASIC) chip, and sensor and...
Patent number
11,973,503
Issue date
Apr 30, 2024
NANJING PRIME SEMICONDUCTOR CO., LTD.
Sunfeng Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Protective cover member and member supplying sheet including the same
Patent number
11,969,975
Issue date
Apr 30, 2024
Nitto Denko Corporation
Yuichi Abe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system device containing a bump stopper an...
Patent number
11,970,387
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chun-wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Flexible electrode and preparation method thereof
Patent number
11,970,391
Issue date
Apr 30, 2024
SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
Tianzhun Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS chip
Patent number
11,968,497
Issue date
Apr 23, 2024
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhengyu Shi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sealed force sensor with etch stop layer
Patent number
11,965,787
Issue date
Apr 23, 2024
NEXTINPUT, INC.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric body and MEMS device using same
Patent number
11,968,902
Issue date
Apr 23, 2024
National Institute of Advanced Industrial Science and Technology
Masato Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having uniform contacts
Patent number
11,964,866
Issue date
Apr 23, 2024
Qorvo US, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of making piezoelectric microphone with deflection control
Patent number
11,963,452
Issue date
Apr 16, 2024
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for sensing the activity of people or the status of infrastr...
Patent number
11,961,384
Issue date
Apr 16, 2024
EnOcean GmbH
Frank Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for controlling stress variation in a material...
Patent number
11,961,722
Issue date
Apr 16, 2024
SPTS Technologies Limited
Anthony Wilby
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual-layer micro-ribbon MEMS light modulator
Patent number
11,958,738
Issue date
Apr 16, 2024
Silicon Light Machines Corporation
Olav Solgaard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a microelectromechanical sensor and microelect...
Patent number
11,958,740
Issue date
Apr 16, 2024
Robert Bosch GmbH
Achim Kronenberger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sample loading cartridge
Patent number
11,958,049
Issue date
Apr 16, 2024
Astrego Diagnostics AB
Johan Öhman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Combined corrugated piezoelectric microphone and corrugated piezoel...
Patent number
11,962,973
Issue date
Apr 16, 2024
Infineon Technologies AG
Christian Bretthauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS sensors and systems
Patent number
11,959,806
Issue date
Apr 16, 2024
OBSIDIAN SENSORS, INC.
John Hong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
Patent number
11,953,674
Issue date
Apr 9, 2024
Texas Instruments Incorporated
Jose A. Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator device
Patent number
11,952,265
Issue date
Apr 9, 2024
Hamamatsu Photonics K.K.
Sadaharu Takimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical component
Patent number
11,957,059
Issue date
Apr 9, 2024
Xaar Technology Limited
Andrew Vella
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
Patent number
11,953,813
Issue date
Apr 9, 2024
STMicroelectronics S.r.l.
Nicolo' Boni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,952,267
Issue date
Apr 9, 2024
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
Patent number
11,952,268
Issue date
Apr 9, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device production method
Patent number
11,953,675
Issue date
Apr 9, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure designs for MEMS-based active cooling
Patent number
11,956,921
Issue date
Apr 9, 2024
Frore Systems Inc.
Suryaprakash Ganti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
Publication number
20240140781
Publication date
May 2, 2024
Vanguard International Semiconductor Corporation
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL SYSTEM AND METHOD FOR OPERATING AN ELECTROMECHANI...
Publication number
20240140784
Publication date
May 2, 2024
ROBERT BOSCH GmbH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL SENSOR WITH INTEGRATED STRESS SENSOR AND METHOD FOR...
Publication number
20240142490
Publication date
May 2, 2024
ROBERT BOSCH GmbH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20240140782
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing company Ltd.
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A DEVICE COMPRISING TWO SEMICONDUCTOR DICE...
Publication number
20240140783
Publication date
May 2, 2024
STMicroelectronics S.r.l.
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIGITAL LIGHT PROCESSING 3D PRINTED MONOLITHIC SUBSTRATES WITH INTE...
Publication number
20240140022
Publication date
May 2, 2024
Toyota Motor Engineering & Manufacturing North America, Inc.
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS
Publication number
20240142770
Publication date
May 2, 2024
Mitsubishi Electric Corporation
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS RESONANT SENSOR ADAPTED TO GENERATE A PULSE OUTPUT SIGNAL
Publication number
20240132341
Publication date
Apr 25, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Emmanuel HARDY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LASER SEALING METHODS FOR CLOSING VENTHOLES OF MICROMECAHNICAL DEVICES
Publication number
20240132342
Publication date
Apr 25, 2024
ROBERT BOSCH GmbH
Bo CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE AND PIEZOELECTRIC COMPOSITE...
Publication number
20240136994
Publication date
Apr 25, 2024
Vanguard International Semiconductor Corporation
JIA JIE XIA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
Publication number
20240137711
Publication date
Apr 25, 2024
Innogrity Pte Ltd
KATHIRGAMASUNDARAM SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical Device for Generating Sound Pressure
Publication number
20240132339
Publication date
Apr 25, 2024
ROBERT BOSCH GmbH
Markus Klemm
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240132340
Publication date
Apr 25, 2024
STMicroelectronics (Malta) Ltd.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL DEVICE COMPRISING A HYDROGEN DRAINAGE LAYER
Publication number
20240124296
Publication date
Apr 18, 2024
ROBERT BOSCH GmbH
Johannes Boy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240130240
Publication date
Apr 18, 2024
STMicroelectronics S.r.l.
Gianluca LONGONI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
Publication number
20240125599
Publication date
Apr 18, 2024
The Regents of the University of California
Andrei M. SHKEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Devices and Methods of Manufacture
Publication number
20240124298
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yun-Chung Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE INCLUDI...
Publication number
20240124299
Publication date
Apr 18, 2024
STMicroelectronics S.r.l.
Paolo FERRARI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
Publication number
20240124300
Publication date
Apr 18, 2024
STMICROELECTRONICS, INC.
Jefferson Sismundo TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CARTRIDGE INTERFERENCE
Publication number
20240124297
Publication date
Apr 18, 2024
VueReal Inc.
Gholamreza CHAJI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTICAL DEVICE
Publication number
20240126070
Publication date
Apr 18, 2024
HAMAMATSU PHOTONICS K. K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTO-MECHANICAL STRUCTURE AND ASSOCIATED MANUFACTURING METHODS
Publication number
20240118533
Publication date
Apr 11, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Thomas FURCATTE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED STRUCTURES
Publication number
20240120245
Publication date
Apr 11, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MODULE
Publication number
20240116750
Publication date
Apr 11, 2024
Rohm Co., Ltd.
Takashi NAIKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED CAVITY STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240116752
Publication date
Apr 11, 2024
Zhuhai ACCESS Semiconductor Co., Ltd
Xianming CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRUE WIRELESS DEVICE AND DUAL-MODE TRUE WIRELESS DEVICE
Publication number
20240121545
Publication date
Apr 11, 2024
Fortemedia, Inc.
Yen-Son Paul HUANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CYLINDRICAL MEMS STRUCTURES FOR AUDIO COMPONENTS
Publication number
20240121559
Publication date
Apr 11, 2024
Apple Inc.
Onur I. ILKORUR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED DEVICE PACKAGE
Publication number
20240118131
Publication date
Apr 11, 2024
Analog Devices International Unlimited Company
Johnny Solana Gealon
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WEARABLE DEVICE WITH COMBINED SENSING CAPABILITIES
Publication number
20240118141
Publication date
Apr 11, 2024
PIXART IMAGING INCORPORATION
Chih-Ming Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR SEALING A MEMS DEVICE AND A SEALED MEMS DEVICE
Publication number
20240116753
Publication date
Apr 11, 2024
Murata Manufacturing Co., Ltd.
Antti IIHOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY