MICRO-STRUCTURAL DEVICES OR SYSTEMS

Industry

CPC
B81B

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology

Current Industry

Sub Industries

B81B1/00Devices without movable or flexible elements B81B2201/00Specific applications of micro-electromechanical systems B81B2203/00Basic micro-electromechanical structures B81B2207/00Micro-structural systems or auxiliary parts thereof B81B3/00Devices comprising flexible or deformable elements B81B5/00Devices comprising elements which are movable in relation to each other B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS sensor as well as method for operating a mems sensor
- Patent number 12,145,840
- Issue date Nov 19, 2024
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light ranging device having an electronically scanned emitter array
- Patent number 12,146,954
- Issue date Nov 19, 2024
- Ouster, Inc.
- Angus Pacala
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drop resistant MEMS actuator-imager assembly package
- Patent number 12,145,839
- Issue date Nov 19, 2024
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-impact motion limiter
- Patent number 12,139,395
- Issue date Nov 12, 2024
- Murata Manufacturing Co., Ltd.
- Mikko Partanen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
- Patent number 12,139,397
- Issue date Nov 12, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflector, deflecting device, distance measurement device, im...
- Patent number 12,140,698
- Issue date Nov 12, 2024
- Ricoh Company, Ltd.
- Goichi Akanuma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal control of MEMS mirrors to limit resonant frequency shift
- Patent number 12,140,752
- Issue date Nov 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical sensor device with improved stability to stress
- Patent number 12,139,396
- Issue date Nov 12, 2024
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Conductive bond structure to increase membrane sensitivity in MEMS...
- Patent number 12,139,399
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device and sensor
- Patent number 12,140,430
- Issue date Nov 12, 2024
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Hideki Ueda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Centrally anchored MEMS-based active cooling systems
- Patent number 12,137,540
- Issue date Nov 5, 2024
- Frore Systems Inc.
- Ananth Saran Yalamarthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method for manufacturing a semiconductor d...
- Patent number 12,134,556
- Issue date Nov 5, 2024
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and fabrication method
- Patent number 12,134,097
- Issue date Nov 5, 2024
- Shanghai Tianma Micro-Electronics Co., Ltd.
- Wei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator system
- Patent number 12,135,437
- Issue date Nov 5, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,134,557
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Undercut-free patterned aluminum nitride structure and methods for...
- Patent number 12,134,824
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device, electronic apparatus, and vehicle
- Patent number 12,130,303
- Issue date Oct 29, 2024
- Seiko Epson Corporation
- Fumiya Ito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and apparatus for micromirror designs with electrode contact
- Patent number 12,130,425
- Issue date Oct 29, 2024
- Texas Instruments Incorporated
- William Craig McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Triple-membrane MEMS device
- Patent number 12,133,060
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semi-finished product of electronic device and electronic device
- Patent number 12,129,169
- Issue date Oct 29, 2024
- Merry Electronics Co., Ltd.
- Jen-Yi Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduced light reflection package
- Patent number 12,133,049
- Issue date Oct 29, 2024
- Invensense, Inc.
- Roberto Brioschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectronics package with vertically stacked MEMS device and co...
- Patent number 12,129,168
- Issue date Oct 29, 2024
- Qorvo US, Inc.
- Julio C. Costa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sensing a motion of a deflective surface
- Patent number 12,133,050
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertia measurement device, vehicle, and electronic device
- Patent number 12,130,305
- Issue date Oct 29, 2024
- Seiko Epson Corporation
- Yusuke Kinoshita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interlocking proof mass for mems inertial sensing device
- Patent number 12,129,167
- Issue date Oct 29, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Paul J. Resnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20240383743
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu LIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240383744
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20240383742
- Publication date Nov 21, 2024
- Zhunmao (Hangzhou) Technology Co.
- Haitao Ding
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
- Publication number 20240383005
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kang-Yi Lien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPUTATIONAL METHODS FOR PREDICTING ADHESION CHARACTERISTICS OF MO...
- Publication number 20240387002
- Publication date Nov 21, 2024
- ROBERT BOSCH GmbH
- Georgy SAMSONIDZE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT
- Publication number 20240383745
- Publication date Nov 21, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COVALENTLY MODIFIED SURFACES, KITS, AND METHODS OF PREPARATION AND USE
- Publication number 20240375097
- Publication date Nov 14, 2024
- Bruker Cellular Analysis, Inc.
- Randall D. LOWE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTILAYER FLUIDIC DEVICES AND METHODS FOR THEIR FABRICATION
- Publication number 20240375099
- Publication date Nov 14, 2024
- Illumina, Inc.
- Jeffrey S. FISHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING IMPROVED SIGNAL DISTOR...
- Publication number 20240375938
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20240375940
- Publication date Nov 14, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIELECTRIC PROTECTION LAYER CONFIGURED TO INCREASE PERFORMANCE OF M...
- Publication number 20240375943
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROBE MODULE STRUCTURE
- Publication number 20240377434
- Publication date Nov 14, 2024
- TAIWAN MASK CORPORATION
- SHANG-KUANG WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
- Publication number 20240381034
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORCE SENSOR WITH AN INCREASED OPERATING RANGE
- Publication number 20240377431
- Publication date Nov 14, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Theo MIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Fabrication Process with Reduced Z-Axis Stiction
- Publication number 20240375937
- Publication date Nov 14, 2024
- NXP USA, Inc.
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP STRUCTURES FOR MEMS DEVICE
- Publication number 20240375939
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Jhih Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM
- Publication number 20240375941
- Publication date Nov 14, 2024
- ROBERT BOSCH GmbH
- Udo Schulz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
- Publication number 20240367964
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
- Publication number 20240368746
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...
- Publication number 20240367965
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Enhanced microelectromechanical system mirror apparatus
- Publication number 20240369826
- Publication date Nov 7, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Dmitry Morits
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYDROGEN SENSOR, HYDROGEN DETECTING METHOD, AND NON-TRANSITORY COMP...
- Publication number 20240369506
- Publication date Nov 7, 2024
- Kabushiki Kaisha Toshiba
- Hiroaki Yamazaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SOUND PRODUCING PACKAGE AND COVERING STRUCTURE
- Publication number 20240365048
- Publication date Oct 31, 2024
- xMEMS Labs, Inc.
- Chao-Yu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...
- Publication number 20240359970
- Publication date Oct 31, 2024
- MITSUMI ELECTRIC CO., LTD.
- Hisanori AGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL DRIVE OF A SOUND TRANSDUCER SYSTEM
- Publication number 20240359971
- Publication date Oct 31, 2024
- ROBERT BOSCH GmbH
- Raik Fiedler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Switch, Preparation Method thereof, and Electronic Apparatus
- Publication number 20240359973
- Publication date Oct 31, 2024
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Lipid-Free Anchoring of Thermophilic Bacteriophage G20c Portal Adap...
- Publication number 20240361296
- Publication date Oct 31, 2024
- Northeastern University
- Meni Wanunu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROOPTICAL SYSTEMS HAVING HEAT ELEMENTS
- Publication number 20240361587
- Publication date Oct 31, 2024
- Innoviz Technologies Ltd.
- Yair ALPERN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE AND METHOD FOR PREPARING SAME, AND SENSOR
- Publication number 20240359972
- Publication date Oct 31, 2024
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Lihui WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY

MICRO-STRUCTURAL DEVICES OR SYSTEMS

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

MEMS sensor as well as method for operating a mems sensor

Light ranging device having an electronically scanned emitter array

CMUT transducer with motion-stopping structure and CMUT transducer...

Drop resistant MEMS actuator-imager assembly package

Multiple layer electrode transducers

Low-impact motion limiter

Selective self-assembled monolayer patterning with sacrificial laye...

Light deflector, deflecting device, distance measurement device, im...

Thermal control of MEMS mirrors to limit resonant frequency shift

Microelectromechanical sensor device with improved stability to stress

Pressure sensor with high stability

Conductive bond structure to increase membrane sensitivity in MEMS...

Sensor device and sensor

Centrally anchored MEMS-based active cooling systems

Semiconductor device and method for manufacturing a semiconductor d...

Method and structure for CMOS-MEMS thin film encapsulation

Microfluidic chip and fabrication method

MEMS actuator system

Arched membrane structure for MEMS device

Undercut-free patterned aluminum nitride structure and methods for...

Mems device, electronic apparatus, and vehicle

Systems and apparatus for micromirror designs with electrode contact

Triple-membrane MEMS device

Semi-finished product of electronic device and electronic device

MEMS actuator package architecture

Reduced light reflection package

Microelectronics package with vertically stacked MEMS device and co...

Device for sensing a motion of a deflective surface

Inertia measurement device, vehicle, and electronic device

Interlocking proof mass for mems inertial sensing device

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

MEMS DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

COMPUTATIONAL METHODS FOR PREDICTING ADHESION CHARACTERISTICS OF MO...

MICROMECHANICAL COMPONENT

COVALENTLY MODIFIED SURFACES, KITS, AND METHODS OF PREPARATION AND USE

MULTILAYER FLUIDIC DEVICES AND METHODS FOR THEIR FABRICATION

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING IMPROVED SIGNAL DISTOR...

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

DIELECTRIC PROTECTION LAYER CONFIGURED TO INCREASE PERFORMANCE OF M...

MEMS PROBE MODULE STRUCTURE

TOP NOTCH SLIT PROFILE FOR MEMS DEVICE

FORCE SENSOR WITH AN INCREASED OPERATING RANGE

MEMS Device and Fabrication Process with Reduced Z-Axis Stiction

STOPPER BUMP STRUCTURES FOR MEMS DEVICE

TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM

OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...

UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...

CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...

Enhanced microelectromechanical system mirror apparatus

HYDROGEN SENSOR, HYDROGEN DETECTING METHOD, AND NON-TRANSITORY COMP...

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

SOUND PRODUCING PACKAGE AND COVERING STRUCTURE

VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...

DIFFERENTIAL DRIVE OF A SOUND TRANSDUCER SYSTEM

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

Lipid-Free Anchoring of Thermophilic Bacteriophage G20c Portal Adap...

ELECTROOPTICAL SYSTEMS HAVING HEAT ELEMENTS

PACKAGE STRUCTURE AND METHOD FOR PREPARING SAME, AND SENSOR