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3373278
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Information
Patent Grant
3373278
References
Source
Patent Number
3,373,278
Date Filed
Not available
Date Issued
Tuesday, March 12, 1968
56 years ago
CPC
G01N23/223 - by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
C23C14/544 - using measurement in the gas phase
G01N23/22 - by measuring secondary emission
G01N23/225 - using electron or ion microprobe or incident electron or ion beam
G01N2223/076 - X-ray fluorescence
G01N2223/079 - incident electron beam and measuring excited X-rays
G01N2223/61 - thin films, coatings
G01N2223/638 - gas
US Classifications
427 - Coating processes
118 - Coating apparatus
250 - Radiant energy
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