Electrolytic plating method

Abstract
A novel electrolytic plating method suitable for filling non-through holes with metal is disclosed. The electrolytic plating method uses a plating solution containing additives such as a surfactant, a brightening agent and a smoothing agent and includes pulse plating for controlling adsorption and desorption of tie additives on the surface and in the non-through holes of substrate and subsequent DC plating for filling up the non-through holes with metal.
Description
BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 shows cross-sections of blind via holes in a printed circuit board plated in Example 1.



FIG. 2 shows cross-sections of blind via holes in a printed circuit board plated in Example 2.

Claims
  • 1. An electrolytic plating method using the plating solution containing additives such as surfactants, brightening agents and smoothing agents, characterized by a plating process comprising a pulse plating to control adsorption and desorption of the additives and a subsequent DC plating to fill up non-thorough holes.
  • 2. An electrolytic plating method according to claim 1, wherein the thickness of plating formed by the pulse plating is not larger than 15 μm.
  • 3. An electrolytic plating method according to claim 1, wherein the plating solution contains as an additive at least a component which exhibits the acceleration of metal deposition of plating.
  • 4. An electrolytic plating method according to claim 1, wherein an insoluble electrode is used as a counter electrode relative to the substrate to be plated.
  • 5. An electrolytic plating method according to claim 1, wherein the metal deposited as plating is copper.
  • 6. A printed circuit board having at least one non-through hole electrolytically plated by the method according to claim 1.
  • 7. A semiconductor wafer plated electrolytically by the method described in claim 1.
Priority Claims (1)
Number Date Country Kind
2006-205665 Jul 2006 JP national