Claims
- 1. An addressable field-emission array, comprising:
a plurality of addressable emitters; and an on-chip electrostatic focusing stack coupled to said plurality of addressable emitters.
- 2. The addressable field emission array of claim 1, wherein the plurality of addressable emitters are controlled using a logical shift register and current regulator circuit.
- 3. The addressable field-emission array of claim 1, further comprising: a plurality of detectors coupled to said plurality of addressable emitters.
- 4. The addressable field-emission array of claim 3, further comprising: a plurality of current copier circuits, each of said plurality of current copier circuits electrically connected to one of said plurality of addressable emitters.
- 5. A maskless digital e-beam direct write lithography system, comprising the apparatus of claim 1.
- 6. An addressable field-emission array, comprising:
a plurality of addressable emitters; and and a plurality of detectors coupled to said plurality of addressable emitters.
- 7. The addressable field-emission array of claim 6, further comprising: a plurality of current copier circuits, each of said plurality of current copier circuits electrically connected to one of said plurality of addressable emitters.
- 8. A scanning electron microscope, comprising the apparatus of claim 6.
- 9. An addressable field-emission array, comprising:
a plurality of addressable emitters; and a plurality of current copier circuits, each of said plurality of current copier circuits electrically connected to one of said plurality of addressable emitters.
- 10. The addressable field-emission array of claim 9, further comprising: an on-chip electrostatic focusing stack coupled to said plurality of addressable emitters.
- 11. A method of operating an addressable field-emission array, comprising:
generating a plurality of electron beams from a plurality of emitters that compose said addressable field-emission array; and focusing at least one of said plurality of electron beams with an on-chip electrostatic focusing stack.
- 12. The method of claim 11, wherein said plurality of addressable emitters are powered by a plurality of current copier circuits, each of said plurality of current copier circuits electrically connected to one of said plurality of addressable emitters.
- 13. The method of claim 11, further comprising receiving a signal that is elicited by said plurality of electron beams with a plurality of detectors that are coupled to said plurality of addressable emitters.
- 14. The method of claim 11, further comprising individually addressing each of said plurality of emitters
- 15. The method of claim 14, further comprising controlling said plurality of emitters with a logical shift register and current regulator circuit.
- 16. A method of scanning electron microscopy, comprising:
generating a plurality of electron beams from a plurality of addressable emitters that compose an addressable field-emission array
focusing at least one of said plurality of electron beams with an on-chip electrostatic focusing stack; and acquiring an image with a plurality of electron detectors coupled to said plurality of addressable emitters.
- 17. The method of claim 16, further comprising traversing a target located on a stage that is coupled to said addressable field-emission array to scan said at least one of said plurality of electron beams across a surface of said target.
- 18. A method of e-beam lithography, comprising:
generating a plurality of electron beams from a plurality of emitters that compose an addressable field-emission array focusing at least one of said plurality of electron beams with an on-chip electrostatic focusing stack; and exposing an e-beam resist with said plurality of electron beams.
- 19. The method of claim 18, wherein exposing said e-beam resist includes generating a gray-scale pattern in said e-beam resist.
- 20. An integrated circuit made by the method of claim 18.
CROSS-REFERENCES TO RELATED APPLICATIONS
[0001] This application is a continuation-in-part under 35 U.S.C. §120 and 37 CFR 1.371 of copending PCT/US98/01850, filed Jan. 29, 1998, now pending, which is a continuation of U.S. Ser. No. 08/795,003, filed Feb. 5, 1997, now U.S. Pat. No. 5,892,231, and a continuation-in-part under 35 U.S.C. §120 of U.S. Ser. No. 60/128,196, filed Apr. 7, 1999, now pending, the entire contents of all of which are hereby incorporated herein by reference as if fully set forth herein.
STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY-SPONSORED RESEARCH AND DEVELOPMENT
[0002] This invention was made with United States government support awarded by the United States Department of Energy under contract to Lockheed Martin Energy Research Corporation and/or Lockheed Martin Energy Systems Corporation. The United States has certain rights in this invention.
Provisional Applications (1)
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Number |
Date |
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60128196 |
Apr 1999 |
US |
Continuations (1)
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Number |
Date |
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Parent |
09368919 |
Aug 1999 |
US |
Child |
10260321 |
Sep 2002 |
US |
Continuation in Parts (2)
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Number |
Date |
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Parent |
PCT/US98/01850 |
Jan 1998 |
US |
Child |
09368919 |
Aug 1999 |
US |
Parent |
08795003 |
Feb 1997 |
US |
Child |
09368919 |
Aug 1999 |
US |