Claims
- 1. An etchant useful for chemically milling aluminum from tri-metal layers of copper-aluminum-copper being copper circuit patterns present on opposing surfaces of an aluminum foil, one of the copper patterns being laminated onto a substrate, the etchant comprising an aqueous solution of: (1) 60-500 g/l base selected from the group consisting of (a) sodium hydroxide, (b) potassium hydroxide, and (c) their mixture; and (2) 91.3-150 g/l of a nitrate salt, wherein the etchant is at a temperature of 40-65.degree. C.
- 2. The etchant according to claim 1 wherein said nitrate is a salt of a metal selected from the group consisting of sodium, potassium, iron, manganese, zinc, lithium, silver, calcium, ammonium, cobalt, copper, aluminum, mercury, thorium, barium, guanidine, lead, cerium, bismuth, zirconium, strontium, cadmium, lanthanum, nickel, and mixtures of any of them.
- 3. The etchant according to claim 1 wherein said etchant is used for the dip etching or spray etching of the aluminum.
- 4. The etchant according to claim 1 wherein said base comprises 150 to 250 g/l.
- 5. An etchant for chemically milling aluminum from a copper-aluminum-copper tri-metal layers, one of the copper layers being laminated on a substrate, the etchant comprising an aqueous solution of: (1) 150 to 250 g/l base selected from the group consisting of (a) sodium hydroxide, (b) potassium hydroxide, and (c) their mixture; and (2) 91.3 to 150 g/l of a nitrate salt at a temperature of 40 to 65.degree. C.
Parent Case Info
Reference is made to related U.S. patent application Ser. No. 08/996,007 filed Dec. 22, 1997 and entitled "ETCHING OF AL--CU LAYERS TO FORM ELECTRONIC CIRCUITS USING BASIC SOLUTIONS INCLUDING NITRITES, BORATES OR BROMATES", being commonly assigned herewith.
US Referenced Citations (5)
Foreign Referenced Citations (3)
Number |
Date |
Country |
691 281 |
May 1967 |
BEX |
233 592 |
Mar 1986 |
DDX |
34 05 437 |
Oct 1984 |
DEX |