Horn-holder pivot type bonding apparatus

Abstract

A horn-holder pivot type bonding apparatus including a horn holder for holding an ultrasonic horn, and a motor for driving the horn holder to pivot, with an imaginary pivot point of the horn holder being positionally fixed on a bonding surface. The motor is provided substantially in the center of the upper portion of the horn holder. The horn holder is formed with circular arc sections in the forward and rearward portions with respect to the imaginary pivot point; and a bonding head has, at portions corresponding to the circular arc sections of the horn holder, forward and rearward cams so that the cams are pivotable by supporting shafts. The forward and rearward cams have circular arc sections that contact the circular arc sections of the horn holder, the circular arc shape of the circular arc sections of the forward and rearward cams being centered on the supporting shafts.

Description

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIGS. 1A and 1B show the first embodiment of the horn-holder pivot type bonding apparatus according to the present invention, FIG. 1A being a side elevational view thereof, and FIG. 1B being an enlarged illustration of the horn holder and bonding head;

FIGS. 2A and 2B show the first embodiment of the horn-holder pivot type bonding apparatus according to the present invention, FIG. 2A being a side elevational view thereof, and FIG. 2B being an enlarged illustration of the horn holder and bonding head;

FIGS. 3A and 3B show the first embodiment of the horn-holder pivot type bonding apparatus according to the present invention, FIG. 3A being a side elevational view thereof, and FIG. 3B being an enlarged illustration of the horn holder and bonding head;

FIGS. 4A and 4B show the first embodiment of the horn-holder pivot type bonding apparatus according to the present invention, FIG. 4A being a side elevational view thereof, and FIG. 4B being an enlarged illustration of the horn holder and bonding head; and

FIGS. 5A, 5B and 5C show the first embodiment of the horn-holder pivot type bonding apparatus according to the present invention, FIG. 5A being a side elevational view thereof, FIG. 1B being an enlarged illustration of the horn holder and bonding head, and FIG. 1C being a cross sectional view taken along the line 5C-5C in FIG. 1A;

Claims

1. A horn-holder pivot type bonding apparatus comprising: a capillary;an ultrasonic horn holding said capillary at one end thereof;a horn holder holding another end of said ultrasonic horn; anda drive means for driving said horn holder to pivot about a virtual pivot point positionally fixed on a bonding surface, said drive means being provided one of at substantially a center of an upper portion of said horn holder and above a rear-side portion of said horn holder.

2. A horn-holder pivot type bonding apparatus comprising: a capillary;an ultrasonic horn holding said capillary at one end thereof;a horn holder holding another end of said ultrasonic horn, said horn holder being provided with each of circular arc sections at a forward portion and at a rearward portion thereof, and each circular arc shape of said circular arc section being centered on a virtual pivot point positionally fixed on a bonding surface;a drive means for driving said horn holder to pivot about said virtual pivot point, said drive means being provided one of at substantially a center of an upper portion of said horn holder and above a rear-side portion of said horn holder; anda bonding head, driven in XY directions, provided with each of forward and rearward cams pivotally supported by supporting shafts at portions corresponding to said circular arc sections of said horn holder, each of said cams having circular arc sections being in contact with each of said circular arc sections of said horn holder, and each circular arc shape of said circular arc section of said cam being centered on each of said supporting shafts.

3. The horn-holder pivot type bonding apparatus according to claim 2, wherein said circular arc section of said forward portion of said horn holder and said circular arc section of said forward cam of said bonding head are connected by cross plate springs, andsaid circular arc section of said rearward portion of said horn holder and said circular arc section of said rearward cam of said bonding head are connected by cross plate springs.

4. A horn-holder pivot type bonding apparatus comprising: a capillary;an ultrasonic horn holding said capillary at one end thereof;a horn holder holding another end of said ultrasonic horn, said horn holder being provided with each of circular arc sections at a forward portion and at a rearward portion thereof, and each circular arc shape of said circular arc section being centered on a virtual pivot point positionally fixed on a bonding surface;a drive means for driving said horn holder to pivot about said virtual pivot point, said drive means being provided one of at substantially a center of an upper portion of said horn holder and above a rear-side portion of said horn holder;a bonding head, driven in XY directions, provided with each of circular arc sections at portions corresponding to said circular arc sections of said horn holder, each circular arc shape of said circular arc section of said bonding head being centered on said virtual pivot point, and each of said circular arc sections of said bonding head being separated by a certain distance from said circular arc sections of said horn holder; anda plurality of columnar elements respectively provided between said circular arc sections of said horn holder and said circular arc sections of said bonding head, each of said circular arc sections of said horn holder and each of said circular arc sections of said bonding head being connected by cross plate springs with said columnar elements in between.

5. A horn-holder pivot type bonding apparatus comprising: a capillary;an ultrasonic horn holding said capillary at one end thereof;a horn holder holding another end of said ultrasonic horn, said horn holder being provided with each of forward and rearward cams pivotally supported by supporting shafts at a forward portion and at a rearward portion thereof, each of said cams being formed with circular arc sections, and each circular arc shape of said circular arc section of said cam being centered on each of said supporting shafts;a drive means for driving said horn holder to pivot about a virtual pivot point positionally fixed on a bonding surface, said drive means being provided one of at substantially a center of an upper portion of said horn holder and above a rear-side portion of said horn holder; anda bonding head, driven in XY directions, provided with each of circular arc sections at portions corresponding to said circular arc sections of each of said cams, each circular arc shape of said circular arc section of said bonding head being centered on said virtual pivot point, and each of said circular arc sections of said bonding head being in contact with each of said cams.

6. The horn-holder pivot type bonding apparatus according to claim 5, wherein said circular arc sections of each of said cams and said circular arc sections of said bonding head are connected by cross plate springs.

7. A horn-holder pivot type bonding apparatus comprising: a capillary;an ultrasonic horn holding said capillary at one end thereof;a horn holder holding another end of said ultrasonic horn, said horn holder being provided with each of circular arc sections so as to contact each of circular arc sections of each of forward and rearward cams pivotally supported by supporting shafts at portions corresponding to said circular arc sections of each of said cams, each circular arc shape of said circular arc section of said horn holder being centered on a virtual pivot point positionally fixed on a bonding surface, and said horn holder being provided above each of said supporting shafts;a drive means for driving said horn holder to pivot about said virtual pivot point, said drive means being provided one of at substantially a center of an upper portion of said horn holder and above a rear-side portion of said horn holder; anda bonding head provided with a horn holder support above said virtual pivot point, said horn holder support being provided with each of said cams pivotally supported by said supporting shafts, each of said cams having circular arc sections, and each circular arc shape of said circular arc section being centered on each of said supporting shafts.

8. The horn-holder pivot type bonding apparatus according to claim 7, wherein said circular arc sections of each of said cams and said circular arc sections of said horn holder are connected by cross plate springs.

9. The horn-holder pivot type bonding apparatus according to claim 2, wherein said drive means is a motor having a pulling force between a stator thereof and a movable element thereof, andone of said stator and movable element is secured to one of said horn holder and a member that pivots together with said horn holder, and other of said stator and movable element is secured to said bonding head driven in said XY directions.

10. The horn-holder pivot type bonding apparatus according to claim 4, wherein said drive means is a motor having a pulling force between a stator thereof and a movable element thereof, andone of said stator and movable element is secured to one of said horn holder and a member that pivots together with said horn holder, and other of said stator and movable element is secured to said bonding head driven in said XY directions.

11. The horn-holder pivot type bonding apparatus according to claim 5, wherein said drive means is a motor having a pulling force between a stator thereof and a movable element thereof, andone of said stator and movable element is secured to one of said horn holder and a member that pivots together with said horn holder, and other of said stator and movable element is secured to said bonding head driven in said XY directions.

12. The horn-holder pivot type bonding apparatus according to claim 7, wherein said drive means is a motor without pulling force between a stator thereof and a movable element thereof, andone of said stator and movable element is secured to said horn holder, and other of said stator and movable element is secured to said bonding head driven in said XY directions.

13. The horn-holder pivot type bonding apparatus according to claim 9, wherein opposing surfaces of said stator and movable member are respectively formed in a circular arc shape centered on said virtual pivot point.

14. The horn-holder pivot type bonding apparatus according to claim 10, wherein opposing surfaces of said stator and movable member are respectively formed in a circular arc shape centered on said virtual pivot point.

15. The horn-holder pivot type bonding apparatus according to claim 11, wherein opposing surfaces of said stator and movable member are respectively formed in a circular arc shape centered on said virtual pivot point.

16. The horn-holder pivot type bonding apparatus according to claim 12, wherein opposing surfaces of said stator and movable member are respectively formed in a circular arc shape centered on said virtual pivot point.