Claims
- 1. A method of forming a micropattern comprising:
- a first step of forming a resist film by applying, onto a semiconductor substrate, a resist containing a base generator which generates a base in response to the radiation of an energy beam;
- a second step of causing the base generator contained in an exposed portion of said resist film to generate the base by irradiating said resist film with the energy beam;
- a third step of causing the exposed portion of said resist film, in which the base has been generated, to absorb water;
- a fourth step of forming a metal oxide film in the exposed portion of said resist film by supplying water and a metal alkoxide to a surface of the exposed portion of said resist film having absorbed the water;
- a fifth step of removing alcohol generated in said metal oxide film formed by said fourth step so as to retain a film of metal oxide having a thickness of about 100 nm or more; and
- a sixth step of forming a resist pattern by performing dry etching with respect to said resist film by using said film of metal oxide as a mask.
- 2. A method of forming a micropattern according to claim 1, wherein vapor of the metal alkoxide is used in said fourth step.
- 3. A method of forming a micropattern according to claim 1, wherein a solution of the metal alkoxide is used in said fourth step.
- 4. A method of forming a micropattern according to claim 1, wherein the base generated from said base generator in said second step is an amine.
- 5. The method of forming a micropattern according to claim 1,
- wherein said fifth step of removing alcohol comprises a step of heating said resist film.
- 6. The method of forming a micropattern according to claim 1,
- wherein said fifth step of removing alcohol comprises a step of supplying a dry inert gas to the surface of said resist film.
Priority Claims (1)
Number |
Date |
Country |
Kind |
6-153538 |
Jul 1994 |
JPX |
|
Parent Case Info
This is divisional of application Ser. No. 08/497,471, filed Jun. 30, 1995, now abandoned.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
5278029 |
Shirai et al. |
Jan 1994 |
|
Foreign Referenced Citations (1)
Number |
Date |
Country |
0599571 |
Jun 1994 |
EPX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
497471 |
Jun 1995 |
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