Number | Name | Date | Kind |
---|---|---|---|
4052787 | Shaheen et al. | Oct 1977 | |
4448800 | Ehara et al. | May 1984 | |
4733290 | Reardn et al. | Mar 1988 | |
4839712 | Mamodaly et al. | Jun 1989 | |
5530282 | Tsuji | Jun 1996 |
Entry |
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D. V. Morgan and K. Board, An Introduction to Semiconductor Microtechnology (Second Editional), John Wiley & Sons, Chichester (1990), pp. 111-114. |