Claims
- 1. A photosensitive resin composition for i-line stepper using monochromatic light, which comprises (1) a polyimide precursor, formed from an oxydiphthalic acid or acid anhydride thereof as a reactant, a 20 μm film thickness of said polyimide precursor having a transmittance, at 365 nm, of at least 40%; (2) an addition-polymerizable compound; and (3) a photoinitiator.
- 2. The photosensitive resin composition according to claim 1, wherein the polyimide precursor is formed by reacting said oxydiphthalic acid or acid anhydride thereof with diamine.
- 3. The photosensitive resin composition according to claim 2, wherein said diamine is a diaminopolysiloxane.
- 4. The photosensitive resin composition according to claim 1, wherein said transmittance is in a range of 40%-68%.
- 5. The photosensitive resin composition according to claim 4, wherein the composition further includes an acryl compound having an amino group.
- 6. A photosensitive resin composition according to claim 1, wherein the addition-polymerizable compound is tetraethylene glycol dimethacrylate.
- 7. A photosensitive resin composition according to claim 1, wherein the polyimide precursor is formed from an oxydiphthalic acid or acid anhydride thereof with a diamine.
- 8. A photosensitive resin composition according to claim 7, wherein said diamine is a diaminodiphenyl ether.
- 9. A photosensitive resin composition according to claim 7, wherein the diamine is selected from the group consisting of 4,4′-diaminodiphenyl ether, 2,4′-diamino-diphenyl ether, 3,4′-diaminodiphenyl ether and 3,3′-diamino-diphenyl ether.
- 10. A photosensitive resin composition which comprises (1) a polyimide precursor formed from an oxydiphthalic acid or acid anhydride thereof with a diamine, (2) an addition-polymerizable compound, and (3) a photoinitiator, and which is adapted to be exposed and developed using an i-line stepper which uses monochromatic light, the polyimide precursor being such that a 20 μm thick film thereof has a transmittance, at 365 nm, of at least 40%.
- 11. A photosensitive resin composition according to claim 10, wherein the addition-polymerizable compound is tetraethylene glycol dimethacrylate.
- 12. A photosensitive resin composition according to claim 11, wherein said diamine is a diaminodiphenyl ether.
- 13. A photosensitive resin composition according to claim 10, wherein said diamine is a diaminodiphenyl ether.
- 14. A photosensitive resin composition for i-line stepper using monochromatic light, which comprises (1) a polyimide precursor, formed from an oxydiphthalic acid or acid anhydride thereof with a diamine, (2) an addition-polymerizable compound and (3) a photoinitiator, the polyimide precursor being such that a 20 μm thick film thereof has a transmittance, at 365 nm, of at least 40%.
- 15. The photosensitive resin composition according to claim 14, wherein the addition-polymerizable compound is tetraethylene glycol dimethacrylate.
- 16. A photosensitive resin composition according to claim 14, wherein said diamine is a diaminodiphenyl ether.
- 17. A photosensitive resin according to claim 14, wherein the diamine is selected from the group consisting of 4,4′-diaminodiphenyl ether, 2,4′-diamino-diphenyl ether, 3,4′-diaminodiphenyl ether and 3,3′-diamino-diphenyl ether.—
- 18. A photosensitive resin composition according to claim 1, wherein said polyimide precursor is formed from the oxydiphthalic acid or acid anhydride thereof as a reactant and a diaminodiphenyl ether as a diamine reactant.
Priority Claims (2)
Number |
Date |
Country |
Kind |
219720/1993 |
Sep 1993 |
JP |
|
2282/1994 |
Jan 1994 |
JP |
|
Parent Case Info
[0001] This application is a Divisional application of application Ser. No. 08/664,515, filed Jun. 17, 1996, which is a Continuation application of application Ser. No. 08/299,628, filed Sep. 2, 1994.
Divisions (2)
|
Number |
Date |
Country |
Parent |
09136610 |
Aug 1998 |
US |
Child |
09482859 |
Jan 2000 |
US |
Parent |
08664515 |
Jun 1996 |
US |
Child |
09136610 |
Aug 1998 |
US |
Continuations (2)
|
Number |
Date |
Country |
Parent |
09482859 |
Jan 2000 |
US |
Child |
10713036 |
Nov 2003 |
US |
Parent |
08299628 |
Sep 1994 |
US |
Child |
08664515 |
Jun 1996 |
US |