Number | Name | Date | Kind |
---|---|---|---|
4364633 | Verber et al. | Dec 1982 | |
4811055 | Hirose | Mar 1989 | |
4929083 | Brunner | May 1990 | |
5077085 | Schnur et al. | Dec 1991 | |
5079600 | Schnur et al. | Jan 1992 |
Entry |
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K. C. Hickman; "Use Of Diffracted Light From Latent Images To Improve Lithography Control"; SPIE Microlithography Conference; 1464-22, Mar. 5, 1991. |
Thomas E. Adams; "Applications of Latent Image Metrology in Microlithography"; SPIE Microlithography Conference; 1464-26; Mar. 5, 1991. |
Karl W. Edmark & Christopher P. Ausschnitt; "Stepper Overlay Calibration Using Alignment To A Latent Image"; SPIE vol. 538; Optical Microlithography IV; pp. 91-101 (1985). |