Printed circuit board

Abstract
A printed circuit board includes a number of ball-shaped terminals provided on one main surface of the board. Each of the ball-shaped terminals includes a metallic ball brazed on a pad provided on the main surface of the board. A thin gold layer is deposited by plating on the surface of the metallic ball.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to a printed circuit board of an IC (integrated circuit) package, more particularly, to a printed circuit board on which a semiconductor IC chip (hereinafter referred to simply as a “chip”) is flip-chip bonded and which is connected to, i.e., mounted on, a motherboard by means of a plurality of external connection terminals provided on a main surface thereof opposite a chip-mounted main surface.




2. Description of the Related Art




Printed circuit boards of IC packages are widely known to be divided into the ball grid array (BGA) packaging type and the pin grid array (PGA) packaging type. Terminals (hereinafter referred to as “external connection terminals,” “connection terminals,” or simply “terminals”) provided on a printed circuit board of BGA packaging, and adapted to establish connection to a motherboard, are typically formed in the following manner. Solder balls made of lead-tin solder which has a greater lead content than tin content are fused on solder ball pads provided on a main surface of the printed circuit board by use of solder of a low melting point, such as lead-tin eutectic solder, thereby forming solder bumps as terminals. After a chip is mounted on the printed circuit board, followed by sealing, the printed circuit board is positioned on the motherboard such that connection terminals thereon are aligned with the respective terminals on the motherboard. Then, the facing terminals are fused together through application of heat (hereinafter referred to as “BGA connection”), thereby mounting the printed circuit board on the motherboard.




Meanwhile, terminals on a printed circuit board of PGA packaging are typically formed in the following manner. A number of connection pads are formed through metallization on one main surface of the printed circuit board and are then plated with a predetermined metal. Nail heads of nail-headed pins are brazed to the pads. The pins are plated with nickel or gold to become terminals. The pins are inserted into socket terminals provided on a motherboard, thereby establishing electrical connection between the pins and the respective socket terminals through pressure contact (hereinafter referred to as “PGA connection”).




The above-described printed circuit board of BGA connection allows for provision of a number of external connection terminals at high density, but involves the following problem. Since a printed circuit board of BGA connection is mounted on a motherboard through fusion of solder bumps serving as terminals, the mounted printed circuit board is difficult to demount from the motherboard. Even when the printed circuit board is successfully demounted from the motherboard, the printed circuit board is very difficult, if not impossible, to remount. In other words, the printed circuit board of BGA connection suffers the disadvantage that, once mounted on a motherboard, the printed circuit board is very difficult, if not impossible, to demount from the motherboard.




By contrast, the above-described printed circuit board of PGA connection is mounted on a motherboard through insertion of pins serving as terminals thereof into socket terminals provided on the motherboard. Thus, the mounted printed circuit board can be readily pulled out from the motherboard. However, in order to attach by, for example, brazing, slender pins to pads provided on the printed circuit board, the nail heads of the pins must be of a relatively large size so as to establish the appropriate strength of attachment to the pads. As a result, there are limits on the degree to which the pitch (interval) of pins or terminals can be decreased, in contrast to terminals of the BGA connection type, so that the pins serving as external connection terminals cannot be arrayed as densely as can terminals in the case of BGA connection.




SUMMARY OF THE INVENTION




An object of the present invention is to provide a printed circuit board capable of arraying terminals to be connected to those of a motherboard as densely as in the case of a printed circuit board of BGA connection and which can be freely demounted from a motherboard as in the case of a printed circuit board of PGA connection, without deteriorating the reliability of electrical connection.




It is noted the above object is seemingly achievable through employment of conventional solder bumps as terminals to be fitted into socket terminals of a motherboard. However, since the solder bumps are low in corrosion resistance, such connection fails to establish highly reliable electrical connection. Further, the solder bumps cannot be plated with gold (Au) or nickel (Ni) by ordinary plating methods. Also, since the Young's modulus of lead-tin solder is low, mechanical contact or pressure contact associated with insertion readily causes deformation of the surfaces of the lead-tin solder bumps serving as terminals. Additionally, in the case of repeated mounting and demounting of the printed circuit board to and from a motherboard, the surfaces of the solder bumps are scraped off, resulting in deterioration of electrical connection between the engaged terminals.




To achieve the above object, there is provided, in accordance with the present invention, a printed circuit board comprising a board member and a plurality of ball-shaped terminals provided on a major surface of said board member, the ball-shaped terminals each comprising a pad disposed on the major surface of the board member; a metallic ball (substantially spherical) brazed onto the pad; and a gold plating layer formed on a surface of the metallic ball.




As a result of plating the ball-shaped terminals with gold, high corrosion resistance is imparted to the surfaces of the ball-shaped terminals, so that the fitting of the ball-shaped terminals into the respective socket terminals of a motherboard does not involve impairment of the highly reliable electrical connection provided between the engaged terminals. In other words, the printed circuit board according to the present invention can be freely mounted to or demounted from the motherboard without impairing the reliability of electrical connection between the engaged boards. Also, the ball-shaped terminals can be disposed or arrayed at a satisfactorily high density.




The metallic balls (which hereinafter may be referred to simply as “balls”) are advantageously of a metal that permits gold to be deposited, by plating, directly on the metallic-ball surface or deposited indirectly, i.e., deposited on a nickel plating layer formed on the metallic-ball surface. Preferably, the metallic balls are formed of a material selected so as to render the ball-shaped terminals resistant to deformation which would otherwise result from the insertion thereof into the socket terminals of a motherboard, i.e., so as to render the ball-shaped terminals free from any plastic deformation which would otherwise result from their insertion into the socket terminals and would thus cause or result in poor conduction of electricity. Metallic balls of a soft metal, such as lead-tin solder, deform easily when subjected to repeated mounting and demounting, resulting in deterioration in the reliability of electrical connection. Through employment of such a deformation-resistant metal for the metallic balls, the printed circuit board becomes highly reliable.




The material for the metallic balls is preferably selected according to a motherboard to be used; specifically, based on the compressive force which the socket terminals of the motherboard exert on the metallic balls fitted therein. Preferably, from the viewpoint of cost and electrical conductivity, the metallic balls are made of copper (Cu) or a copper alloy. From the viewpoint of Young's modulus, an iron-nickel alloy, such as Kovar or 42-alloy, is preferred. However, the material for the metallic balls is not limited to these examples, but may be selected as appropriate.




Preferably, from the viewpoint of adhesion, the gold plating layer is formed on an Ni plating layer formed on the metallic-ball surface. The thickness of the gold plating layer may be selected as appropriate, but is preferably 0.03 μm to 3 μm from the viewpoint of adhesion and economy. More preferably, from the viewpoint of factors related to reliability of electrical connection, such as resistance to corrosion or abrasion, the thickness of the gold plating layer is 1 μm to 3 μm. A brazing material for brazing the metallic balls on the respective pads is preferably a silver brazing filler metal, which is compatible with plating with gold.




In order to securely engage the ball-shaped terminals and the socket terminals, the ball-shaped terminals are preferably shaped such that, once engaged with the respective socket terminals, the metallic balls function as clamps against disengagement. To this end, the metallic balls preferably have a diameter greater than that of the pads and are brazed on the respective pads substantially coaxially therewith. As a result, when the metallic ball is brazed on the pad, a constricted portion (a smaller-diameter portion) is formed at a brazed portion of the resultant ball-shaped terminal. Accordingly, when the socket terminals of a motherboard are shaped so as to hold the respective ball-shaped terminals at the constricted portions, the ball-shaped terminals engaged with the respective socket terminals are secured in place.











BRIEF DESCRIPTION OF THE DRAWINGS




Various other objects, features and many of the attendant advantages of the present invention will be readily appreciated as the same becomes better understood by reference to the following detailed description of the preferred embodiments when considered in connection with the accompanying drawings, in which:





FIG. 1

is a cross sectional view showing a printed circuit board according to an embodiment of the present invention;





FIG. 2

is an enlarged, partially broken away, side elevational view showing:a ball-shaped terminal of the printed circuit board of

FIG. 1

;





FIG. 3

is a schematic side elevational view showing the printed circuit board of

FIG. 1

engaged with a socket of a motherboard;





FIG. 4

is an enlarged al side elevational view, partially in cross section, showing a portion A of

FIG. 3

;





FIG. 5

is an enlarged side elevational view, partially in cross section, showing a socket terminal of

FIG. 4

;





FIG. 6

is a side elevational view similar to that of

FIG. 4

depicting separation of the ball-shaped terminals of the printed circuit board from the socket terminals of the motherboard;





FIG. 7

is an enlarged side elevational view, partially in cross section, showing a modified example of the socket terminal; and





FIG. 8

is an enlarged, partially broken away, side elevational view showing a ball-shaped terminal of a printed circuit board according to another embodiment of the present invention.











DESCRIPTION OF THE PREFERRED EMBODIMENTS




Embodiments of the present invention will next be described in detail with reference to the drawings.

FIG. 1

shows a printed circuit board according to one embodiment of the invention. In

FIG. 1

, reference numeral


1


denotes a printed circuit board (a package substrate) of, for example, alumina ceramic. A number of substantially circular terminals


3


are arrayed in rows and columns on an upper main surface


2


of the printed circuit board


1


. A flip-chip semiconductor IC chip S is turned face down and bonded to the upper surface


2


by way of the terminals


3


. The terminal


3


includes a pad of a high-melting-point metal, such as tungsten or molybdenum, a nickel-boron (Ni-B) plating layer formed on the pad, and a thin gold plating layer (thickness: about 0.03 μm to 0.10 μm) formed on the nickel-boron plating layer.




A number of substantially circular pads


11


, on which respective balls are mounted, are formed on a lower main surface


6


of the printed circuit board


1


in such a manner as to be arrayed in rows and columns at intervals greater than those of the terminals


3


. The pads


11


are connected to the corresponding terminals


3


by way of internal conductive paths


7


. The pad


11


is also made of a high-melting-point metal, such as tungsten or molybdenum. A copper alloy ball (which hereinafter may be referred to as a “copper ball”), which serves as a metallic ball, is brazed on the pad


11


in the following manner. An Ni-B plating layer


12


having a thickness of 3.0 μm to 4.0 μm is formed on the surface of the pad


11


. A substantially spherical copper ball


13


is brazed concentrically on the pad


11


coated with the Ni-B plating layer


12


, by use of a silver brazing filler metal


15


. Thus is formed a ball-shaped terminal


10


. A nickel-phosphorus (Ni-P) plating layer


16


having a thickness of 1.5 μm to 5 μm is formed on the surface of the ball-shaped terminal


10


. Further, a gold plating layer


17


having a thickness of 1 μm to 3 μm is formed on the nickel-phosphorus plating layer


16


. In the present embodiment, the bare pad


11


has a circular shape and a diameter D of 0.86 mm, and the bare ball


13


has a diameter of 0.89 mm.




It is noted that, in the present embodiment, the pad serving as the terminal


3


is plated thinly with gold in order to suppress generation of an intermetallic compound which would otherwise result from soldering the terminal


3


to an electrode of the IC chip S. In contrast, the ball-shaped terminal


10


is plated more thickly with gold (gold plating layer


17


), since the gold plating layer


17


is subjected to wear, caused by friction, when the ball-shaped terminal


10


is fitted into a socket terminal provided on a motherboard.




The thus-configured printed circuit board


1


of the present embodiment assumes a shape similar to that of a conventional BGA printed circuit board, but is different from the conventional circuit board in the following points: the ball


13


is made of copper, not solder; the ball


13


is brazed on the pad


11


by use of the silver brazing filler metal


15


, not a low-melting-point solder; and the Ni-P plating layer


16


is interposed between the surface of the ball-shaped terminal


10


and the gold plating layer


17


. The IC chip S is mounted on the printed circuit board


1


, and then the resultant assembly is sealed by attaching an unillustrated lid thereto, yielding a semiconductor device. The ball-shaped terminals


10


of the printed circuit board


1


are releasably fitted into the respective socket terminals


23


provided in a socket


22


attached to a motherboard


21


.





FIGS. 4 and 5

depict a state or condition in which a ball-shaped terminal


10


of the printed circuit board


1


is fitted into a corresponding socket terminal


23


provided in the socket


22


attached to the motherboard


21


. The socket


22


of an insulating material has through-hole portions formed therein in such a manner as to correspond to the array of the ball-shaped terminals


10


. The socket terminal


23


includes two receiving elements


24


, which are provided at an end thereof and which, as a pair, are of a semispherical form, and holder elements


25


, which are provided at the ends, of the respective receiving elements


24


. The inner diameter defined by the holder elements


25


is made smaller than the diameter of the ball


13


as measured in a free state (i.e., before the ball-shaped terminal


10


is fitted into the socket terminal


23


). When the ball-shaped terminal


10


is pressed into the space defined by the receiving elements


24


, the inner diameter defined by the holder elements


25


is expanded, since the socket terminal


23


including the receiving elements


24


is flexible or elastic. As a result, as shown in

FIGS. 4 and 5

, the ball-shaped terminal


10


is fitted into the semispherical space defined by the receiving elements


24


. The elasticity of the socket terminal


23


causes the holder elements


25


to elastically hold the ball-shaped terminal


10


at a maximum-diameter portion, thereby establishing electrical conduction between the engaged terminals.




As shown in

FIGS. 4

to


6


, the printed circuit board


1


according to the present embodiment is engaged with the motherboard


21


in the following manner. The printed circuit board


1


is placed on the motherboard


21


such that the ball-shaped terminals


10


face the corresponding socket terminals


23


in alignment therewith. Subsequently, a force is exerted on the printed circuit board


1


so as to press-fit the ball-shaped terminals


10


into the corresponding socket terminals


23


, thereby establishing electrical connection between the ball-shaped terminals


10


and the socket terminals


23


through the gold plating layers


17


formed on the ball-shaped terminals


10


. To provide separation (release) of the printed circuit board


1


from the motherboard


21


, the printed circuit board


1


may simply be pulled away in the reverse direction of engagement (FIG.


6


).




Even where the printed circuit board


1


according to the present embodiment is repeatedly mounted on and demounted from the motherboard


21


, there is very little deformation of the balls


13


of copper alloy, in contrast to lead-tin solder balls. Also, the balls


13


are free from corrosion, since the gold plating layer


17


is formed thereon. Thus, the printed circuit board


1


can be releasably mounted on the motherboard


21


, while a reliable electrical connection is established therebetween. Further, since the printed circuit board


1


can be configured in a manner similar to that of the conventional BGA printed circuit board, the ball-shaped terminals


10


can be arrayed as densely as can those of the BGA board.




According to the above-described embodiment, the balls


13


are made of a copper alloy, and, after being brazed on the respective pads


11


, are plated with nickel-phosphorus (Ni-P) and then plated further with gold, thereby securing good adhesion and stable electrical conduction. Advantageously, the balls


13


are plated with nickel-phosphorus (Ni-P) before they are brazed on the respective pads


11


. A material for the balls


13


may be selected according to the material, and ball-receiving structure, of the socket terminals


23


and so as to permit gold to be deposited, by plating, directly on the ball surface or deposited indirectly, i.e., deposited on a substrate plating layer, such as an Ni plating layer, formed on the ball surface. Also, the material for the balls


13


is preferably selected from among those which exhibit good electrical conductance and which have such a Young's modulus or hardness so as to render the ball-shaped terminals


10


free from any plastic deformation such as would otherwise result from repeated engagement and disengagement thereof and would thus result in poor electrical conductance between the engaged terminals.




Further, according to the present embodiment, the metallic ball


13


has a diameter greater than that of the pad


11


, and is brazed on the pad


11


coaxially therewith. As a result, a constricted portion (i.e., a smaller-diameter portion) is formed at a brazed portion of the resultant ball-shaped terminal


10


. Accordingly, when, as shown in

FIG. 7

, the socket terminal


23


is configured so as to hold the ball-shaped terminal


10


in the vicinity of the constricted portion by means of the holder elements


25


, the engaged holder elements


25


and ball-shaped terminal


10


effect a clamping function which acts against disengagement. Therefore, the printed circuit board


1


can be stably mounted on a motherboard without using engagement-retaining means, such as a clamp. It will be understood that the printed circuit board according to the present invention can be widely compatible with motherboards with socket connections even though the specific structure of the socket terminal is different from that described above.




Next will be described a process for forming the ball-shaped terminals


10


on the printed circuit board


1


(see FIG.


2


). Here, the printed circuit board


1


has the form of an alumina ceramic laminate fabricated by the steps of: laminating green sheets on which pads are printed by use of a metallization paste which contains a high-melting-point metal, such as tungsten; pressing the resultant laminate to obtain an unfired board; and subjecting the unfired board to simultaneous firing to obtain a printed circuit board (ceramic board).




An Ni-B substrate layer is formed by electroless plating on a number of IC-chip-bonding pads formed on one main surface of the above-obtained ceramic board, and on a number of motherboard connection pads


11


formed on the other main surface of the ceramic board, thereby forming a Ni-B plating layer


12


of a predetermined thickness. Subsequently, a paste of silver brazing filler metal is applied to the pads


11


through printing. The copper balls


13


are placed on the centers of the respective pads


11


, followed by heating at a temperature of about 800° C. Thus, the silver brazing filler metal


15


is melted, so that the balls


13


are brazed on the respective pads


11


. Preferably, the balls


13


may be previously coated with the silver brazing filler metal


15


in order to attain good wettability of the silver brazing filler metal


15


during brazing.




Next, the main surface


2


, on which the IC chip S is bonded, is masked with a sheet to provide protection from the plating operation. In this state, the balls


13


are coated with an Ni-P plating layer having a predetermined thickness. Subsequently, the masking sheet is removed. The metallized areas on the main surfaces


2


and


6


are flash-plated with gold to thereby form a thin gold plating layer. Then, the main surface


2


is again masked with a sheet. A thick gold plating layer is formed on the portions of the ball-shaped terminals


10


on the main surface


6


.




In this way, there is formed the printed circuit board


1


of

FIG. 1

, on the main surface


2


of which the terminals


3


coated with a thin gold plating layer are formed, and on the main surface


6


of which the ball-shaped terminals


10


coated with the thick gold plating layer


17


are formed. It is noted that the above plating process may be either an electroless plating process or an electroplating process. So long as the ball-shaped terminals


10


are plated with gold, the underlying substrate plating layer may be different from that of the present embodiment.




Next, the printed circuit board


1


according to another embodiment of the present invention will be described will be described with reference to FIG.


8


. The present embodiment is different from the above-described embodiment only in the form of the ball-shaped terminal


10


. The same features are denoted by common reference numerals, and further description thereof will be omitted. In

FIG. 8

, the pads


11


, on which the respective balls


13


are mounted, are made of a high-melting-point metal, such as tungsten or molybdenum. An insulator


31


of alumina ceramic covers the side wall and an edge portion of the ball-mounting surface (in

FIG. 8

, the bottom surface) of the pad


11


. The side wall of the insulator


31


is stepped as shown in FIG.


8


and assumes a ring shape as viewed from the bottom side of

FIG. 8. A

nickel plating layer


12


is formed on a bare portion of the surface of the pad


11


, which is not covered by the insulator


31


. The metallic ball


13


is brazed on the nickel-plated bare portion of the surface of the pad


11


by use of a silver brazing filler metal. Subsequently, nickel and then gold are deposited by plating on the metallic ball


13


including the brazed portion, thereby forming the nickel plating layer


16


and the gold plating layer


17


.




The printed circuit board


1


according to the previously described embodiment involves the following potential problem: when the printed circuit board


1


is mounted on a motherboard through engagement of the ball-shaped terminals


10


and the socket terminals of the motherboard and is then subjected to a significant temperature variation, a breaking of a conductive path may occur due to difference in thermal expansion coefficient between the printed circuit board


1


of ceramic and the motherboard of resin. In contrast, the printed circuit board


1


according to the embodiment of

FIG. 8

combats the problem. Specifically, upon a variation in temperature, a shearing stress is exerted on the ball-shaped terminal


10


in a direction (indicated by the arrow of

FIG. 8

) which is parallel to the ball-mounting surface of the pad


11


due to difference in thermal expansion coefficients between the printed circuit board


1


and the motherboard. In the previously described embodiment, this shearing stress may cause the silver brazing filler metal


15


to crack in the vicinity of the interface with the pad


11


, thereby potentially resulting in a disruption or breaking of the conductive path. In contrast, in the embodiment of

FIG. 8

, the insulator


31


supports the silver brazing filler metal


15


against the lateral shearing stress. Because the insulator


31


exerts a force that is transmitted to the ball-shaped terminal


10


in the direction of the arrow of

FIG. 8

, cracking is less likely to develop in the silver brazing filler metal


15


. Therefore, interruption or breaking of the conductive path rarely occurs, thereby improving the durability of the ball-shaped terminal


10


. Also, the insulator


31


encloses the pad


11


such that the silver brazing filler metal


15


does not reach an edge portion of the pad


11


, thereby reducing the tensile stress which is induced during brazing at the interface between the printed circuit board


1


and the pad


11


and thus preventing the printed circuit board


1


from cracking.




The process for forming the ball-shaped terminals


10


of this embodiment is different from that of the previously described embodiment only in that, in fabrication of the ceramic board, after the pads


11


are printed on a relevant green sheet by use of a metallization paste, an alumina paste whose composition is identical to that of the ceramic board is applied by printing around the printed pads


11


, followed by simultaneous firing to produce the ceramic board. The ball-shaped terminals


10


are formed on the resultant ceramic board in a manner similar to that of the previously described embodiment.




The above embodiments have been described in connection with a printed circuit board made of alumina ceramic. However, the present invention is not limited thereto, and, in general, the printed circuit board may be made of any appropriate insulating material. Also, in the above embodiments, the metallic balls are described as being made of copper. However, as mentioned previously, the balls may be made of any appropriate metal, such as any iron-nickel alloy. Further, to the above embodiments, the ball-bonding pads assume a circular shape. However, the ball-bonding pads may assume, for example, a square or rectangular shape or a ring shape.




Obviously, numerous modifications and variations of the present invention are possible in light of the above teachings. It is therefore to be understood that within the scope of the appended claims, the present invention may be practiced otherwise than as specifically described herein.



Claims
  • 1. A printed circuit board comprising a board member and a plurality of ball-shaped terminals provided on a major surface of said board member, said ball-shaped terminals each comprising:a pad disposed on said major surface of said board member; a full spherical metallic ball adapted to be engaged by a socket terminal formed by a pair of ball receiving members which, taken together, are of a semispherical form; a brazing metal brazing said metallic ball onto said pad; and a gold plating layer formed on a surface of said metallic ball, the metallic ball being made of a material preventing deformation of said ball-shaped terminal such as would otherwise result from insertion into a socket terminal of a motherboard, and the metallic ball having a diameter greater than that of the pad and being brazed on the pad substantially coaxially therewith.
  • 2. A printed circuit board according to claim 1, wherein the metallic ball is made of a copper alloy or an iron-nickel alloy.
  • 3. A printed circuit board according to claim 2, wherein the gold plating layer has a thickness of 0.03 μm to 3 μm.
  • 4. A printed circuit board according to claim 1, wherein the gold plating layer has a thickness of 0.03 μm to 3 μm.
  • 5. A printed circuit board comprising a board member and a plurality of ball-shaped terminals provided on a major surface of said board member, said ball-shaped terminals each comprising:a pad disposed on said major surface of said board member; a metallic ball brazed onto the pad; and a gold plating layer formed on a surface of said metallic ball, said metallic ball having a diameter greater than that of the pad and being brazed on the pad substantially coaxially therewith.
  • 6. A printed circuit board according to claim 5 further comprising an annular insulator, formed of alumina ceramic, surrounding the pad.
  • 7. A printed circuit board comprising a board member and a plurality of ball-shaped terminals provided on a major surface of said board member, said ball-shaped terminals each comprising:a pad disposed on said major surface of said board member; a metallic ball brazed onto the pad; and a gold plating layer formed on a surface of said metallic ball, said metallic ball being made of a material preventing deformation of said ball-shaped terminal such as would otherwise result from insertion into a socket terminal of a motherboard, said material comprising a copper alloy or an iron-nickel alloy, and said metallic ball having a diameter greater than that of the pad and being brazed on the pad substantially coaxially therewith.
  • 8. A printed circuit board comprising a board member and a plurality of ball-shaped terminals provided on a major surface of said board member, said ball-shaped terminals each comprising:a pad disposed on said major surface of said board member; a metallic ball brazed onto the pad; and a gold plating layer formed on a surface of said metallic ball, said metallic ball being made of a material preventing deformation of said ball-shaped terminal such as would otherwise result from insertion into a socket terminal of a motherboard, the gold plating layer having a thickness of 0.03 μm to 3 μm, and said metallic ball having a diameter greater than that of the pad and being brazed on the pad substantially coaxially therewith.
Priority Claims (1)
Number Date Country Kind
10-270621 Sep 1998 JP
US Referenced Citations (8)
Number Name Date Kind
4418857 Ainslie et al. Dec 1983 A
5744759 Ameen et al. Apr 1998 A
6027791 Higashi et al. Feb 2000 A
6037065 Hajmrle et al. Mar 2000 A
6120885 Call et al. Sep 2000 A
6294837 Akram et al. Sep 2001 B1
6333554 Kitajima et al. Dec 2001 B1
6337445 Abbott et al. Jan 2002 B1
Foreign Referenced Citations (1)
Number Date Country
10041351 Feb 1998 JP