Number | Date | Country | Kind |
---|---|---|---|
99 15902 | Dec 1999 | FR |
Number | Name | Date | Kind |
---|---|---|---|
4987094 | Colas et al. | Jan 1991 | A |
5212110 | Pfiester et al. | May 1993 | A |
5262348 | Pribat et al. | Nov 1993 | A |
5630905 | Lynch et al. | May 1997 | A |
5705321 | Brueck et al. | Jan 1998 | A |
5746826 | Hasegawa et al. | May 1998 | A |
6103540 | Russell et al. | Aug 2000 | A |
6110278 | Saxena | Aug 2000 | A |
Number | Date | Country |
---|---|---|
0661733 | May 1995 | EP |
0 661 733 | Jul 1995 | EP |
0 951 055 | Oct 1999 | EP |
2 741 195 | May 1997 | FR |
02122682 | May 1990 | JP |
Entry |
---|
O.G. Schmidt, et al. “Free-standing SiGe-based nanopipelines on Si(001) substrates” Applied Physics Letters vol. 78, No. 21 (May 2001).* |
Patent Abstracts of Japan, vol. 008, No. 131—Jun. 19, 1984—“Forming Method of Fine Pattern”; Inventor: Yamauchi Yoshiharu. |
Proceedings of the European Solid State Device Research Conference 1998, XP-000949963—“Investigation on the Suitability of Vertical MOSFET's for High Speed (RF) CMOS Applications”; Jurczak M. et al. p. 174. |