Number | Date | Country | Kind |
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7-256307 | Oct 1995 | JPX |
Number | Name | Date | Kind |
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5334552 | Homma | Aug 1994 | |
5683940 | Yahiro | Nov 1997 | |
5700720 | Hashimoto | Dec 1997 | |
5703404 | Matsuura | Dec 1997 |
Number | Date | Country |
---|---|---|
408203892 | Aug 1996 | JPX |
8-203892 | Aug 1996 | JPX |
Entry |
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M. Matsuura et al., "Novel Self-planarizing CVD Oxide for Interlayer Dielectric Applications," IEEE IEDM, 1994, pp. 117-120. |