Number | Date | Country | Kind |
---|---|---|---|
10-321978 | Nov 1998 | JP | |
11-120207 | Apr 1999 | JP | |
11-120208 | Apr 1999 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5453305 | Lee | Sep 1995 | A |
6051151 | Keller et al. | Apr 2001 | A1 |
6217703 | Kitagawa | Apr 2001 | B1 |
Number | Date | Country |
---|---|---|
05-259124 | Oct 1993 | JP |
07-122539 | May 1995 | JP |
07-142020 | Jun 1995 | JP |
07-226387 | Aug 1995 | JP |
08-181125 | Jul 1996 | JP |
08-298288 | Nov 1996 | JP |
09-082689 | Mar 1997 | JP |
Entry |
---|
Peart, et al. “Measured cross sections for the formation of H— by collisions between H+3 ions and electrons”, Journal of Physics B: Atomic and Molecular Physics, vol. 12, No. 20, 1979; pp. 3441-3443. |
Mizutani, et al. “Sputtering yield and radiation damage by neutral beam bombardment” Journal of Vacuum Science & Technology A, vol. 6, No. 3, May/Jun. 1988; pp. 1417-1420. |