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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device, manufacturing method and apparatus for the same
Patent number
7,793,818
Issue date
Sep 14, 2010
NEC Corporation
Masamoto Tago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor device, manufacturing method and apparatus for the same
Patent number
7,611,041
Issue date
Nov 3, 2009
NEC Corporation
Masamoto Tago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Process for making a semiconductor device having a roughened surface
Patent number
7,560,372
Issue date
Jul 14, 2009
NEC Electronics Corporation
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device, manufacturing method and apparatus for the same
Patent number
7,282,432
Issue date
Oct 16, 2007
NEC Corporation
Masamoto Tago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor device having a roughened surface
Patent number
7,170,172
Issue date
Jan 30, 2007
NEC Electronics Corporation
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device having damascene inter...
Patent number
6,989,328
Issue date
Jan 24, 2006
NEC Electronics Corporation
Koji Arita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device, manufacturing method and apparatus for the same
Patent number
6,969,915
Issue date
Nov 29, 2005
NEC Corporation
Masamoto Tago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for forming a silicide of metal with a high melting point in...
Patent number
6,569,766
Issue date
May 27, 2003
NEC Electronics Corporation
Nobuaki Hamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a silicide film on gate electrodes and diffusion...
Patent number
6,566,254
Issue date
May 20, 2003
NEC Electronics Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a refractory-metal-silicide layer in a semicondu...
Patent number
6,548,421
Issue date
Apr 15, 2003
NEC Corporation
Nobuaki Hamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having silicide films on a gate electrode and...
Patent number
6,413,807
Issue date
Jul 2, 2002
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for making the same
Patent number
6,383,911
Issue date
May 7, 2002
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a cobalt silicide layer by use of a TEOS through...
Patent number
6,284,662
Issue date
Sep 4, 2001
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for making the same
Patent number
6,274,923
Issue date
Aug 14, 2001
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having metal interconnection comprising metal...
Patent number
6,274,932
Issue date
Aug 14, 2001
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for making semiconductor device
Patent number
6,232,227
Issue date
May 15, 2001
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor device providing effective resi...
Patent number
6,153,507
Issue date
Nov 28, 2000
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
C49-structured tungsten-containing titanium salicide structure and...
Patent number
6,114,765
Issue date
Sep 5, 2000
NEC Corporation
Kunihiro Fujii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a salicide-structured MOS semiconductor devic...
Patent number
6,107,096
Issue date
Aug 22, 2000
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming C49-structure tungsten-containing titanium salici...
Patent number
6,069,045
Issue date
May 30, 2000
NEC Corporation
Kunihiro Fujii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process of fabricating salicide structure from high-purity reproduc...
Patent number
5,899,720
Issue date
May 4, 1999
NEC Corporation
Kaoru Mikagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
C49-structured tungsten-containing titanium salicide structure
Patent number
5,880,505
Issue date
Mar 9, 1999
NEC Corporation
Kunihiro Fujii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact semiconductor device having excellent electrical characteri...
Patent number
5,751,067
Issue date
May 12, 1998
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating semiconductor device with interconnections b...
Patent number
5,595,937
Issue date
Jan 21, 1997
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having an interconnection of a laminate struct...
Patent number
5,539,256
Issue date
Jul 23, 1996
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Production method of semiconductor device having a wiring layer con...
Patent number
5,502,005
Issue date
Mar 26, 1996
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD AND APPARATUS FOR THE SAME
Publication number
20100015796
Publication date
Jan 21, 2010
NEC Corporation
Masamoto Tago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD AND APPARATUS FOR THE SAME
Publication number
20070295786
Publication date
Dec 27, 2007
NEC Corporation
Masamoto Tago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Process or making a semiconductor device having a roughened surface
Publication number
20070015351
Publication date
Jan 18, 2007
NEC ELECTRONICS CORPORATION
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device, manufacturing method and apparatus for the same
Publication number
20050279812
Publication date
Dec 22, 2005
NEC Corporation
Masamoto Tago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method of manufacturing semiconductor device having damascene inter...
Publication number
20040161928
Publication date
Aug 19, 2004
NEC ELECTRONICS CORPORATION
Koji Arita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for producing the same
Publication number
20030111731
Publication date
Jun 19, 2003
NEC ELECTRONICS CORPORATION
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A REFRACTORY-METAL-SILICIDE LAYER IN A SEMICONDU...
Publication number
20030077901
Publication date
Apr 24, 2003
NOBUAKI HAMANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device having an external electrode
Publication number
20030025202
Publication date
Feb 6, 2003
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device, manufacturing method and apparatus for the same
Publication number
20020093096
Publication date
Jul 18, 2002
NEC Corporation
Masamoto Tago
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for making the same
Publication number
20010042922
Publication date
Nov 22, 2001
NEC Corporation
Kaoru Mikagi
H01 - BASIC ELECTRIC ELEMENTS