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3089793
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Information
Patent Grant
3089793
References
Source
Patent Number
3,089,793
Date Filed
Not available
Date Issued
Tuesday, May 14, 1963
62 years ago
CPC
H01L23/488 - consisting of soldered or bonded constructions
C23C16/402 - Silicon dioxide
C30B31/185 - Pattern diffusion
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02164 - the material being a silicon oxide
H01L21/02216 - the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen
H01L21/02263 - deposition from the gas or vapour phase
H01L21/2252 - using predeposition of impurities into the semiconductor surface
H01L21/31608 - Deposition of SiO2
H01L29/00 - Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier
H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Y10S252/95 - Doping agent source material
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
252 - Compositions
257 - Active solid-state devices
430 - Radiation imagery chemistry: process, composition, or product thereof
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