Number | Name | Date | Kind |
---|---|---|---|
6054379 | Yau et al. | Apr 2000 | A |
6068884 | Rose et al. | May 2000 | A |
Entry |
---|
Loboda, M.J., Seifferly, J. A., Grove, C.M. and Schneider R.F.; Safe Precursor Gas for Broad Replacement of SiH4 in Plasma Processes Employed in Integrated Circuit Production, 1997, Title and pp 146-150. |
Loboda, M.J., Seifferly, J. A., Grove, C.M. and Schneider R.F.; Using Trimethylsilane to Improve Safety, Throughput and Versatility in PECVD Processes, 1997, 12 pages. |