The present patent document relates generally to methods of packaging sensor and packages therefor. More specifically, the present patent document relates to methods of packaging Micro-electro-mechanical systems (MEMS) pressure sensors and packages for the same.
Sensors are used in a wide variety of applications including, for example, in automotive, aerospace, industrial and medical applications. As manufacturing techniques continue to allow smaller and smaller sensor designs, sensors are becoming even more widespread. Due to their small size, the use of MEMS sensors is becoming commonplace in areas never thought possible. In all these various applications, the sensors must somehow be mounted or packaged to allow them to perform properly. An effective package and packaging technique must address a number of engineering requirements and is preferably easily manufactured at as low a cost as possible.
Packaging of MEMS sensors is an important part of a successful implementation. Sensor design has rapidly improved in recent times. Sensor packaging must keep pace. US Patent Publication No. 2015/0339384 filed on Jun. 20, 2014, discloses a plurality of embodiments for sensor packages and that application is incorporated herein by reference in its entirety.
U.S. patent application Ser. No. 15/220,048 filed on Jul. 26, 2016, provides additional embodiments of sensor packages and methods of packaging sensors and that application is also incorporated herein by reference in its entirety.
The current application provides a number of improvements to the sensor packaging design and methods of packaging a sensor to allow for ease of manufacture and cost reductions. One main drive of the sensor package designs disclosed herein, is to allow for a sensor package design that can be manufactured with standardized manufacturing equipment. Moreover, the embodiments disclosed herein minimize variations in design and accommodate various applications and requirements with minimal differences in the assembly process.
Objects of the present patent document are to provide improved methods for packaging a sensor and packages therefor. To this end, a sensor package is provided. The sensor package comprises: a ceramic base wherein the base is comprised of a platform and walls that extend up from the platform around the periphery of the platform to form a cavity; a sensor mounted to the ceramic base on a bottom surface of the cavity; a circuit board mounted down into the cavity wherein the circuit board has a hole through the board that aligns with the sensor such that the sensor is exposed to a top side of the circuit board through the hole; a plurality of electrical connections between the sensor and the circuit board; a plurality of electrical pins mounted to the circuit board and extending up above the walls of the ceramic base; and a cap mounted down into the cavity over the top of the circuit board, the cap including a window that allows the electrical pins to pass through the cap and extend above the cap.
In preferred embodiments, the cap is made from a thermal plastic and the base is made from Alumina Oxide. The cap may be color coded to reflect different applications or pressure ranges of the enclosed pressure sensor.
The sensor packages designed herein are designed for use with MEMS sensors and in particular MEMS pressure sensors. However, the packages and packaging techniques taught herein may be used with any type of sensor.
In some embodiments, the ceramic base may be made from two pieces coupled together. In embodiments with a base made from a plurality of pieces, the first piece comprises the platform and the second piece comprises the walls. In embodiments where the base is cylindrically shaped, the walls may be thought of as a ring and referred to as such.
In some embodiments, a thermal sensor may be mounted to the base along with the sensor. Preferably, the thermal sensor is a thermistor. In various different embodiments, the thermal sensor may be mounted to the interior or exterior of the sensor package and in particular the base.
In embodiments where the thermal sensor is mounted to the interior of the sensor package, the thermal sensor may be mounted on the bottom surface of the cavity. During assembly, the thermal sensor is aligned with the hole in the circuit board such that the thermal sensor is exposed to the top side of the circuit board through the hole just like the sensor.
In embodiments where the thermal sensor is mounted to the exterior of the sensor package, the thermal sensor may be mounted on a bottom surface of the platform portion of the base and vias through the platform can provide electrical communication between the thermal sensor and the circuit board on the interior of the sensor package.
In order to provide electrical connection to the thermal sensor, some embodiments use contact pads. In some embodiments, a first set of electrical contact pads are placed on the bottom surface of the cavity of the base and a corresponding second set of electrical contact pads are placed on the circuit board. The first and second sets of electrical contact pads are aligned to provide electrical communication between the circuit board and the thermal sensor.
Although generally the components can be any shape, preferably the base, cap and circuit board are cylindrical.
In another aspect of the present patent document, a method of assembling a sensor in a sensor package is provided. In preferred embodiments, the method comprises the steps of: soldering a sensor to a bottom surface of a cavity in a ceramic base wherein the base is comprised of a platform and walls that extend up from the platform around the periphery of the platform to form the cavity; epoxying a circuit board down into the cavity of the base such that a hole in the circuit board surrounds the sensor; electrically connecting the sensor to the circuit board with bond-wires; and epoxying a cap down into the cavity of the base such that the cap covers the circuit board wherein the cap has a window and connection pins mounted to the circuit board extend up past the top of the walls and the cap through the window.
In some embodiments, the ceramic base is made from two pieces, a first piece comprises the platform and a second piece comprises the walls and the method further comprises coupling the platform to the walls. Preferably, the platform is coupled to the walls using epoxy or RTV.
In embodiments that include thermal sensors, the method may further comprise placing the circuit board in electrical communication with the thermal sensor by aligning a first set of electrical contact pads on the bottom surface of the cavity of the base and a corresponding second set of electrical contact pads on the circuit board.
The present patent document discloses sensor packages and methods of packaging a sensor that are more easily manufactured and are more cost effective. The novelty in the designs is not only in each single design individually but in the collective four designs. The four designs share many of the same parts and configurations allowing different types of sensor packages to be assembled with the fewest number of parts.
As may be seen in
As used herein, the term “mechanical mating interface” means an interface that is a groove, cut, channel slot or other depression with a corresponding protrusion on another part. A “mechanical mating interface” provides mechanical alignment of two parts. This should be contrasted with a “mating interface.” A “mating interface” is simply two interfaces that are designed to be mated together.
The embodiment of a mechanical mating interface 15 shown in the base 3 is a slot. However, the mechanical mating interface 15 may be a groove, channel, depression or other type of mechanical mating interface 15. On the inside of the base 3 another mechanical mating interface 15 aligns the cap with the base. The mechanical mating interface on the inside of the base 3, is a protrusion. The protrusion may be any type of protrusion. The protrusion should be sized and shaped such that it is reciprocal and may receive the corresponding mechanical mating interface on the other piece. It should be understood that a mechanical mating interface may be a groove or protrusion as long as the reciprocal mechanical mating interface is the opposite. In the embodiment, shown in
In various embodiments, any number of mechanical mating interfaces may be used between the base 3, the cap 1 and the circuit board 2. In the embodiment shown in
As may be seen, the shape of the base 3 is generally cylindrical but is cup shaped in that a concentric recess or cavity is bored down into the base 3. The base may be generally thought of as comprising the platform, which is the flat bottom portion of the base, and the walls, which extend up from the platform around the periphery. The cap 1 is also cylindrically shaped and sits down into the cavity such that the top surface of the cap 1 sits flush with the top surface of the base 3. As may be seen in
As may be appreciated, the interior of the base 3 may also have a mechanical mating interface to allow alignment of the cap 1. As shown in
In preferred embodiments, the base 3 is made from Alumina Oxide. In an even more preferred embodiment the Alumina Oxide is 96% Al2O3. In other embodiments, other materials may be used for the base 3. In some embodiments, the base 3 may be referred to as a cup.
In preferred embodiments, the cap 1 is made from a thermal plastic. In some embodiments, the cap may be color coded for different applications and pressure ranges. In other embodiments, other materials may be used for the cap 1 and color coding of the cap 1 is not a requirement. The cap 1 may be coupled to the base 3 using epoxy. Other connection types may also be used including interference fit, clips, clamps or any other type of connector.
Similar to the cap 1, the circuit board 2 may include a slot or protrusion to ensure correct assembly. In the embodiment of
The sensor is shown in
The senor 4 is mounted to the base 3 and the circuit board 2 has a window/hole 18 through the circuit board 2 to allow access to the sensor 4 from the top side of the circuit board 3. As may be seen in
As may be appreciated, the electronics on the circuit board 2 need to be in electrical communication with the sensor 4. In the embodiments shown herein, the sensor 4 is electrically connected to the electronics of the circuit board 2 with bond-wires. A plurality of bond-wires 5 connect the circuit board 2 to the sensor 4. In preferred embodiments, the bond-wires 5 are aluminum or gold. However, in other embodiments, the bond-wires 5 may be made from other conductive materials. As just one example, copper may be used for the bond-wires 5.
For reference purposes, the size of the package in
The embodiment shown in
As explained above, the sensor 4 is mounted directly to the base 3, preferably in the center. The circuit board 2 fits down on top of the sensor 4 with the sensor 4 extending up through the hole 18 in the circuit board 2. The cap 1 fits down on top of the circuit board 2 with the pins 14 extending up through the window 12 in the cap 1.
In preferred embodiments the circuit board 2 and the cap 1, may be coupled to the base using Epoxy or Room Temperature Vulcanized Silicon (RTV). In yet other embodiments, other types of adhesives may be used. In still yet other embodiments, fasteners or interference fits may be used. In the embodiments shown, the circuit board 2 is coupled directly to the bottom of the cavity of the base using epoxy. Similarly, the cap 1 is coupled directly to the walls of the base using epoxy.
The embodiment shown in
As may be seen in
In the embodiment of
The embodiment shown in
Although the inventions have been described with reference to preferred embodiments and specific examples, it will readily be appreciated by those skilled in the art that many modifications and adaptations of the apparatus and methods described herein are possible without departure from the spirit and scope of the inventions as claimed hereinafter. Thus, it is to be clearly understood that this description is made only by way of example and not as a limitation on the scope of the embodiments as claimed hereafter.