Method for producing semiconductor package

Abstract

A method for producing a semiconductor package including a main semiconductor chip having a semiconductor circuit formed on one surface thereof, at least one subsidiary semiconductor chip stacked on the other surface of the main semiconductor chip, and an encapsulation resin covering the subsidiary semiconductor chip. This method comprises a semiconductor wafer preparation step of preparing a semiconductor wafer, on whose one surface many rectangular regions are defined by streets, and in each of the rectangular regions of which a semiconductor circuit constituting the main semiconductor chip is disposed; a circular concavity formation step of forming a circular concavity in the other surface of the semiconductor wafer; a semiconductor chip stacking step of stacking at least one such subsidiary semiconductor chip on each of many rectangular regions on the bottom surface of the circular concavity; an encapsulation resin formation step of filling a molten resin into the circular concavity, and curing the resin, thereby forming an encapsulation resin covering the subsidiary semiconductor chips; and a separation step of cutting the encapsulation resin, together with the semiconductor wafer, along the streets, to separate the semiconductor wafer and the encapsulation resin into many of the semiconductor packages.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view showing a typical example of a semiconductor wafer used in the method of the present invention.

FIG. 2 a perspective view showing a state in which a circular concavity is formed in the back of the semiconductor wafer of FIG. 1.

FIG. 3 is an enlarged partial sectional view showing a state in which via contact means and bumps are formed at required positions of the semiconductor wafer of FIG. 2.

FIG. 4 is a perspective view showing a state in which three subsidiary semiconductor chips are stacked in each of required regions of the circular concavity of the semiconductor wafer of FIG. 3.

FIG. 5 is an enlarged partial sectional view showing a state in which the three subsidiary semiconductor chips are stacked in each of the required regions of the-circular concavity of the semiconductor wafer of FIG. 3, and required wires are further disposed.

FIG. 6 is a perspective view showing a state in which an encapsulation resin is formed in the circular concavity of the semiconductor wafer of FIG. 5.

FIG. 7 is an enlarged partial sectional view of the semiconductor wafer of FIG. 6.

FIG. 8 is an enlarged sectional view showing a semiconductor package produced by cutting the semiconductor wafer of FIGS. 6 and 7, together with the encapsulation resin, along streets.

Claims

1. A method for producing a semiconductor package including a main semiconductor chip having a semiconductor circuit formed on one surface thereof, at least one subsidiary semiconductor chip stacked on another surface of the main semiconductor chip, and an encapsulation resin covering the subsidiary semiconductor chip, comprising: a semiconductor wafer preparation step of preparing a semiconductor wafer which is generally disk-shaped, on whose one surface a peripheral edge region and a main region surrounded with the peripheral edge region are present, in the main region of which many rectangular regions are defined by streets arranged in a lattice pattern, and in each of the rectangular regions of which a semiconductor circuit constituting the main semiconductor chip is disposed;a circular concavity formation step of grinding other surface of the semiconductor wafer, except a peripheral edge region corresponding to the peripheral edge region on the one surface, after the preparation step, thereby forming a circular concavity in the other surface of the semiconductor wafer;a semiconductor chip stacking step of stacking at least one said subsidiary semiconductor chip on each of many rectangular regions, which corresponds to each of the rectangular regions, on a bottom surface of the circular concavity of the semiconductor wafer after the circular concavity formation step;an encapsulation resin formation step of filling a molten resin into the circular concavity of the semiconductor wafer, and curing the resin, after the semiconductor chip stacking step, thereby forming an encapsulation resin covering the subsidiary semiconductor chips; anda separation step of cutting the encapsulation resin, together with the semiconductor wafer, along the streets, to separate the semiconductor wafer and the encapsulation resin into many of the semiconductor packages.

2. The method according to claim 1, further comprising a via contact means formation step of forming a plurality of penetrating via contact means in each of the rectangular regions prior to the semiconductor chip stacking step.

3. The method according to claim 2, wherein a plurality of bumps connected to the via contact means are formed in each of the rectangular regions on the one surface of the semiconductor wafer in the via contact means formation step.

4. The method according to claim 2, further comprising a wire laying step of connecting a semiconductor circuit of the subsidiary semiconductor chip and the via contact means by electrically conductive wires after the semiconductor chip stacking step and before the encapsulation resin formation step.