Number | Date | Country | Kind |
---|---|---|---|
99201220 | Apr 1999 | EP |
This is a continuation Application of U.S. application Ser. No. 09/551,229 filed Apr. 17, 2000 now U.S. Pat. No. 6,445,440, the entire contents of which is hereby incorporated by reference.
Number | Name | Date | Kind |
---|---|---|---|
4191385 | Fox et al. | Mar 1980 | A |
4383178 | Shibata et al. | May 1983 | A |
4993696 | Furukawa et al. | Feb 1991 | A |
5134640 | Hirokawa et al. | Jul 1992 | A |
5301013 | Meijer et al. | Apr 1994 | A |
5677758 | McEachern et al. | Oct 1997 | A |
5825470 | Miyai et al. | Oct 1998 | A |
Entry |
---|
Ceglio et al., “Front-end design issues in soft-x-ray projection lithography,” Applied Optics, Optical Society of America, Washington, US, vol. 32, No. 34, Dec. 1, 1993, pp. 7050-7056 (Abstract No. XP000414608 ISSN: 0003-6935). |
Number | Date | Country | |
---|---|---|---|
Parent | 09/551229 | Apr 2000 | US |
Child | 10/196712 | US |