Claims
- 1-21. (canceled)
- 22. A movement sensor comprising:
an elongate object, comprising a piezoelectric material, having an anchored end that is anchored to a base, and an unanchored end which is free to move in at least two degrees of freedom and to which a force is applied, the unanchored end of the elongated object being configured to move in response to the applied force; a plurality of electrodes disposed on the elongate object, configured to cooperate with the elongate object in producing signals usable to determine the magnitude and direction of the movement of the unanchored end due to the applied force; sensing circuitry electrically coupled to the electrodes, configured for processing the signals from the electrodes so as to determine a magnitude and a direction of movement and produce a signal indicative of said magnitude and direction; a movement sensor coupled to the elongate object, the movement sensor comprising one material of a bimetal material and a piezoelectric material configured to produce an electrical potential upon deformation of the material, the movement sensor being configured so that said one material deforms as the elongate object deforms, whereby an electrical signal indicative of the magnitude of deformation is produced enabling feedback control of movement of the unanchored end of the elongate object.
BACKGROUND OF THE INVENTION
[0001] This is a continuation-in-part of application Ser. No. 07/816,628 filed Dec. 31, 1991.
[0002] This invention relates to systems for effecting movement of an object and, in desired applications, sensing the movement of objects, especially of micro-structures.
[0003] With recent developments in non-planar lithography, the fabrication of micro-structures, including both three-dimensional mechanical parts and three-dimensional electrical components, has become more readily achievable. See, for example, U.S. Pat. No. 5,106,455 and co-pending application, Ser. No. 816,628, filed Dec. 12, 1991. Such micro-structures are finding use in a variety of areas including medical devices, robotics, navigation equipment, motors and similar equipment. It is oftentimes desired in such applications to cause the controlled movement of very small mechanical parts, such as fibers or filaments, and also to detect the movement of mechanical parts, both the degree or extent of such movement and the direction.
Divisions (4)
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Number |
Date |
Country |
Parent |
10386375 |
Mar 2003 |
US |
Child |
10867608 |
Jun 2004 |
US |
Parent |
08744381 |
Nov 1996 |
US |
Child |
10386375 |
Mar 2003 |
US |
Parent |
08480018 |
Jun 1995 |
US |
Child |
08744381 |
Nov 1996 |
US |
Parent |
07898216 |
Jun 1992 |
US |
Child |
08480018 |
Jun 1995 |
US |
Continuation in Parts (2)
|
Number |
Date |
Country |
Parent |
07816628 |
Dec 1991 |
US |
Child |
07898216 |
Jun 1992 |
US |
Parent |
07647659 |
Jan 1991 |
US |
Child |
07816628 |
Dec 1991 |
US |