Claims
- 1. A method for manufacturing a semiconductor device, comprising:forming a pad electrode over a main surface of a semiconductor chip; sequentially forming a first insulating layer and a second insulating layer over a peripheral region of said pad electrode, wherein a non-peripheral region of said pad electrode remains exposed; forming a metal layer over at least portions of said non-peripheral region of said pad electrode and said second insulating layer; forming a bump electrode on said metal layer, said bump electrode having a top surface with a protrusion along first parallel sides of the too surface and a peripheral portion along second parallel sides of the ton surface, wherein said first parallel sides and said second parallel sides are perpendicular to said second parallel sides, and said protrusion has a greater height than said peripheral portion.
- 2. A method for manufacturing a semiconductor device, comprising:forming a bump electrode; shaping a top surface of the bumping electrode using a shaping tool; wherein the top surface is shaped to have a plurality of concave and convex portions by pressing the shaping tool to the top of the bump electrode.
- 3. A method for manufacturing a semiconductor device having bump electrodes, comprising:positioning a plurality of portions of a tool to form partitions between adjacent bump electrodes, wherein each of the bump electrodes includes a plurality of grooves along a top surface; and connecting a plurality of leads to the bump electrodes, respectively, while the plurality of portions form partitions between respective adjacent bump electrodes.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2000-117993 |
Apr 2000 |
JP |
|
Parent Case Info
This is a continuation of application Ser. No. 09/836,422 filed Apr. 18, 2001 now U.S. Pat. No. 6,577, 001.
US Referenced Citations (7)
Foreign Referenced Citations (1)
Number |
Date |
Country |
05251450 |
Sep 1993 |
JP |